多壁碳纳米管湿度传感器频率特性(英文)

为了研究测试频率对传感器性能的影响,改善多壁碳纳米管(multi-walled carbon nanotubes,MWCNTs)湿度传感器检测方法并提高传感器检测精度,对传感器频率特性进行了分析.在玻璃衬底上利用蒸镀和光刻技术制作了叉指电极,在电极表面涂敷了MWCNTs-SiO2敏感薄膜,最后通过烧结完成传感器制作.利用饱和盐溶液法产生相应湿度值,并使用RCL自动测试仪对传感器进行测试,测试频率选择在1 kHz到500 kHz之间.对传感器频率特性进行了实验与理论分析,结果表明,该传感器电容值对环境湿度敏感,并且其敏感特性受传感器检测频率的影响.使用毛细凝聚理论以及电解质物理理论对上述实验现象进行了合理的解释.传感器静态电容以及对湿度的灵敏度均随着测试频率的增加明显降低,测试频率为500 kHz时传感器灵敏度仅为测试频率1 kHz时的0.24倍.     

基于层层自组装纳米碳管薄膜的应变传感器

以层层自组装单壁碳纳米管网状薄膜为敏感材料,在柔性基底上制作了应变传感器,并对薄膜和器件性能进行了测试。测试结果表明:薄膜组装均匀,电导性良好,电阻随组装层数增加呈指数态下降;器件对应变呈现较好的敏感特性、线性响应和可恢复性,灵敏度为4.25;通过添加防护层屏蔽外界湿度及光照影响,传感器稳定性显著提高。该传感器可用于弯曲表面的应力应变检测。     

多壁碳纳米管湿度传感器介电损耗模型（英文）

为揭示碳纳米管湿度传感器的介电损耗,制作了一种电阻型碳纳米管湿度传感器.使用介电损耗相关理论对其频率特性进行分析,并利用普适方程建立了传感器介电损耗模型.对实验数据与所建立模型进行拟合,得到拟合决定系数为0.994,表明可以使用普适方程对传感器介电损耗进行描述.由于测试频率引起的传感器电阻变化会改变传感器线性度,分析了不同测试频率下传感器的线性度,发现当测试频率为10 kHz时传感器的线性度最佳（1.52%）,此时传感器灵敏度为-7.83Ω/%RH.     

聚吡咯/二氧化钛复合薄膜的制备及气敏性研究

运用静电力自组装和原位化学氧化聚合相结合的方法制备了聚吡咯/纳米二氧化钛(PPy/TiO₂)复合薄膜, 并进行了紫外－可见光谱分析和原子力显微镜分析. 采用平面叉指电极制备了PPy/TiO₂复合薄膜气体传感器, 研究了其在常温下对有毒气体NH₃和CO的敏感性. 最后测试了该传感器的温度湿度特性. 结果表明, 该传感器对NH₃具有较高的灵敏度, 对CO几乎没有响应. 同时讨论了复合薄膜沉积时间对气敏特性的影响, 实验表明当沉积时间为20min时, 该传感器的NH₃敏感特性最好.     

仿蟋蟀尾毛的MEMS振动传感器 有限元仿真分析

基于MEMS技术和仿生学设计了一种纤毛+薄膜振动传感器敏感结构,由垂直纤毛和两个相互垂直的悬臂梁构成信息接收和传递单元,沉积在与悬臂梁末端固连的硅衬底薄膜上的PZT压电薄膜作为敏感转化单元.建立了该传感器结构的等效运动模型,在此基础上对传感器的输出特性和频率特性进行了数学分析.利用ANSYS有限元软件对不同结构及几何参数的敏感结构进行了仿真分析,对比仿真结果,优化传感器的结构和几何参数.仿真结果表明该结构传感器共振频率达到了6 757.4 Hz.     

基于p-n导电转变的二氧化钛对CO高温感应性能的研究

研究了以金红石TiO2半导体材料为气敏材料的一氧化碳(CO)传感器在600~800℃之间的气敏性能.该传感器在测试温度600~700℃时对20~2000 mg/m3的CO(载气为氮氧混合物且氧气含量为2%~25%)表现出p型电导行为.随着测试温度从600℃升高至700℃,传感器的感应强度迅速下降到接近于1.当温度升高到750℃以上时,传感器再次出现对CO的感应强度并且表现出n型导电行为.随着温度升高到800℃,传感器对CO的n型感应信号进一步增强,表现出良好的高温感应性能.利用交流阻抗谱仪对该TiO2敏感材料的高温导电特性进行了研究,并初步讨论了TiO2在高温下对CO还原气氛的诱导导电性能变化的原因.     

基于热电堆结构的微型热传导真空传感器

本文描述了一种与CMOS工艺完全兼容的热电堆微型热传导真空传感器.该传感器可在商业化的标准CMOS生产流水线上进行流片,配合后续的无掩模体硅各向异性腐蚀工艺,即可完成全部制造程序.器件敏感部分为124μm×100μm的多层复合薄膜架空结构,其卜制作了n型多晶硅加热器、20对由p型多晶硅条和铝条构成的热电堆.利用加热器对复合薄膜加热,在不同的真空状态下,薄膜呈现不同温度,温度值由热电堆转换为温差电动势输出.本文在以下方面进行详细描述:1.器件的结构设计和制造工艺;2.器件的稳态和瞬态有限元分析;3.测试结果与理论分析的对照.结果表明,在加热器1.5V恒压驱动条件下,器件的气压敏感范围为0.1Pa～l05Pa(空气),此时热电堆输出电压范围为26mV～50mV,最大响应时间预计为1.4ms.     

V2O5薄膜在传感器上的研究进展

V2O5薄膜具有优异的物理、化学性质,在化工催化、电子、电化学等许多领域有广泛的应用,由于V2O5薄膜对还原性气体和湿度具有良好的敏感特性,其在气体和湿度传感器上的研究也日渐广泛,因此本文综述了V2O5为基体的薄膜在气体传感器和湿度传感器上的研究进展及存在的问题和解决的思路.     

不同测试电压下多壁碳纳米管湿度传感器的稳定性(英文)

为提高碳纳米管(CNTs)湿度传感器的检测精度,研制了一种电阻型碳纳米管湿度传感器.阐述了传感器的结构、工作原理与制作过程,并对传感器的稳定性进行了实验与理论分析.建立并求解了对应于两根碳纳米管间势垒的薛定谔方程.分析结果表明传感器内部碳纳米管的稳定决定了传感器的稳定性,并且测试电压会影响碳纳米管的稳定性对传感器电阻波动的影响.实验结果表明传感器的工作电压影响着传感器的稳定性,当测试电压为5V时传感器电阻波动范围大约是工作电压为15 V时的5倍.     

气相CdCl2退火对CdTe多晶薄膜性能的影响

利用近空间升华法在Ar O2气氛下沉积了CdTe多晶薄膜,并在气相CdCl2氛围下进行了不同温度的退火,对样品进行了厚度、XRD、SEM、透过谱,σ-T等性能测试,结果表明:退火后CdTe多晶薄膜在(111)面上仍具有择优取向,退火能使晶界钝化,增加再结晶并促进晶粒长大;但对薄膜的透过率没有影响,退火后,暗电导(σdark)增加,电导激活能(Ea)减少.得到了最优化的退火条件.     

酸处理对MWCNTs石英晶振微天平VOCs传感器灵敏度的影响(英文)

为分析酸处理过程对石英晶振型碳纳米管(CNTs)有机(VOCs)气体传感器灵敏度的影响,制作了一种多壁碳纳米管(MWCNTs)石英晶振式VOCs传感器.发现酸处理可以明显提高传感器灵敏度,利用毛细凝聚原理与开尔文公式对上述实验现象进行了分析.另外,比较了传感器对不同有机气体(甲苯、乙醇和丙酮)的灵敏度,研究结果表明传感器灵敏度与气体饱和蒸汽压有关,同样,该实验现象可利用毛细凝聚原理与开尔文公式来解释.     

Studies on hysteresis reduction in thermally carbonized porous silicon humidity sensor

Different ways to reduce hysteresis in a capacitive-type thermally carbonized porous silicon (TC-PS) humidity sensor are studied and compared. Modification of the contact angle of the dielectric surface, enlargement of the pore size of dielectric, and operating the sensor at elevated temperature proved all to be possible ways to reduce hysteresis in a TC-PS humidity sensor. By variation of the carbonization temperature, we produced TC-PS surfaces of different contact angles. Although the hydrophobic surface prevents hysteresis, it also decreases considerably the sensitivity of the sensor. Enlargement of the pore size reduces and tunes the hysteresis loop into the higher relative humidity (RH) values. Also operation of the sensor only few degrees above room temperature was found to be a workable method to prevent hysteresis. However, a constant temperature is crucial for exact humidity measurement using a TC-PS sensor.     

MWCNTs/多孔ZnO纳米材料的制备及室温NO气敏性研究

为开发室温气敏传感器材料,以Zn(NO3)2.6H2O为锌源、尿素为沉淀剂,在制备水合碱式碳酸锌(Zn4CO3(OH)6.H2O)的过程中加入羧基化的MWCNTs(MWCNT-COOH),焙烧制备了MWCNTs/ZnO复合材料.采用XRD,SEM和TEM等对其进行了分析.结果表明:复合材料中MWCNTs分散均匀,ZnO呈多孔纳米片状,纳米片由多个尺寸在10～20 nm的ZnO颗粒组成;在室温、空气湿度为50%的氛围中测试复合材料对NO的气敏响应发现,复合材料对体积浓度1×10-4的NO气敏响应灵敏度大约是MWCNT-COOH的3倍,明显高于MWCNT-COOH;对比加入不同量MWCNT-COOH制备的3种复合材料对NO的气敏性可知,加入200 mg MWCNT-COOH所制备的复合材料对低浓度(体积浓度≤50×10-6)的NO气体表现出较高的灵敏度.     

Electrical sensing properties of silica aerogel thin films to humidity

Mesoporous silica aerogel thin films have been fabricated by dip coating of sol-gel derived silica colloid on gold electrode-patterned alumina substrates followed by supercritical drying. They were evaluated as the sensor elements at relative humidity 20-90% and temperature 15-35 °C under an electrical field of frequency 1-100 kHz. Film thickness and pore structure were two main parameters that determined the sensor performance. The film with a greater thickness showed a stronger dielectric characteristic when moisture abounded, and presented a smaller hysteresis loop and a higher recovery rate, due to the large size of pore throats. As the film thickness decreased, at low humidity the surface conductivity enhanced and the response rate increased. The silica aerogel based humidity sensor can be modeled as an equivalent electrical circuit composed of a resistor and a capacitor in parallel, and is driven by ionic conduction with charged proton carriers.     

Construction of Dual-Channel Water Transport in Mesoporous Silica Low Humidity Sensors to Achieve High Sensitivity

In this paper, strong hydrophilic poly(ionic liquid)s (PILs) are selectively grafted on different positions (mesoporous channels and outer surface) of mesoporous silica via thiol-ene click chemical reaction. The purposes of selective grafting are on the one hand, to explore the differences of adsorption and transportation of water molecules in mesoporous channels and on the outer surface, and on the other hand, to combine the two approaches (intra-pore grafting and external surface grafting) to reasonably design SiO₂@PILs low humidity sensing film with synergetic function to achieve high sensitivity. The results of low relativehumidity （RH） sensing test show that the sensing performance of humidity sensor based on mesoporous silica grafted with PILs in the channels is better than that of humidity sensor based on mesoporous silica grafted with PILs on the outer surface. Compared with water molecules transport single channel, the construction of dual-channel water transport significantly improves the sensitivity of the low humidity sensor, and the response of the sensor is up to 4112% in the range of 7–33% RH. Moreover, the existence of micropores and the formation of dual-channel water transport affect the adsorption/desorption behaviors of the sensor under different humidity ranges, especially below 11% RH.     

Fabrication of a room-temperature NO2 gas sensor based on WO3 films and WO3/MWCNT nanocomposite films by combining polyol process with metal organic decomposition method

Polyol process was combined with metal organic decomposition (MOD) method to fabricate a room-temperature NO₂ gas sensor based on a tungsten oxide (WO₃) film and another a nanocomposite film of WO₃/multi-walled carbon nanotubes (WO₃/MWCNTs). X-ray diffractometry (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to analyze the structure and morphology of the fabricated films. Comparative gas sensing results indicated that the sensor that was based on the WO₃/MWCNT nanocomposite film exhibited a much higher sensitivity than that based on a WO₃ film in detecting NO₂ gas at room temperature. Microstructural observations revealed that MWCNTs were embedded in the WO₃ matrix. Therefore, a model of potential barriers to electronic conduction in the composite material was used to suggest that the high sensitivity is associated with the stretching of the two depletion layers at the surface of the WO₃ film and at the interface of the WO₃ film and the MWCNTs when detected gases are adsorbed at room temperature. The sensor that is based on a nanocomposite film of WO₃/MWCNT exhibited a strong response in detecting very low concentrations of NO₂ gas at room temperature and is practical because of the ease of its fabrication.     

湿度对便携式甲醛分析仪现场检测的影响

采用30m~3实验舱,在温度为(20±2)℃,对不同湿度条件下仪器现场检测的情况进行了探讨。当环境湿度在一定范围内仪器法的检测结果能符合技术要求。当湿度超过75%RH时,检测结果在某些测试浓度段出现较大偏差。当湿度超过80%RH时,检测结果已不符合技术要求。湿度对室内空气质量采用仪器法现场检测的结果有显著影响。