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1.
介绍了一种基于标准硅工艺的微悬臂梁非致冷红外探测器的设计和制作.由于氮化硅和铝的热膨胀系数相差很大,用这两种材料的薄膜做成的双材料微悬臂梁在红外辐射下温度升高并发生弯曲,微悬臂梁和衬底形成一个可变电容,通过检测电容的变化来反映微悬臂梁的弯曲,从而可以探测红外辐射的情况.利用外部测试设备对单元探测器进行测试表明,该微悬臂梁对红外辐射有很高的响应.  相似文献   

2.
介绍了一种压电微悬臂梁共振频率检测系统.压电材料沉积在微悬臂梁上,在压电层的上下电极之间施加交变电压使其振动,当微悬臂梁的振动频率等于它的固有频率时,发生共振,此时微悬臂梁的振幅最大.结合所设计的激励电路以及微悬臂梁共振频率检测电路,对压电微悬臂梁进行了检测实验.实验结果表明,放大电路能够检测出压电微臂梁的共振频率,并且压电微悬臂梁达到共振时,共振频率附近振幅远大于其他频率对应的振幅,振幅最大值接近600 nm.  相似文献   

3.
一种新型非致冷红外探测器   总被引:2,自引:0,他引:2  
刘海涛 《红外技术》2005,27(5):388-392
介绍一种基于标准硅工艺、采用电容读出方式微悬臂梁非制冷红外探测器的设计、制作及性能测试。用这两种热膨胀系数相差很大材料(氮化硅和铝)的薄膜做成的双材料微悬臂梁在红外辐射下,温度升高并发生弯曲。通过检测微悬臂梁和衬底形成的一个可变电容变化可以得知微悬臂梁的弯曲情况,从而可以探测红外辐射的信息。利用外部测试设备对单元探测器进行测试表明微悬臂梁对红外辐射有很高的响应。  相似文献   

4.
王俊  谭荣华 《激光杂志》2020,41(3):177-181
为了解决红外光通信存在传输方向单一和消耗功率高问题,设计基于嵌入式技术的超低功耗红外光通信系统,系统单片机使用改进型STM32,将超低功耗红外发射装置嵌入到红外光通信系统中,该装置通过固定载波频率将输入音频信号,通过发送校准模式和音频传输模式调制为高频方波信号后,采用红外光管向外发射信号,并在电路中增加功率负载电流实现限流,降低红外光发射电路功耗。红外接收装置通过共射级放大电路接收信号,采用脉冲宽度调制(PWM)调制信号,实现信号高质量、低功率传输。红外通信模块实现红外发射装置和接收装置间信号的双向传输。系统采用保护驱动模式、中断模式与用户模式的红外通信协议栈,最大程度降低系统通信能耗,提高系统通信效率。实验结果表明:该系统能够实现信号和温度信号的有效传输,在休眠和正常运行时的功耗均较低,误码率低,是一种功率消耗低、通信质量高的红外光通信系统。  相似文献   

5.
李炳乾 《半导体光电》2005,26(2):105-107
设计了悬臂梁结构电热激励、压阻拾取硅微机械谐振器件,分析了电热激励和压阻拾取的基本工作原理,设计了与Bipolar工艺兼容的器件制作工艺流程,并制作了器件样品.对真空中器件的幅频特性进行了实验研究,研究结果表明,在粗真空范围内,保持激励功率不变的情况下,微悬臂梁的振幅、谐振频率与真空度之间具有明显的依赖关系,可以用来设计、制作MEMS粗真空谐振式传感器.  相似文献   

6.
基于电容读出的非制冷红外探测器   总被引:1,自引:0,他引:1       下载免费PDF全文
介绍了一种基于标准硅工艺的电容读出式微悬臂梁非制冷红外探测器的设计、制作以及集成读出电路的设计。该探测器用于探测室温下物体的红外辐射,其响应波长为8~12 μm 。由于氮化硅和铝的热膨胀系数相差很大,用这两种材料的薄膜做成的双材料微悬臂梁在红外辐射下会发生弯曲,微悬臂梁和衬底形成一个可变电容,通过检测电容的变化来反映微悬臂梁的弯曲,从而可以探测红外辐射的情况。采用和探测器集成的CMOS读出电路对探测器信号进行读取,微悬臂梁的电容灵敏度可达2.5 fF/K,温度分辨率为0.1 K。  相似文献   

7.
基于微悬臂梁结构的生化传感器   总被引:1,自引:0,他引:1  
微悬臂梁是一种结构简单、易于进行微加工以及大量生产的传感器结构。当分子吸附在微悬臂梁表面之后,微悬臂来的弯曲以及振荡频率都会发生变化,这使微悬臂梁在化学和生物的实时探测方面非常具有吸引力。采用光学方法探测微悬臂梁的偏转;比较了不同的悬臂梁结构在流体中的稳定性以及不同结构的反光部分的反光效果,并将悬臂梁用于研究PNIPAM分子构象随温度的转变.  相似文献   

8.
超晶格材料已经成为了第三代红外焦平面探测器的优选材料。双波段红外探测器能够通过对比两个波段内的光谱信息差异,对复杂的背景进行抑制,提高探测效果,在需求中尤为重要。本文开展了InAs/InAsSb超晶格中/中双色焦平面探测器设计及制备技术研究,从器件设计、材料外延、芯片加工等方面展开研究,制备了中心距30 μm的320×256 InAs/InAsSb二类超晶格中/中波双色焦平面探测器。器件短中波峰值探测率达到7.2×1011 cm·Hz1/2W-1,中波峰值探测率为6.7×1011 cm·Hz1/2W-1,短中波有效像元率为99.51%,中波为99.13%,获得了高质量的成像效果,实现中中双色探测。  相似文献   

9.
材料质量好坏对于获得高性能红外探测器至关重要。提出决定材料质量的关键点在于精准控制材料结构中层与层之间的晶格失配度,报道了晶格失配对材料质量和器件暗电流性能的影响。实验结论表明在液相外延技术生长的InAs/InAsSbP材料体系中,InAs和InAsSbP间的晶格失配不是越小越好,而是有一个最佳值。如果晶格失配偏离这个值,不管是偏大还是偏小,材料的质量都会恶化。阐述了如何调整生长参数以获得合适的晶格失配度。制备了具有适宜晶格失配度的红外探测器件,该探测器零偏压下的室温峰值探测率为6.8×109 cm Hz1/2W-1,与国际商用InAs探测器的指标相当。  相似文献   

10.
微测辐射热计利用热敏电阻对温度的敏感特性来实现红外探测,将光学天线场局域的能力应用于微测辐射热计,可以集中入射能量至热敏电阻,提高电阻的温度响应。基于这一思想设计了一种工作在红外波段的改进型蝶形光学天线,其中心场强最高可增强83 倍。采用了多物理分析方法,结合两种常用的热敏材料(铝和氧化钒)对耦合结构的电磁特性和热学特性进行了分析。结果显示,在1000 W/m2 的入射功率密度下,铝温升可达1.85 mK,氧化钒温升0.85 mK,与同类工作相比温度响应增强了数倍。该改进型蝶形光学天线可用于微测辐射热计提升红外探测效率,在高密度红外成像器件应用中发挥作用。  相似文献   

11.
Sensitive detection of infrared photons using a high-Q microcantilever   总被引:1,自引:1,他引:0  
A new approach based on microcantilevers is presented to detect infrared photons with high sensitivity. Infrared photons are measured by monitoring the amplitude change of a vibrating microcantilever under light pressure force.The irradiating light is modulated into sinusoidal and pulsed waves,and to be in-phase and anti-phase with the cantilever driving signal.A linear relationship between the amplitude change of the cantilever and the light power distributing on the cantilever was observed.Under a vacuum of 10-4 Pa,an infrared light power of 7.4 nW was detected with the cantilever.The in-phase and anti-phase modulation to the cantilever vibration using a pulsed light results in an enhanced response of the cantilever.  相似文献   

12.
Vertical-cavity surface-emitting lasers (VCSELs) with optical feedback are known to exhibit different transverse-mode regimes depending on the injection current. Close to threshold a VCSEL operates on the fundamental transverse mode, while for larger injection the dynamics is often multimode, with the optical feedback inducing either in-phase or anti-phase transverse mode oscillations. In this paper, we study numerically the influence of current modulation on these different feedback-induced transverse-mode regimes. The modulation amplitude and period are taken as control parameters. We find that the in-phase and anti-phase regimes are robust under weak modulation. As the modulation amplitude increases, there is a transition to a dynamics governed by the current modulation, where the total output power follows the injection current and there is either single-mode or in-phase multimode behavior. However, the effect of the current modulation depends on the modulation period. Under fast modulation, the laser cannot follow the modulation and the optical-feedback-induced effects are dominant. On the contrary, under slow modulation there is a superposition of modulation and feedback effects, with the total output following the modulated current and an underlying transverse-mode behavior mainly determined by the optical feedback. A resonant behavior was observed for modulation periods close to the internal oscillation period. In this case, current modulation induces pulsing output intensity with single-mode or in-phase multimode behavior.  相似文献   

13.
We report on the thin film growth of 1,2,3,4,5,6,7,8-octahydroacridine (OHA) by matrix-assisted pulsed laser evaporation (MAPLE), starting from a frozen solution of 1% OHA dissolved in methanol and using a Nd:YAG laser emitting at 266 nm wavelength with fluences in the range 0.1–1 J/cm2. The optical properties were studied by spectroscopic-ellipsometry (SE), while Fourier transform infrared spectroscopy (FTIR), atomic force microscopy (AFM), and scanning electron microscopy (SEM) were performed for structure and surface morphology investigation. Second harmonic generation (SHG) capabilities of the thin films were investigated by using a tunable Ti:sapphire laser with maximum emission centred in near infra-red. The peak of emitted photons is located at 388 nm, therefore half the wavelength of the initial photons (776 nm). The semi logarithmic dependence of SHG intensity on incident power is almost linear, except the value obtained at highest power of incident photons. This value indicates a local changing of sample due to the heating produced by the high-power incident beam.  相似文献   

14.
A broad-banding technique for in-phase equal power divider is described. Detailed comparisons between the proposed variants of power dividers and the conventional in-phase power divider are also performed. Based on the 15-dB input and output return losses criteria, it is noted that a maximum impedance bandwidth of 44.3% for an amplitude error of ±0.9 dB and a phase error of ±1.8° can be achieved, for the first time, for divider with length more than 3λ/2 ring impedance transformer. A systematic design technique that relaxes some of the conventional constraint in in-phase hybrid ring equal power divider design, is also described  相似文献   

15.
Photosensitive chalcogenide glasses are very promising materials for pulsed holography, pulsed photolithography and pulsed optical information recording due to their exceptional sensitivity to pulsed light excitation. We present a comprehensive study of the dynamics of the pulse photoresponse of 0.3–1.0 μm thick chalcogenide glassy As50Se50 thin films using a transient-grating method. Both the decrease of transparency and a change of the dissolution rate were recorded after single Nd : YAG and ArF laser pulse and about (1–5)×1000 times larger energy was necessary to obtain the same changes using CW radiation. We show that when excited by a short laser pulse, two different time scales behavior and different intensity dependence of short- and long-time scale signals are present: the short-time signal behaves linearly with the input power but the long-time signal behaves quadratically with the input power. Such behavior reflects a fast electronic process followed by a slow structural rearrangement (the after-pulse effect). The obtained data indicate that the strong increase of photosensitivity following a short intense pulsed light excitation is due to a two-photon effect that aids the process of structural rearrangement as when two photons weaken or break the neighboring bonds, the probability of structural transformation increases significantly.  相似文献   

16.
In this paper, two novel broadband in-phase and out-of-phase waveguide power dividers with high isolation are presented. Based on the substrate-integrated waveguide (SIW) divider and SIW-to-waveguide transition circuit, two kinds of E-plane waveguide dividers have been implemented. Due to the features of in-phase and out-of-phase performances, the proposed waveguide dividers can provide much more flexibilities than that of conventional E-plane waveguide T-junction. A broadband phase and amplitude performances are achieved across the whole Ka-band owing to the wideband characteristic of the SIW divider and transition circuits. To minimize the size and loss of the divider, a compact and low-loss SIW-to-waveguide transition circuit has been developed using the antisymmetric tapered probes. Two prototypes of the Ka-band waveguide dividers, including the in-phase and out-of-phase types, have been fabricated and measured. Measured results show that the isolation, input return loss, output return loss, amplitude imbalance, and phase imbalance of the in-phase divider are better than 15.5, 13.1, 10.8, 0.4 dB, and 3.50, while those of the out-of-phase divider are better than 15.0, 13.4, 10.4, 0.5 dB, and 3.60, respectively, over the frequency range from 26.5 to 40 GHz. The measured results agree well with the simulated ones. Considering their wide bandwidth, high isolation, good port matching performance, and compact configuration, the two types of waveguide dividers can be good candidates for broadband applications in millimeter-wave waveguide systems.  相似文献   

17.
We describe a broadband (1 μm?1 mm) synchrotron radiation infrared source, pulsed each 20–180 nseconds and delivering about 1015 photons/sec/1% bandpass into f10 optics. The source size is diffraction limited. This source is thus 100–1000 times brighter than a 2000°K black body, very stable and capable of being used for calibration.  相似文献   

18.
NaYbF4:Tm@NaYF4:Yb/Er upconversion nanoparticles are synthesized and then integrated with light‐sensitive nitric oxide (NO) donors (Roussin's black salt) to construct a novel near‐infrared (NIR)‐triggered on‐demand NO delivery platform. This nanocompound can absorb 980 nm NIR photons, convert them into higher energy photons and then transfer the energy to the NO donors, resulting in an efficient release of NO. By manipulating the output power of the 980‐nm NIR light, NO‐concentration‐dependent biological effects for cancer therapy can be fine‐tuned, which is investigated and confirmed in vitro. High concentrations of NO can directly kill cancer cells and low concentrations of NO can act as a potent P‐glycoprotein (P‐gp) modulator to overcome multi‐drug resistance (MDR) if combined with chemotherapy.  相似文献   

19.
高超音速飞行器红外探测预警分析   总被引:4,自引:0,他引:4  
当目标飞行速度高于5Ma时,其辐射峰值波长位于短波红外的工作范围,并且具有辐射功率大、随时间变化快等显著特征,最适于被短波红外传感器探测.短波红外探测器将大气粒子反射的目标的入射光子转换为电信号.通过监测电信号幅度的变化来判断有无强辐射源趋近,从而将预警时间提前.  相似文献   

20.
电子俘获材料的红外最小可激发阈值   总被引:8,自引:2,他引:6  
在对撞脉冲锁模NdYAG激光器产生的1.064μm超短红外脉冲激光激励下,采用参考光和测量光同时入射的测量方案,利用一台可见光条纹相机进行了电子俘获材料CaSEu,Sm的红外最小可激发阈值的研究,结果表明:在可见光条纹相机最小可探测能量密度Jmin=8.3×10-10J/mm2的条件下,测得电子俘获材料CaSEu,Sm的红外最小可激发阈值优于4.8×10-9J/mm2。  相似文献   

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