基于CPLD的全帧型CCD图像传感器驱动系统设计

CCD芯片的驱动系统是数字航测相机的核心部分,它关系到整个相机的性能和技术指标.这里介绍了高分辨率全帧CCD芯片FTF4052M的内部结构和驱动时序.采用集成芯片设计该CCD芯片的驱动电路,并应用于数字航测相机系统.实验结果表明,该CCD驱动系统采用CPLD进行设计,具有性能好,功耗低,体积小的优点,满足了数字航测相机系统的设计要求.     

一种可调线阵CCD信号采集处理系统

在线阵CCD信号采集系统中,实时更改CCD芯片的驱动脉冲频率和光积分时间可以提高整个系统的测量精度,为此设计了一种基于FPGA的线阵CCD信号采集处理系统,此系统可以灵活地调节CCD驱动波形,并可以根据CCD的输出信号调整FIR数字滤波单元的截止频率.系统通过USB2.0接口接收PC机的设定参数对CCD驱动单元和FIR数字滤波单元进行配置,然后将处理数据上传至PC机.实验结果表明:系统控制灵活、集成度高,能够满足线阵CCD信号采集系统多种应用场合的需要.     

高密度模块化TDI CCD成像系统设计

为提升遥感相机的高密度组装技术,采用厚膜集成电路技术设计了高集成度的TDI CCD成像系统,并对该成像系统中的具体设计做了详述。首先TDI CCD焦平面通过机械拼接方式拼凑成可复制的单元。然后,通过三极管射极跟随器增强CCD输出图像信号强度传送给模拟前端芯片LM98640中转换成14 bit的数字信号,再传给现场可编程门阵列芯片XC5VLX50T-1FFG1136C缓存和整合处理。最终,通过TLK2711高速LVDS输出芯片传输给数据采集卡并在计算机上成像。该成像系统中所有的驱动信号和处理时序都是通过现场可编程门阵列产生的,计算机可以通过RS422通信总线对成像系统进行控制和部分参数修改。该系统中的驱动电路和CCD二次电源电路采用厚膜集成电路技术设计,提高了系统的集成度。实验结果表明:整个系统基于厚膜技术,驱动电路PCB电路板减少了2/3的面积,同时采用了机电热一体化的设计,实现了相机的高密度组装。该系统总数据输出速度达到3.6 Gbps,饱和输出图像信噪比52.6 dB。     

TDI CCD相机系统设计

采用Kodak CCD芯片研制了一整套完整的具有TDI功能的CCD相机系统.分析了CCD相机TDI的工作原理,运用CPLD编写了Pixel驱动,AD转换,数据锁存等时序,采用USB2.0进行数据传输,编写图像采集及相机控制程序.在移动轨道上进行TDI扫描实验,采集图像信息,并对结果进行分析.     

基于FPGA的面阵CCD驱动及快速显示系统的设计实现

为了实现面阵CCD传感器采集的数据在TFT液晶屏上的快速显示,提出一种基于现场可编程逻辑门阵列(FPGA)的快速显示系统。利用FPGA构建软核处理器(NiosII),采用专用IC模块AD9929作为CCD驱动与处理芯片,并依据TFT液晶屏和芯片AD9929的接口时序设计驱动电路,利用DMA技术实现采集数据的快速显示。电路的测试结果表明,利用该方法可以把面阵CCD传感器采集的数据快速显示在TFT液晶屏上,在工业现场监视场合具有广泛的实用性。     

CCD成像系统的模拟自校图形设计

目前航天遥感领域CCD自校图形都是数字式的,仅能在数字链路上检测FPGA逻辑模块和图像数据传输模块,而视频AD模块一直未能实现在轨检测。提出了一种驱动芯片+数模转换芯片的架构,搭建了易行可靠的电路,仿照CCD视频信号格式,并与CCD信号通过电容直接耦合到视频AD输入端。选用FPGA模块来产生与CCD像素时钟同频的逻辑信号,然后输出给驱动芯片EL7156。驱动芯片的低压输出取决于FPGA控制的数模转换芯片的模拟输出,高压输出不变,从而实现灰度变化。当CCD正常工作时,FPGA模块控制模拟自校图形输出为高阻状态,对CCD工作影响微乎其微。试验结果表明:模拟自校图形能与CCD视频信号互不干扰,并可与之分时送入视频AD模块,达到检测整个CCD成像系统工作状态的目的。该电路可检测多个视频AD模块,简单易行且占用很小的PCB空间,所选芯片具有航天应用可靠性。     

基于FPGA和USB2．0的高速CCD声光信号采集系统

设计一个基于FPGA和USB 2.0接口控制芯片的高速线阵CCD声光信号采集系统.FPGA是硬件电路系统的核心,主要完成线阵CCD时序脉冲的产生.专用A/D芯片的采样控制以及FIFO缓存数据的片内配置,并通过USB 2.0接口与上位机实现通信.讨论并开发了USB 2.0接口控制芯片的固件程序、USB驱动程序及上位机应用程序.实验结果表明,系统达到了设计要求,可广泛应用于相关领域的信号检测.     

基于FPGA的LED显示屏逐点检测系统的设计与实现

论述了LED显示屏逐点检测系统的工作原理,主要包括带侦测功能的LED驱动芯片的侦测原理、错误侦测数据的读取以及数据的传输.介绍了一种基于FPGA+MCU的LED显示屏逐点检测系统的实现方案,详细阐述了该系统是如何接收错误侦测数据以及把该数据存到SRAM中,再根据上位机的请求把侦测数据传送给上位机;分析了FPGA内部各功能模块和其他电路模块的作用及工作过程.     

基于FPGA的空间光学遥感器CCD信号检测系统设计

为了精确监视空间光学遥感器多光谱TDI CCD 控制单元的工作状态,测试其性能和可靠性,提出了基于FPGA的一种新型CCD信号检测系统.该系统利用FPGA对48路控制CCD驱动信号和31路直流偏置信号进行并行实时逻辑分析及检测,同时,经由RS232串行通讯接口传输到上位机,输出检测结果.FPGA内部集成了A/D控制模块、逻辑判断模块和UART模块.实验结果表明,该方法可实时准确监视TDI CCD 控制单元的工作状态,适用于空间光学遥感多光谱TDI CCD的检测需要.     

基于STM32的线阵CCD图像采集系统

本文采用STM32F103作为主控芯片,利用该芯片产生线阵CCD驱动时序,通过USB技术进行数据传输,使用Qt+Libusb进行上位机软件开发,实现了一个驱动时序稳定,传输速率高、可即插即用,跨平台的USB线阵CCD图像采集系统。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.