In0.68Ga0.32As热光伏电池的制作和特性分析

用在InP衬底上失配生长的能隙为0.6eV的In0.68Ga0.32As制成了热光伏(TPV)电池。对其光伏特性的测试分析表明,通过对As组分渐变的InAsxP1-x缓冲层厚度的优化,可以将晶格失配引起的位错完全弛豫在缓冲层内,从而大幅改善热光伏电池的性能。在AM1.5G标准光谱下,与晶格失配没有被完全弛豫的热光伏电池相比,优化措施可将开路电压从0.19V提高到0.21V,外量子效率在长波处可达到85%,转换效率也提高了30%。     

不同缓冲层对GaAs基In_(0.3)Ga_(0.7)As材料特性的影响

采用组分跳变和低温大失配缓冲层技术在GaAs衬底上外延了In0.3Ga0.7As材料。测试结果表明,采用组分跳变缓冲层生长的In0.3Ga0.7As主要依靠逐层间产生失配位错来释放应力,并导致表面形成纵横交错的Cross-hatch形貌;而采用低温大失配缓冲层技术则主要通过在低温缓冲层中形成大量缺陷来充分释放应力,并在后续外延的In0.3Ga0.7As表面没有与失配位错相关的Cross-hatch形貌出现。此外,仅需50nm厚的低温大失配缓冲层即可促使In0.3Ga0.7As中的应力完全释放,这种超薄缓冲层技术在工业批产中显得更为经济。     

InP/GaAs异质外延及异变InGaAs光探测器制备

借助超薄低温InP缓冲层,在GaAs衬底上生长出了高质量的InP外延层,在InP外延层中插入了15周期In0.93Ga0.07P/InP应变层超晶格(SLS),进一步阻断了失配位错穿透到晶体表面,提高了外延层的晶体质量,这样2.5 μm厚InP外延层的双晶X射线衍射(DCXRD)ω扫描半高全宽(FWHM)值降低至219 arcsec,该InP外延层的室温光荧光(PL)谱线宽度仅为42 meV.在此基础上,只利用超薄低温InP缓冲层技术就在半绝缘GaAs衬底上成功地制备出了长波长异变In0.53Ga0.47As PIN光电探测器,器件的台面面积为50 μm×50 μm,In0.53Ga0.47As吸收层厚度为300 nm,在3 V反偏压下器件的3 dB带宽达到了6 GHz,在1 550 nm波长处器件的响应度达到了0.12 A/W,对应的外量子效率为9.6%.     

In Ga As/Ga As超晶格的界面研究

In_xGa_(1-x)As/Ga As之间晶格失配度与X成线性关系,其最大值为7％。因而当外延层厚度大于临界厚度时在界面会产生微缺陷,这些缺陷对其材料性能有很大影响。因此对In x Ga_(1-x)As Ga As界面研究就显得很重要。本工作就GaAs衬底上MBE生长In_(0.2)Ga_(0.8)As/Ga As超晶格样品进行平面,断面的TEM研究。实验结果表明超晶格平整,均匀,只看到位错一种微缺陷。GaAs衬底内位错。表面机械损伤会在超晶格层内引入位错。在In Ga As Ga As界面上失配位错情况如图1所示。图1a为[110]方向衬象,可见界面上位错线及露头(箭头所示)倾转约30,在图1b中看到位错网络,箭头所示位错为1a中所示的露头。     

用X射线衍射研究缓冲层对GaInAs材料的影响

用分子束外延方法制备了具有GaInAs组分渐变缓冲层和不具有GaInAs组分渐变缓冲层的Ga0.9In0.1As/GaAs结构的外延材料。利用高分辨率X射线衍射法(HRXRD)对制备的两种样品分别进行了测试分析。实验结果表明,GaInAs组分渐变缓冲层对外延生长在GaAs衬底上的Ga0.9In0.1As外延材料的晶体质量具有显著的改善作用,极大降低了由于外延层与衬底晶格不匹配所带来的影响。从X射线倒易空间衍射(RSM)二维图谱结果来看,具有GaInAs组分渐变缓冲层结构的样品,其Ga0.9In0.1As外延层与GaInAs组分渐变缓冲层接近完全弛豫,Ga0.9In0.1As外延层的应变降低,表面残留应力小于0.06%,同时,GaAs衬底与Ga0.9In0.1As外延层之间的偏移夹角明显变小。     

基于异变缓冲层与应变层超晶格的InP/GaAs异质外延

利用低压金属有机化学气相沉积技术, 开展InP/GaAs异质外延实验。由450 ℃生长的低温GaAs层与超薄低温InP层组成双异变缓冲层, 并进一步在正常InP外延层中插入In1-xGaxP/InP(x=7.4%)应变层超晶格。在不同低温GaAs缓冲层厚度、应变层超晶格插入位置及应变层超晶格周期数等条件下, 详细比较了InP外延层(004)晶面的X射线衍射谱, 还尝试插入双应变层超晶格。实验中, 1.2 μm和2.5 μm厚InP外延层的ω扫描曲线半峰全宽仅370 arcsec和219 arcsec; 在2.5 μm厚InP层上生长了10周期In0.53Ga0.47As/InP 多量子阱, 室温PL谱峰值波长位于1625 nm, 半峰全宽为60 meV。实验结果表明, 该异质外延方案有可能成为实现InP-GaAs单片光电子集成的一种有效途径。     

GaAs衬底上InP的直接外延生长及性能表征

用低压金属有机物气相外延(LP-MOCVD)技术,采用低温缓冲层生长法,在GaAs(100)衬底上直接生长了高质量的InP外延层.1.2 μm InP(004)面X射线衍射(XRD) ω-2θ和ω扫描半高全宽(FWHM)分别为373 arcsec和455 arcsec,在外延层中插入10周期Ga0.1In0.9P/InP应变超晶格后,其半高全宽分别下降为338 arcsec和391 arcsec.透射电子显微镜(TEM)测试显示,应变超晶格有效地抑制了失配位错穿进外延层,表明晶体质量得到了较大提高.     

重掺InP生长的InGaAs外延层迁移率的测量

通过衬底剥离技术对以重掺N型磷化铟(N+-InP)衬底生长的In0.53Ga0.47As外延层的迁移率测量方法进行了研究。首先,采用环氧树脂胶将In0.53Ga0.47As外延层粘贴在半绝缘蓝宝石衬底上,以盐酸溶液腐蚀掉InP衬底;之后,采用扫描电子显微镜能谱及金相显微镜对InP衬底的剥离情况及In0.53Ga0.47As薄膜的损伤情况进行了检测;最后采用范德堡法对粘贴在半绝缘蓝宝石衬底上的In0.53Ga0.47As薄膜的迁移率进行了测量。通过对比试验得出,剥离InP衬底的In0.53Ga0.47As薄膜的迁移率测量结果与理论值符合较好,与真值偏差在20%以内。     

1.5μm InGaAsP/InP双异质结激光器液相外延中液相组分调整对晶格失配及发射波长的影响

本文描述了在(100)InP衬底上用液相外延(LPE)方法生长In_(1-x)Ga_xAs_yP_(1-y),外延层时,液相组分X_(Ga)~l、X_(A5)~l变化对外延片晶格失配及发射波长的影响,以及生长温度变化对晶格失配的影响。并对实验结果进行了简单的理论上的分析和探讨。     

InP衬底上Ga_(0.47)In_(0.53)As/InP液相外延生长

用液相外廷获得了与InP晶格匹配的Ga_(0.47),In_(0.53)As单晶外延层.本文叙述在(100)和(111)InP衬底上Ga_(0.47)In_(0.53)As/InP液相外延生长方法.用常规滑动舟工艺生长的这种外延层,其表面光亮,Ga的组分x=0.46～0.48,晶格失配率小于2.77×10~(-4),禁带宽度E_g=0.74～0.75eV.使用这种Ga_(0.47)In_(0.53)As/InP/InP(衬底)材料研制的长波长光电探测器,在波长为0.9～1.7μm范围内测出了光谱响应曲线,在1.55μm处呈现峰值.     

InP-based InxGa1-xAs metamorphic buffers with different mismatch grading rates

Linearly graded In_xGa_1-xAs metamorphic buffers with different mismatch grading rates were grown on InP substrate by gas source molecular beam epitaxy.Room temperature photoluminescence spectra show that the sample with lower mismatch grading rate in the buffer has stronger photoluminescence signal,indicating the improved optical property.Atomic force microscope images show that the lower mismatch grading rate in the buffer leads to a slightly rougher surface.The relaxation procedure with two steps in the buffer layers has been observed by X-ray diffraction reciprocal space mapping.The measurements of X-ray diffraction also reveal that the lower mismatch grading rate in the buffer is beneficial for the lattice relaxation and release of residual strain.To further increase the relaxation degree,a lower mismatch grading rate and composition "overshoot" are suggested.     

InP衬底上InAlAs异变缓冲层和高铟组分InGaAs的生长温度优化

利用气态源分子束外延技术在InP衬底上生长了包含InAlAs异变缓冲层的In0.83Ga0.17As外延层.使用不同生长温度方案生长的高铟InGaAs和InAlAs异变缓冲层的特性分别通过高分辨X射线衍射倒易空间图、原子力显微镜、光致发光和霍尔等测量手段进行了表征.结果表明, InAlAs异变缓冲层的生长温度越低, X射线衍射倒易空间图 (004) 反射面沿Qx方向的衍射峰半峰宽就越宽, 外延层和衬底之间的倾角就越大, 同时样品表面粗糙度越高.这意味着材料的缺陷增加, 弛豫不充分.对于生长在具有相同生长温度的InAlAs异变缓冲层上的In0.83Ga0.17As外延层, 采用较高的生长温度时, X射线衍射倒易空间图 (004) 反射面沿Qx方向的衍射峰半峰宽较小, 77K下有更强的光致发光, 但是表面粗糙度会有所增加.这说明生长温度提高后, 材料中的缺陷得到抑制.     

Structure optimization of high indium content InGaAs/InP heterostructure for the growth of In0.82Ga0.18As buffer layer

Microstructure and misfit dislocation behavior in InxGa1-xAs/InP heteroepitaxial materials grown by low pressure metal organic chemical vapor deposition (LP-MOCVD) were analyzed by high resolution transmission electron microscopy (HRTEM), scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy and Hall effect measurements. To optimize the structure of In0.82Ga0.18As/InP heterostructure, the InxGa1-xAs buffer layer was grown. The residual strain of the In0.82Ga0.18As epitaxial layer was calculated. Further, the periodic growth pattern of the misfit dislocation at the interface was discovered and verified. Then the effects of misfit dislocation on the surface morphology and microstructure of the material were studied. It is found that the misfit dislocation of high indium (In) content In0.82Ga0.82As epitaxial layer has significant influence on the carrier concentration.     

Integrated In0.53Ga0.47As p-i-n f.e.t. photoreceiver

The first operation of an integrated p-i-n-photodiode/f.e.t.-amplifier on a single wafer of In0.53Ga0.47As grown lattice matched to an InP substrate is reported.     

Photoemission characteristics of transmission-mode negative electron affinity GaAs and (ln,Ga)As vapor-grown structures

Several types of transmission-mode negative electron affinity (NEA) photocathodes were investigated. The first group consisted of GaAs cathodes of various thicknesses grown on a composite structure composed of a GaP substrate and a Ga(As,P) buffer layer. These cathodes were of two types, one having an abrupt Ga(As,P)/GaAs interface and the other having a compositionally graded interface. The latter type exhibited the highest transmission-mode quantum efficiency, 0.11 electron per incident photon at 0.85 μm. It is assumed that the electron diffusion length L in the GaAs layer is limited by misfit dislocations arising from the lattice mismatch between the GaAs and the Ga(As,P) buffer layer. L increased with cathode layer thickness more rapidly for the graded structure, suggesting that misfit dislocation propagation into the GaAs layer is less when the dislocations are generated gradually (graded structure) than when they are introduced abruptly (ungraded structure). The second group of samples consisted of (In, Ga)As alloy cathodes of various compositions grown on both GaAs and GaP substrates with lattice-mismatch-reducing buffer layers of (In, Ga)As, (In, Ga)P, and Ga(As,P). It was found that photosensitivity was improved significantly by reducing the amount of lattice mismatch between the (In, Ga)As cathode layer and the substrate or buffer layer. Using an (In, Ga)As cathode with an (In,Ga)P buffer layer grown on a GaP substrate, transmission quantum efficiencies in excess of 0.01 were obtained over the relatively broad wavelength range of 0.7 to 1.04 µm.     

0.6-eV bandgap In/sub 0.69/Ga/sub 0.31/As thermophotovoltaic devices grown on InAs/sub y/P/sub 1-y/ step-graded buffers by molecular beam epitaxy

Single-junction, lattice-mismatched (LMM) In/sub 0.69/Ga/sub 0.31/As thermophotovoltaic (TPV) devices with bandgaps of 0.60 eV were grown on InP substrates by solid-source molecular beam epitaxy (MBE). Step-graded InAs/sub y/P/sub 1-y/ buffer layers with a total thickness of 1.6 /spl mu/m were used to mitigate the effects of 1.1% lattice mismatch between the device layer and the InP substrate. High-performance single-junction devices were achieved, with an open-circuit voltage of 0.357 V and a fill factor of 68.1% measured at a short-circuit current density of 1.18 A/cm/sup 2/ under high-intensity, low emissivity white light illumination. Device performance uniformity was outstanding, measuring to better than 1.0% across a 2-in diameter InP wafer indicating the promise of MBE growth for large area TPV device arrays.