溅射气体和基板偏压对溅射Al_2O_3薄膜内应力和密度的影响

在纯Ar和Ar＋10％O2两种工作气体及不同基极偏压条件下，用射频溅射方法制备了Al2O3薄膜，测量了每个样品的内应力和密度，并对部分样品用X射线光电子谱进行了结构分析。结果表明，薄膜呈非晶态，薄膜的内应力均为压应力，并给出了气体种类和们压对膜的密度和应力的影响。     

高速钢基体离子注氮对c-BN薄膜制备的影响研究

采用射频磁控溅射法在离子注氮的高速钢基体上沉积制备c-BN薄膜,主要研究离子注氮层对c-BN薄膜相结构和内应力的影响;采用各种现代分析方法对沉积的薄膜进行了表征分析,包括傅立叶红外光谱(FTIR)、X射线光电子能谱(XPS)和原子力显微镜(AFM)等分析方法;试验结果表明:高速钢基体上离子注氮有利于立方氮化硼含量的提高和薄膜内应力的降低,同时注氮处理的高速钢基体上沉积的薄膜表面形貌平整,结晶性较好.并采用X射线衍射分析(XRD)对高速钢基体的离子注氮层进行了相结构分析,探索研究了离子注氮层对c-BN薄膜生长的影响.     

电沉积铜薄膜中的内应力与织构特征

利用X射线衍射方法分析了电沉积铜薄膜的内应力及其织构特征.结果表明,随薄膜厚度的增加,薄膜内应力增大.电沉积铜薄膜具有较强的(220)丝织构,随着铜薄膜内应力的增加,(220)丝织构增强,同时叠加有板织构的特征.     

热解温度对离子液体前驱体制备碳基薄膜的影响

利用离子液体前驱体热解工艺,选取Al_2O_3作为基体制备碳基薄膜,对比了不同热解温度条件下所制碳基薄膜的表面形貌、结构特征以及摩擦学性能,探究了离子液体热解法制备碳基薄膜的最佳热解温度。利用X射线衍射分析仪、X射线光电子能谱和扫描电子显微镜对碳基薄膜的结构和表面形貌进行分析,并考察薄膜的摩擦学性能。结果表明:热解温度对薄膜成分和内应力具有较大影响,薄膜成分和内应力则影响薄膜表面形貌和摩擦学性能,最佳热解温度为1000℃。     

Cr在多弧离子镀（Ti，Cr）N复合膜中的作用

利用AlP—01多弧离子镀膜机，通过改变铬靶电流，在高速钢基体上沉积出不同Cr含量的（Ti，Cr）N复合膜涂层，用扫描电子显微镜、微纳米力学测试仪和X射线对薄膜的表面颗粒、硬度及内应力进行了分析。结果表明：薄膜中添加Cr能减小表面颗粒尺寸，提高硬度，当Cr的含量达到31％（wt）时，薄膜硬度达到最高值，此时薄膜的内应力也最大。     

离子束辅助沉积制备TaN薄膜的X射线衍射分析

利用离子束辅助沉积技术制备TaN薄膜，并对其进行X射线衍射分析。掠入射的X射线衍射分析得出：离子束辅助沉积制备的TaN薄膜是面心立方结构，晶格常数a为0．4405nm。根据X射线衍射分析，用屈服强度表征的TaN薄膜的显微硬度为16～20GPa，与文献上报道的显微硬度值接近。离子束辅助沉积制备的TaN薄膜宏观内应力较小，且都为压应力。晶粒尺寸大约在10nm左右，随着注入离子能量的增加，薄膜晶粒尺寸有长大的趋势。     

溅射气体和基板偏压对溅射Al2O3薄膜内应力和密度的影响

在纯Ａｒ和Ａｒ＋１０％Ｏ２两种工作气体及不同基板偏压条件下，用射频溅射方法制备了Ａｌ２Ｏ３薄膜，测量了每个样品的内应力和密度，并对部分样品用Ｘ射线光电子谱进行了结构分析。结果表明，薄膜呈非晶态，薄膜的应内应力均为压力，并给出了气体种类和偏压对膜的密度和应力的影响。     

PECVD生长纳米硅薄膜的X射线衍射分析

等离子增强化学沉积生长的纳米硅薄膜是由纳米级尺寸的晶粒和晶界组成的厚度极薄的薄膜,采用X射线薄膜衍射法即X射线以低掠射角(1°～5°)入射,延长X射线在薄膜中的行程,同时将聚焦光路改为平行光光路,以提高来自薄膜的衍射强度,得到纳米硅薄膜的衍射峰。借此方法,研究了本征膜和掺磷薄膜的硅晶体结构及掺磷浓度对硅晶粒大小和晶格微观畸变的影响。     

中频磁控溅射NiO_x电致变色薄膜(英文)

采用中频孪生非平衡磁控溅射技术,制备了纳米晶结构NiOx电致变色薄膜。利用原子力显微镜、掠射X射线衍射、电化学设备、紫外分光光度计等测试手段分析薄膜结构及电致变色特性。结果表明:室温沉积获得表面质地均匀的NiOx薄膜;在±3V致色电压下,薄膜电致变色性能优异,对可见光透过率调制范围达30%以上,但薄膜寿命低。获得的薄膜为结构疏松的纳米晶结构,易于离子的注入和抽取,变色性能优异,但易发生Li+不可逆注入,薄膜寿命低。     

X射线衍射技术在薄膜残余应力测量中的应用

残余应力测量在薄膜材料研究中具有重要的意义,综述了薄膜残余应力X射线衍射技术测量的研究现状,其中介绍了强织构薄膜残余应力X射线衍射测量技术;同时对由于G(o)bel平行光镜、毛细管元件及二维探测器等X射线功能附件的发展,以及同步辐射源X射线的应用而带来残余应力分析的新进展进行了介绍.     

利用近饱和磁化产生的巴克豪森效应测量铁磁件二轴应力

讨论了一种检测铁磁材料的内部应力的无损检测新技术。利用该技术,以近饱和磁化产生的巴克豪森效应与应力的关系,测量了铁磁构件的二轴应力和焊接构件的残余应力。检测结果与传统的Ｘ射线检测法的结果相一致。该检测技术在工程检测中有广泛的适用性。     

Neutron Stress Measurement of W‐Fiber Reinforced Cu Composite

Stress measurement methods using neutron and X‐ray diffraction were examined by comparing the surface stresses with internal stresses in the continuous tungsten‐fiber reinforced copper‐matrix composite. Surface stresses were measured by X‐ray stress measurement with the sin²ψ method. Furthermore, the sin²ψ method and the most common triaxal measurement method using Hooke's equation were employed for internal stress measurement by neutron diffraction. On the other hand, microstress distributions developed by the difference in the thermal expansion coefficients between these two phases were calculated by FEM. The weighted average strains and stresses were compared with the experimental results. The FEM results agreed with the experimental results qualitatively and confirmed the importance of the triaxial stress analysis in the neutron stress measurement.     

碳纤维复合材料界面残余应力的X射线衍射分析

根据碳纤维的晶体学特点,提出了利用X射线衍射技术分析碳纤维/树脂基复合材料界面残余应力的新方法。通过在环氧树脂基体中引入膨胀单体,改变界面残余应力,对本文提出的方法进行了验证     

Eigenspannungsmessungen an oberflächenbearbeiteten Proben aus einem Gamma‐Titanaluminidwerkstoff

Residual Stress Measurements on Machined Specimens of a Gamma Titanium Aluminide Material Residual stress measurements by x‐ray diffraction and hole drilling were carried out on specimens made of the commercially available gamma titanium aluminide alloy ABB‐2. The specimens had been ground and milled by three various methods in each case. Evaluation of X‐ray measurements displayed significantly different stress profiles in the surface layers and enabled qualitative ratings of the applied machining techniques. Evaluation of the hole drilling results showed agreements as well as discrepancies with the X‐ray findings. Determination of X‐ray elastic constants indicated similar values as obtained in a previous investigation on a different gamma titanium aluminide alloy.     

红外用超薄PtSi膜的一种制备新方法

膜厚制约着PtSi红外探测器的量子效率。本文介绍了一种根据固相反应理论 ,在 1 0 - 4 Pa量级真空度条件下 ,采用真空退火、化学腐蚀手段制备超薄 (约 5 5nm)PtSi膜的新工艺方法 ,并用XRD ,XPS对所制备的样品进行了物相分析。该方法所需温度低 ,时间短 ,制得薄膜均匀性好     

用正电子湮没技术研究退火温度对FeCuNbSiB合金微观缺陷的影响

利用正电子湮没技术结合Ｘ－射线衍射分析了Ｆｅ７３．５Ｃｕ１Ｎｂ３Ｓｉ１３．５Ｂ９纳变软磁合金在不同退火温度下，微观缺陷与相应相结构和软磁性能的变化规律。     

Residual stress measurement in AlSi alloys

In this work, the relaxation of residual stresses inside a sample made of the aluminum alloy AlSi7Mg0.3 after tempering is described. The comparison of stress evaluation by X‐ray diffraction and incremental hole drilling method combined with electronic speckle pattern interferometry strain determination gives the opportunity to evaluate micro stresses together with first order macro stresses. Compressive stresses within the surface of a cold worked sample are relaxed by tempering. The X‐ray diffraction evaluation is supported by the analysis of a stress‐free sample through incremental hole drilling method.     

High‐Energy X‐Ray Diffraction Study of the Inhomogeneous Zr43Cu43Al7Ag7 Bulk‐Metallic Glasses

In the present work, the microscopic structure of an as‐cast Zr₄₃Cu₄₃Al₇Ag₇ bulkmetallic glass (BMG) had been investigated in detail. The structure analyses are performed using the laboratory X‐ray diffraction (XRD), high‐energy synchrotron X‐ray diffraction, and transmission‐electron microscopy (TEM). The results from different techniques are compared and discussed. The specimen shows a typical amorphous hallo using the conventional laboratory XRD. However, tiny crystalline particles, roughly ≈10 nm in size, are found in the sample by the high‐energy XRD as well as the TEM. The standard laboratory XRD measurement is not adequate to differentiate amorphous from a nano‐composite phase. The high‐energy XRD method is an essential technique to determine the glassy nature of a BMG.     

Materialbeanspruchungsanalyse und ihre Anwendung auf Prüfstandsversuche zum Oberflächenausfall (Nierlich‐Schadensmodus) von Wälzlagern

Material Response Analysis and its Application to Rig Tests for the Surface Failure (Nierlich Damage Mode) of Rolling Bearings The material response analysis according to Nierlich using X‐ray diffraction represents an important physical examination technique for the evaluation of material stressing and the lifetime estimation of rolling bearings and other highly loaded machine parts. The method is presented and employed for the evaluation of automobile gearbox rig tests. The extensively described damage modes of the practically predominating surface and the classical sub‐surface failure of rolling bearings can be distinguished that way. In gearboxes, lubricating oil contaminated by metal abrasion of the cogwheels usually appears. Penetrating foreign particles produce indentations at the ring raceways and rolling elements of the rolling bearings, which promotes surface fatigue. The results of the X‐ray diffraction measurements confirm this damage mode. Evaluation of the occurred material stressing permits a more detailed characterization of the surface failure of rolling bearings.     

反应蒸发制备nmSi-SiOx发光薄膜

报道了用真空反应蒸发制备nmSi/SiOx 薄膜 ,制备出含有不同纳米尺寸硅颗粒的薄膜 ,研究了不同条件下得到的nmSi SiOx 薄膜的结构和组分。实验发现以SiO为蒸发源制备的薄膜能够实现光致发光。初步分析nmSi SiOx 薄膜发光机制可能是由纳米硅量子效应引起的 ,界面效应和缺陷对薄膜PL可能没有贡献 ,解释了有纳米硅颗粒存在但观察不到PL的原因