角度调谐滤光片的膜系优化设计算法

根据薄膜窄带滤光片在倾斜入射时的特性,通过改进间隔层膜系结构调整其等效折射率,可以设计出具有稳定透射峰值和带宽的角度调谐窄带滤光片.倾斜入射时窄带滤光片透射光的S和P偏振分量的中心波长会随着入射角度的增大出现分离现象,产生较大的偏振相关损耗.分析了偏振分离现象出现的原因和其与滤光片等效折射率的关系,提出了消除偏振分离现象的方法.根据薄膜矩阵理论建立了分析模型并提出了一种该可调滤光片的设计方法,根据开发的程序优化设计并制备了一组用于100 GHz密集波分复用(DWDM)系统的低偏振相关损耗的四腔角度调谐窄带滤光片,实验结果证明其满足设计要求并有接近20 nm的可调范围.     

非平行光束对窄带滤光片光谱性能的影响

因为发散角和线宽效应的存在,非平行光束入射窄带滤光片时,滤光片的透射特性会发生变化。特别是在斜入射时,窄带滤光膜透射通带波形更易从矩形向三角形退化,并且伴随峰值透过率降低等负面现象。虽然已知的卷积模型可以对非平行光束入射窄带滤光片的情况进行数值模拟,但是由于制备和测量误差的阻碍,其正确性和数值模拟的准确性没有严格的实验进行验证。通过膜系优化和测量误差修正降低相应误差及其影响,并通过等离子体辅助反应磁控溅射 (PARMS) 的方法制备了工作角度为17°的1 064 nm高性能窄带滤光片。滤光片的透射光谱分别由两款分光光度计Cary 7000和Lambda 1050测量得到。在不同条件下测得的光谱与数值模拟结果吻合得很好,充分验证了卷积模型的有效性和数值模拟的准确性。     

液晶光谱偏振系统的透射谱研究

为了研究液晶光谱偏振系统的透过率特性,在可见光波段下的对透射谱分布进行仿真分析。基于Berreman矩阵获得液晶旋光器透射光谱,同时结合Lyot型可调谐滤光片以及液晶相位延迟器,分析了不同偏振态入射光在垂直入射和斜入射两种条件下系统的透射光谱。结果表明,垂直入射情况下在540~680nm出现谷值,斜入射情况下在520~640nm出现谷值,斜入射情况相对垂直入射情况光谱发生一定蓝移。当不同入射光通过系统时,圆偏振光在谷值区域透过率接近0,而线偏振光在谷值区域透过率约为0.25。通过对液晶偏振光谱系统的透射谱研究,有利于分析入射光构成,为深入研究系统以及提高系统性能奠定理论基础。     

手性液晶滤光片研究

本文研究了掺有手性分子的反射式液晶滤光片的光学特性以及手性液晶膜用于滤光片的可行性。利用Jones矩阵法对其透射光谱特性进行了分析和数值计算,同时制作了手性液晶盒并对其透射光谱进行了测量。从数值计算和实验结果可知,利用掺有手性添加剂的液晶材料可以反射某种特定波长的入射光,起到一种窄带滤光片的作用,利用此特性制成的液晶偏振滤光片膜可用于各种类型的光电防护。     

改善蓝光特性的可调谐液晶滤光片

日本桃谷大学工程系 T.Uchida领导的研究组已开发一种利用向列液晶双折射特性的可调谐彩色滤光片。其透射波长可通过调节外加电压而连续改变。这种器件能从二维图像信息提取特定波长 ,可用于成像光谱仪。这种窄带彩色滤光片的结构基本上与双折射或Lyot滤光片相同 ,由夹在 4片偏振器之间的三片液　　电压控制可调谐滤光片 ,三片变带宽液晶池夹在偏振器之间。滤光片在 4 80～ 6 80 nm之间连续可调谐 ,在蓝光波长具有很高透射特性 ,P为偏振器 ,LC1～ 3 为液晶池晶池构成 (见图 )。液晶池是种电补偿弯曲 (ECB)池 ,把它放在电场中时其双折射…     

一种新型优质光子晶体偏振滤波器的设计

设计了一种各向异性的一维掺杂光子晶体,利用特征矩阵法研究了该各向异性一维掺杂光子晶体的偏振滤波特性,并与各向同性的一维掺杂光子晶体的两个偏振态缺陷模进行了比较.结果表明,当光以不同角度入射时,透射波中横电波(TE)和横磁波(TM)的缺陷模都会出现明显的分离.利用这个特性设计出一种新型优质光子晶体偏振滤波器.     

斜入射角度调谐滤光片的反射光强分布

基于多光束干涉原理,从高斯光束在自由空间的传输方程出发,推导了高斯光束斜入射角度调谐窄带滤光片的反射光强以及透射光强的表达式。在此基础上研究了滤光片入射角对高斯光束反射特性的影响和关系。理论数值计算和实验结果都表明,随着入射角度的增大,滤光片透射光强的光斑会出现明显的展宽现象,而其反射光强的光斑虽会在较大角度斜入射时出现一定的展宽,但是展宽幅度远小于透射光斑的变化。故角度调谐窄带滤光片的反射端口在其调制范围内不需要跟透射端口一样进行光斑整形处理。     

一种红外多光谱成像光学系统设计

介绍了一种中波段的多光谱成像光学系统,由于窄带滤光片对光线入射角度有严格要求,故在光学系统中窄带滤光片的放置位置尤为重要.光学系统由三部分构成,分别为光束压缩单元、分光单元和成像单元,光线经过光束压缩单元口径压缩,但各个视场仍然保持平行光状态,入射到窄带滤光片上的角度均小于7°,满足窄带滤光片的最小入射角要求,最后经过成像单元成像在制冷型中波探测器上.通过细分光谱可以很好的提高目标识别能力.     

基于频域递推算法的窄带滤光片光束传输特性研究

多腔窄带薄膜滤光片在倾斜入射时中心透射波长会向短波方向移动,由此可制备角度调谐滤波器。但其透射光斑在倾斜入射时会出现明显的斑展宽现象,由此产生的接收端耦合度及干涉级次的降低会导致其透射光谱的插入损耗迅速增大,会限制其有效波长调谐范围。传统的多光束叠加法可以对窄带滤光片斜入射时的透射光斑展宽现象进行仿真,但是在光强分布上与实验结果有着较大的误差。本文基于快速傅里叶变换及菲涅尔公式,提出了一种新颖的频域递推算法来计算光斑的展宽程度及透射光强分布,计算了从0度到60度倾斜入射范围内光斑展宽以及透射率的变化情况。理论计算和实验结果都表明该方法较之传统的多光束叠加算法结果更准确且计算效率高。     

基于薄膜滤光片的角度调谐系统设计

基于薄膜滤光片角度调谐的基本原理,实现了一种具有较宽波长调谐范围的可调窄带滤光器。通过优化机构装置参量,利用步进电机精确控制滤光片的入射角度。通过对多腔窄带薄膜滤光片的膜系结构及其等效折射率的计算,得到了滤光片透射中心波长与入射角度的关系式。制备了一个包括步进电机及转动机构在内的滤波器角度调谐装置,在1543-1563...     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.