精准农业观测高数值孔径短波红外成像光谱仪光学系统

研究了一种在1.0~2.5 m短波红外波段上可用于机载精准农业观测的成像光谱仪光学系统。研究分析了用于精准农业探测所需的成像光谱仪科学性能参数,着重改进了Dyson成像光谱仪系统并获得了完善的消像散条件,使得其各组成部分在沿光轴方向和垂直光轴方向均具备足够的空间,确保了狭缝、探测器和光学镜片的光机结构放置。设计成像光谱仪具备良好光学性能,光学系统F数为1.5,视场28,狭缝长度25 mm,光谱分辨率12.7 nm,空间分辨率1 mrad,系统像差得到充分校正,公差比较宽松。该系统的研究将为精准农业遥感应用提供一种思路。     

大视场小F数同轴Offner结构热红外光谱仪的设计

热红外成像光谱仪广泛应用于工业研究、环境监测以及自然资源探测等多个领域。随着大面阵红外探测器技术的发展,大视场大相对孔径热红外光谱仪已成为遥感领域新的发展方向。本文介绍了一种基于凸面光栅的同轴Offner结构,对常规Offner结构进行改进,仅使用一块大凹面反射镜,在凸面光栅的位置插入带有负像散的校正透镜。设计验证结果表明,这种结构在热红外波段具有非常优异的表现,较传统Offner结构能实现更大的视场,更小的F数。最后利用这种结构设计了60 mm狭缝视场,F数为2的热红外光谱仪,其成像弥散斑直径小于5μm,MTF达到衍射极限。该热红外光谱仪系统结构紧凑,非常适合航天航空遥感的应用。     

编码孔径光谱成像仪中凸面闪耀光栅的研制

针对一款基于DMD的光谱维编码Offner光谱成像仪对凸面闪耀光栅的性能要求,提出了一种凸面闪耀光栅的宏观-微观一体化优化设计方法,利用三维偏振光追迹算法有机融合了宏观层面的Offner光学系统设计与微观层面的凸面闪耀光栅槽型设计。介绍了编码孔径Offner光谱成像系统的组成和工作原理,并结合系统的使用要求设计了一款平均衍射效率为85.47%的中波红外凸面闪耀光栅。在此基础上,采用超精密单点金刚石车床成功制备了曲率半径为120 mm、周期为99.945 μm、闪耀角为1.1783°、槽深为1.834 μm的凸面闪耀光栅。测试结果表明,在3~5 μm光谱范围内,最大衍射效率为93.46%,平均衍射效率为84.29%,与理论设计值较为吻合,验证了凸面闪耀光栅设计方法的有效性。     

基于Offner凸面光栅星载CO2成像光谱仪光学系统设计

星载CO₂成像光谱仪具有图谱合一、高空间分辨率、高时间分辨、非接触和长期监测的优点,已成为监测全球温室气体变化的重要手段之一。为解决大视场因入射狭缝较大,信噪比低,成像质量不佳的问题,文中对Offner成像光谱仪的光学系统初始结构设计提出了一种新方案。该方案基于在30 mm狭缝处发出的子午光线、弧矢光线在中心波长处相切,提高入射光线在整个光谱范围内的利用率。利用光学设计软件,设计在1594~1619 nm波段范围内,F数为2.5,光谱系统分辨率为0.1 nm的成像光谱仪。设计结果表明,点列图均方根（RMS）半径小于5 μm,系统在33 lp/mm处的传递函数优于0.7。此外,该系统采用像元合并（即扩展像元）的方法,进一步提高光谱信号的探测强度,该设计方案能够满足应用于星载CO₂成像光谱仪大视场、高光谱分辨率和高信噪比的遥感探测需求。     

双狭缝高分辨率紫外成像光谱仪光学系统设计

在机载和星载领域,尤其是用于观测科学目标短期变化的应用领域,遥感平台逐步要求光谱仪在实现高分辨率的同时缩短重访时间。研究了基于Offner结构的紫外成像光谱系统,设计了一种工作波段为250~500nm、双狭缝均长50mm、双入射狭缝间隔为37mm、光谱分辨率为0.3nm的双缝高分辨率紫外成像光谱仪,并对设计结果进行了分析与评价。结果表明,这种紫外双缝成像光谱仪在41.67lp·mm-1处的传递函数达到0.76以上,实现接近衍射极限的优良成像质量,同时大大缩短了系统重访时间,提高了系统的信噪比,在保证高分辨率的同时缩小了系统体积和扫描镜口径,适合机载和星载遥感应用。     

新型大相对孔径Schwarzschild光谱成像系统设计

为满足高分辨率大相对孔径宽波段高光谱成像仪的要求,克服Offner光谱成像系统中凸面光栅加工的困难和改进型Czerny-Turner光谱成像系统相对孔径小的缺点,提出一种新型的基于平面光栅的大相对孔径Schwarzschild光谱成像系统,根据反射球面罗兰圆理论分析了该系统的像散校正方法,利用Matlab软件编制了初始结构快速计算程序。作为实例,设计了一个相对孔径为1/2.5,工作波段为400~1000nm的Schwarzschild光谱成像系统。首先利用自己编制的Matlab程序计算初始结构参数,再利用Zemax-EE光学设计软件对该光谱成像系统进行光线追迹和优化设计,并对设计结果进行分析。结果表明,在整个工作波段内,点列图弥散斑的尺寸小于13μm,实现了大相对孔径宽波段像差的同时校正,在宽波段内获得了良好的成像质量,满足设计指标要求,也证明了这种新型Schwarzschild光谱成像系统是可行的,其在航空和航天高光谱遥感领域具有广阔的应用前景。     

空间高光谱成像仪的光学设计

空间高光谱成像仪是现代空间遥感器的新型载荷,设计的空间高光谱成像仪光学系统由前置望远系统和光谱成像系统两部分组成,对前置望远系统和光谱成像系统分别设计,再进行组合优化。前置望远系统采用离轴三反结构,在增大幅宽、提高成像质量的同时减小高光谱成像仪光学系统的畸变。为了保证光学系统结构的紧凑,前置望远系统采用视场分离的方式设计,进一步提高了光学系统的分辨率。凸面光栅是现代光栅刻划技术的最新成果,光谱成像系统采用次镜为凸面光栅的Offner光栅光谱仪,实现了光谱成像系统的高分辨率与小型化。组合优化后的高光谱成像仪光学系统幅宽大、体积小、成像质量好、光谱分辨率高、光谱通道数多,全视场全谱段MTF在Nyquist频率下高于0.7,成像弥散圆80%的能量集中在15 m范围内,小于探测器18 m的像元尺寸,均高于系统技术指标要求。     

不同光栅常数下同心长波红外成像光谱仪对比

为对比分析不同光栅常数下Offner光栅和Dyson光栅光谱仪的性能差异,推导了两种光谱仪结构的衍射角公式,获得其衍射特点,并在F数为2.5,工作波段为8～12 m,光谱分辨率15.6 nm,光栅常数分别为100 m、50 m下,借助ZEMAX软件对这两种结构进行了优化设计。结果表明:较大光栅常数下,两者都能理想成像,Offner光谱仪体积约为Dyson的7倍,质量约为Dyson的1/13;较小光栅常数下,Dyson光谱仪仍可理想成像,而Offner必须加入二次非球面镜并进行离轴,才能满足系统对像质及光谱分辨率的要求,此时,Offner光谱仪体积约为Dyson的7倍,重量约为Dyson的1/11。设计结果表明,两种同心结构在加工难易度、体积、重量方面各有优劣,在光谱仪选型工作中,可根据具体情况进行取舍。     

噪声等效光谱辐亮度定标系统的性能测评

噪声等效光谱辐亮度（NESR）是代表红外遥感器极限探测能力的关键性指标。高灵敏红外遥感器的NESR定标需要高稳定、高均匀和充满视场的红外辐射光源,其光谱辐亮度的不确定度应当显著低于红外遥感器的NESR。针对一种新型的级联积分球型大孔径NESR定标系统,开展了NESR定标不确定度的实验测试研究,评定了绝对光谱辐亮度的量值溯源、积分球输出的均匀性和稳定性等11种不确定性因素的影响。测试结果表明,在规定的303~308 K亮温范围内,主积分球光谱辐亮度的相对不确定度优于0.34%,6~15 μm波段的NESR定标不确定度优于0.1~0.0037 μW·cm?2·sr?1·μm?1,验证了新型定标系统应用于高性能红外遥感器NESR定标的可行性。     

Offner凸面光栅超光谱成像仪的设计与研制

传统的平面或凹面光栅分光的光谱成像仪受像差校正的限制,数值孔径较小,能量利用率低,难以实现高的光谱和空间分辨率.用一块凸面光栅代替全反射式Offner中继系统中的凸面反射镜.构成的Offner凸面光栅超光谱成像仪具有固有像差小的优点.凸面光栅的制作采用全息记录的方法.通过优化设计全息记录参数和光栅槽形,可获得高的衍射效率.优化设计并研制得到的凸面光栅超光谱成像仪结构紧凑、像差校正能力强、数值孔径大、集光本领高,可同时获得高的光谱和空间分辨率.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.