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1.
通过测试电容值的变化来分析电容式微超声波换能器(CMUT)的发射性能。介绍了CMUT的工艺过程,关键工艺为硅硅键合。利用硅硅键合工艺制作的CMUT误差小、工艺流程简单且能进行量产。利用E4990A阻抗分析仪测试CMUT电容值得到CMUT初始电容值为680 p F,阵列内电容值一致性良好,误差为0. 62 p F,并对所设计的CMUT进行带宽测试,得出其在-6 d B时归一化带宽为200%,远远优于现有的传感器。  相似文献   

2.
空气耦合电容式微超声换能器线阵设计与测试   总被引:1,自引:0,他引:1  
电容式微超声换能器(CMUT)作为一种新型的MEMS器件,在空气耦合无损检测领域具有较大的研究价值;设计了一种在空气介质中使用的电容式微超声换能器阵列,阵列由8个阵元组成,每个阵元包含16个CMUT敏感单元;介绍了CMUT换能器的原理和设计方法,利用FieldⅡ仿真了不同参数下的阵列指向性;对加工出的CMUT阵列进行了表面形貌测试和声学实验测试.实验结果表明:所加工的CMUT阵列满足设计要求,实验结果同仿真结果一致.  相似文献   

3.
目前CMUT以其频带宽、易集成阵列化、无需匹配层、灵敏度高等优点成为水下超声传感器在研究及应用推广方面的一个新热点。主要开展了对CMUT动态性能的仿真与测试。首先利用SIMULINK对CMUT发射和接收性能进行动态仿真分析,并建立实验平台,以仿真结果作为依据对CMUT动态性能进行了测试,同时实现了CMUT水下初步探测。本研究为CMUT的设计提供了有利的依据。  相似文献   

4.
为了分析阵列设计参数与成像效果的关系,提高微电容超声传感器(CMUT)阵列设计的可靠性,提出了一种仿真CMUT阵列水下成像方法。设计了一种CMUT结构,振膜厚3μm,振动单元边长1.16 mm,ANSYS仿真得出中心频率为464 kHz。讨论了阵列参数与声束指向性关系,以空间脉冲响应理论为基础提出了一种可显示CMUT阵列成像效果图的仿真设计方法。通过MATLAB对该方法的仿真,模拟了不同结构的CMUT线阵在不同激励形式下的水下成像。仿真结果表明,64阵元且阵元中心距0.5λ的CMUT线阵在单脉冲激励下成像效果最好。该仿真方法的实验结果与理论一致,且相比单纯理论分析该方法结论更直观,考虑成像影响因素更全面。  相似文献   

5.
余远昱  王久江  刘鑫  张双 《传感技术学报》2023,36(12):1863-1870
为提升电容式微机械超声换能器(CMUT)的输出声压,提出一种新型凸纹薄膜CMUT阵列设计与实现方法。首先结合解析法与有限元分析法设计器件;然后结合牺牲层释放工艺与电镀方法在CMUT电极上制备尺寸为3μm×2μm的镍凸纹圆环;最后对凸纹薄膜CMUT阵列进行光学、电学与声学特性测量。声学测量结果表明在塌陷模式下78%的工作点范围内,凸纹薄膜CMUT的输出声压均比常规的平膜CMUT高。当直流偏置电压为160 V时,凸纹薄膜CMUT的输出声压提升21.2%,3-dB相对带宽为54%。本研究成果为新型CMUT的设计与实现提供了有益的指导。  相似文献   

6.
提出一种基于MEMS工艺的柔性压力传感器制备方法.采用MEMS工艺制备柔性压力传感器模板,结合纳米压印技术、射频磁控溅射技术和PDMS软光刻工艺在PDMS柔性基底上制备了具有"V"型阵列微结构的Ag薄膜平行板电极,基于碳纳米管(CNTs)/PDMS聚合物的压电容特性,制备出电容式柔性压力传感器.针对不同尺寸的压力传感器进行对比测试,本文制作的压力传感器的灵敏度能够达到3.98% kPa-1,具有良好的重复性,在智能穿戴和电子皮肤等方面有着广阔的应用前景.  相似文献   

7.
为获得一定空间内的温度分布信息,本文研制一种阵列式小尺寸温度传感装置,采用阵列式微小热敏电阻进行温度传感,为尽量减少阵列中相邻传感器的相互耦合和干扰提出了一种反馈隔离驱动测量方法进行阵列电阻检测,并进行了接触温度传感试验.测试实验结果表明,所研制的阵列式小尺寸温度传感装置能较好地识别具有温度差异物体的外形,具有较好的空...  相似文献   

8.
一种柔性三维力触觉传感器阵列的实现方法   总被引:1,自引:0,他引:1  
介绍了一种可安装在曲面上,对三维力进行检测的柔性三维力触觉传感器阵列的实现方法.首先采用MEMS技术制备三维力触觉传感器阵列,再将多个三维力触觉传感器单元分别通过倒装焊技术集成在已加工好的柔性电路板基底上,实现了传感器与信号处理电路的互连和传感器阵列(4×4)的柔性化.采用信号选通的多路信号采集方法简化了传感器阵列的信号处理电路.测试结果表明,柔性触觉传感器阵列可弯曲变形90°以上,检测三维力的分辨率达到0.1 N.  相似文献   

9.
针对智能化网络化传感器与蒙皮式传感器阵列交叉和发展的趋势.将柔性封装技术与智能结构相结合.针对飞行器风洞实验过程中测试数据复杂并且无法进行实际飞行实验的现状.设计一种新型的MEMS压力传感器阵列数据高速传输总线。并对其进行加工、校准,最后将其应用在实际的气动参数测试系统中。  相似文献   

10.
针对飞行器结构的复杂程度,以及飞行器风洞试验过程中需要测试数据较复杂、且无法进行实际飞行试验的现状,经过大量的实际测试和工程实践,设计了一种新型的基于MEMS传感器的飞行器气动参数测试用带式传感器阵列,可以对飞行器表面多点的压力、应变、振动、温度进行测试。经实际调试验证,该测试系统具有良好的测试精度,性能可靠,能够完成飞行器表面的多个气动参数测试,具有良好的工程化价值。  相似文献   

11.
Abstract This paper describes an approach to the design of interactive multimedia materials being developed in a European Community project. The developmental process is seen as a dialogue between technologists and teachers. This dialogue is often problematic because of the differences in training, experience and culture between them. Conditions needed for fruitful dialogue are described and the generic model for learning design used in the project is explained.  相似文献   

12.
European Community policy and the market   总被引:1,自引:0,他引:1  
Abstract This paper starts with some reflections on the policy considerations and priorities which are shaping European Commission (EC) research programmes. Then it attempts to position the current projects which seek to capitalise on information and communications technologies for learning in relation to these priorities and the apparent realities of the marketplace. It concludes that while there are grounds to be optimistic about the contribution EC programmes can make to the efficiency and standard of education and training, they are still too technology driven.  相似文献   

13.
融合集成方法已经广泛应用在模式识别领域,然而一些基分类器实时性能稳定性较差,导致多分类器融合性能差,针对上述问题本文提出了一种新的基于多分类器的子融合集成分类器系统。该方法考虑在度量层融合层次之上通过对各类基多分类器进行动态选择,票数最多的类别作为融合系统中对特征向量识别的类别,构成一种新的自适应子融合集成分类器方法。实验表明,该方法比传统的分类器以及分类融合方法识别准确率明显更高,具有更好的鲁棒性。  相似文献   

14.
为了设计一种具有低成本、低功耗、易操作、功能强且可靠性高的煤矿井下安全分站,针对煤矿安全生产实际,文章提出了采用MCS-51系列单片机为核心、具有CAN总线通信接口的煤矿井下安全监控分站的设计方案;首先给出煤矿井下安全监控分站的整体构架设计,然后着重阐述模拟量输入信号处理系统的设计过程,最后说明单片机最小系统及其键盘、显示、报警、通信等各个组成部分的设计;为验证设计方案的可行性与有效性,使用Proteus软件对设计内容进行仿真验证,设计的煤矿井下安全监控分站具有瓦斯、温度等模拟量参数超标报警功能和电机开停、风门开闭等开关量指示功能;仿真结果表明:设计的煤矿井下安全监控分站具有一定的实际应用价值.  相似文献   

15.
Development of software intensive systems (systems) in practice involves a series of self-contained phases for the lifecycle of a system. Semantic and temporal gaps, which occur among phases and among developer disciplines within and across phases, hinder the ongoing development of a system because of the interdependencies among phases and among disciplines. Such gaps are magnified among systems that are developed at different times by different development teams, which may limit reuse of artifacts of systems development and interoperability among the systems. This article discusses such gaps and a systems development process for avoiding them.  相似文献   

16.
蒙古语言是中国蒙古族使用的通用语言,由于蒙古文区别于其他文字的书写方式和其自身变形机制等特点,在很多通用的文字处理引擎中都不被支持。在嵌入式产品开发与应用领域中Linux加QTE已经成为流行方式。该文给出了一种在QTE环境上实现基于标准Unicode的蒙古文点阵显示和变形算法, 并自定义了支持蒙古文的QTE组件,扩展了QTE功能,为在Linux加QTE方式的嵌入式体系结构中处理蒙古文提供了一种解决方法。  相似文献   

17.
This paper presents control charts models and the necessary simulation software for the location of economic values of the control parameters. The simulation program is written in FORTRAN, requires only 10K of main storage, and can run on most mini and micro computers. Two models are presented - one describes the process when it is operating at full capacity and the other when the process is operating under capacity. The models allow the product quality to deteriorate to a further level before an existing out-of-control state is detected, and they can also be used in situations where no prior knowledge exists of the out-of-control causes and the resulting proportion defectives.  相似文献   

18.
自然界的绝大部分信号都是以模拟的形式存在,因此模拟信号的采集转换存储在数字时代十分关键。文章讨论了在雷达信号处理领域基于AD9626的AD采集存储卡的设计原理、硬件结构和程序设计与芯片配置等问题,为今后相关领域的研究提供了可参考的方案。  相似文献   

19.
Going through a few examples of robot artists who are recognized worldwide, we try to analyze the deepest meaning of what is called “robot art” and the related art field definition. We also try to highlight its well-marked borders, such as kinetic sculptures, kinetic art, cyber art, and cyberpunk. A brief excursion into the importance of the context, the message, and its semiotics is also provided, case by case, together with a few hints on the history of this discipline in the light of an artistic perspective. Therefore, the aim of this article is to try to summarize the main characteristics that might classify robot art as a unique and innovative discipline, and to track down some of the principles by which a robotic artifact can or cannot be considered an art piece in terms of social, cultural, and strictly artistic interest. This work was presented in part at the 13th International Symposium on Artificial Life and Robotics, Oita, Japan, January 31–February 2, 2008  相似文献   

20.
Jacob Palme 《Software》1979,9(9):741-747
The COM teleconferencing system was designed to be easy to use for both beginners and people with much computer experience. A number of design choices in organizing the human-computer interface were considered very carefully. These design problems are not unique for teleconferencing applications, but will appear in many other developments of human-computer interfaces for non-computer specialists. This report discusses naming conventions, menu format, user commands, help facility and the treatment of ‘type ahead’ from the users.  相似文献   

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