衬底温度对SnO2薄膜中激光感生电压效应的影响

采用固相反应法制备了四方相结构的SnO2靶材,选用蓝宝石衬底,利用脉冲激光沉积法在不同温度下生长了一系列SnO2薄膜。X射线衍射测试结果表明,SnO2薄膜具有四方金红石结构,并且沿a轴近外延生长。另外,在倾斜衬底上生长的SnO2薄膜上观察到了激光感生电压(LIV)效应,并研究了衬底温度对SnO2薄膜中LIV效应的影响。结果表明,随着生长温度从500℃增加到800℃,SnO2薄膜中的LIV信号的峰值电压先增加后减小,响应时间随衬底温度的升高先降低后增加,此外,存在一个最佳的衬底温度,使得SnO2薄膜的LIV信号的峰值电压达到最大,响应时间达到最小。在生长温度为750℃的SnO2薄膜中探测到响应最快的LIV信号,在紫外脉冲激光辐照下,峰值电压约为4V,响应时间为98ns,信号的上升沿为28ns,与激光的脉宽相当。     

Lateral polarity control of Ⅲ-nitride thin film and application in GaN Schottky barrier diode

N-polar and Ⅲ-polar GaN and AIN epitaxial thin films grown side by side on single sapphire substrate was reported.Surface morphology,wet etching susceptibility and bi-axial strain conditions were investigated and the polarity control scheme was utilized in the fabrication of Schottky barrier diode where ohmic contact and Schottky contact were deposited on N-polar domains and Ga-polar domains,respectively.The influence of N-polarity on on-state resistivity and I-V characteristic was discussed,demonstrating that lateral polarity structure of GaN and A1N can be widely used in new designs of optoelectronic and electronic devices.     

Tuning the Phase and Microstructural Properties of TiO<Subscript>2</Subscript> Films Through Pulsed Laser Deposition and Exploring Their Role as Buffer Layers for Conductive Films

Titanium oxide (TiO₂) is a semiconducting oxide of increasing interest due to its chemical and thermal stability and broad applicability. In this study, thin films of TiO₂ were deposited by pulsed laser deposition on sapphire and silicon substrates under various growth conditions, and characterized by x-ray diffraction (XRD), atomic force microscopy (AFM), optical absorption spectroscopy and Hall-effect measurements. XRD patterns revealed that a sapphire substrate is more suitable for the formation of the rutile phase in TiO₂, while a silicon substrate yields a pure anatase phase, even at high-temperature growth. AFM images showed that the rutile TiO₂ films grown at 805°C on a sapphire substrate have a smoother surface than anatase films grown at 620°C. Optical absorption spectra confirmed the band gap energy of 3.08 eV for the rutile phase and 3.29 eV for the anatase phase. All the deposited films exhibited the usual high resistivity of TiO₂; however, when employed as a buffer layer, anatase TiO₂ deposited on sapphire significantly improves the conductivity of indium gallium zinc oxide thin films. The study illustrates how to control the formation of TiO₂ phases and reveals another interesting application for TiO₂ as a buffer layer for transparent conducting oxides.     

Advances in pulsed-laser-deposited AIN thin films for high-temperature capping, device passivation, and piezoelectric-based RF MEMS/NEMS resonator applications

In this paper we report recent advances in pulsed-laser-deposited AIN thin films for high-temperature capping of SiC, passivation of SiC-based devices, and fabrication of a piezoelectric MEMS/NEMS resonator on Pt-metallized SiO₂/Si. The AlN films grown using the reactive laser ablation technique were found to be highly stoichiometric, dense with an optical band gap of 6.2 eV, and with a surface smoothness of less than 1 nm. A low-temperature buffer-layer approach was used to reduce the lattice and thermal mismatch strains. The dependence of the quality of AlN thin films and its characteristics as a function of processing parameters are discussed. Due to high crystallinity, near-perfect stoichiometry, and high packing density, pulsed-laser-deposited AlN thin films show a tendency to withstand high temperatures up to 1600°C, and which enables it to be used as an anneal capping layer for SiC wafers for removing ion-implantation damage and dopant activation. The laser-deposited AlN thin films show conformal coverage on SiC-based devices and exhibit an electrical break-down strength of 1.66 MV/cm up to 350°C when used as an insulator in Ni/AlN/SiC metal-insulator-semiconductor (MIS) devices. Pulsed laser deposition (PLD) AlN films grown on Pt/SiO₂/Si (100) substrates for radio-frequency microelectrical and mechanical systems and nanoelectrical and mechanical systems (MEMS and NEMS) demonstrated resonators having high Q values ranging from 8,000 to 17,000 in the frequency range of 2.5–0.45 MHz. AlN thin films were characterized by x-ray diffraction, Rutherford backscattering spectrometry (in normal and oxygen resonance mode), atomic force microscopy, ultraviolet (UV)-visible spectroscopy, and scanning electron microscopy. Applications exploiting characteristics of high bandgap, high bond strength, excellent piezoelectric characteristics, extremely high chemical inertness, high electrical resistivity, high breakdown strength, and high thermal stability of the pulsed-laser-deposited thin films have been discussed in the context of emerging developments of SiC power devices, for high-temperature electronics, and for radio frequency (RF) MEMS.     

制备工艺对ZnO薄膜的结构与光学性质的影响

利用射频磁控反应溅射技术生长出具有高度晶面(0002)取向的ZnO外延薄膜。通过AFM、XRD、吸收光谱和荧光光谱等测试手段,分别研究分析了不同衬底、不同溅射气氛和退火对ZnO薄膜结构及光学性质的影响。研究表明,在200℃低温生长的硅基ZnO薄膜具有几百纳米的氧化锌准六角结构外形;当氧氩比为4:1(质量流量比)时,吸收谱激子峰最佳;退火后,激子峰(363 nm)加强,同时出现了402 nm的本征氧空位紫光发射。     

低压MOCVD生长ZnO单晶薄膜的制备与性质

利用 LP-MOCVD生长技术 ,采用 Zn(C2 H5) 2 作 Zn源和 CO2 作氧源 ,在 (0 0 0 2 )蓝宝石衬底上获得了沿 c轴取向高度一致的 Zn O单晶薄膜。通过对其吸收谱的曲线拟合 ,得到室温下 Zn O薄膜的光学带隙为 3 .2 45e V。在样品的室温光荧光谱 (PL)中观察到对应于带边发射的较强的发光峰 ,对样品中蓝带的产生原因进行了讨论     

热电Ca3Co4O9薄膜的一致取向生长及其激光感生电压效应

利用脉冲激光沉积(PLD)法,在蓝宝石(0001)平衬底上成功制备了c轴一致取向的Ca3Co4O9薄膜。利用X射线衍射(XRD)分析测定了薄膜的相结构和生长取向。研究了不同衬底温度与不同原位氧压对Ca3Co4O9薄膜结晶质量与生长取向的影响,确定了最佳生长条件。利用这一条件在倾斜Al2O3(0001)衬底上制备了Ca3Co4O9薄膜。研究发现,当Ca3Co4O9薄膜被波长248nm,脉冲宽度20ns的脉冲激光照射时,在薄膜两端存在较大的激光感生热电电压(LITV)信号,峰值电压达到4.4V,其上升沿为36ns,半峰全宽(FWHM)为131ns。可以认为这种激光感生热电电压信号是由于Ca3Co4O9薄膜面内与面间泽贝克(Seebeck)系数张量的各向异性引起的。     

退火对用PLD法制备ZnO薄膜的发光影响

用脉冲激光沉积(PLD)方法在Si(111)和蓝宝石衬底上制备的氧化锌薄膜,在不同的退火温度和不同的退火氛围中进行了退火处理.退火温度及退火氛围对ZnO薄膜的结构和发光特性的影响用X射线衍射(XRD)谱和光致发光谱进行了表征.实验结果表明,随着退火温度的提高,ZnO薄膜的压应力减小,并向张应力转化.在不同的退火温度退火...     

Anisotropic Jc-ϑ measurements at low fields on a-MoSi thinfilms: evidence of a two-dimensional regime

Transport critical current versus applied field inclination (Jc-ϑ plots) have been made on a-MoSi thin films in low fields of order 0.04 T. The applied field was rotated (at fixed magnitude) in a plane both parallel (φ=0°) and perpendicular (φ=90°) to the film's longitudinal axis. The results indicate a Jc governed by the perpendicular component of the applied field as is sometimes observed in the layered high-temperature superconducting (HTS) thin films. These results also suggest that the peaks in the Jc-ϑ occur when the vortex density coming from external sources becomes comparable to that induced internally from the self field of the transport current. A broad peak in the Jc when the field is incident perpendicular to the film surface is observed on the silicon substrate film but not on the sapphire substrate film. Possible reasons for this broad peak are discussed     

锐钛矿型TiO_2薄膜的低温制备及其光催化性能研究

采用改进的sol-gel法及浸渍–提拉工艺在低温条件下制备了纳米TiO2薄膜。利用X射线衍射仪(XRD)、傅里叶变换红外光谱仪(FTIR)、扫描电镜(SEM)及紫外–可见光光谱仪(UV-Vis)对所制TiO2薄膜的物相结构、表面形貌以及光吸收特性进行了表征,并利用紫外光照降解亚甲基蓝溶液的方法考察了TiO2薄膜的光催化活性。结果表明:低温制备的纳米TiO2薄膜为锐钛矿结构,表面均匀致密,且对紫外光表现出较强的吸收特性。在紫外光照射48 h后,该TiO2薄膜对亚甲基蓝溶液的降解率为67.4%。     

Al掺杂对ZnO薄膜形貌和光学性能的影响

采用溶胶-凝胶旋涂法在FTO玻璃衬底上制备得到了不同Al掺杂浓度的ZnO薄膜(AZO)。利用XRD、FESEM、UV-vis和PL等测试手段对样品结构、形貌和光学性能进行了表征。结果表明,合成的AZO薄膜均为六方纤锌矿结构且峰强随掺杂浓度的升高而减弱;同时,颗粒形貌由不规则向规则球形转变且尺寸逐渐减小;PL谱中的近紫外发射峰和晶格缺陷峰值随掺杂浓度的升高先增大后降低;由UV-vis吸收光谱可知,AZO薄膜在设定波长内的光吸收处于波动状态,且当Al掺杂浓度为3%时,光吸收强度最高,禁带宽度减小到3.12eV。     

CdS微晶掺杂TiO2—SiO2复合薄膜的非线性光学特性

采用溶胶－凝胶方法在普通的载玻片上制备了ＣｄＳ微晶掺杂的ＴｉＯ２－ＳｉＯ２复合薄膜。用正硅酸乙酯、钛酸丁酯、醋酸镉作原料，比较了硫脲和硫化乙氨的硫化作用。不同热处理温度、时间的吸收光谱表明，薄膜中存在着量子尺寸效应。采用Ｚ－Ｓｃａｎ技术测量了薄膜的非线性吸收及非线性折射率。     

Laser processing of BN and AIN films

We have formed cubic boron nitride (c-BN) and hexagonal aluminum nitride (h-AlN) using novel pulsed laser processing methods. To synthesize c-BN, the boron target was evaporated by pulsed KrF laser (λ = 248 nm) with simultaneous bombardment with nitrogen ions. On the other hand, epitaxial deposited h-AlN on silicon and sapphire substrates was accomplished by pulsed laser evaporation of AlN target. The films of c-BN were polycrystalline on Si(100) and Si(111) substrates, and high-quality epitaxial h-AlN film was grown on (0001) sapphire with a following in-plane alignment of . This is equivalent to 30° rotation of the film with respect to the substrate in the basal c-plane. The absorption edge measured by ultraviolet-visible spectroscopy for the epitaxial AIN film was sharp and the band gap was found to be 6.1eV. Details of microstructure-property correlation of these films and possible applications are discussed.     

脉冲激光沉积制备NiO(111)外延薄膜及其结构研究

采用脉冲激光沉积法(PLD)在具有六方纤锌矿结构的蓝宝石衬底上制备了NiO外延薄膜,研究了沉积温度、氧分压对薄膜结构和形貌的影响。在650℃、20Pa氧分压的条件下制得了高结晶质量的单晶NiO薄膜。高能电子衍射分析发现,该NiO薄膜沿Al2O3[11–20]方向入射的衍射图像为清晰的斑点,说明NiO薄膜的生长模式为岛状模式,薄膜与衬底的外延匹配关系为:(111)[11–2]NiO//(0001)[11–20]Al2O3。     

MOCVD生长GaN膜的光调制反射谱研究

采用光调制反射光谱（PR）研究了（0001）晶向蓝宝石村底上MOCVD方法生长的单晶六角GaN薄膜的室温光学性质。测得六角GaN薄膜的禁带宽度为3．400eV，对PR谱的调制机理进行了分析，发现信号来自缺陷作用下的表面电场调制。光吸收增和光反射谱的测量，得到3．39eV的光学吸收边和3．3eV的反射峰，证实了光调制反射光谱的结果。     

二氧化钒薄膜的制备及性能表征

通过激光脉冲沉积法,分别在Csapphire和R—sapphire衬底上制备了单相二氧化钒（VO2）薄膜。用x射线衍射法表征了不同实验条件下制备的二氧化钒薄膜的结构性质,分析表明在600℃,10^-2torr的氧气分压下,生长15min可得到单相的二氧化钒（VO2）薄膜;重点研究了激光能量对薄膜电学性质的影响,实验结果表明激光能量在500-600MJ对制备的二氧化钒薄膜具有最好的电学性质。     

Annealing and light effect on optical and electrical properties of ZnS thin films grown with the SILAR method

Zinc sulphide (ZnS) thin films were grown on glass substrates by the Successive Ionic Layer Adsorption and Reaction (SILAR) technique at room temperature and ambient pressure. Surface morphologies of grown films were characterized using scanning electron microscopy (SEM). The crystal structure and crystal size of the thin films were characterized by the X-ray diffraction (XRD) method and found that the films exhibit polycrystalline characterization. The optical absorption measurements were done as a function of the temperature at 10–320 K temperature range. Using absorption measurements, the band gap energies were calculated at 10 and 320 K, as 3.83 and 3.72 eV, respectively. The annealing temperature effect on optical band gap and the light effect on the electrical properties of ZnS thin films were investigated and it was found that the current increased with increasing light intensity. The annealed films were found have more resistance than the as-grown film.     

磁控共溅射GaAs/SiO2细小纳米颗粒镶嵌材料的结构和非线性光学性质

应用磁控共溅射技术和后退火方法制备了GaAs/SiO2纳米颗粒镶嵌薄膜,并分别应用原子力显微镜、X射线衍射和卢瑟福背散射实验来观测薄膜的形貌、相结构和化学组分.结果表明GaAs纳米颗粒的平均直径很小(约为1.5～3.2nm),且均匀地分布于SiO2之中,薄膜中的GaAs和SiO2组分都符合化学计量关系.应用脉冲激光高斯光束对薄膜的光学非线性进行了Z扫描测试和分析.结果表明,薄膜的三阶光学非线性折射率系数和非线性吸收系数都由于量子限制效应而大大地增强,在非共振条件下,它们分别约为4×10-12m2/W和2×10-5m/W,在准共振的条件下,它们分别约为2×10-11m2/W和-1×10-4m/W.     

Composition effect on the structure and optical parameters of Ge–Se–Te thin films

The present work reported the influence of Ge content variation on the optical properties of Ge_xSe₅₀Te_50-x (x=0, 5, 15, 20, 35 at%). Vacuum thermal evaporation technique was employed to prepare amorphous Ge_xSe₅₀Te_50−x thin films. The stoichiometry of the chemical composition was checked by energy dispersive X-ray spectroscopy (EDX), whereas the thin films structure was determined by an X-ray diffraction and a scanning electron microscope (SEM). The optical absorption measurements were performed at room temperature in the wavelength range of 200–900 nm. Many optical constants were calculated for the studied thin films utilizing the optical absorption data. It was observed that the optical absorption mechanism follows the rule of the allowed direct transition. The optical band gap was found to increase from 2.31 to 2.60 eV as the Ge content increases from 0 to 35 at%. This result was explained in terms of the chemical bond approach.     

Deposition of polycrystalline AIN thin films by coherent magnetron sputtering at temperatures <80°C

A1N thin films were reactively deposited onto Al layers on negatively biased glass and Si substrates at temperatures <80°C by coherent magnetron sputtering. The low temperature deposition of the films without substrate heating was achieved by increasing the target-to-substrate distance, and therefore the heating effect of the plasma is relieved. The microstructure and morphology of the films deposited at different bias voltage and target-to-substrate distance were investigated. The films are amorphous when the target is far from the substrate for a bias voltage up to −320V. When the target-to-substrate distance is decreased to 17 cm a preferred (002) orientation of AIN films is observed at a bias voltage of −240 V. Additionally, the deposited films have specular reflectance and no voids can be observed. This low temperature technique can be used for applications in acoustic wave devices due to the improved homogeneity of the films and step coverage.