舰船远程尾流气泡群的前向光散射特性研究

利用Mie理论计算了舰船尾流气泡群的归一化体散射函数和散射能量分布函数,分析了尾流气泡群的前向光散射特性。计算和分析结果表明,气泡群的前向散射光强度远大于后向散射,前向散射能量占总散射能量的90%以上;散射能量分布函数在小于1°的前向小角度散射角范围内迅速增加到40%以上,然后随散射角的增加缓慢增加;气泡表面附着的有机膜会显著地增强气泡群的后向散射,但对前向散射的影响不大。     

舰船尾流的激光散射特性

根据Mie 散射理论,在认为气泡不相干的情况下,计算了气泡在不同散射方向的散射强度,得出舰船尾流某个横截面上气泡群的光散射特性;计算结果表明气泡群的后向散射增强非常明显;舰船尾流横截面上尾流中心气泡的散射强度远大于尾流边缘处的散射强度,说明利用舰船尾流中气泡与背景海洋中的气泡对光散射的差异来作为鱼雷自导的一种手段是可行的。     

舰船尾流的前向光散射对光束衰减测量的影响

为优化前向光尾流自导的探测系统的设计,分析了舰船远程尾流中气泡群的前向光散射对测量气泡群衰减系数的影响。根据消光定理和Mie理论,推导了单散射条件下测量气泡群衰减系数的公式,给出了因前向光散射导致的测量误差因子和修正因子的表达式。基于此表达式对干净的尾流气泡群和覆盖着两种典型有机膜的脏尾流气泡群的误差因子和修正因子进行了数值计算,分析了探测系统的接收视场角和气泡表面附着的有机膜对衰减系数测量的影响。结果表明,前向散射对尾流气泡群的衰减测量影响很大,在前向1°的散射角范围内这种影响尤为显著;气泡表面附着的有机膜对尾流气泡群的衰减测量影响很小。     

舰船尾流中脏气泡光的散射特性

阐述了舰船尾流气泡的分布特性和气泡数密度的衰减特性．基于Mie散射理论。计算和分析了干净气泡和脏气泡光的背向散射特性，群体干净气泡和脏气泡光的背向散射特性．     

舰船尾流中脏气泡光的散射特性

阐述了舰船尾流气泡的分布特性和气泡数密度的衰减特性。基于Mie散射理论,计算和分析了干净 气泡和脏气泡光的背向散射特性,群体干净气泡和脏气泡光的背向散射特性.     

水中气泡光学特性的蒙特卡罗模拟

基于Mie散射理论的单个气泡光散射,考虑光的多次散射,用蒙特卡罗方法模拟计算水中气泡群的光散射特性.计算结果表明：光的后向散射随气泡数密度的增加而明显增强,并且在折射率较大的海水中这种增强会更加明显,从而说明利用尾流中气泡群的光散射特性研究光自导鱼雷是可行的.     

多尺度复杂水质尾流气泡的激光探测仿真与实验

舰船尾流气泡具有尺度范围大、稀疏、离散等特征。利用蓝绿激光的海水穿透性能以及气泡对激光的后向散射特性，可以实现舰船尾流气泡的远场检测。舰船尾流的稀疏、离散特征导致气泡的激光散射回波信噪比极低，对光学接收处理系统及尾流信号处理方法带来了困难与挑战。建立了舰船尾流气泡的激光后向散射模型，通过蒙特卡罗仿真验证了不同水质、不同气泡距离和不同尺度气泡的激光后向散射特性，设计了可抑制近场水体强散射干扰的水下气泡激光测试分析系统，实现了激光能量与雪崩光电二极管接收增益间的匹配调节。针对室内和湖泊环境，开展了不同水质和光电探测参数下的尾流气泡检测性能测试，通过对数据进行统计处理分析得到了舰船尾流气泡的激光探测特征规律。设计的水下气泡激光测试分析系统可以实现对舰船尾流气泡的有效探测，为舰船尾流探测系统在不同水质环境下的工程应用提供了理论及数据支撑。     

尾流气泡群的激光多普勒检测方法

提出了一种基于气泡群后向散射光多普勒频移谱特性的舰船尾流检测方法。利用蒙特卡罗(Monte Carlo)方法对尾流区运动气泡群后向散射激光多普勒频移谱进行了理论模拟,分析了气泡数密度和速率分布对后向散射光信号多普勒频移谱特性的影响。在此基础上,利用差动型激光多普勒探测方法,实验研究了模拟尾流气泡群后向散射光多普勒频移谱特性,实验结果与理论模拟基本符合。研究表明,随着尾流中气泡数密度和速率分布范围的增大,后向散射光信号的多普勒频移谱的幅度、截止频移也随之增大。这证明了激光后向散射多普勒频移谱特性分析法可作为一种有效的尾流检测方法。     

尾流气泡激光散射的测量

采用收发分置的光学结构实现了尾流气泡对532 nm激光在散射角5°～175°内的散射测量,同时测量了水的激光散射。散射角度的改变是通过发射系统不动而转动接收系统来实现的。解决了散射信号大动态范围的压缩问题,讨论了接收视场内散射体积随散射角的变化。分析了气泡散射的信号特征,并提出了气泡散射信号的功率谱密度处理法。将实验结果与米氏理论结果进行了对比,发现尾流气泡的激光散射强度及其随散射角的变化趋势与米氏理论结果吻合得很好,与水的散射相差近一个数量级。研究结果表明利用激光可以将气泡和水的散射区别开,即利用激光探测尾流气泡的存在具有可行性。     

舰船气泡尾流激光雷达的关键技术

针对舰船气泡尾流激光雷达研发中的三项关键技术———复合散射理论研究、激光断层和偏振检测技术、后向散射抑制技术展开综述,总结了相关领域研究成果并提出新的技术方案。对复杂海洋环境下的激光复合散射理论进行了系统的分析,有针对性地给出了相关研究方法及研究关键点。提出利用激光断层和偏振检测技术对舰船尾流进行检测的新方法。基于Monte Carlo模型分析了尾流激光雷达近场后向散射光的大动态衰减规律,提出一种新的基于雪崩光电二极管的大动态范围信号接收技术。在国内首次成功研发尾流激光雷达样机并首次获得大量详实的海试数据。海试结果表明,该样机对8节航行下的千吨级民用船舶尾流探测距离大于3.7 km。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.