具有双绝缘层和修饰电极的薄膜场效应晶体管

研究了具有OTS/SiO2双绝缘层结构及MoO3/Al电极结构的有机薄膜晶体管.器件是以热生长的Si02作为有机薄膜晶体管的栅绝缘层,酞菁铜作为有源层的.OTS/SiO2双绝缘层的结构提高了器件的场效应迁移率和开关电流比,降低了阈值电压.实验表明在同样的栅极电压下,具有MoO3/Al电极的器件和金电极的器件有着相似的源漏输出电流.结果显示具有OTS/SiO2双绝缘层及MoO3/Al电极结构的器件能有效改进有机薄膜晶体管的性能.     

具有双绝缘层和修饰电极的薄膜场效应晶体管

研究了具有OTS/SiO2双绝缘层结构及MoO3/Al电极结构的有机薄膜晶体管.器件是以热生长的Si02作为有机薄膜晶体管的栅绝缘层,酞菁铜作为有源层的.OTS/SiO2双绝缘层的结构提高了器件的场效应迁移率和开关电流比,降低了阈值电压.实验表明在同样的栅极电压下,具有MoO3/Al电极的器件和金电极的器件有着相似的源漏输出电流.结果显示具有OTS/SiO2双绝缘层及MoO3/Al电极结构的器件能有效改进有机薄膜晶体管的性能.     

表面修饰的ZnPc薄膜晶体管性能研究

以热生长的SiO2作为栅绝缘层,酞菁锌(ZnPc)作为有源层,研究了具有十八烷基三氯硅烷(OTS,C18H37SiCl3)/SiO2双绝缘层结构的有机薄膜晶体管(OTFT)。实验表明,采用OTS可以有效地降低SiO2栅绝缘层的表面能并改善表面的平整度,器件的场效应迁移率提高了3.5倍,漏电流从10-9A降到10-10A,阈值电压降低了5 V,开关电流比从103增加到104。结果显示,具有OTS/SiO2双绝缘层的器件结构能有效改进OTFT的性能。     

绝缘层/有源层界面修饰及对有机薄膜晶体管性能的影响

制备了具有修饰层的有机薄膜场效应晶体管,采用高掺杂Si作为栅极,传统的无机绝缘材料SiO2作为栅绝缘层,有机绝缘材料PMMA或OTS作为修饰层,CuPc作为有源层,Au作为源、漏极.测试结果表明,采用经过修饰的栅绝缘层SiO2/OTS和SiO2/PMMA的两种器件的开关电流比最高可达8×104,迁移率最高为1.22×10-3cm2/(V·s),而漏电流仅为10-10A,总体性能优于单层SiO2器件.     

绝缘层/有源层界面修饰及对有机薄膜晶体管性能的影响

制备了具有修饰层的有机薄膜场效应晶体管,采用高掺杂Si作为栅极,传统的无机绝缘材料SiO2作为栅绝缘层,有机绝缘材料PMMA或OTS作为修饰层,CuPc作为有源层,Au作为源、漏极.测试结果表明,采用经过修饰的栅绝缘层SiO2/OTS和SiO2/PMMA的两种器件的开关电流比最高可达8×104,迁移率最高为1.22×10-3cm2/(V·s),而漏电流仅为10-10A,总体性能优于单层SiO2器件.     

磁控溅射法制备复合绝缘层的薄膜晶体管

研究了磁控溅射法制备的复合绝缘层结构的有机薄膜晶体管.该器件是以酞菁铜(CuPc)作为有源层,SiO2/Si3N4/SiO2复合绝缘层和单层SiO2为绝缘层来进行对比研究的.结果显示与单层SiO2绝缘层的器件相比,具有复合绝缘层的器件结构能有效改进有机薄膜晶体管的性能.同时发现,不同厚度的SiO2/Si3N4/SiO2复合绝缘层对晶体管的性能也有影响,绝缘层太厚,感应电流小;绝缘层太薄,器件容易被击穿.     

OTS修饰的不同厚度酞菁铜OTFT的研究

用十八烷基三氯硅烷(OTS)修饰了不同厚度的酞菁铜(CuPc)有机薄膜晶体管器件, 对比酞菁铜厚度为15、40、80 nm的3种器件性能后,得到40 nm的酞菁铜器件具有最高载流子迁移率.分析了OTS修饰的绝缘层表面对器件性能的影响,得到的40 nm厚度酞菁铜器件载流子迁移率为4.3×10-3cm2/V*s, 阈值电压为-9.5 V.     

真空气相沉积生长PTCDI C8 N型有机薄膜晶体管

在大气环境下N型有机薄膜晶体管(OFET)的性能不稳定,为提高晶体管在大气环境稳定性,该文分别制作了SiO2单绝缘层器件和SiO2/PMMA双绝缘层器件。采用N型新材料PTCDI-C8作为有源层,Ag作为源、漏电极,对制作的不同绝缘层的器件进行聚对二甲苯的封装,对有源层进行形貌和晶体结构分析。并进行电流-电压(I-V)曲线测试。在相同工作电压下,双绝缘层器件比单绝缘层器件具有更大的场效应迁移率、开关电流比和更小的阈值电压。     

绝缘层材料及结构对薄膜晶体管性能的影响

基于半导体仿真软件Silvaco TCAD对薄膜晶体管(TFT)进行器件仿真,并结合实验验证,重点分析不同绝缘层材料及结构对TFT器件性能的影响。仿真及实验所用薄膜晶体管为底栅电极结构,沟道层采用非晶IGZO材料,绝缘层采用SiN_x和HfO_2多种不同组合的叠层结构。仿真及实验结果表明:含有高k材料的栅绝缘层叠层结构较单一SiN_x绝缘层结构的TFT性能更优;对SiN_x/HfO_2/SiN_x栅绝缘层叠层结构TFT,HfO_2取40nm较为合适;对含有高k材料的3层和5层绝缘层叠层结构TFT,各叠层厚度相同的对称结构TFT性能最优。本文通过仿真获得了TFT性能较优的器件结构参数,对实际制备TFT器件具有指导作用。     

一种廉价电极的并五苯场效应晶体管

采用底栅顶接触结构,研究制备了以并五苯为有源层、聚甲基丙烯酸甲酯(PMMA)为绝缘层的全有机场效应晶体管(OFET),其中绝缘层采用溶液旋涂法制备,电极采用MoO3/Al双层电极。与传统采用单一Au为电极的器件相比,采用双层电极的器件性能大幅提高,经测试,器件的迁移率达到了0.133cm2/Vs,开关电流比可以达到2.61×105。对采用MoO3修饰层提高性能的作用机理进行了详细论证。     

Organic thin film transistors with a SiO2/SiNx/SiO2 composite insulator layer

We have investigated a SiO₂/SiN_x/SiO₂ composite insulation layer structured gate dielectric for an organic thin film transistor（OTFT） with the purpose of improving the performance of the SiO₂ gate insulator. The SiO₂/SiN_x/SiO₂ composite insulation layer was prepared by magnetron sputtering.Compared with the same thickness of a SiO₂ insulation layer device,the SiO₂/SiN_x/SiO₂ composite insulation layer is an effective method of fabricating OTFT with improved electric characteristics and decreased leakage current.Electrical parameters such as carrier mobility by field effect measurement have been calculated.The performances of different insulating layer devices have been studied,and the results demonstrate that when the insulation layer thickness increases,the off-state current decreases.     

Organic thin-film field-effect transistors with MoO3/Al electrode and OTS/SiO2 bilayer gate insulator

An organic thin-film transistor (OTFTs) having OTS/SiO₂ bilayer gate insulator and MoO₃/Al electrode configuration between gate insulator and source–drain (S–D) electrodes has been investigated. Thermally grown SiO₂ layer is used as the OTFT gate dielectric and copper phthalocyanine (CuPc) for an active layer. We have found that using silane coupling agents, octadecyltrichlorosilane (OTS) on SiO₂, surface energy of SiO₂ gate dielectric is reduced; consequently, the device performance has been improved significantly. This OTS/SiO₂ bilayer gate insulator configuration increases the field-effect mobility, reduces the threshold voltage and improves the on/off ratios simultaneously. The device with MoO₃/Al electrode has similar source–drain current (I_DS) compared to the device with Au electrode at same gate voltage. Our results indicate that using double-layer of insulator and modified electrode is an effective way to improve OTFT performance.     

具有双绝缘层的有机薄膜晶体管

为了提高SiO2单绝缘层器件的性能,在SiO2绝缘层的表面用旋涂的方法制备一层大约50 nm厚度的PMMA.实验结果表明用无机/有机双绝缘层可以有效的提高器件的性能同时降低器件的漏电流.计算出了载流子迁移率和开关电流比,基于PMMA/SiO2双绝缘层器件的载流子迁移率和开关电流比分别是4.0×10-3cm2/Vs和104.     

具有SiO2/SiNX/SiO2 复合绝缘层的有机薄膜晶体管

We have investigated a SiO_2/SiN_x/SiO_2 composite insulation layer structured gate dielectric for an organic thin film transistor(OTFT) with the purpose of improving the performance of the SiO_2 gate insulator. The SiO_2/SiN_x/SiO_2 composite insulation layer was prepared by magnetron sputtering.Compared with the same thickness of a SiO_2 insulation layer device,the SiO_2/SiN_x/SiO_2 composite insulation layer is an effective method of fabricating OTFT with improved electric characteristics and decrease...     

Organic thin film transistors with PMMA modified insulator

A double insulation layer structure organic thin films transistor (OTFT) was investigated for improving the performance of the SiO2 gate insulator. A 50 nm PMMA layer was coated on top of the SiO2 gate insulator as the organic insulator layer. The results demonstrated that using inorganic/organic compound insulator as the gate dielectric layer is an effective method to fabricate OTFTs with improved electric characteristics and decreased leakage current. Electrical parameters of carrier mobility and on/off ratio were calculated. OTFT based on Si substrate with a field-effect mobility of 4.0 × 10-3cm2/Vs and on/off ratio of 104 was obtained.     

Triacetate cellulose gate dielectric organic thin-film transistors

Here, we report on the performance and the characterization of all solution-processable top-contact organic thin-film transistors (OTFTs) consisting of a natural-resourced triacetate cellulose gate dielectric and a representative hole-transport poly[2,5-bis(3-dodecylthiophen-2-yl)thieno[3,2-b]thiophene] (pBTTT) semiconductor layer on rigid or flexible substrates. The bio-based triacetate cellulose layer has an important role in the OTFT fabrication because it provides the pBTTT semiconducting polymer with highly suitable gate dielectric properties including a low surface roughness, hydrophobic surface, appropriate dielectric constant, and low leakage current. The triacetate cellulose gate dielectric-based pBTTT OTFTs exhibit an average filed-effect mobility of 0.031 cm²/Vs similar to that obtained from a SiO₂ gate dielectric-based OTFT device in ambient conditions. Even after a bending stimulation of 100 times and in an outward bending state, the flexible triacetate cellulose gate pBTTT OTFT device still showed excellent electrical device performance without any hysteresis.