一种新型硅基PT/PZT/PT夹心结构的电性能研究

以无机锆盐为原料,用溶胶－凝胶（Ｓｏｌ－Ｇｅｌ）法成功地在Ｐｔ／Ｔｉ／ＳｉＯ／Ｓｉ衬底上制备出一种新型Ｐｂ－ＴｉＯ３／Ｐｂ（Ｚｒ０．５３Ｔｉ０．４７）Ｏ３／ＰｂＴｉＯ（ＰＴ／ＰＺＴ／ＰＴ）夹心结构。这种结构对于ＰＺＴ的晶化有很好的促进作用,其最终的退火温度为７００℃Ｃ－Ｖ特性,介电步率响应,漏电等电性能测试表明这一新型夹心结构具有良好的铁电和介电性能。     

单晶、薄膜及其它功能材料

４单晶、薄膜及其它功能材料９５０４０用ＣＶＤ法在蓝宝石基片上合成Ｂｉ＿４Ｔｉ＿３Ｏ＿（１２）外延膜─—增本博．粉体粉末冶金，１９９３；４０（７）＝６９３～６９６采用Ｂｉ（Ｃ＿６Ｈ＿５）＿３－Ｔｉ（ｉ－Ｃ＿３Ｈ＿７Ｏ）＿４及Ｂｉ（ｏ－Ｔｏｌ）＿３－Ｔｉ...     

CSD法制备PZT/Bi2Ti2O7薄膜的研究

用化学溶液分解（ＣＳＤ）法制备Ｐｂ（Ｚｒ０．５Ｔｉ０．５）Ｏ３（ＰＺＴ）和Ｂｉ２Ｔｉ２Ｏ７薄膜,利用Ｘ－射线衍射技术研究了以Ｂｉ２Ｔｉ２Ｏ７为籽晶层的ＰＺＴ薄膜的结晶性。实验结果表明,以高（１１１）取向的Ｂｉ２Ｔｉ２Ｏ７为籽晶层可获得高结晶性的ＰＺＴ薄膜,在７５０℃退火１０ｍｉｎ的ＰＺＴ／Ｂｉ２Ｔｉ２Ｏ７薄膜具有单一的钙钛矿相。     

涡街流量计用压电陶瓷材料的研究

在分析Ｐｂ（Ｔｉ，Ｚｒ）Ｏ３＋ＢｉＦｅＯ３＋Ｓｒ（Ｃｕ１／３Ｎｂ２／３）Ｏ３以及Ｐｂ［（Ｚｎ１／３Ｎｂ２／３）（Ｔｉ，Ｚｒ）］Ｏ３系列压电性能的基础上，通过调整系统中的锆钛比，得到压电性能参数满足要求的涡街流量计用压电陶瓷材料。     

硅基PT/PZT/PT夹心结构的性能研究

在已有的以夫机锆盐为原料,用Ｓｏｌ－Ｇｅｌ方法制备硅基Ｐｂ（Ｚｒ０．５３Ｔｉ０．４７）Ｏ３（ＰＺＴ）铁电薄膜的工艺基础上,地制备出ＰｂＴｉＯ３／Ｐｂ（Ｚｒ０．５３Ｔｉ０．４７Ｏ３／ＰｂＴｉＯ３（ＰＴ／ＰＺＴ／ＰＴ）夹心式新结构。由于采用了这种闪心式结构,使得ＰＺＴ铁电薄膜的退火温度由原来的９００℃降到了７００℃。通过实验检验了新结构的铁电和介电性能。发现夹心结构有助于提高ＰＺＴ薄膜的品质。     

铁电钛酸铋超微粉及陶瓷的研究

采用类溶胶－凝胶方法制备了铁电Ｂｉ４Ｔｉ３Ｏ１２超微粉，分别用Ｘ射线衍射、透射电子显微镜、激光散射粒度仪和差热分析仪对其结构、形貌、粒度和相变特性进行了测试分析。结果表明，超微粉形成了正交晶系Ｂｉ４Ｔｉ３Ｏ１２结构，晶粒尺寸为１０～５０ｎｍ。由微粉制备了Ｂｉ４Ｔｉ３Ｏ１２陶瓷，其介电常数和损耗角正切分别为ε＝１０５．６和ｔｇδ＝０．０５２（１００Ｈｚ）及ε＝９７．２和ｔｇδ＝０．０００３６（４ＭＨｚ），铁电参数矫顽电场Ｅｃ为２．９１×１０６Ｖ／ｍ，剩余极化强度Ｐｒ为７×１０－３Ｃ／ｍ２。     

含铋层化合物BaTiO3和系独石电容瓷料

分别以Ｂｉ，Ｔｉ，Ｚｒ，Ｓｎ，Ｗ，Ｎｂ，Ｐｂ等元素的氧化物合成多种不同铋层化合物，用以降低ＢａＴｉＯ３系瓷料烧成温度。通过调整ＢａＴｉＯ３的合成温度、改变铋层化合物的组成和选择合理的工艺条件等试验，探讨含铋层化合物ＢａＴｉＯ３瓷料组成对其性能的影响。以ＢａＯ／ＴｉＯ２为０．９９的ＢａＴｉＯ３烧块、钛铋层化合物及稀土元素氧化物配制成的瓷料，其性能符合美国ＥＩＡ标准Ｘ７Ｒ指标，制成的独石电容器性能优良     

功率型压电陶瓷振子的研制及应用

介绍了功率型压电陶瓷振子的研制过程。采用二次水磨加黏合剂造粒方法，并使用超细ＺｒＯ２，使烧结温度降低，从而减少ＰｂＯ的挥发。作者对铌锂锆钛酸铅系统做了大量的配方筛选工作，确定了性能满足使用要求的配方（Ｐｂ１－ａＳｒａ（Ｌｉ１／４Ｎｂ３／４）０．１２Ｚｒ０．４６Ｔｉ０．４２Ｏ３）。叙述了功率型压电陶瓷振子在超声清洗、超声焊接、超声钻孔等方面的应用。     

含铋层化合物BaTiO_3系独石电容瓷料

分别以Ｂｉ、Ｔｉ、Ｚｒ、Ｓｎ、Ｗ、Ｎｂ、Ｐｂ等元素的氧化物合成多种不同铋层化合物，用以降低ＢａＴｉＯ３系瓷料烧成温度。通过调整ＢａＴｉＯ３的合成温度、改变铋层化合物的组成和选择合理的工艺条件等试验，探讨含铋层化合物ＢａＴｉＯ３瓷料组成对其性能的影响。以ＢａＯ／ＴｉＯ２为０．９９的ＢａＴｉＯ３烧块、钛铋层化合物及稀土元素氧化物配制成的瓷料，其性能符合美国ＥＩＡ标准Ｘ７Ｒ指标，制成的独石电容器性能优良，稳定可靠。     

一种用于大功率超声清洗换能器的压电材料

通过对ＰｂＭｅ（Ｃａ＿（１／４）Ｍｎ＿（１／４）Ｎｂ＿（１／２））＿ｘＴｉ＿ｙＺｒ＿ｚＯ＿３系材料的研究，并以Ｓｒ￣（２＋）、Ｍｇ￣（２＋）等价取代Ｐｂ￣（２＋），以ＣｅＯ＿２作为添加改性剂，研制出机电耦合系数高（ｋ＿ｐ＝０．６２）、机械品质因数高（Ｑ＿Ｍ＝２０３６）、机械强度高（抗张强度为４４２ＭＰａ）、经时稳定性好的适用于大功率超声清洗换能器的压电材料。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.