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功率放大器(Power Amplifier, PA)是射频前端重要的模块,本文基于SMIC 55 nm RF CMOS 工艺,设计了一款60 GHz 两级差分功率放大器。针对毫米波频段下,硅基CMOS晶体管栅漏电容(Cgd)严重影响放大器的增益和稳定性的问题,采用交叉耦合电容中和技术抵消Cgd影响。通过优化级间匹配网络和有源器件参数,提高了功率放大器的输出功率,增益和效率。后仿结果显示,在1.2V的供电电压下,工作在60 GHz的功率放大器饱和输出功率为11.3 dBm,功率增益为16.2 dB,功率附加效率为17.0%,功耗为62 mW。芯片面积380×570 um2 。 相似文献
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RF MEMS开关具有低损耗、低功耗、尺寸小和易于集成等优点而被广泛应用于各种可重构射频电路及系统中。通过分析比较电容并联式和串联式RF MEMS开关两种电路结构的射频性能,设计了一种基于RF MEMS开关的新型功率放大器,使用RF MEMS开关控制匹配网络来实现双工作频带的转换。结果表明,设计的功率放大器在2.35GHz和1.25GHz两个工作频带下,功率附加效率(PAE)和输出功率(Pout)可分别达到72%、67%及40.8、42.7dBm。该功率放大器具有较高的功率附加效率和输出功率,适用于多频带的射频系统,对RF MEMS器件在可重构系统中的应用具有一定参考价值。 相似文献
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《固体电子学研究与进展》2017,(4)
采用SiGe BiCMOS工艺设计了一款大功率高效率硅基功率放大器芯片,用于驱动现有大功率GaN功率放大器芯片,满足相控阵雷达的低成本需求。该硅基功率放大器通过和低噪声放大器、驱动放大器、数控移相器、数控衰减器、单刀双掷开关、电源管理以及数字逻辑单元等硅基电路进一步集成,实现了一片式高集成度硅基幅相多功能芯片,从而降低了前端收发组件的尺寸和成本。在硅基功率放大器设计中,结合Stack结构、变压器耦合结构和有源偏置结构,开展电路设计及优化,提高了放大器的输出功率和效率。测试结果表明:研制的硅基功率放大器在Ku波段f_1~f_2(3GHz带宽)频带内,实现了小信号增益31dB;在-3dBm输入功率条件下,实现发射功率21.5dBm、功率附加效率(PAE)25%等技术指标。集成功率放大器的幅相多功能芯片在f_1~f_2(3GHz带宽)频带内,实现了发射通道增益24dB;在5dBm输入功率条件下发射功率21.5dBm、功率附加效率(PAE)23%等技术指标。 相似文献
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近年来60 GHz附近的一个连续频段可以自由使用,这为短距离的无线个域网等高速率传输的应用提供了条件.设计了一个工作在60 GHz的CMOS功率放大器.采用台积电0.13μmRF-CMOS工艺设计制造,芯片面积为0.35mm × 0.4 mm,最大线性输出功率为11 dBm,增益为9.7 dB,漏极增加效率(η_(PAE))为9.1%.达到应用在通信距离为10 m的无线个域网(WPAN)射频电路中的要求.设计中采用了厚栅氧化层工艺器件和Load-Pull方法设计最优化输出阻抗z_(opt),以提高输出功率.该方法能较大提高CMOS功率放大器的输出功率,可以应用到各种CMOS功率放大器设计中. 相似文献
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针对未来无线通信系统中的宽带和效率问题,设计了一种宽带高效率的J类功率放大器。为了减少谐波阻抗对效率的影响,该J类功率放大器在输出匹配网络中采用了谐波控制单元,并通过对晶体管模型的简化,综合出一种较好的匹配网络。另外,在输入匹配网络中,使用了具有宽带效应的混合集中和分布元件的π形匹配网络。设计中使用10 W GaN HEMT晶体管对理论进行验证,测试结果显示,在2.2 GHz~2.8 GHz之间的频带内,J类功率放大器的漏极效率大于61%,增益大于10.4 dB。该J类功率放大器在下一代无线通信系统中具有良好的应用前景。 相似文献
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Michael Reilly 《半导体技术》2004,29(12)
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system. 相似文献
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Thomas M.Trexler 《半导体技术》2004,29(5)
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test. 相似文献
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The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high. 相似文献
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The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation. 相似文献
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Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible. 相似文献
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Qi-jiang Ran Pei-de Han Yu-jun Quan Li-peng Gao Fan-ping Zeng Chun-hua Zhao 《光电子快报》2008,4(4):239-242
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's. 相似文献
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In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal (200) (2d = 0.4027 nm) is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line(w), the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line(x), the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines(y), the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line(z) in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line(q) in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution(λ/△ 2) is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy. 相似文献
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High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET > PDMAT > TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center. 相似文献
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This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors. 相似文献
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It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory. 相似文献