啁啾布喇格光栅F-P传感器的优化设计

根据实际需要优化设计了一种基于啁啾布喇格光栅的本征型光纤法珀(F-P)传感器。对构成光纤F-P传感器的啁啾布喇格光栅的参数进行了优化设计,得到优化设计的光纤F-P传感器反射谱。实际制作了按照参数设计的啁啾布喇格光栅F-P传感器并进行了应变实验,实验结果表明,该方法设计的传感器应变测量精度高达±8με。     

光纤光栅传感系统信号解调技术的研究

光纤光栅传感是光纤光栅的重要应用之一,波长信号的解调是实现光纤光栅传感网络的关键。介绍了布喇格光纤光栅(FBG)传感的基本原理,对比FBG说明了长周期光纤光栅(LPG)的特点。阐述了基于长周期光栅的布喇格光纤光栅的解调技术,详细阐述了用长周期光纤光栅来解调布喇格光纤光栅的具体方案及技术。     

基于双光纤光栅的加速度传感探头结构的设计

分布式光纤光栅加速度传感技术对微弱振动测量分析及其故障诊断具有重要的实用价值。采用副载波调频、波分复用技术提出了一种分布式光纤布喇格光栅加速度测量系统,并进行了基于双光纤布喇格光栅的加速度传感探头结构的设计。该传感探头具有尺寸小,质量轻,不受电磁干扰等优点,有较高的测量灵敏度和分辨率,而且能自动消除温度噪声和相位噪声的影响。     

消除温度对应变测量的影响

提出了用光纤布喇格光栅( FBG)传感器测量光纤有效弹光系数的方法。利用光纤布 喇格光栅的性质,建立了一个可以有效地解决温度与应变对光栅存在交叉敏感的问题实验系统。实验结果表明,该系统能有效地测出了光纤的有效弹光系数,而且测量误差小于1. 3%。     

采用掩模板制作的光纤布喇格光栅传感器

光纤布喇格光栅(FBG)是国际上光纤传感技术研究的前沿热点。在恶劣环境下对复杂结构进行变形和健康监测，具有波长编码等明显的其他传感器所没有的特点。将由光纤光栅组成的阵列埋入结构材料内部，可用来监测桥梁、大坝、重要建筑物以及船体、航天器内部的温度、应变、压力及材料结构状态的变化。该文介绍了采用掩模板制作光纤光栅传感器的原理和方法，分析了采用相位掩模法制作的分布式光纤布喇格光栅传感器的灵敏度等测量性能和噪声的随机过程特性，从而为其在船舶结构变形测量技术中的应用提供了科学依据。     

分布式FBG的粮仓温度监测系统实验研究

提出了一种新型的粮仓温度监测系统,即利用分布式光纤布喇格光栅传感系统从整体上实现对温度的实时监测.在实验基础上,利用origin软件作出了温度与中心波长的关系图,同时与作为标准的K型热电偶测量数据进行对比,偏差曲线显示光纤布喇格光栅测得温度与标准温度接近,偏差在±0.45℃的范围内,表明本监测系统的测量准确度较高,可以满足粮仓温度监测的要求.     

高精度准分布式光纤光栅传感系统的研究

利用一个经过温度补偿封装的长周期光纤光栅解调系统中所有测量点的传感光栅的波长漂移,实现了实时、高效解调的准分布式测量.理论研究表明该系统适用于对温度、应变等参量的多布点准分布式测量.并以温度为例从实验上研究了高精度的准分布式光纤光栅传感系统.通过改善每个测量点的测量精度来提高整体系统的测量精度.利用金属槽对传感光纤布喇格光栅进行增温敏封装,使其温度灵敏系数比普通裸光栅提高了3.6倍,并利用经过温度增敏封装的光栅作为传感元件,在110℃(-50 ℃-60 ℃)的动态范围内实现了精度为0.04- ℃的多布点准分布式温度测量,理论分析与实验结果一致.     

《学报》与我们共同成长

研究了一种基于长周期光纤光栅的振动传感器波长解调方法,可解调波长范围为1 522～1 538 nm.宽带光源的出射光经光纤布喇格光栅反射后,入射到长周期光栅,经长周期光栅调制后光纤布喇格光栅反射光强会发生变化.通过对谐振波长处光功率的探测,实现光纤布喇格光栅静态、动态信号的监测.通过温度测量实验对监测系统进行标定,实验中光纤布喇格光栅传感器波长偏移量与系统输出电压成线性关系,比值为0.01 nm/mV.将传感器粘贴于铝板表面,采用该系统解调简支铝板结构的微小振动引起的波长变化.系统采集到的动态信号时域波形及频谱与涡电流位移计的测量结果相吻合,表明该系统可实现1 kHz以上的动态应变测量.     

基于Lab VIEW的FBG传感解调技术的研究

结合虚拟仪器技术和光纤光栅传感技术,自行设计了一套光纤光栅传感解调系统.系统采用了基于迈克尔逊干涉技术的解调方法,将包含被测应变信息的光纤布喇格光栅(FBG)波长信号转变成相位信号,通过以Lab VIEW为核心的虚拟仪器系统检测相位的变化,从而得到被测应变的大小.该干涉解调系统避开了传统解调系统受电磁干扰和环境等方面的影响,因此使测量精度提高.虚拟仪器系统可用于静态应变和动态应变的检测,具有高分辨力、大测量范围的特点.     

FBG传感对应变，温度及湿度的同时测量

为更好地解决交叉敏感这一光纤光栅应用中的瓶颈问题,该文从光纤布喇格光栅(FBG)的传感理论出发,分析了光纤光栅在同时测量应变、温度及湿度时交叉敏感的物理机制.通过给光纤光栅外层镀湿敏材料和温敏材料,推广了双光栅法解决交叉敏感的思路,采用三光栅法实现同时对应变、温度及湿度的测量,并设计了相应的解调方案.通过控制步进电机对基于悬臂梁的匹配光栅施加压力或拉力,从而与传感光栅进行匹配,能对传感光栅的波长漂移量进行高精度的测量.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.