5G毫米波GaN收发前端芯片研究

收发前端芯片是5G混合波束赋形系统架构中的关键器件之一，其关键指标包括发射通路的高效率与接收通路的低噪声。研制了一款采用GaN集成工艺的Ka波段收发前端MMIC，采用谐波匹配技术提高发射通路的效率，通过接收电路拓扑的正确选择及前级匹配网络的优化设计降低接收通路的噪声系数。测试结果表明，芯片在37～40 GHz频率范围内发射通路饱和输出功率大于36 dBm，饱和效率大于26%，功率回退8 dB时三阶交调失真小于-33 dBc；接收通路增益大于19 dB，噪声系数小于3.6 dB。该收发前端芯片可应用于5G毫米波基站中。     

高集成度X波段1W单通道硅基三维集成器件

南京电子器件研究所基于自有的8寸硅基射频微系统工艺线,研制了一款工作在X波段输出功率1W的高集成度单通道硅基三维集成器件。该器件以高阻硅为原材料,结合TSV转接板、晶圆级键合、高密度RDL以及多层BGA POP等三维集成工艺技术,在8.5 mm×8.5 mm×3.0mm的体积内实现了GaAs多功能芯片、收发电源调制芯片、串并转换接口芯片以及IPD的一体化集成;该器件具备了相控阵T/R组件所需的收发信号的移相、衰减、放大、SPI控制、电源调制以及栅稳压等功能,其发射输出功率约为30 dBm,接收增益大于23.5 dB,接收输出P-ldB大于-5 dBm,噪声系数小于3.2dB,移相精度RMS小于4°,衰减精度RMS小于0.5dB。     

K波段收发多功能GaAs MMIC芯片

介绍了一种基于0.15μm GaAs pHEMT功率工艺的K波段收发一体多功能芯片。该多功能芯片包含了功率放大器和低噪声放大器及收发开关。接收支路19.6~23.0GHz内增益大于23dB,增益平坦度为±0.2dB,输入输出驻波均小于1.8,噪声低于3.5dB;发射支路21~23GHz内输出驻波小于2.2,输入驻波小于2,增益大于25.6dB。在22GHz时饱和输出功率为23.3dBm,饱和电流170mA,效率达到25.2%。该多功能芯片接收/发射由单刀双掷开关控制。芯片尺寸为:4.1mm×2.75mm×0.05mm。     

一种Ka 波段多通道收发组件设计

基于混合微波集成电路技术(Hybrid Microwave Integrated Circuit, HMIC)设计了一款Ka 波段多通道 收发组件。该收发组件由四路接收链路、两路发射链路、衰减控制模块、锁相介质振荡器(Phase-locked Dielectric Resonator Oscillator, PLDRO)和电源模块组成。测试表明,该组件发射功率可达36 dBm,接收增益最大可达70 dB,接 收链路可以实现0~62 dB 的增益调控,发射链路可以实现0~31 dB 的增益调控,通道间隔离度可以达到80 dBc,实 现了大功率、高增益、大动态增益范围的技术要求,具有较高的工程应用价值。     

一种高精度宽带幅相控制多功能MMIC

利用0.15μm GaAs E/D PHEMT工艺研制了一款C-X波段多功能MMIC芯片,集成了2个驱动放大器、1个6位数控移相器、1个6位数控衰减器、4个单刀双掷开关、数字驱动器、均衡器和增益调节电路。其中移相器基于新颖的"非折叠式"兰格耦合器、改进的反射型负载,具有移相精度高、插入损耗小等优点,并内部集成对应的数字逻辑驱动电路,简化使用。多功能芯片测试结果表明:工作频带内移相误差均方根值(RMS)在发射和接收模式下均小于3°,所有移相态增益变化RMS小于0.3dB;衰减误差RMS小于0.5dB,附加调相从-4°~+6°。发射支路增益大于4dB,输出P1dB大于12dBm;接收支路增益大于3dB,输出P1dB大于10dBm。     

采用电流复用拓扑的宽带收发一体多功能电路

基于标准的GaAs赝配高电子迁移率晶体管(PHEMT)单片微波集成电路(MMIC)工艺设计并制备了一款宽带收发一体多功能电路芯片.该多功能芯片包含了功率放大器、低噪声放大器和收发开关.放大器采用电流复用拓扑结构实现了低功耗的目标.收发开关采用浮地结构避免了使用负电源.芯片在14～ 24 GHz工作频率的实测结果显示:接收支路噪声系数小于3.0dB,增益大于18 dB,输入及输出电压驻波比(VSWR)均小于2.0,1 dB压缩点输出功率大于0 dBm,直流功耗为60 mW;发射支路增益大于21 dB,输入输出VSWR均小于1.8,1dB压缩点输出功率大于10 dBm,直流功耗为180 mW.芯片尺寸为2 600 μm×1 800 μm.该多功能收发电路的在片测试结果和仿真结果一致,性能达到了设计要求.     

Ku波段SiGe幅相多功能芯片设计

幅相多功能芯片是相控阵雷达的关键部件。为了降低前端收发组件的尺寸和成本,本文采用0.13μm SiGe BiCMOS工艺设计了一款Ku波段幅相多功能芯片,单片集成了接收通道和发射通道,芯片面积2.5 mm×4.5mm。研制的多功能芯片的接收通道含前端低噪声放大器、六位数控衰减器、驱动放大器、单刀双掷开关、六位数控移相器;发射通道含六位数控移相器、单刀双掷开关、驱动放大器、中功率放大器。此外,为了进一步提高芯片的集成度,采用片上集成的电源管理单元和数字逻辑单元实现电源电压变换、衰减器和移相器的逻辑控制以及收发通道切换等功能。实测结果表明:在f1~f2(1GHz带宽)频带内,实现了发射增益17dB,发射功率(Psat)21.7dBm;接收增益-3dB,接收输入功率(P-1)-8.5dBm,接收噪声系数6.5dB;5.625°移相步进,移相精度(RMS)4.5°;0.5dB衰减步进,衰减精度(0.3dB+7%AS)。     

Ku波段GaN一片式收发组件芯片

报道了一款应用于Ku波段的GaN T/R MMIC。该芯片采用0.15μm GaN HEMT器件工艺制造,集成了T/R组件的接收通道和发射通道,芯片面积7.00mm×3.32mm。研制的MMIC集成了5位数字衰减器、5位数字移相器、前级低噪声放大器、后级低噪声放大器、驱动放大器、功率放大器、公用支路的小信号开关和收发切换的功率开关。在16~17GHz工作频带内测得该芯片接收通道增益大于21dB,噪声系数小于3.5dB;发射通道增益大于20.8dB,饱和功率大于40.8dBm,功率附加效率典型值30%。该芯片上集成的5位数字移相器、5位数字衰减器功能正常,达到设计要求。     

Ka波段5W GaAs PHMET功率MMIC

报道了一款采用0.15μm GaAs功率MMIC工艺研制的Ka波段功率放大器芯片。芯片采用四级放大拓扑结构,在29～32GHz频带范围内6V工作条件下线性增益25dB,线性增益平坦度小于±0.75dB;饱和输出功率大于5W,饱和效率大于20%,功率增益大于22dB;1dB压缩点输出功率大于36.5dBm,效率大于18%。     

基于GaN HEMT的13～17 GHz收发多功能芯片

基于GaN高电子迁移率晶体管(HEMT)工艺设计制作了一款收发(T/R)多功能芯片(MFC),主要用于射频前端收发系统.该芯片集成了单刀双掷(SPDT)开关用于选择接收通道或发射通道工作,芯片具有低噪声性能、高饱和输出功率和高功率附加效率等特点.芯片接收通道的LNA采用四级放大、单电源供电、电流复用结构,发射通道的功率放大器采用三级放大、末级四胞功率合成结构,选通SPDT开关采用两个并联器件完成.采用微波在片测试系统完成该芯片测试,测试结果表明,在13～ 17 GHz频段内,发射通道功率增益大于17.5 dB,输出功率大于12W,功率附加效率大于27％.接收通道小信号增益大于24 dB,噪声系数小于2.7 dB,1 dB压缩点输出功率大于9 dBm,输入/输出电压驻波比小于1.8∶1,芯片尺寸为3.70 mm×3.55 mm.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.