基于SP4T开关的4位MEMS开关线式移相器设计

设计了一款4位MEMS开关线式移相器,由SP4TMEMS开关和微带传输线构成,工作于X波段。单刀四掷(single pole 4throw,SP4T)开关用于切换两条不同电长度的信号通道,即参考相位通道和延迟相位通道。每个SP4T开关包含4个悬臂梁接触式RF MEMS串联开关。介绍了4位MEMS开关线式移相器的总体设计,并给出了其关键部件SP4T开关和相位延迟线的设计细节。采用ADS软件仿真分析了器件的电气性能。仿真分析得到:SP4T开关在中心频率10GHz处的回波损耗为-36dB,插入损耗约为0.18dB;移相器各相位的回波损耗均低于-15dB,插入损耗为-0.8～-0.4dB。这种射频MEMS移相器具有小型化、低功耗和高隔离度的优点。     

单刀双掷RF MEMS开关的研究与设计

介绍了一种基于横向金属接触的DC-5GHz单刀双掷RF MEMS开关的研究与设计．横向金属接触开关包括了一套有限的共面波导（FGCPW）传输线和左右摆动的悬臂梁．为了降低开启电压,设计了一种曲折型的折叠梁结构,通过理论分析与仿真实验验证了该结构的可行性,并利用MetalMUMPs工艺加以实现．测试结果显示,该开关在5GHz处的插入损耗为0．8dB,回波损耗大于20dB,隔离度为40dB．测得最低开启电压为33V．     

X-波段MEMS单刀双掷开关的研究

利用X-波段MEMS单刀单掷膜开关和成熟的微带线技术设计了一种X-波段MEMS单刀双掷膜开关,其模拟结果为;阈值电压为19V左右,工作频率为8～12GHz,在中心频率（10GHz）处,导通开关的插入损耗为-0．2dB,截止开关的隔离度为-21dB,开关的回波损耗为-43dB。     

多晶硅衬底上的RF MEMS开关

在微机械开关与硅IC工艺设计和兼容方面进行了改进,获得了一种可与IC工艺兼容的RF MEMS微机械开关.采用介质隔离工艺技术把这种RF MEMS微机械开关制作在绝缘的多晶硅衬底上,实现了与IC工艺兼容;采用在金属膜桥的端点附近刻蚀一些孔的优化方法,降低了RF MEMS微机械开关的下拉电压.用TE2819电容测试设备测试开关的电容,测得开关的开态电容、关态电容和致动电压分别为0.32pF、6pF和25V.用HP8753C网络分析仪对RF MEMS微机械开关进行了RF特性测试,得出RF MEMS微机械开关在频率1.5GHz下关态的隔离度为35dB,开态的插入损耗为2dB,用示波器测得该开关的开关速度为3μs.     

一种新型RF MEMS 单刀双掷开关的设计与仿真

本文介绍了一种利用单驱动电压控制通路选择的新型RF MEMS单刀双掷开关,利用三维仿真软件Ansoft HFSS和ANSYS进行仿真和优化设计该开关的性能。仿真结果表明：驱动电压为22V,开关时间为22μs,在中心频率30GHz处,开关处于down状态下的插入损耗为0.42dB,回波损耗为43dB,隔离度为29dB;而当开关处于up状态的插入损耗为0.53dB,回波损耗为19dB,隔离度为28dB,该开关的性能仿真和优化设计达到理想情况。     

改进K型单刀四掷射频MEMS开关

针对射频器件小型化以及5G通信发展的需求，设计了一款射频微机电系统（RF-MEMS）单刀四掷开关。该开关由一个改进型K型功分器和六个单刀单掷开关级联构成，并基于硅基MEMS工艺进行制造。其中，改进型K型功分器由多个Y型功分器串并联构成。改进的开关各端口具有插入损耗小和隔离度高的特点。最终流片的测试结果显示：该单刀四掷MEMS开关的插入损耗优于2.8 dB，隔离度优于29 dB。     

单刀双掷RF MEMS开关的研究与设计

介绍了一种基于横向金属接触的DC-5GHz单刀双掷RF MEMS开关的研究与设计.横向金属接触开关包括了一套有限的共面波导(FGCPW)传输线和左右摆动的悬臂梁.为了降低开启电压,设计了一种曲折型的折叠梁结构,通过理论分析与仿真实验验证了该结构的可行性,并利用MetalMUMPs工艺加以实现.测试结果显示,该开关在5GHz处的插入损耗为0.8dB,回波损耗大于20dB,隔离度为40dB.测得最低开启电压为33V.     

驱动与信号隔离的单刀双掷RF MEMS开关

设计了一种基于横向金属接触的DC-5 GHz单刀双掷RF MEMS开关,该开关包括一套有限地共面波导(FGCPW)传输线和左右摆动的悬臂梁。利用绝缘的介质层实现了驱动信号与射频信号的隔离,提高了开关的性能。根据开关的拓扑结构,提出相应的等效电路,并据此实现开关射频性能的优化设计。开关利用MetalMUMPs工艺实现,测试结果显示,该开关在5GHz的插入损耗为0.8dB,回波损耗大于20dB,隔离度为40dB。测得开关的开启电压为59V。     

砷化镓基毫米波MEMS开关表面工艺研究

研究了砷化镓基毫米波MEMS开关的表面工艺方法,包括MEMS开关的工艺流程中的牺牲层技术、结构层技术、触点技术、薄膜电阻技术。重点阐述了以光敏聚酰亚胺作牺牲层和以电镀金作结构层的工艺制作方法。形成了砷化镓RF MEMS开关表面工艺流程,制作出了RF MEMS开关样品。开关驱动电压为60 V,35 GHz时的插入损耗<0.2 dB,隔离度>18 dB。     

高隔离度宽频段组合式RF-MEMS开关的设计

接触式与电容耦合式两类RF MEMS开关各自在一定的频段内,都具有较高的隔离度,但仍然很难满足微波控制系统中对高隔离度的要求.为了获得全波段高隔离度RF MEMS开关,单元开关很难达到要求,在此目标要求下,提出了组合式RF MEMS开关的设计,分别利用HFSS软件对各单元进行结构参数优化,再将两者集成在一起,得到的组合式RF MEMS开关,这种组合式开关在0～20 GHz时隔离度都高于-60 dB,在(≤5 GHz),隔离度高于-70 dB,这是一般单元开关及其他半导体固态开关所无法企及的,而且,在DC～20 GHz范围内,开关的插入损耗小于-0.20 dB,而且并没因隔离度的提高,牺牲了插入损耗.     

A Novel Unit Cell for Active Switches in the Millimeter-Wave Frequency Range

This paper presents a novel transistor unit cell which is intended to realize compact active switches in the high millimeter-wave frequency range. The unit cell consists of the combination of shunt and common gate transistor within a four-finger transistor cell, achieving gain in the amplifying state as well as good isolation in the isolating state. Gate width-dependent characteristics of the unit cell as well as the design of actual switch implementations are discussed in detail. To verify the concept, two switches, a single pole double throw (SPDT) switch and single pole quadruple throw (SP4T) switch, intended for the WR3 frequency range (220–325 GHz) were manufactured and characterized. The measured gain at 250 GHz is 4.6 and 2.2 dB for the SPDT and SP4T switch, respectively. An isolation of more than 24 dB for the SPDT switch and 12.8 dB for the SP4T switch was achieved.     

Single-pole-four-throw switch using high-aspect-ratio lateral switches

A single-pole-four-throw (SP4T) switch using a high-aspect ratio lateral metal-contact micromachined switch is reported. This simplified SP4T micromachined switch is developed using deep reactive ion etching fabrication technology based on silicon-on-insulator wafer. The measurement results of the SP4T switch show an insertion loss of less than 1 dB and isolation of 30 dB from DC to 6 GHz.     

一种高功率低谐波单刀三掷开关组合设计

基于PIN二极管开关工作原理,提出了一种双波段高功率低谐波单刀三掷开关组合的设计方法。开关组合集成电源变换、控制电路与两个单刀三掷开关,可实现对六个通道的控制。通过增加滤波电路的方式,使得每个通道具有低谐波特性。该开关组合在所设计的频率范围内,性能指标优良,VSWR小于1.3,低波段插入损耗小于0.4 dB,高波段插入损耗小于0.85 dB,承受功率均达到4 kW,10%占空比,具有良好的二次谐波及三次谐波特性。     

毫米波串联接触式RF MEMS开关的设计与制造

设计了一种应用于毫米波波段的串联接触式RF MEMS开关。为了在毫米波波段获得较高的隔离度,通过使用短截线结构,以降低输入输出端口的耦合电容。为了获得可靠的金属接触,设计了一种改进型的"蟹形"桥结构。测试结果显示,在30GHz,插入损耗为-0.3dB,隔离度为-20dB。在DC～40GHz的频率范围内,插入损耗优于-0.5dB,隔离度优于-20dB。所设计的串联接触式RF MEMS开关,可应用于20～40GHz的频率范围内。     

Some Designs Of X/sub L/ Band Diode Switches

X/sub L/-band waveguide switches, using PIN diodes for the switching elements, were developed in the SPST, SP2T, SP4T, and SP8T configurations. At the frequency of 7.75 GHz, for which they were tuned, they exhibited insertion losses on the average of 0.1, 0.4, 0.6, and 1.1 dB, respectively. In all cases, the signal going out of each switch port when turned OFF decreased in excess of 29 dB. The bandwidth of each switch, whose values are indicated, is narrower for the switch which has the larger number of ports or which contains diodes of lower capacitance. Semiempirical formulas are developed which predict performance characteristics of the SPST switch in particular.     

1~26.5GHz GaAs PIN单刀单掷开关单片

采用GaAs PIN二极管,完成1~26.5 GHz的单刀单掷开关单片的设计、制作。SPST开关单片带内插损小于0.5 dB,驻波优于1.1,隔离度大于27 dB,在10~26.5 GHz,隔离度大于37 dB。开关单片采用MOCVD生长的GaAs纵向PIN二极管材料结构,76 mm GaAs圆片工艺加工制作。     

A low-loss single-pole six-throw switch based on compact RF MEMS switches

A low-loss single-pole six-throw (SP6T) switch using very compact metal-contact RF microelectromechanical system (MEMS) series switches is presented. The metal-contact MEMS switch has an extremely compact active area of 0.4 mm /spl times/ 0.3 mm, thus permitting the formation of an SP6T MEMS switch into the RF switch with a total area of 1 mm/sup 2/. The MEMS switch shows an effective spring constant of 746 N/m and an actuation time of 8.0 /spl mu/s. It has an isolation loss from -64.4 to -30.6dB and an insertion loss of 0.08-0.19 dB at 0.5-20 GHz. Furthermore, in order to evaluate RF performances of the SP6T MEMS switch, as well as those of the single-pole single-throw RF MEMS series switch, we have performed small-signal modeling based on a parameter-extraction method. Accurate agreement between the measured and modeled RF performances demonstrates the validity of the small-signal model. The SP6T switch performed well with an isolation loss from -62.4 to -39.1dB and an insertion loss of 0.19-0.70 dB from dc to 6 GHz between the input port and each output port.     

隔离度大于95dB的Ku波段微带型开关

研究了具备高隔离度性能的Ku 波段基于PIN 二极管的微带型开关电路,通过采用含有多个子单元电路的拓扑结构以及合理优化子单元电路参数,解决了微带型开关在微波频段难以实现高隔离度的难题. 所研制的开关电路在15.75~16.25GHz频段范围内,隔离度大于95dB,插入损耗小于4dB,输入端S11均小于-12dB,输出端S22均小于-20dB, 电路体积仅为34mm×11mm×5mm.     

Design of a wideband multi-standard antenna switch for wireless communication devices

A wideband Low Power Single Pole 6-Throw (SP6T) antenna switch has been designed for GSM/DCS/802.11b mobile standards using a newly improved architecture and fabricated using a pseudomorphic depletion mode 0.18 μm HEMT GaAs process. The switch exhibits less than 1 dB insertion loss and isolation performances from up to 53 dB at 0.8 GHz down to 42 dB at 2.5 GHz. The circuit DC power consumption is less than 500 μW in full power transmission condition and makes it suitable for use in mobile terminals like mobile phones or PDAs. The paper presents simulation results validated by experimental measurements on an IC prototype.