高功率VCSEL中应变补偿量子阱的理论设计

利用模型固体理论、k.p理论和Pikus-Bir理论,研究了InGaAs/GaAsP应变补偿量子阱,得出了较为简单通用的设计方法;进而研究了阱宽、InGaAs中In组分和GaAsP中P组分等参数对跃迁波长的影响.理论计算发现,与InGaAs/GaAs普通量子阱相比,InGaAs/GaAsP应变补偿量子阱能提供更深的载流子阱和更大的增益.按照提出的理论设计方法,研制了含InGaAs/GaAsP应变补偿量子阱的垂直腔面发射激光器(VCSEL),理论计算和实验结果相吻合.     

应变GaInNAs/GaAs量子阱光增益特性研究

采用近似方法对GaInNAs材料的能带结构进行了分析,并计算了应变GaInNAs/GaAs量子阱能级,在此基础上进一步计算了应变GaInNAs/GaAs量子阱的材料光增益谱.对计算结果的分析表明,应变GaInNAs/GaAs量子阱材料是一种可以应用于1 300 nm波段的新型长波长半导体光电子材料.     

高功率980nm垂直腔面发射激光器的温度特性

应变补偿量子阱结构因带宽大、增益高和波长漂移速度低等特点而成为近年来研究的热点.首次介绍了国内980 nm 高功率InGaAs/GaAsP应变补偿量子阱结构的垂直腔面发射激光器(VCSEL) 变温实验,测得脉冲条件下600 μm直径的器件在10-100℃温度范围内发射波长漂移速度为0.05 nm/K,阈值电流随温度变化呈现先缓慢下降后迅速上升的特性.结合VCSEL反射谱、PL谱和增益峰值波长漂移速度,对器件阈值电流特性进行了合理的分析和解释.连续工作状态下,测试得到器件峰值功率为1 W,根据波长与耗散功率的实验曲线及热阻计算公式,可估算出垂直腔面发射激光器热阻值为10 K/W.     

垂直外腔面发射激光器抽运脉冲的优化设计

采用脉冲抽运方式可显著改善光抽运垂直外腔面发射半导体激光器的热效应,大幅度提升激光器的输出功率。用有限元方法数值求解瞬态传热方程,得到激光器中温度升高的最大值随抽运脉冲的变化规律。讨论了抽运光脉冲宽度范围的选择,分析了抽运脉冲重复频率对激光器中温度升高最大值的影响作用,对抽运脉冲的时间宽度进行了优化设计。结果表明,对于基质去除型的InGaAs量子阱垂直外腔面发射激光器,抽运光脉冲的宽度介于1～10μs时,激光器中最大温升值即明显下降;同时,抽运脉冲的重复频率应限制在50kHz以内,以满足脉冲间隔大于激光器热弛豫时间的要求,否则激光器中会产生热量的积聚,增加最大温升值。     

808nm InGaAlAs垂直腔面发射激光器的结构设计

为实现垂直腔面发射半导体激光器(VCSEL)在808 nm波长的激射,对VCSEL芯片的整体结构进行了设计。基于应变量子阱的能带理论、固体模型理论、克龙尼克-潘纳模型和光学传输矩阵方法,计算了压应变InGaAlAs量子阱的带隙、带阶、量子化子能级以及分布布拉格反射镜(DBR)的反射谱,从而确定了量子阱的组分、厚度以及反射镜的对数。数值模拟的结果表明,阱宽为6 nm的In0.14Ga0.74Al0.12As/Al0.3Ga0.7As量子阱,在室温下激射波长在800 nm左右,其峰值材料增益在工作温度下达到4000 cm-1;渐变层为20 nm的Al0.9Ga0.1As/Al0.2Ga0.8As DBR,出光p面为23对时反射率为99.57%,全反射n面为39.5对时反射率为99.94%。设计的顶发射VCSEL结构通过光电集成专业软件(PICS3D)验证,得到室温下的光谱中心波长在800 nm处,证实了结构设计的正确性。     

小型化可调谐外腔面发射绿光激光器

以InGaAs多量子阱为有源区材料,以对抽运光透明的AlGaAs/AlAs为后端分布布拉格反射镜材料,采用后端抽运方式,在腔内插入标准具作为滤波元件,通过腔内倍频,获得小型化可调谐的光抽运外腔面发射绿光激光器。作为滤波元件,标准具可压窄基频光的光谱半峰全宽。为了阻止倍频光返回到增益芯片,标准具镀有倍频光高反膜。激光器的基频光调谐范围超过10 nm,倍频绿光在中心波长559 nm处的调谐范围为4 nm,光谱半峰全宽为1.0 nm,最大输出功率为65 mW。     

AlInGaAs/AlGaAs应变量子阱增益特性研究

采用Shu Lien Chuang方法计算了AlInGaAs/AlGaAs应变引起价带中重、轻空穴能量变化曲线,在Harrison模型的基础上详细地计算了AlInGaAs/AlGaAs和GaAs/AlGaAs量子阱电子、空穴子能级分布并且进一步研究了这两种材料在不同注入条件下的线性光增益.进一步计算比较可以得出AlInGaAs/AlGaAs应变量子阱光增益特性要优于GaAs/AlGaAs非应变量子阱增益特性,因此AlInGaAs/AlGaAs应变量子阱半导体材料应用于半导体激光器比传统GaAs/AlGaAs材料更具优势.     

长波长垂直腔面发射激光器

给出了长波长垂直腔面发射激光器的器件结构的发展现状，同时对GaInNAs／GaAs垂直腔面发射激光器进行了详细的介绍。最后，给出了所设计的新型1.3μm GaInNAs/GaAs长波长垂直外腔面发射半导体激光器的结构设计，有源区量子阱由980nm半导体激光二极管进行泵浦。这种器件设计实现了激光二极管泵浦与长波长垂直腔面发射激光器的有机结合，同时具有两者的优点。此外，本文还对器件的阈值特性和光输出功率进行了理论计算。     

飞速发展的半导体激光器

评述半导体激光器的发展动态, 包括应变量子阱激光器、垂直腔面发射激光器、可见光激光器、增益耦台型分布反馈激光器及高功率激光器列阵等。     

980nm大功率垂直腔面发射激光器温度和远场分布特性

采用发射波长为980 nm的InGaAs/GaAs应变量子阱,在垂直腔面发射结构中共设计生长3组、每组3个量子阱,形成9个量子阱的周期性增益结构,并使每组均位于腔场极大处,以获得最好的增益匹配.为提高激光器的输出功率及获得较好的光束质量,采用大台面直径和由衬底面出射激光的结构.每个单元器件的P面台面直径为400～600 μm,经湿氮气氛下40 min的侧氧化后在有源区形成直径300～500 μm的电流限制孔.而N面出光孔的直径仍为相应的400～600 μm.在室温连续工作下器件的最大输出功率达到1.4 W.随着注入电流的增大,观察到激光远场分布从空心圆环向中心单亮斑转化的过程.对不同温度下的激光输出特性进行了变温测试,结果表明通过DBR和有源区结构设计上较好的匹配,实现了室温下最低的激射阈值电流.     

1040 nm vertical external cavity surface emitting laser based on inGaAs quantum dots grown in Stranski-Krastanow regime

Quantum dots grown by metal organic vapour phase epitaxy in the Stranski-Krastanow regime are succesfully implemented for the first time as active media in optically pumped vertical external cavity surface emitting lasers. To optimise the gain the quantum dots are engineered to match the excited state luminescence to the cavity resonance. Room temperature continuous-wave operation at 1040 nm wavelength is demonstrated. An output power of 280 mW is achieved, limited only by the onset of thermal rollover. The differential conversion efficiency is 6.7%.     

半导体可饱和吸收镜锁模光抽运垂直外腔面发射半导体激光器

介绍了半导体可饱和吸收镜锁模光抽运垂直外腔面发射半导体激光器的原理、基本结构特点、应用及设计中的主要问题，对其研究进展及未来发展趋势作了分析和总结。     

垂直腔面发射激光器DBR的优化设计

模拟分析了垂直腔面发射激光器分布布拉格反射镜铝组分不同分布对价带的影响,并对两种不同结构的器件进行了测试,测试结果表明抛物线渐变结构可以有效降低价带的势垒,进而可以改善垂直腔面发射激光器的电流热效应,为实现室温连续工作打下基础。     

0.8 W optically pumped vertical external cavity surface emitting laser operating CW at 1550 nm

An InP based optically pumped vertical external cavity surface emitting laser has been designed and optimised for emission at 1550 nm. To overcome thermal limitations an intra-cavity synthetic diamond heatspreader is bonded to the gain structure. The laser produces 780 mW at -30/spl deg/C and 100 mW at 20/spl deg/C in a near Gaussian beam (M/sup 2/<1.2).     

Spin controlled optically pumped vertical cavity surface emitting laser

It is shown that the output polarisation of optically pumped vertical cavity surface emitting lasers (VCSELs) can be unambiguously controlled by the pump polarisation. The degree of the output polarisation is higher than that of the pump polarisation. It is concluded that the polarisation of VCSELs with spin polarised electrical pumping can be controlled even with low spin injection efficiencies.     

Anomalous in-plane polarization dependence of optical gain in compressively strained GaInAsP-InP quantum-wire lasers

In-plane polarization anisotropy of optical gain in compressively strained GaInAsP-InP quantum wire (Q-wire) lasers including elastic strain relaxation induced band mixing is studied. The interaction between two-dimensional (2-D) quantum confinement and elastic strain relaxation effects is found to be complex depending qualitatively also on the wire width. Additional valence band mixing due to strain relaxation has a strong influence on the polarization dependence of optical gain. In the absence of elastic strain relaxation, gain is the maximum for tranverse electric (TE) polarization with the electric field parallel to the wire axis (TE/sub /spl par//), in agreement with the existing theory. On the other hand, when strain relaxation is strong, contrary to the existing theory, valence band mixing causes the gain to be the maximum in TE polarization with the electric field normal to the wire axis (TE/sub /spl perp//). Moreover, Q-wire lasers without suppression of strain relaxation are more likely to exhibit ground-state lasing for TE/sub /spl perp// polarization. These results suggest that in the presence of strong strain relaxation, a laser cavity parallel to the wire axis would provide higher gain. Therefore, the appropriate orientation of the laser cavity in strained GaInAsP-InP Q-wire lasers should be decided after carefully studying the polarization dependence of gain. Our calculation also shows that strong strain relaxation causes in-plane polarization anisotropy to show complex, nonmonotonic dependence on the wire width. Consequently, in such structures, in-plane polarization anisotropy may not be regarded as a direct measure of 2-D confinement effects.     

Investigation of thermal management in optically pumped, antimonide VECSELs

In this work, an optical modulation spectroscopy technique: thermoreflectance has been employed to study temperature distributions on the surface of optically pumped vertical external cavity surface emitting lasers (VECSELs). The thermoreflectance is based on the relative change of reflectivity of the sample induced by the change of its temperature. In this case the temperature change of the sample is induced by operating the pump in pulse mode. We have investigated samples with and without intracavity heatspreader. The resulting temperatures and temperature distributions on the sample surface have been measured and compared with theoretical calculations. The results confirm the effectiveness of silicon carbide (SiC) heatspreader approach. This is also a first report on the direct temperature mapping on VECSELs, with micron spatial resolution.     

Self-Consistent Analysis of Strain-Compensated InGaN–AlGaN Quantum Wells for Lasers and Light-Emitting Diodes

Strain-compensated InGaN–AlGaN quantum wells (QW) are investigated as improved active regions for lasers and light emitting diodes. The strain-compensated QW structure consists of thin tensile-strained AlGaN barriers surrounding the InGaN QW. The band structure was calculated by using a self-consistent 6-band $kcdot p$ formalism, taking into account valence band mixing, strain effect, spontaneous and piezoelectric polarizations, as well as the carrier screening effect. The spontaneous emission and gain properties were analyzed for strain-compensated InGaN–AlGaN QW structures with indium contents of 28%, 22%, and 15% for lasers (light-emitting diodes) emitting at 480 (500), 440 (450), and 405 nm (415 nm) spectral regimes, respectively. The spontaneous emission spectra show significant improvement of the radiative emission for strain-compensated QW for all three structures compared to the corresponding conventional InGaN QW, which indicates the enhanced radiative efficiency for light emitting diodes. Our studies show the improvement of the optical gain and reduction of the threshold current density from the use of strain-compensated InGaN–AlGaN QW as active regions for diode lasers.      

光泵浦外腔半导体激光器的研究进展

从谐振腔和半导体增益介质的角度介绍了光泵浦外腔面发射半导体激光器的基本结构,评述了国内外在该领域的最新研究进展,探讨了该类型激光器在大功率、小型化技术方面的发展前景。     

光泵浦垂直外腔面发射激光器斜率效率的分析

研究了光泵浦垂直外腔面发射激光器(OPS-VECSEL)的湿法腐蚀工艺,采用快速腐蚀和精细选择腐蚀相结合的腐蚀方法,使得衬底能被干净地腐蚀掉,并精确停留在阻挡层,得到高平整度的外延片表面,提高了泵浦效率,降低了散射损耗。从理论上分析了外延片表面粗糙度与OPS-VECSEL斜率效率的关系,得出如果在外延片上镀一层λ/4单介质增透膜,能进一步提高VECSEL的斜率效率。