背入射Al0.42Ga0.58N/Al0.40Ga0.60N 异质结 p-i-n 太阳光盲紫外探测器成

在蓝宝石上用MOCVD生长的材料制备了背入射Al0.42Ga0.58N/Al0.40Ga0.60N 异质结 p-i-n 太阳光盲紫外探测器. 从器件的正向I-V特性曲线计算了理想因子n与串联电阻RS分别为3和93Ω. 器件在零偏压下275nm峰值波长处的外量子效率与探测率分别为9%和4.98e11cm·Hz1/2/W,分析表明Al0.42Ga0.58N窗口层在275nm波长处的透过率仅为15.7%,是器件外量子效率和探测率偏低的原因之一.     

背入射Al0.42 Ga0.58 N/Al0.40 Ga0.60 N异质结p-i-n太阳光盲紫外探测器

在蓝宝石上用MOCVD生长的材料制备了背入射Al0.42Ga0.58N/Al0.40Ga0.60N异质结p-I-n太阳光盲紫外探测器.从器件的正向Ⅰ-Ⅴ特性曲线计算了理想因子n与串联电阻Rs分别为3和93?器件在零偏压下275nm峰值波长处的外量子效率与探测率分别为9%和4.98×1011cm·Hz1/2/W,分析表明Al0.42Ga0.58N窗口层在275nm波长处的透过率仅为15.7%,是器件外量子效率和探测率偏低的原因之一.     

背入射AlxGa1-xN 64×1线列焦平面太阳光盲探测器

在蓝宝石衬底上用MOCVD生长的材料制备了背入射Al0.42Ga0.58N/Al0.5Ga0.5N P-I-N型64元线列焦平面太阳光盲紫外探测器。测试了器件的光谱响应,其截止波长为285nm,在275nm峰值波长处的零偏电流响应率为20mA/W。测试了线列器件各元在5V反偏压下的暗电流,结果表明暗电流大约在10-8A数量级,暗电流分布均匀。线列器件各元的紫外光响应均匀性较好。     

背入射AlxGa1-xN64×1线列焦平面太阳光盲探测器

在蓝宝石衬底上用MOCVD生长的材料制备了背入射Al0.42Ga0.58N／Al0.5Ga0．5NP—I—N型64元线列焦平面太阳光盲紫外探测器。测试了器件的光谱响应,其截止波长为285nm,在275nm峰值波长处的零偏电流响应率为20mA／W。测试了线列器件各元在5V反偏压下的暗电流,结果表明暗电流大约在10^-8A数量级,暗电流分布均匀。线列器件各元的紫外光响应均匀性较好。     

不同尺寸分布的自组织In_(0.55)Al_(0.45)As/Al_(0.5)Ga_(0.5)As量子点的静压光谱

在 1 5K测量了不同尺寸分布的 In0 .55Al0 .4 5As/Al0 .5Ga0 .5As量子点的静压光致发光 ,静压范围为 0 - 1 .3GPa.常压下观察到三个发光峰 ,分别来源于不同尺寸的量子点 (横向直径分别为2 6、52和 62 nm)的发光 .它们的压力系数分别为 82、94和 98me V/GPa,都小于 In0 .55Al0 .4 5As体材料带边的压力系数 ,特别是尺寸为 2 6nm的小量子点比 In0 .55Al0 .4 5As体材料带边小 1 7% ,并且压力系数随量子点尺寸的变小而减小 .理论计算表明有效质量的增大和 Γ- X混合是量子点压力系数变小的主要原因 ,并得到横向直径为 2 6和 52 nm的小量子点的 Γ- X混合势为     

p-GaN/Al0.35Ga0.65N/GaN应变量子阱肖特基紫外探测器

报道了p-GaN/Al0.35Ga0.65N/GaN应变量子阱结构的肖特基紫外探测器的制备及性能.器件的测试结果表明,在p-GaN/Al0.35Ga0.65N/GaN双异质结中强烈的压电极化和Stark效应共同作用下使得器件在正偏和反偏时的响应光谱都向短波方向移动了10nm.零偏下器件在280nm时的峰值响应为0.022A/W,在反向偏压为1V时,峰值响应增加到0.19A/W,接近理论值.在正向偏压下器件则呈平带状态,并在283和355nm处分别出现了两个小峰.在考虑极化的情况下,通过器件中载流子浓度分布的变化解释了器件在不同偏压下的响应特性,发现p-GaN/Al0.35Ga0.65N/GaN中的极化效应对器件的响应特性影响很大,通过改变偏压和适当的优化设计可以使探测器在紫外波段进行选择性吸收.     

p-GaN/Al0.35Ga0.65N/GaN应变量子阱肖特基紫外探测器

报道了p-GaN/Al0.35Ga0.65N/GaN应变量子阱结构的肖特基紫外探测器的制备及性能.器件的测试结果表明,在p-GaN/Al0.35Ga0.65N/GaN双异质结中强烈的压电极化和Stark效应共同作用下使得器件在正偏和反偏时的响应光谱都向短波方向移动了10nm.零偏下器件在280nm时的峰值响应为0.022A/W,在反向偏压为1V时,峰值响应增加到0.19A/W,接近理论值.在正向偏压下器件则呈平带状态,并在283和355nm处分别出现了两个小峰.在考虑极化的情况下,通过器件中载流子浓度分布的变化解释了器件在不同偏压下的响应特性,发现p-GaN/Al0.35Ga0.65N/GaN中的极化效应对器件的响应特性影响很大,通过改变偏压和适当的优化设计可以使探测器在紫外波段进行选择性吸收.     

背照式GaN/AlGaN p-i-n紫外探测器的制备与性能

文章研究了p-GaN/i-GaN/n-A l0.3Ga0.7N异质结背照式p-i-n可见盲紫外探测器的制备与性能。器件的响应区域为310~365nm,最大响应率为0.046A/W,对应的内量子效率为19%,优值因子R0A达到1.77×108Ω.cm2,相应的在363nm处的探测率D*=2.6×1012cmHz1/2W-1。     

AlGaN/GaN/InGaN对称分别限制多量子阱激光器的优化设计

采用一维传递矩阵法模拟计算了AlGaN/GaN/InGaN对称分别限制多量子阱激光器(发射波长为396.6nm)的波导特性.以光限制因子、阈值电流密度和功率效率作为优化参量,获得激光器的优化结构参数为:3周期量子阱In0.02Ga0.98N/In0.15Ga0.85N(10.5nm/3.5nm)作为有源层,90nm In0.1Ga0.9N为波导层,120周期Al0.25Ga0.75N/GaN(2.5nm/2.5nm)为限制层.     

AlGaN/GaN/InGaN对称分别限制多量子阱激光器的优化设计

采用一维传递矩阵法模拟计算了AlGaN/GaN/InGaN对称分别限制多量子阱激光器(发射波长为396.6nm)的波导特性.以光限制因子、阈值电流密度和功率效率作为优化参量,获得激光器的优化结构参数为:3周期量子阱In0.02Ga0.98N/In0.15Ga0.85N(10.5nm/3.5nm)作为有源层,90nm In0.1Ga0.9N为波导层,120周期Al0.25Ga0.75N/GaN(2.5nm/2.5nm)为限制层.     

日盲探测器高Al组分n-Al_(0.6)Ga_(0.4)N欧姆接触(英文)

研究了应用于日盲探测器的高Al组分Si掺杂n型Al0.6Ga0.4N与两层金属层Ti（20nm）/Al（100nm）之间的欧姆接触.在制作金属电极前用煮沸王水对样片进行表面预处理,金属制作后再在N2氛围中做快速热退火处理.使用高精度XRD测试样品表面特性,并对不同温度下的情况进行比较.样品的比接触电阻率是用环形传输线模型通过I-V测试得到.670℃下90s退火得到最优ρc为3.42×10-4Ω·cm^2.将该处理方法应用到实际的背照式AlGaN p-i-n日盲探测器中,探测器的光谱响应度和反向特性等参数得到很大的优化.     

Al_(0.35)Ga_(0.65)As中DX中心的俘获激活能(英文)

The capture, spectra in LPE-Ga0.35Al0.65As were studied. Two peaks of DX center is the capture spectra were obtained by a pulse with suitable duration, although there was one peak only in the emission spectra. It was possible thnt there were two deep levels about the different captures cross section and mar the emission rate. The unusual results of an emission activation energy of 0.31eV and a capture activation energy of 0.42eV were determined in the sample with NDX/Ns-1.7. Nonexponential single shot transient capacitance curves were imitated theoretically by using emission and capture equations for the high concentration of deep levels and by considering spreading factor of DX centers. Experimental curves were consistent with theoretical curves. The spreading factor of barrier was 40meV. Emission and capture activation energy were determined to be 0.3leV and 0.18eV, respectively.     

Ga_(0.47)In_(0.53)As/SiO_2与Ga_(0.47)In_(0.53)As/Al_2O_3的界面性质

本文研究了GaInAs/SiO_2与GaInAs/Al_2O_3的界面性质.采用PECVD技术以TEOS为源以及采用MOCVD技术以Al(OC_3H_1)_3为源在n~+-InP衬底的n-Ga_(0.47) In_(0.33)As外延层上淀积了/SiO_2和Al_2O_3,制备成MIS结构.结果表明这些MIS结构具有良好的C-V特性,SiO_2/GaInAs界面在密度最低达 2.4×10~(11)cm~2·eV~(?),氧化物陷阱电荷密度达10~(?)～10~(10)cm~2,观察到GaInAs/SiO,结构中的深能级位置为E_c-E_T=0.39eV.GaInAs/Al_2O_3结构中的深能级位置为E_c=E_T=0.41eV.     

蓝紫光范围灵敏的GaAs/Ga_(0.55)Al_(0.45)As异质结光晶体管

本文在对异质结光晶体管的光电流注入进行理论分析的基础上,采用选择性腐蚀工艺,制出了在蓝紫光波段灵敏的GaAs/Ga_(0.55)Al_(0.45)As异质结光晶体管,其光谱响应范围为小于4000A到8800A.峰值响应波长为5500A.4000A处的相对响应约为30％,其绝对响应度优于 70μA/μW.     

Influence of Ni Schottky contact thickness on two-dimensional electron-gas sheet carrier concentration of strained Al_(0.3)Ga_(0.7)N/GaN heterostructures

Ni/Au Schottky contacts with thicknesses of either 50(?)/50(?) or 600(?)/2000(?) were deposited on strained Al_(0.3)Ga_(0.7)N/GaN heterostructures.Using the measured C-V curves and I-V characteristics at room temperature,the calculated density of the two-dimensional electron-gas(2DEG) of the 600(?)/2000(?) thick Ni/Au Schottky contact is about 9.13×10~(12) cm~(-2) and that of the 50(?)/50(?) thick Ni/Au Schottky contact is only about 4.77×10~(12) cm~(-2).The saturated current increases from 60.88 to 86.3...     

Protection effect of a SiO_2 layer in Al_(0.85)Ga_(0.15)As wet oxidation

正The Al_(0.85)Ga_(0.15)As layers buried below the GaAs core layer with and without the SiO_2 layer were successfully oxidized in a wet ambient environment.The experimental results show that the SiO_2 layer has little impact on the lateral-wet-oxidation rate of the Al_(0.85)Ga_(0.15)As layer.The contrast of the SEM image of the oxidized regions and the absence of As-related Raman peaks for samples with the SiO_2 layer arise from the removal of As ingredients with the largest atomic number,which leads to improvements in the thermal stability of the oxidized layer.The PL intensities of samples with the SiO_2 layer are much stronger than those without the SiO_2 layer.The PL emission peak is almost unshifted with a slight broadening under the protection of the SiO_2 layer.This is attributed to the SiO_2 layer preventing oxidation damage to the GaAs capping layer.     

In_(0.15)Ga_(0.85)As/GaAs和GaAs/Al_(0.3)Ga_(0.7)As量子阱的静压下光致发光的对照研究

在77K,0—60kbar范围内对在同一衬底上生长的In_(0.15)Ga_(0.85)As/GaAs和GaAs/Al_(0.3)Ga_(0.7)As量子阱的静压下的光致发光进行了对照研究。在GaAs/Al_(0.3)Ga_(0.7)As量子阱中同时观察到导带到轻重空穴子带的跃迁。而在In_(0.15)Ga_(0.85)As/GaAs阱中只观察到导带到重空穴子带的跃迁。与GaAs/Al_(0.3)Ga_(0.7)As的情况相反,In_(0.15)Ga_(0.85)As/GaAs 量子阱的光致发光峰的压力系数随阱宽的减小而增加。在压力大于48kbar时观察到多个与间接跃迁有关的发光峰,对此进行了简短的讨论。     

GaAs(001)基底取向误差对GaAs/Al_(0.3)Ga_(0.7)As中局域声子的影响(英文)

We have studied the confined phonons in GaAs/Al0 3Ga0.7As superlat-tice grown by molecular beam epitaxy on oriented and misoriented GaAs (001) substrates. Raman scattering measurements have been performed at room- and low-temperatures. The results show that the phonon features in the superlattice-grown on GaAs(001) misoriented 4° toward the [110] direction are significantly different from those in the precisely oriented sample. The difference is discussed in terms of misorientation induced atomic-steps at GaAs-Al0.3Ga0.7As interfaces.     

非对称GaAs／Al0.3Ga0.7As双量子阱的光学特性和光学非线性

报道用光调制反射谱和光致发光方法对非对称的GaAs/Al_(0.3)Ga_(0.7)As耦合双量子阱研究的实验结果。在300K和77K下测量了光调制反射谱,对实验结果的线形拟合确认了在双量子阱中分别对应子能级11H、11L、13H、22H等的跃迁,并与理论计算结果作了比较。以氩离子激光器488nm激发测量了双量子阱中基态(n=1)荧光峰强度随激发光密度的变化,研究了其非线性效应。用632.8nm激光在弱激发下测量了3.8～300K范围内相应荧光峰随温度的变化,对实验结果作了分析讨论。     

T形栅In0.52Al0.48 As／In0.6Ga0.4As MHEMTs功率器件

利用电子束光刻技术制备了200nm栅长GaAs基T型栅InAlAs/InGaAs MHEMT 器件.该GaAs基MHEMT器件具有优越的直流、高频和功率性能,跨导、饱和漏电流密度、阈值电压、电流增益截止频率和最大振荡频率分别达到510mS/mm, 605mA/mm, -1.8V, 138GHz 和78GHz. 在8GHz下,输入功率为-0.88(2.11)dBm时,输出功率、增益、PAE、输出功率密度分别为14.05(13.79)dBm,14.9(11.68)dB,67.74 (75.1)%,254(239)mW/mm,为进一步研究高性能GaAs基MHEMT功率器件奠定了基础.