A 0.13-μ m CMOS Phase Shifter Using Tunable Positive/Negative Refractive Index Transmission Lines

This letter presents a tunable positive/negative refractive index transmission line (TL) phase shifter utilizing active circuits. It comprises a microstrip TL loaded with series varactors and a shunt monolithic microwave integrated circuit (MMIC) to synthesize a tunable inductor. This implementation increases the phase tuning range and maintains the input and output matching of the phase shifter across the entire phase tuning range, while eliminating the need for bulky passive inductors. The phase shifter is capable of providing both positive and negative phase shifts. The MMIC tunable inductors are fabricated in a 0.13-mum CMOS process and operate from a 1.5-V supply. The phase shifter achieves a phase of -40deg to +34deg at 2.5GHz from a single stage with less than -19dB return loss, and better than 1.1-dB insertion loss at 2.5 GHz. The phase shifter has a 1-GHz bandwidth over which the return loss remains better than 12.1dB     

宽带双周期性BST电容加载共面波导移相器

提出了一种双周期性BST电容加载共面波导传输线的移相器结构。基于这种结构设计制作的铁电薄膜移相器较好地解决了整个电路的阻抗匹配问题,其反射损耗的波纹在较宽的工作频带内趋于同一幅度。在沉积有钛酸锶钡(BST)薄膜的氧化镁基片上设计并制作了一个宽带双周期性BST叉指电容加载共面波导移相器,测试结果显示该移相器的反射损耗在0~15GHz内保持在–15dB,其中在14.5GHz处,在30V的外加偏压下其移相能力可达35o。     

Printed and Integrated CMOS Positive/Negative Refractive-Index Phase Shifters Using Tunable Active Inductors

This paper presents a printed and an integrated bi-directional tunable positive/negative refractive-index phase shifter utilizing CMOS tunable active inductors (TAIs). The printed phase shifter is comprised of a microstrip transmission line (TL), loaded with series varactors and a shunt monolithic microwave integrated circuit (MMIC) synthesizing the TAI. Using the TAI extends the phase tuning range and results in a low return loss across the entire tuning range. The integrated circuit (IC) phase shifter replaces the TLs with suitable lumped L-C sections. This enables integrating the entire phase shifter on a single MMIC, resulting in a compact implementation. The TAI used for both phase shifters is based on a modified gyrator-C architecture, employing a variable resistance to independently control the inductance and quality factor. The TAI is fabricated in the 0.13-mum CMOS process and operates from a 1.5-V supply. The TAI chip is used to implement the TL phase shifter, which achieves a phase of -40deg to +34deg at 2.5 GHz with less than -19-dB return loss from a single stage occupying 10.8 mm times 10.4 mm. The IC phase shifter is fabricated in the same process and achieves a phase from -35deg to +59deg at 2.6 GHz with less than -19-dB return loss from a single stage occupying 550 mum times 1300 mum.     

2.4 GHz continuously variable ferroelectric phase shifters using all-pass networks

Continuously variable ferroelectric (BST on sapphire) phase shifters based on all-pass networks are presented. An all-pass network phase shifter consists of only lumped LC elements, and thus the total size of the phase shifter is kept to less than 2.2 mm /spl times/ 2.6 mm at 2.4 GHz. The tunability (C/sub max//C/sub min/) of a BST interdigital capacitor is over 2.9 with a bias voltage of 140 V. The phase shifter provides more than 121/spl deg/ phase shift with the maximum insertion loss of 1.8 dB and the worst case return loss of 12.5 dB from 2.4 GHz to 2.5 GHz. By cascading two identical phase shifters, more than 255/spl deg/ phase shift is obtained with the maximum insertion loss of 3.75 dB. The loss figure-of-merit of both the single- and double-section phase shifters is over 65/spl deg//dB from 2.4 GHz to 2.5 GHz.     

A 2-bit miniature X-band MEMS phase shifter

The design and performance of a compact low-loss X-band true-time-delay (TTD) MEMS phase shifter fabricated on 8-mil GaAs substrate is described. A semi-lumped approach using microstrip transmission lines and metal-insulator-metal (MIM) capacitors is employed for the delay lines in order to both reduce circuit size as well as avoid the high insertion loss found in typical miniaturized designs. The 2-bit phase shifter achieved an average insertion loss of -0.70 dB at 9.45 GHz, and an associated phase accuracy of /spl plusmn/1.3/spl deg/. It occupies an area of only 5 mm/sup 2/, which is 44% the area of the smallest known X-band MEMS phase shifter . The phase shifter operates over 6-14 GHz with a return loss of better than -14 dB.     

一个DC-32GHz两位微机械移相器

采用分布式微机械传输线结构实现了两位移相器,并且为了减小传输线负载电容和驱动电压首次提出了用共面波导传输线来驱动微机械桥的结构(共面波导驱动结构).结果显示驱动电压小于20V,20GHz时两位移相器的相移为0°/20.1°/41.9°/68.2°,插入损耗为-1.2dB.在DC到32GHz的范围内相移具有良好的线性,插入损耗小于-1.8dB,反射损耗好于-11dB.实验结果表明了该结构在高介电常数衬底上制造低插损、宽带数字微机械射频移相器的潜力.     

A Ku‐Band 5‐Bit Phase Shifter Using Compensation Resistors for Reducing the Insertion Loss Variation

This paper describes the performance of a Ku‐band 5‐bit monolithic phase shifter with metal semiconductor field effect transistor (MESFET) switches and the implementation of a ceramic packaged phase shifter for phase array antennas. Using compensation resistors reduced the insertion loss variation of the phase shifter. Measurement of the 5‐bit phase shifter with a monolithic microwave integrated circuit demonstrated a phase error of less than 7.5° root‐mean‐square (RMS) and an insertion loss variation of less than 0.9 dB RMS for 13 to 15 GHz. For all 32 states of the developed 5‐bit phase shifter, the insertion losses were 8.2 ± 1.4 dB, the input return losses were higher than 7.7 dB, and the output return losses were higher than 6.8 dB for 13 to 15 GHz. The chip size of the 5‐bit monolithic phase shifter with a digital circuit for controlling all five bits was 2.35 mm × 1.65 mm. The packaged phase shifter demonstrated a phase error of less than 11.3° RMS, measured insertion losses of 12.2 ± 2.2 dB, and an insertion loss variation of 1.0 dB RMS for 13 to 15 GHz. For all 32 states, the input return losses were higher than 5.0 dB and the output return losses were higher than 6.2 dB for 13 to 15 GHz. The size of the packaged phase shifter was 7.20 mm × 6.20 mm.     

0.13-μm CMOS Phase Shifters for X-, Ku-, and K-Band Phased Arrays

Two 4-bit active phase shifters integrated with all digital control circuitry in 0.13-mum RF CMOS technology are developed for X- and Ku-band (8-18 GHz) and K-band (18-26 GHz) phased arrays, respectively. The active digital phase shifters synthesize the required phase using a phase interpolation process by adding quadrature-phased input signals. The designs are based on a resonance-based quadrature all-pass filter for quadrature signaling with minimum loss and wide operation bandwidth. Both phase shifters can change phases with less than about 2 dB of RMS amplitude imbalance for all phase states through an associated DAC control. For the X- and Ku-band phase shifter, the RMS phase error is less than 10^o over the entire 5-18 GHz range. The average insertion loss ranges from to at 5-20 GHz. The input for all 4-bit phase states is typically at -5.4 plusmn1.3 GHz in the X- and Ku-band phase shifter. The K-band phase shifter exhibits 6.5-13 of RMS phase error at 15-26 GHz. The average insertion loss is from 4.6 to at 15-26 GHz. The input of the K-band phase shifter is at 24 GHz. For both phase shifters, the core size excluding all the pads and the output 50 Omega matching circuits, inserted for measurement purpose only, is very small, 0.33times0.43 mm² . The total current consumption is 5.8 mA in the X- and Ku-band phase shifter and 7.8 mA in the K-band phase shifter, from a 1.5 V supply voltage.     

Linear tunable phase shifter using a left-handed transmission line

We demonstrate a compact, linear, and low loss variation hybrid phase shifter using a left-handed (LH) transmission line. For frequencies from 4.3 to 5.6 GHz, this phase shifter gives a nearly linear phase variation with voltage, with a maximum deviation of /spl plusmn/7.5/spl deg/. Within this frequency range, the maximum insertion loss is 3.6 dB, and the minimum insertion loss is 1.8 dB over a continuously adjustable phase range of more than 125/spl deg/, while minimum return loss is only 10.2 dB. Furthermore, this phase shifter requires only one control line, and it consumes almost no power.     

A Novel Miniature 1–22 GHz 90° MMIC Phase Shifter with Microstrip Radial Stubs

A novel miniature ultra wide bandwidth 90 monolithic microwave integrated circuit phase shifter with microstrip radial stubs operated from 1 to 22 GHz is presented. The phase shifter exhibits a high performance. Within the whole bandwidth from 1 to 22 GHz, the phase error of the phase shifter is less than 3deg, the return losses of the different phase shift states are more than 14 dB, the insertion loss of all phase shift states are within 3.3plusmn0.5 dB. The chip size of this phase shifter is 1.4 mm times 1.8 mm times 0.1 mm. The proposed phase shifter can be compatible with different polarity control signals without the need of drivers and can also be compatible with either analogue or digital control signals.     

Millimeter-Wave Reflective-Type Phase Shifter in CMOS Technology

The design and measurement of a compact, wide-band reflective-type phase shifter in 90 nm CMOS technology in V-band frequency is presented. This phase shifter has a fractional bandwidth of 26% and an average insertion loss of 6 dB over all phase states. The chip area is only 0.08 mm $^{2}$. Measurement results show that the developed phase shifter provides 90$^{circ}$ continuous phase shift over the frequency range of 50–65 GHz. The measured return loss is greater than 12 dB at 50 GHz. The output power is linear up to at least 4 dBm input power.      

基于SP4T开关的4位MEMS开关线式移相器设计

设计了一款4位MEMS开关线式移相器,由SP4TMEMS开关和微带传输线构成,工作于X波段。单刀四掷(single pole 4throw,SP4T)开关用于切换两条不同电长度的信号通道,即参考相位通道和延迟相位通道。每个SP4T开关包含4个悬臂梁接触式RF MEMS串联开关。介绍了4位MEMS开关线式移相器的总体设计,并给出了其关键部件SP4T开关和相位延迟线的设计细节。采用ADS软件仿真分析了器件的电气性能。仿真分析得到:SP4T开关在中心频率10GHz处的回波损耗为-36dB,插入损耗约为0.18dB;移相器各相位的回波损耗均低于-15dB,插入损耗为-0.8～-0.4dB。这种射频MEMS移相器具有小型化、低功耗和高隔离度的优点。     

A 170 GHz 45$^{circ}$ Hybrid for Submillimeter Wave Sideband Separating Subharmonic Mixers

We present a 135deg/45deg phase shifter hybrid intended to be used in subharmonic sideband separation mixer schemes at submillimeter-wave frequencies. The design consists of an increased height 90deg 6-arm branch guide coupler with a three stub loaded differential line 45deg phase shifter at the output. The device has been implemented at G-band in an E-plane WR-05 splitblock design with a center frequency of 170 GHz and 15 % bandwidth. Measured S-parameter are in good agreement with simulations showing an isolation and return loss better than 20 dB and an amplitude and phase imbalance within 0.4 dB and 2deg, respectively.     

A Full-360° Reflection-Type Phase Shifter With Constant Insertion Loss

A new reflection-type phase shifter with a full 360deg relative phase shift range and constant insertion loss is presented. This feature is obtained by incorporating a new cascaded connection of varactors into the impedance-transforming quadrature coupler. The required reactance variation of a varactor can be reduced by controlling the impedance ratio of the quadrature coupler. The implemented phase shifter achieves a measured maximal relative phase shift of 407deg, an averaged insertion loss of 4.4 dB and return losses better than 19 dB at 2 GHz. The insertion-loss variation is within plusmn0.1 and plusmn0.2 dB over the 360deg and 407deg relative phase shift tuning range, respectively.     

Ka波段0/Π MEMS移相器

报道了一种Ka波段实时延MEMS移相器芯片。该移相器基于开关线式移相器设计原理,集成了4个MEMS三端口直接接触式毫米波开关单元,使用共面波导(CPW)传输线,利用阶梯阻抗的方式实现传输线拐角和CPW空气桥结构的传输线阻抗匹配。芯片采用RF MEMS表面牺牲层工艺制作在400μm厚的高阻硅衬底上,面积为1.4 mm×2.8 mm。测试显示,在34~36 GHz频率范围内,相移误差3.2°,插入损耗2 dB,反射损耗小于-15 dB。     

Optimum design of waveguide E-plane stub-loaded phaseshifters

Broadband low-insertion-loss E-plane stub-loaded rectangular waveguide phase shifters are designed with the method of field expansion into normalized eigenmodes, which includes higher-order mode interaction between the step discontinuities. Computer-optimized three-stub prototypes of 90° differential phase shift with reference to an empty waveguide of appropriate length, designed for R140-band (12.4-18 GHz) and R320-band (26.5-40 GHz) waveguides, achieve typically ±0.5° phase shift deviation within about 20% bandwidth. For two-stub designs, the corresponding values are about +2.5°/-1° and 17%. Both designs achieve minimum return loss of 30 dB. The theory is verified by measurements of a compact R120-band (10-15 GHz) waveguide phase shifter design example milled from a solid block, showing measured insertion loss of about 0.1 dB and about +2.5°/-0.5° phase error between 10.7 and 12.7 GHz     

New miniature 15-20-GHz continuous-phase/amplitude control MMICs using 0.18-/spl mu/m CMOS technology

The design and performance of two new miniature 360/spl deg/ continuous-phase-control monolithic microwave integrated circuits (MMICs) using the vector sum method are presented. Both are implemented using commercial 0.18-/spl mu/m CMOS process. The first phase shifter demonstrates all continuous phase and an insertion loss of 8 dB with a 37-dB dynamic range from 15 to 20 GHz. The chip size is 0.95 mm /spl times/ 0.76 mm. The second phase shifter can achieve all continuous phase and an insertion loss of 16.2 dB with a 38.8-dB dynamic range at the same frequency range. The chip size is 0.71 mm /spl times/ 0.82 mm. To the best of the authors' knowledge, these circuits are the first demonstration of microwave CMOS phase shifters using the vector sum method with the smallest chip size for all MMIC phase shifters with 360/spl deg/ phase-control range above 5 GHz reported to date.     

A new Millimeter-wave printed dipole phased array antenna using microstrip-fed coplanar stripline tee junctions

A new millimeter-wave printed twin dipole phased array antenna is developed at Ka band using a new microstrip-fed CPS tee junction, which does not require any bonding wires, air bridges, or via holes. The phased array used a piezoelectric transducer (PET) controlled tunable multitransmission line phase shifter to accomplish a progressive phase shift. A progressive phase shift of 88.8/spl deg/ is achieved with the 5 mm of perturber length when the PET has full deflection. Measured return loss of the twin dipole antenna is better than 10 dB from 29.5 to 30.35 GHz. Measured return loss of better than 15 dB is achieved from 30 to 31.5 GHz for a 1/spl times/8 phased array. The phased array antenna has a measured antenna gain of 14.4 dBi with 42/spl deg/ beam scanning and has more than 11 dB side lobe suppression across the scan.     

An X-band 22.5°/45° digital phase shifter based on switched filter networks

The design approach and performance of a 22.5°/45°digital phase shifter based on a switched filter network for X-band phased arrays are described. Both the MMIC phase shifters are fabricated employing a 0.25μm gate GaAs pHEMT process and share in the same chip size of 0.82×1.06 mm². The measurement results of the proposed phase shifters over the whole operating frequency range show that the phase shift error is less than 22.5°±2.5°, 45°±3.5°, which shows an excellent agreement with the simulated performance, the insertion loss is within the range of 0.9-1.2 dB for the 22.5°phase shifter and 0.9-1.4 dB for the 45°phase shifter, and the input/output return loss is better than -12.5 and -11 dB respectively. They also achieve the similar P_1dB continuous wave power handing capability of 24.8 dBm at 10 GHz. The phase shifters show a good phase shift error, insertion loss and return loss in the X-band (40%), which can be employed into the wide bandwidth multi-bit digital phase shifter.     

Highly Linear Ku-Band SiGe PIN Diode Phase Shifter in Standard SiGe BiCMOS Process

This letter presents a fully integrated highly linear 4-bit SiGe PIN diode phase shifter MMIC for Ku-band phase-array application in the standard SiGe BiCMOS process. High-performance customized SiGe PIN diode switches are employed for high linearity and low insertion loss. The use of differential inductors in the hybrid switched filters makes this phase shifter compact in size. Measurements show 20 dB ${pm}5$ dB input/output return loss, less than ${pm} 1.8^{circ}$ phase variation, and maximum 37 dBm input-referred IP3 over the 14.5–15.5 GHz frequency range, while this phase shifter draws an average current of 3.5 mA from a 3.3 V power supply. To the authors' best knowledge, this 4-bit phase shifter MMIC achieves the highest linearity at Ku-band in the standard SiGe BiCMOS process without utilizing any post-fabrication process for low loss transmission lines.