原子力显微镜在液相条件下的成像分析

本研究利用原子力显微镜(atomic force microscope,AFM)分别对Al2O3纳米模板、云母片及数字光盘在固相及液相务件下进行形貌扫描和云母片上的力 - 距离曲线测量.实验结果分析表明液相条件可以降低针尖的展宽效应,使得形貌成像更能够显示出物体的细微结构.在液相条件下,由于样品表面消除了静电效应和液体的阻滞力结果,力 - 距离曲线显示了较好的力均一性.这些结果为AFM实验技术研究生理条件下的生物样品的形态学及生物分子之间的相互作用力提供了实验可行性.     

Mechanical behavior of mismatch strain-driven microcantilever

A model of mechanical behavior of microcantilever due to mismatch strain during deposition of MEMS structures is derived. First, a microcantilever, modeled as an Euler-Bernoulli beam, is subjected to deposition of another material and a linear ordinary differential equation which considers the through-thickness variation of the mismatch strain is derived. Second, the deposition analysis is experimentally realized by electroplating of nickel onto an atomic force microscope (AFM) cantilever beam. Young's modulus of the electroplated nickel film is determined by using Sader's method and elementary beam theory. The deflection of the AFM cantilever is in-situ measured as a function of the electroplated thin film thickness through the optical method of AFM and the mismatch strain with the through-thickness variation is determined from the experiment results.     

基于1×2阵列压电悬臂梁的AFM并行扫描

分析了阵列悬臂探针并行扫描的工作方式,以非接触磁力模拟样品与悬臂梁间的范德华力,研究了1×2阵列压电悬臂梁的并行扫描和驱动控制方法。每一压电梁均集成了微位移致动器和力传感器,在320Hz一阶共振频率下振动。实验表明:在0.2～1.0mm力作用区内,压电梁自由端每接近模拟样品0.1mm,表征悬臂梁振幅的锁相放大器输出电压减小1.7mV,但微力传感在扫描的升回程存在迟滞;致动器的控制电压每增加10V使锁相放大器输出减小约3mV,表明集成的致动器可调节压电梁与样品间的间距。两压电梁的电荷-位移响应曲线、间距调节灵敏度均不完全一致,讨论了阵列悬臂梁一致性问题和阵列规模大小问题。     

基于STM的原子力显微镜的设计及应用

原子力显微镜由于不受物质导电性的限制,已经成为纳米检测和加工的重要手段之一。本文介绍了根据隧道效应检测微悬臂位移的原理自制的原子力显微镜系统,重点讲述了镜体结构及特点。测试结果表明该仪器具有原子量级的分辨率。最后还给出了用该原子力显微镜检测到的几幅试样的三维表面形貌图。     

两种基于MEMS谐振器的原子力显微镜探针

目前商用原子力显微镜(AFM)大多使用的微悬臂式探针,力灵敏度可达到pN级别。然而受到工艺水平及检测方法限制,微悬臂谐振频率难以超过3.5 MHz,且Q值较低,制约了AFM的成像速度以及在液体中的成像效果。另外,光杠杆的检测方法无法与探针本身进行片上集成,较小的悬臂也给激光束的聚焦带来困难。基于以上考虑,本文提出两种基于MEMS谐振器的探针,振频率可达11 MHz,Q值为4 000,并集成了执行与传感功能以及批量加工纳米针尖的工艺。目前两种探针都已经实现对树脂图案的成像功能,力灵敏度最高可达5pN/√Hz。     

Sensitive detection of infrared photons using a high-Q microcantilever

A new approach based on microcantilevers is presented to detect infrared photons with high sensitivity. Infrared photons are measured by monitoring the amplitude change of a vibrating microcantilever under light pressure force.The irradiating light is modulated into sinusoidal and pulsed waves,and to be in-phase and anti-phase with the cantilever driving signal.A linear relationship between the amplitude change of the cantilever and the light power distributing on the cantilever was observed.Under a vacuum of 10^-4 Pa,an infrared light power of 7.4 nW was detected with the cantilever.The in-phase and anti-phase modulation to the cantilever vibration using a pulsed light results in an enhanced response of the cantilever.     

AFM/STM系统中微悬臂的设计和研制

扫描隧道显微镜（ＳＴＭ）和原子力显微镜（ＡＦＭ）由于具有原子量级的分辨率,所以在表面物理、化学、生物等领域得到了越来越广泛的应用。我们研制了一个ＡＦＭ／ＳＴＭ系统,它利用隧道电流检测微悬臂的位移,既可用作ＡＦＭ,又可作为ＳＴＭ。本文介绍了这个系统的微悬臂的设计和研制。实验表明,这种微悬臂使系统可以达到纳米量级的分辨率。     

基于微悬臂梁的高灵敏红外光子探测

提出一种基于微悬臂梁的具有较高灵敏度的新型红外光子探测方法。该方法通过测量振动悬臂梁在光压作用下振幅的变化量来探测红外光子。实验中,将红外辐射光调制成正弦型或方波脉冲,并与微悬臂梁的激励信号保持同相或反相。实验结果表明,微悬臂梁振幅的改变量与红外光功率之间存在线性关系,并在10^-4 Pa的真空环境中最小可以探测到7.4 nW的红外光功率,另外还发现,方波脉冲调制光会增大微悬臂梁的振幅响应。     

力学性能对于原子力显微镜接近曲线的影响

该文基于Derjaguin-Muller-Toporov接触模型,研究了振幅调制原子力显微镜(AM-AFM))成像中,3种典型针尖悬臂系统与四类具有不同力学性能的材料样品在针尖样品接近过程中互作用的响应情况。研究表明相位响应与针尖样品相互作用力作用形式密切相关。通过针尖的振幅曲线可确定针尖与样品间的互作用力的性质是吸引还是排斥,本研究结果有助于在AM-AFM成像实验中优化基准值设置,以避免对样品的损害。     

Na掺杂量对ZnO薄膜AFM图像多重分形谱的影响

用溶胶-凝胶法在Si（111）基片上制备Na掺杂ZnO薄膜,利用原子力显微镜（AFM）观察薄膜的表面形貌,采用多重分形理论定量表征薄膜的AFM图像。结果显示：随着Na含量的增加,薄膜平均颗粒尺寸逐渐增大,表面RMS粗糙度从7.4 nm增大到44.4 nm,分形谱宽Δα从0.059增大到0.200,说明薄膜表面高度分布不均匀程度逐渐增大;所有样品的Δf值均大于零,表明薄膜表面沉积于最高峰的原子数多于最低谷的原子数。     

AFM压电微悬臂振动影响测量图像的研究

在轻敲工作模式下,原子力显微镜(AFM)压电微悬臂以较大的振幅振动。以纳米管针尖为例建立了压电微悬臂振动的数学模型并描述了纳米管尖端的振动轨迹,从纳米管尖端的振动轨迹和仿真图形的关系,指出压电微悬臂振动影响测量精度的有关参数及减小由振动产生膨胀变形的方法。根据数学图形学膨胀理论仿真出纳米管尖端振动轨迹对标准线宽模型的影响,AFM测量线宽的试验验证了上述结果。     

原子力显微镜在生殖支原体研究中的应用

为了确定生殖支原体在活性条件下的结构形貌,并在较高的分辨水平上观察其三维形貌结构,本研究采用原子力显微在常温常压下对生殖支原体标准株及分离株进行形态学的初步观察,将标本固定于云母上,在ｔａｐｐｉｎｇ模式下扫描成像,结果显示：生殖支原体多呈烧瓶状或鸭梨状,有突出的颈产及膨大的头端,与电镜观察结果类似,其大小亦与银镜测量结果类似。     

A Model-Based Processor Design for Smart Microsensor Arrays [Applications Corner]

In this article, we discuss the design of a smart-physics-based processor for microcantilever sensor arrays. The processor is coupled to a microelectromechanical sensor and estimates the presence of critical materials or chemicals in solution. We first briefly present microcantilever sensors and then discuss the microcantilever sensor array design, which consists of the cantilever physics propagation model, cantilever array measurement model, model-based parameter estimator design, and model-based processor (MBP) design. Finally, we end with experimental results and conclusions     

Al/SiO_2/Si表面Al_2O_3纳米图形的AFM阳极氧化制备方法

采用AFM阳极氧化方法,在控制AFM探针尖端电压和扫描方式的条件下,在Al/SiO2/Si表面制备了Al2O3纳米图形,图形最小尺寸为70nm.研究了表面吸附水层存在下AFM阳极氧化机理.实验结果表明AFM阳极氧化是制备金属氧化物半导体纳米器件的较好方法     

PSD233型位置敏感元件的特性及其在AFM中的应用

给出了自制的 3mm× 3mm位置敏感元件 (PSD)的光谱响应特性 ,覆盖从紫外光、可见光到红外光 (32 0～115 0nm)的广阔区域 .采用光束偏转法对其时间响应特性和位置敏感特性进行测定 .阐述了PSD在卧式原子力显微镜 (AFM)系统中的应用 ,介绍了卧式AFM的工作原理和控制系统 ,提供了部分样品的AFM扫描图像 .结果表明 ,该AFM系统具有较高的成像效率以及良好的工作稳定性、图像重复性和对比度 ,系统的最大扫描范围为 5 μm× 5 μm ,分辨率达到 1nm量级 ,表明PSD在光谱响应、时间响应和位置敏感特性等方面具有优良性能     

基于超平表面的原子力显微镜探针磨损研究

原子力显微镜的图像质量受到探针磨损情况的直接影响,本文主要对基于超平表面的原子力显微镜(AFM)探针磨损问题进行了试验研究,针对探针磨损效率以材料表面的粗糙度(Rq)作为评估指标,测试样品选用了Rq小于0.5nm的超平表面。探针在10%的反馈回路设定值比例和悬臂目标振幅比例的测试条件下,采用1Hz的扫描速度及1.7的I-gain值可使磨损最小,进而有效提升探针使用寿命。     

Design and implementation of a bistable microcantilever actuator for magnetostatic latching relay

This paper presents the design, fabrication, and implementation of a microcantilever actuator with magnetostatic latching for performing low power bistable relay applications. This unique bistable feature consists of a low-stiffness torsion/cantilever beam system with circular-shaped support and a permanent magnet for holding the closed state with a permalloy soft magnetic circuit. The special circular support is designed to enhance the stiffness of the overhang beams. First, mechanical modeling of the leveraged torsion/cantilever beams was performed by Castigliano’s theorem so as to deduce the spring stiffness of system. Then the device has been prepared by a laminated photoresist sacrificial layer process (LPSLP). Finally, mechanical performance was characterized by atomic force microscopy (AFM), combined with finite element simulation using ANSYS™ package and analysis model as well. Switching between two stable states of the microactuator was successfully validated with WYKO NT1100 optical profiling system.     

基于AFM的微纳米结构力学特性测量

原子力显微镜（ＡＦＭ）以其优异的特性不仅在微米、纳米的范围内获取图象。同时可以获取针尖与样品之间的作用力,为研究样品的力学性能提供了新思路。对ＡＦＭ在力学测量上的原理和应用进行了综述,并提出基于ＡＦＭ的生物样品的力学测量的新方法。     

Calibration of the spring constant of AFM cantilever

Several methods have been developed in recent years to calibrate the spring constant of atomic force microscopy (AFM) cantilever. In the present work, an effective and practical improvement is made on these methods to provide a more convenient calibration method. Simplifying the originally tedious procedures by just examining the cantilever's dimensions in scanning electron microscopy (SEM) and the resonance frequency of the cantilever from Q curves in AFM system, the spring constants of different cantilevers are calculated by the methods of Cleveland and Sader. The results are close to the nominal values provided by the manufacturers, which indicates that simplifying the procedures is valid and reliable. Moreover, it shows that spring constants acquiring by Cleveland method is more close to their nominal values than Sader's method does.     

Sensitivity of V-shaped atomic force microscope cantilevers based on a modified couple stress theory

A relationship based on a modified couple stress theory is developed to investigate the flexural sensitivity of a V-shaped cantilever of an atomic force microscope (AFM) taking into account the normal interaction force between the cantilever tip and the sample surface. An approximate solution to the flexural vibration problem is obtained using the Rayleigh-Ritz method. The results show that the sensitivity of the V-shaped AFM cantilever using the modified couple stress theory is smaller than that using the classical beam theory for the lower contact stiffness. However, when the contact stiffness becomes higher, the situation is reversed. Furthermore, as the ratio of cantilever thickness to internal material length scale parameter decreases, the sensitivity of the cantilever decreases.