单次大气散射效应对星载激光测高仪接收脉冲回波的影响

大气散射效应是影响星载激光测高仪接收脉冲回波的重要因素。根据星载激光测高仪接收脉冲回波信号与大气响应函数之间的关系式,在忽略大气多次散射效应的条件下,通过分析散射激光束的几何轨迹和散射概率,推导出单次大气散射激光脉冲和接收脉冲回波的特征参数的数学解析式。以地球科学激光测高仪系统参数为输入,采用数值仿真分析的方法,模拟了大气散射介质分布、激光指向角和目标倾斜角对接收脉冲回波信号特征参数的影响。结果表明,若散射介质的高度和粒子半径范围分别为0.2~6 km和0~120 m,则其对接收脉冲回波的能量、重心和均方根脉宽的影响最大值分别超过15%、250 cm和800 cm。随着激光指向角或目标倾斜角的增加,接收脉冲回波的能量基本不产生影响,但是其重心和均方根脉宽近似呈线性增加趋势。同时,采用高斯拟合方法可以减小大气散射效应对接收脉冲回波的影响。所得结论对于接收脉冲回波的数据处理与分析以及激光测距精度的评估具有一定的指导意义。     

同轴零盲区米散射激光雷达系统仿真与设计

针对传统米散射激光雷达近距离探测盲区大的缺陷,设计一款同轴的米散射激光雷达气溶胶探测系统。首先,通过美国标准大气模型和激光雷达系统参数对系统回波信噪比进行了数值模拟研究。主要讨论激光脉冲能量、雷达接收口径、脉冲累加数对回波信噪比的影响。仿真结果表明,提高发射激光脉冲能量、增加雷达接收口径、增加脉冲累加数都可以提高回波信噪比,其中,增加雷达接收口径对回波信噪比的提升最为明显。其次,设计平衡探测器对散射回光进行光电转换。最后,基于系统结构搭建了可移动式米散射激光雷达实验平台,对大气气溶胶进行初步探测,试验结果表明：提高发射激光脉冲能量对探测距离的影响不大,该系统的有效探测距离在约10 km;平衡探测法相对于直接探测法信噪比提高了2.7倍;系统的同轴设计使得近距离探测盲区几乎为0,空间分辨率可以达到120 m。     

水下激光回波信号采集系统的设计与实现

针对水下激光探测遇到的特殊问题,设计了一种水下脉冲激光回波信号采集系统。信号前端放大电路采用AD603可变增益放大器,用于抑制水体后向散射并放大激光回波信号;数据采集及缓冲电路采用ADC08200配合FPGA实现,简化了电路设计结构,并使系统具备可扩展性;数据传输及系统控制基于C8051F单片机实现。整个系统工作稳定,已用于实际系统中。     

浑浊水体激光后向散射特性仿真与实验研究

由于水体的吸收和散射作用,光束能量在传播的过程中会产生衰减,激光脉冲会被展宽,制约着水下激光雷达的探测范围和探测精度。文中以浑浊水体环境下水下弱小目标探测为应用背景,建立了水下光子传播的蒙特卡洛仿真模型,模拟了不同衰减系数和散射率的水体后向散射回波信号,并对相应的水体后向散射回波信号变化趋势进行了分析。仿真结果表明：随水体衰减系数的增加,近场水体激光回波信号接收光子数逐渐增多;随水体散射率的增加,回波信号光子消亡速度逐渐降低。开展了不同浊度下的激光雷达回波信号的测试实验,实验结果表明：随水体衰减系数的增加,水体激光后向散射回波幅度逐渐增高,脉冲宽度逐渐展宽。在进行浑浊水体水下弱小目标探测时,随水体衰减系数的增加,应通过逐渐减小激光器能量或接收系统增益来增强水体回波与目标回波之间的差异,以此提高浑浊水体水下弱小目标探测的信噪比。实验验证了理论与仿真结果,为浑浊水体环境下水下弱小目标激光探测系统在不同水质下的激光能量选取、接收系统增益设计等提供理论支撑。     

微脉冲激光雷达探测信号的数值模拟计算

本文对微脉冲激光雷达探测的大气后向散射回波信号进行了数值模拟计算，计算结果得到了实验的验证，并就激光脉冲能量、发射的激光脉冲数、滤光片半宽度以及接收视场等系统参数对微脉冲激光雷达探测回波信号信噪比的影响进行了较为详细的分析和讨论。     

脉冲激光引信烟雾后向散射特性研究

激光引信的探测性能容易受到烟雾的干扰,引起虚警和漏警。为研究脉冲激光引信在烟雾环境中的传输特性,基于Mie散射理论和Monte Carlo方法,建立脉冲激光引信烟雾后向散射模型,仿真905 nm脉冲激光在不同烟雾环境下的回波特性,进行相关试验,对比仿真归一化峰值强度与实测峰值电压,进行相关性分析,验证模型的准确性。分析不同烟雾质量浓度、烟筒长度与距离下脉冲激光引信在烟雾环境中的后向散射特性,得到不同条件对回波的影响规律,研究结果可为脉冲激光引信抗烟雾干扰提供支撑。     

激光大气传输特性及其回波信号仿真研究

基于Rayleigh散射和Mie散射理论,利用已有的中光谱分辨率大气辐射传输模式(MODTRAN)数据及参考模式大气(RMA)数据资料,对355nm、2μm、10μm激光信号的散射、消光、透射等大气传输特性进行了仿真和比较。同时利用高斯函数分析了355nm波长处的Rayleigh和Mie回波信号光谱分布,并模拟了不同高度处的大气回波信号光谱。结果表明:与2μm、10μm相比,355nm波长的激光信号的散射特性较好;其在大气中传输时,衰减严重,适用于晴空大气;该波段的多普勒测风激光雷达接收到的回波信号在底层以Mie信号为主,高层以Rayleigh信号为主;综合考虑各种因素,选用355nm作为星载多普勒测风激光雷达的工作波长。     

机载双波长米散射激光雷达大气回波信号与信噪比的模拟计算

为了研究机载双波长米散射激光雷达的技术参数对其探测性能的影响,为该激光雷达的设计与研制提供理论分析依据,使用合适的大气消光模式和机载米散射激光雷达方程,对其接收的大气后向散射回波信号以及信噪比进行了模拟计算,讨论了几何重叠因子和不同消光模式对回波信号的作用,分析了激光脉冲能量、累积激光脉冲数、接收视场、滤光片半宽度等技术参数对信噪比的影响.结果表明设计的机载激光雷达完全可以进行10 km高度以下大气气溶胶和云的探测.     

激光主动成像系统同步控制板的设计与实现

激光主动成像系统是以激光为光源,对远、小、暗或者恶劣天气条件下的目标进行照明,利用CCD摄相机接收目标的回波信号最终成像,从而实现对目标的跟踪、探测和识别。为了克服主动成像系统的大气后向散射,提高成像质量,利用单片机和CPLD设计了距离选通同步控制板。利用同步控制板可产生精度为1 ns的选通控制脉冲,实现了激光器与摄相机的同步控制,以时间的先后分开不同距离上的后向散射和目标反射回的有用信号。仿真和实验结果证明:该控制板能确保目标的回波信号刚好在摄相机选通工作的时间内到达摄像机并成像。     

基于小波分析的脉冲激光回波信号分离方法北大核心CSCD

针对脉冲激光引信易受战场烟尘粒子后向散射回波干扰的问题,提出了一种基于小波分析的激光回波信号分离方法。通过Mie散射理论和蒙特卡洛方法,建立烟尘环境脉冲激光传输与接收理论模型,模拟含有噪声的激光回波信号。在回波信号分离过程中,首先通过基于阈值的小波去噪方法,去除激光回波信号噪声。再采用峰锐化算法提高回波信号的峰分辨率,解决波峰重叠度过高的问题。最后,对锐化后的回波信号进行连续小波变换,得到波峰峰位参数,并根据峰位值求解出最佳高斯拟合波形,得到峰强及峰宽信息。实验结果表明,利用连续小波变换求解出的回波峰位值偏差在7.9%之内,通过高斯函数拟合得到的峰宽值误差小于2.71%,峰强值误差小于1.82%。该方法通过对烟尘环境脉冲激光回波进行解析实现目标反射回波和烟尘后向散射回波的有效分离,可为实际战场环境脉冲激光引信抗烟尘干扰提供理论参考。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.