Development of a fast atom beam gun for surface-activated bonding

Surface-activated bonding (SAB), also called room-temperature bonding, is used in three-dimensional integration technology for semiconductor devices. An Ar fast atom beam (FAB) is used for SAB. However, conventional FAB guns must be replaced after hundreds of minutes of irradiation because carbon abrasion powders are generated by Ar ions sputtering in the gun. Therefore, this study develops a novel FAB gun with improved lifetime. The proposed FAB gun applies magnetic fields to guide Ar ions to reduce sputtering in the gun and improve irradiation efficiency. The proposed FAB gun indicates the possibility of improving gun lifetime.     

一种新型SAW气体传感器的设计

提出了将纳米线技术与声表面波(SAW)技术相结合,分别利用纳米线气体敏感材料比表面积高,声表面波传感器质量敏感性高的优点,探索研制新一代声表面波气体传感器。该传感器具有响应速度快,灵敏度高,体积小,质量注和易集成等优点。该文主要从SAW专用芯片的研制、专用纳米线研制、专用纳米线的表面修饰与改性研究、检测电路设计等4方面进行了阐述。理论计算表明,相比传统二维结构的SAW气体传感器,三维纳米线结构的SAW气体传感器的在灵敏度和响应速度上都得到提高。     

基于MATLAB的声表面波标签数据采集与处理

利用Matlab控制数字示波器,实现声表面波-射频识别(SAW-RFID)系统数据采集的功能,以获取示波器采集的标签编码回波信号。上位机在Matlab上进行了显示界面的设计,利用最大相关法对采集的回波信号作算法解调处理,最终完成了声表面波射频识别系统的搭建。     

ZnO单晶声表面波谐振器传播特性的研究

基于有限元压电材料中表面波传播的有限元分析原理,利用有限元分析软件COMSOL对基于ZnO单晶材料的声表面波器件进行多物理域耦合建模与仿真,提取出了符合声表面波振型的对称模态变形图和反对称模态变形图。通过谐振频率分析,计算出了ZnO单晶的相速度和机电耦合系数;通过频率响应分析,得出谐振器输入导纳、阻抗与频率之间的关系图;最后讨论了叉指换能器的结构对谐振频率、反谐振频率的影响,得出输入、输出叉指换能器(IDT)的叉指电极对数越大,插入损耗值越大,信号衰减越小。     

Analysis of surface wave behavior in corrugated piezomagnetic layer resting on inhomogeneous half-space

This paper deals with propagation of Love type waves in a Piezomagnetic layer with corrugated boundaries overlying an inhomogeneous half-space. Inhomogeneity of elastic half-space is caused due to exponential variations in elastic parameters. Dispersion relations are obtained for magnetically open and short cases. Prominent effects of inhomogeneity, layer's width and corrugation on the phase velocity of considered wave are illustrated through graphs. Some particular cases are derived and exhibited through graphs. Also the influence of undulation parameter, elastic parameter, and piezomagnetic coefficient on phase velocity of considered wave has been marked separately. The present study finds its applications in designing and optimization of Love wave sensors and Seismic Acoustic Wave (SAW) devices. Findings may also be used for analytical study of wave propagation in piezomagnetic coupled structures.     

Surface acoustic wave characteristics of ZnO films grown on a polycrystalline 3C-SiC buffer layer

Zinc oxide (ZnO) thin films were deposited onto a polycrystalline (poly) 3C-SiC buffer layer for surface acoustic wave (SAW) applications using a magnetron sputtering system. Atomic force microscopy (AFM) and X-ray diffraction (XRD) showed that the ZnO grown on 3C-SiC/Si had a smooth surface, a dominant c-axis orientation and a lower residual stress in ZnO thin film compared to that grown directly onto Si substrate. In order to evaluate the SAW characteristics of ZnO films on a 3C-SiC buffer layer, the two-port SAW resonators, based on inter-digital transducer (IDT)/ZnO/3C-SiC/Si and IDT/ZnO/Si structures, were fabricated and measured within a temperature range of 25-135 °C. The resulting 3C-SiC buffer layer improved the insertion loss by approximately 7.3 dB within the SAW resonator and enhanced the temperature stability with TCF = −22 ppm/°C up to 135 °C in comparison to that of TCF = −45 ppm/°C within a temperature range of 25-115 °C of the ZnO/Si structure.     

周期栅格中的场与COM参量提取

从耦合模式模型(COM)方程出发,得到周期短路栅格与开路栅格中场分布的解析表达式,利用给出COM参量,研究了场分布的特征,通过对解析表达式和典型频率的场分布图形的研究,找到与场分布有关的一些特征量,并将这些特征量与COM参量通过一定的解析关系联系起来.在用其他方法得到了周期栅格中的场分布时,可拟合场分布包含的这些特征量从而得出对应的COM参量.该文给出了一种从场分布提取随频率变化的COM参量的方法.     

一种便携SAW气体传感器的电路设计

该文采用信号处理技术,设计了一种振荡电路。该电路解决了双延迟线型声表面波(SAW)器件不易起振,频率跳变等问题。整个电路结构简单,对插损低于20 dB的器件有很好的起振效果,满足气体检测的需要。     

一种声表面波器件的新型晶圆级封装技术

总结了声表面波(SAW)器件传统封装技术中存在的问题,提出了一种SAW器件新型晶圆级封装技术。采用一种有机物干膜,分别经两次压膜、曝光和显影完成了对SAW芯片在划片前的封装,并用实验进行了验证。实验结果表明,本技术具有在不改变叉指换能器(IDT)质量负载的情况下同时具备吸声的功能,改善器件的带外抑制能力,增强了产品的一致性和可靠性。本技术在SAW器件的封装方面有广阔的应用前景。