MEMS微致动器的研究

MEMS技术在未来的发展中有着重要的意义。本文介绍了MEMS微致动器和各类驱动模式的优缺点,并以微泵为例,详细比较了致动器的执行机制和原理。     

Parylene薄膜及其在MEMS中的应用

介绍了聚合物Parylene,包括其制备工艺和Parylene薄膜的图形化。着重介绍了Parylene在微流体系统的应用,包括微阀、微泵和微通道;在可植入微系统中的应用,包括人工耳蜗和视网膜假体。近来的研究表明,基于Parylene的MEMS微器件广泛应用在各种MEMS微结构、微传感器和微驱动器上,Parylene在各种完全集成微系统应用中将具有更加诱人的前景。     

A highly simple failure detection method for electrostatic microactuators: application to automatic testing and accelerated lifetime estimation

Reliability and testability are two important factors for the development of batch fabrication of microelectromechanical systems (MEMS) or mixed MEMS/IC applications. In that frame, an easy-to-implement electrical method of detection of failures is presented in this paper, valid for every kind of electrostatic microactuators showing pull-in behavior, with great expectation value in the case of arrayed MEMS. The method relies on the detection of a pull-in current peak at very low frequency. An experimental setup is described and results are shown obtained with prototypes of electrostatic microactuators with parallel capacitances created by deep reactive ion etching on silicon-on-insulator wafers. This method is really suitable for automation and application to on-line testing during mass production and reliability studies. The functional schematic of a test circuitry is proposed for implementation in an industrial tester or for built-in self-test purposes. Then, in order to illustrate the benefits of this method for reliability studies, it is used in conjunction with high voltage testing for accelerated lifetime measurements. A time gain factor of 20 is achieved with above-mentioned test structures.     

微型热致动器研究

本论文围绕微型热致动器的研制开发,对热致动方式进行较为深入研究,利用硅微细加工工艺制造出多种型热致动器,并进行了理论分析和实验测试。     

负载刚度对电热微执行器输出性能的影响分析

针对微机电系统中电热微执行器和位移放大机构都具有柔性的事实,从理论上分析了作为负载系统的柔性位移放大机构对微执行器输出位移的影响,并用有限元方法对二者的工作性能进行了仿真.结果表明,电热微执行器外接负载的刚度和执行器本身刚度的比值是影响整个组合器件性能的重要因素.最后用深层反应离子刻蚀技术(DRIE)在硅隔离衬底(SOI)上加工了电热微执行器和柔性位移放大机构,并对其进行了测试,测试结果与有限元分析结果符合得很好.     

串联电容对扭转静电微执行器Pull-in稳定的影响

在MEMS执行器的设计中,求出准确的Pull-in电压值是至关重要的.针对扭转式静电微执行器,采用串联电容方法来拓宽MEMS执行器的Pull-in行程,提出了相应的Pull-in模型,并给出了算例的数值结果.这些结果对扭转式静电微执行器的设计具有一定的参考价值.     

微执行器的研究与展望

在微机电系统中,微执行器是核心部件。为了优化设计微执行器,通过对比近年来各种微执行器的研究和发展,系统地总结了线性位移微执行器所采用的驱动原理、驱动方式和应用以及存在的优缺点等。针对热执行器,提出了个人的一些见解。     

Microactuators and their technologies

This paper gives a brief overview of microactuators, focussing on devices made by microfabrication technologies which are based on silicon processes like photolithography, etching, thin film deposition etc. These technologies enable the miniaturization of electrical devices as well as micromechanisms and microactuators. They can be batch fabricated on large area silicon substrates and represent the smallest available in a vast field of actuators. Mentioning the activation principles and the three main fabrication technologies: bulk micromachining, surface macromachining and moulding, the paper focusses on devices, which made their way into industrial applications or prototypes. The far most developed micro electro-mechanical systems (MEMS) are found in micro-fluidic systems (printheads, microvalves and -pumps) and micro-optical systems (micromirrors, -scanners, -shutters and -switches). They can be combined with microelectronics and microsensors to form an integrated on-chip or hybrid-assembled system. Other MEMS-actuators like microgrippers, microrelays, AFM heads or data storage devices, are promising devices for future medical, biological and technical applications like minimal invasive surgery or the vast field of information storage and distribution.     

Demonstrating kHz Frequency Actuation for Conducting Polymer Microactuators

This paper reports results on ionic EAP micromuscles converting electrical into micromechanical response in open‐air. Translation of small ion motion into large deformation in bending microactuator and its amplification by fundamental resonant frequency are used as tools to demonstrate that small ion vibrations can still occur at frequency as high as 1000 Hz in electrochemical devices. These results are achieved through the microfabrication of ultrathin conducting polymer microactuators. First, the synthesis of robust interpenetrating polymer networks (IPNs) is combined with a spincoating technique in order to tune and drastically reduce the thickness of conducting IPN microactuators using a so‐called “trilayer” configuration. Patterning of electroactive materials as thin as 6 μm is demonstrated with existing technologies, such as standard photolithography and dry etching. Electrochemomechanical characterizations of the micrometer sized beams are presented and compared to existing model. Moreover, thanks to downscaling, large displacements under low voltage stimulation (±4 V) are reported at a frequency as high as 930 Hz corresponding to the fundamental eigenfrequency of the microbeam. Finally, conducting IPN microactuators are then presenting unprecedented combination of softness, low driving voltage, large displacement, and fast response speed, which are the keys for further development to develop new MEMS.     

串联电容的静电驱动微执行器的动态Pull-in模型

在MEMS执行器的设计中,求出准确的pull-in参数是至关重要的.在过去的研究中,在准静态假设下,电压控制的MEMS微执行器的pull-in模型已经被提出,并且还提出了一些拓宽微执行器稳定行程的方法.在动态条件下,电压控制的MEMS微执行器的pull-in模型也已经被提出.但是,还没有人研究如何提高微执行器动态稳定行...     

驱动电极位置对扭转式静电微执行器Pull-in行程的影响

Pull-in失稳问题是静电微执行器的关键问题之一。为了提高静电微执行器的Pull-in稳定行程,提出了一些方法,例如采用串联电容等。对于扭转式静电微执行器,提出通过改变驱动电极位置的方法来改变Pull-in位置与Pull-in电压,导出了驱动电极位置与Pull-in参数的计算模型。实例计算结果表明,改变电极位置可以使扭转式静电微执行器达到满行程。这些结果对于扭转式静电微执行器Pull-in位置的设计具有较好的参考价值。     

Electrostatic microactuators for precise positioning of neural microelectrodes

Microelectrode arrays used for monitoring single and multineuronal action potentials often fail to record from the same population of neurons over a period of time likely due to micromotion of neurons away from the microelectrode, gliosis around the recording site and also brain movement due to behavior. We report here novel electrostatic microactuated microelectrodes that will enable precise repositioning of the microelectrodes within the brain tissue. Electrostatic comb-drive microactuators and associated microelectrodes are fabricated using the SUMMiT V (Sandia's Ultraplanar Multilevel MEMS Technology) process, a five-layer polysilicon micromachining technology of the Sandia National labs, NM. The microfabricated microactuators enable precise bidirectional positioning of the microelectrodes in the brain with accuracy in the order of 1 microm. The microactuators allow for a linear translation of the microelectrodes of up to 5 mm in either direction making it suitable for positioning microelectrodes in deep structures of a rodent brain. The overall translation was reduced to approximately 2 mm after insulation of the microelectrodes with epoxy for monitoring multiunit activity. The microactuators are capable of driving the microelectrodes in the brain tissue with forces in the order of several micro-Newtons. Single unit recordings were obtained from the somatosensory cortex of adult rats in acute experiments demonstrating the feasibility of this technology. Further optimization of the insulation, packaging and interconnect issues will be necessary before this technology can be validated in long-term experiments.     

通信领域中的MEMS器件及发展动态

微电子机械系统(MEMS)技术在通信领域中有着广泛的应用前景,本文介绍了在无线通信和光通信中的MEMS器件如MEMS电感、电容、开关、滤波器、光检测器等MEMS器件的原理、结构和发展概况,指出了MEMS器件发展所面临的问题和方向。     

Microelectromechanical systems

The microfabrication techniques used to develop high-performance closed-loop-controlled microelectromechanical systems (MEMS) are discussed. A generalized MEMS could consist of mechanical components, sensors, actuators, and electronics, all integrated in the same environment. Bulk and surface micromachining, substrate bonding, and electroforming in conjunction with X-ray lithography, all integral components of silicon micromachining, are described. The development of a materials base for MEMS and a variety of physical phenomena for microactuator applications that have recently been demonstrated are reviewed. The applications and future trends of MEMS technologies are discussed     

微电子机械系统

本文对国外微电子机械系统的研究现况作了评述，介绍了ＭＥＭＳ的主要技术和它的应用情况，对国外的一些主要研究机构的情况进行了分析，最后就我国ＭＥＭＳ的发展提出了一些建议。     

微机电系统的研究与展望

微机电系统是面向2l世纪的高新技术。文章对微机电系统产生的背景、组成特征、发展现状及应用前景进行了全面分析。在此基础上，论述了MEMS未来发展的趋势。     

微驱动器的原理与应用

为了优化设计微驱动器,笔者通过对比近年来各种微驱动器的研究和发展,系统地概括总结了微驱动器所采用的主要的驱动原理、驱动方式和加工技术及其存在的优缺点等。并在此基础上,首次将微驱动器按功能进行了分类。     

Silicon carbide MEMS for harsh environments

Silicon carbide (SiC) is a promising material for the development of high-temperature solid-state electronics and transducers, owing to its excellent electrical, mechanical, and chemical properties. This paper is a review of silicon carbide for microelectromechanical systems (SiC MEMS). Current efforts in developing SiC MEMS to extend the silicon-based MEMS technology to applications in harsh environments are discussed. A summary is presented of the material properties that make SiC an attractive material for use in such environments. Challenges faced in the development of processing techniques are also outlined. Last, a review of the current stare of SiC MEMS devices and issues facing future progress are presented     

基于MEMS工艺的微型制冷器

微机电系统MEMS（micro-electro-mechanical system）是一种集合了微电子与机械工程技术的新型高科技装置,其制造工艺可以进行最小至纳米尺度的加工以及高度集成化的微型制造。其产品微小体积、高度集成化以及高性能高产热的特性也决定了其需要匹配相应的制冷解决方案,本文重点阐述了基于MEMS制造工艺并同时应用于MEMS产品的微型制冷器的工作原理、性能及发展趋势。分别分析了微型半导体制冷器以及微型节流制冷器各自的优势和不足,对微型制冷器的未来发展提出了建议。