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空间失配角是影响外差探测的主要因素之一,很小的角度失配就会导致中频信号极为微弱。通过分析提出,外差信号的振幅可以视为探测器量子效率分布函数的傅里叶变换,基于此提出一种单元增益可调的阵列探测器接收方法。该方法通过设置阵列中探测单元的增益系数,使阵列有效量子效率分布函数的频谱特性匹配信号光与本振光形成的干涉光场,以此提高存在失配角时的中频信号的强度。通过对有效量子效率分布函数的调整,匹配不同角度入射的信号光,即可达到高速扫描探测的目的。 相似文献
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针对本振光为高斯分布,接收信号光经望远镜聚焦后为艾里分布的情况,首先对高斯和艾里函数用数值计算的方式得到两种光斑最大外差效率:当艾里斑直径和高斯光束束腰直径之比为1.719时,最大外差效率为81.45%;然后介绍了光的标量衍射和Zernike像差理论,分析了夫琅禾费衍射适用于相干聚焦光场的条件,计算了平面、高斯、艾里光场和Zernike像差的采样要求,对存在各种像差的光学系统的外差效率进行了仿真,分析了倾斜、离焦、像散、慧差、球差等基本像差及组合像差对外差效率的影响,结果表明:各种像差对外差效率的影响从低到高分别为像散、倾斜、离焦、慧差和球差;3 dB外差效率损失对应相干系统的指标为跟踪误差优于1μrad (RMS),组合波像差优于0.1λ.研究结果对相干激光通信系统的链路损耗分配和光机系统的工程设计具有指导意义. 相似文献
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针对本振光为高斯分布, 接收信号光经望远镜聚焦后为艾里分布的情况, 首先对高斯和艾里函数用数值计算的方式得到两种光斑最大外差效率: 当艾里斑直径和高斯光束束腰直径之比为1.719时, 最大外差效率为81.45%; 然后介绍了光的标量衍射和Zernike像差理论, 分析了夫琅禾费衍射适用于相干聚焦光场的条件, 计算了平面、高斯、艾里光场和Zernike像差的采样要求, 对存在各种像差的光学系统的外差效率进行了仿真, 分析了倾斜、离焦、像散、慧差、球差等基本像差及组合像差对外差效率的影响, 结果表明: 各种像差对外差效率的影响从低到高分别为像散、倾斜、离焦、慧差和球差; 3dB外差效率损失对应相干系统的指标为跟踪误差优于1μrad(RMS), 组合波像差优于0.1λ。研究结果对相干激光通信系统的链路损耗分配和光机系统的工程设计具有指导意义。 相似文献
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现阶段合成孔径雷达(SAR)都采用外差探测,因其外差相干探测的优越性,成为研究和应用的热点。然而,在实际探测中,雷达接收系统接收到的回波激光信号与本地振荡光信号进行相干外差时,匹配具有一定难度。文中分析了信号光宇本振光的夹角对外差信号的影响。 相似文献
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当前研制的快速成像无扫描激光雷达系统由于激光器功率和信号损耗的限制,遇到了无法增大作用距离的瓶颈。结合光外差体制和APD阵列探测器设计的APD阵列外差探测激光雷达系统可以有效地解决这个问题。鉴于光学系统的外差效率能够直接影响外差激光雷达的性能,因此照明方式的设计是该套激光雷达系统的一个关键。经过分析,传统的直接扩束照明模式下系统的平均外差效率仅为10-5量级,远无法打到使用要求;因此提出了采用改进的点阵照明,并采用在阵列探测器前置微透镜阵列实现匹配接收的方式来解决这一问题。计算结果显示,经过优化后的点阵照明模式下的系统外差效率可达0.82,进而证明了采用点阵照明设计的APD阵列外差激光雷达系统的性能可以达到实用要求,为进一步开展APD阵列外差激光雷达的研究工作奠定了理论基础。 相似文献
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Michael Reilly 《半导体技术》2004,29(12)
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system. 相似文献
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Thomas M.Trexler 《半导体技术》2004,29(5)
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test. 相似文献
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The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high. 相似文献
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The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation. 相似文献
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Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible. 相似文献
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Qi-jiang Ran Pei-de Han Yu-jun Quan Li-peng Gao Fan-ping Zeng Chun-hua Zhao 《光电子快报》2008,4(4):239-242
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's. 相似文献
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In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal (200) (2d = 0.4027 nm) is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line(w), the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line(x), the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines(y), the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line(z) in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line(q) in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution(λ/△ 2) is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy. 相似文献
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High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET > PDMAT > TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center. 相似文献
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This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors. 相似文献
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It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory. 相似文献