光纤甲烷气体传感器

本文介绍了基于干涉法和光谱吸收法的光纤甲烷气体传感器系统的原理、设计和系统结构,并对它们进行了比较。采用光学测量方法,不仅能精确测量甲烷气体浓度,而且安全可靠。尤其在1．6654μm波长处,采用光谱吸收法测量甲烷气体浓度,可使传感系统的灵敏度变得更高。     

光纤光栅式甲烷浓度差分检测系统研究

基于甲烷气体的近红外光谱吸收特性,研究了一种全光纤差分吸收式甲烷检测系统.分析了差分吸收检测的基本原理,建立了甲烷检测的数学模型.系统选用发光二极管(LED)作光源,用光纤布拉格光栅进行滤波实现差分吸收检测,并结合光源强度调制技术和锁相放大技术,消除了光路干扰和光源强度波动的影响,提高了测试灵敏度.最后给出了该甲烷气体浓度检测系统的实验结果.     

基于光谱吸收原理光纤甲烷传感器实验分析与研究

光纤气体传感器是一种新型传感器,从光纤链路损耗实验、光源驱动和锁相放大电路输出波形实验、甲烷气体吸收实验等3个方面对甲烷气体传感器性能进行了分析和测试。实验结果表明基于光谱吸收原理的光纤甲烷传感器系统性能较为稳定,灵敏度较高,测量范围宽,重复性较好,因此该传感器适合于煤矿井下瓦斯检测,满足各种要求。     

吸收光谱学测量甲烷激光器的研究

基于气体在其特征吸收波长下的光的吸收随其浓度变化的机理,通过对甲烷气体吸收光谱的分析,研究了光谱吸收式甲烷气体浓度检测方法.通过波长调制实现气体浓度的谐波检测,利用二次谐波与一次谐波的比值来消除由光源的不稳定和变化所引起的检测误差,并建立了谐波检测的模型,给出了甲烷气体谐波检测方案.     

基于ZEMAX的气体光学吸收池的设计与优化

基于光谱吸收法的瓦斯实时监测系统的核心器件是开放式光学吸收池,根据矩阵传输理论和q参数的ABCD法则,设计了由2个相对的C-Lens组成的光学吸收池结构,并在ZEMAX的物理光学模式下实现仿真与优化。由理论分析得到结构的初步参数并在ZEMAX中进行优化,并使用合适的优化操作数对像差进行校正,经过逐步优化得到工作距离为100.39 mm的吸收池结构参数。高斯光束从一端光纤输出的束腰半经为5.2μm,经C-Lens聚焦和准直后,耦合到另一端光纤的束腰半经为5.48μm,该光学吸收池对甲烷近红外激光的耦合效率达到92%。通过实验验证了该光学吸收池的稳定性和高耦合效率,适用于甲烷气体的开放式光学气体传感和在线监测。     

基于平均滤波算法的光纤气体传感系统研究

数字平均滤波是信号处理中一种常用的方法。在小信号检测中,使用数字平均滤波可以获得较高的信噪比,提高检测的灵敏度。本文提出了一种利用光学器件来实现数字平均滤波的新方法,应用于基于差分吸收检测原理的窄带扫描光源光纤气体传感系统。系统的输出是一段连续的光谱,包含有被测乙炔气体的多个特征吸收峰。系统使用法珀标准具ETALON和参考光栅提供波长参考,完成对输出信号的光谱重建。对相同波长范围的信号进行平均滤波,使气体的相同特征吸收峰重合,提高检测的灵敏度。利用光谱重建,克服了可调谐Fabry-Perot滤波器驱动电压和透射波长不稳定因素的影响。实验结果表明,本系统可以方便有效地实现光谱意义上的数字平均滤波,检测到较低浓度的乙炔气体,比较适用于工业化气体检测系统。     

光纤甲烷气体传感器的研究

基于甲烷气体近红外吸收的机理,研究了一种高灵敏度易于实现的光纤甲烷气体传感器。分析了半导体激光器的调制特性和谐波检测的基本原理,建立了传感器的数学模型。系统采用分布反馈式半导体激光器做光源,气室采用小型渐变折射率透镜构成的气室,加入参考光路和参考气室,使光源输出的中心波长锁定在气体的吸收峰上,通过光源调制实现气体浓度的谐波检测,给出了甲烷气体测量的实验结果。     

光纤瓦斯多点传感系统的设计

差分吸收法是基于近红外光谱吸收、远距离监测气体浓度的重要方法.采用双波长差分检测法,选取1 653.7 nm作为甲烷气体的吸收峰,1 652 nm作为参考波长,设计了一种新型远距离多点测量的光纤瓦斯传感系统,可以对甲烷气体浓度进行实时检测.通过对光路链路损耗的预算及吸收系数的计算,综合考虑气室结构和数字信号处理电路等影响系统性能的重要因素,从理论上论证了该方案的可行性.系统的稳定性及测试灵敏度需通过实验验证,仍有较大的提高空间,同时也可用于实现其他气体浓度的监测和远程监控.     

基于C51单片机的便携式甲烷浓度检测仪

本文介绍了一种基于C51单片机与红外光谱的吸收特性的便携式甲烷浓度检测报警仪的设计与实现。采用红外光谱技术对甲烷气体的浓度进行定量分析,并在超过设定值时报警,并能通过串口与PC机进行通信,适合于用在矿场开采的安全检查中,测量范围0~100%,且使用方便,工作稳定,数据可靠。     

采用Tm光纤光源的甲烷气体相关光谱检测

报道了以半导体激光器泵浦掺Ｔｍ３＋光纤为光源的甲烷气体相关光谱检测系统，研究了７８８ｎｍ波长泵浦下掺Ｔｍ光纤光源的一些光谱特性，并在实验上用这种光源及系统对甲烷气体作了测量。在５．７ｃｍ长的测量腔下，系统噪声幅度对应的最小气体检测浓度为０．４７％，远低于甲烷气体的爆炸低限（５％），证明了这种光纤光源用于甲烷气体浓度测量的可行性。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.