Modeling and control of a finger-like mechanism using bending shape memory alloys

Microsystem Technologies - In this research a biologically inspired finger-like mechanism similar to human musculoskeletal system is developed based on Shape Memory Alloys (SMAs). SMA actuators are...     

Mask-substrate gap control system for exposure equipment

Microsystem Technologies - Precise printed circuit boards (PCBs) and touch screen panels (TSPs) are produced by the proximity exposure patterning process. In the exposure patterning process, the...     

Biaxial scanning mirror with large rotation angle and low resonance frequency for LIDAR application

Microsystem Technologies - We propose a biaxial scanning mirror with a large rotation angle and low resonance frequency for a compact and low-power-consuming LIDAR. The scanning mirror in LIDAR,...