毫米级静电微扑翼驱动器的结构设计、工艺与测试

针对仿昆虫扑翼飞行器核心动力装置——微驱动器的结构特点和研究难点,设计了一种基于静电驱动原理的毫米(mm)级微扑翼驱动器,并针对各个部件研究了整套加工工艺与测试方法.运动优化与升力测试结果表明:微扑翼驱动器(翼展9 mm,重量3 mg)以91 Hz的频率实现了±40°的拍动和±25°的扭转运动,输出1.5 mg的升力,升重较以往静电微扑翼驱动器有大幅提升.研究成果为实现仿昆虫微型飞行器的自主飞行提供了新的方向,并奠定了理论与试验基础.     

微型仿鸟扑翼飞机设计与仿真系统开发

基于仿生学的微扑翼飞行器是一种模仿鸟类飞行的新概念飞行器.鉴于扑翼飞行理论及实践本身的困难,为了减少设计制造中的风险,开发了微型仿鸟扑翼飞机设计与仿真系统.采用Visual C 和MATLAB进行仿生学设计模块、驱动机构和气动力计算模块的开发,由此进行扑翼飞机结构及动力学设计,生成初步样机.结合OpenGL技术,建立微型扑翼飞机的三维可视化结构模型,进行扑翼飞机的运动和虚拟飞行仿真.进行扑翼飞机的开发实例分析,结果与实际制作的扑翼飞机各项特征吻合.该系统有很高的实用价值,可以有效地辅助进行微型仿鸟扑翼飞机的研制工作.     

仿昆扑翼微飞行器电磁驱动电路设计与制造

针对电磁驱动方式的仿昆扑翼微飞行器,设计了电磁线圈驱动电路,电路能够驱动微飞行器扑动双翼。驱动电路利用电池组和升压(BOOST)电路实现电路供电。研制了产生两路电压控制信号的最小系统板,能够在上位机在线实时控制输出信号的频率和幅值。电压控制信号通过电路后,电路输出稳定驱动电流,实现对仿昆扑翼微飞行器翅膀的控制。     

微扑翼飞行中的生物和仿生力传感器述评

随着昆虫飞行机理和仿生扑翼飞行研究的不断进展,理解昆虫的传感系统并研制适于微型扑翼飞行器的仿生传感器逐渐成为目前关注的焦点,而MEMS的快速发展使得研制新型的仿生微型传感器成为可能。简要介绍仿生扑翼飞行中传感系统研究现状,对昆虫飞行中采用的力传感器原理、分类进行了介绍;重点分析了几种典型的力传感器;归纳和总结了基于昆虫毛状传感器、钟状传感器和平衡棒仿生,采用各种MEMS技术研制的微型力传感器的生产工艺和应用特点;探索和展望了仿生力传感器的发展特点和今后的发展趋势。     

微型仿昆扑翼飞行器解耦操控机制

提出一种解耦操控机制，用于解决微型仿昆扑翼飞行器飞行控制中的欠驱动问题．首先通过理论分析和仿真试验分析了翅膀的振翅运动参数对气动力旋量的控制作用；然后在对昆虫飞行所采用的生物学振翅运动进行模拟的基础上，通过调整翅膀的振翅运动参数，设计了一个能对气动力和气动力矩实现独立控制的解耦操控机制．此操控机制采用周期函数将控制输入量参数化，从而在仿昆扑翼布局的动力学模型中引入更多数目的独立控制量．通过将原动力学系统转化为完全能控系统，解决了仿昆扑翼布局的欠驱动控制问题．同时，此操控机制仅仅要求转动角可控，有效地降低了仿昆扑翼飞行器的设计难度．     

仿生变形飞行器的飞行特性研究

随着无人飞行器的小型化甚至微型化发展,扑翼飞行的优势逐渐显现出来。受鸟类及昆虫飞行运动的启发,分析鸟类及昆虫的扑翼运动特性,设计了一种鸟类扑翼飞行方式,使用涡格法进行了扑翼的气动计算,并采用质点弹道学模型分析了仿生飞行的轨迹特性。仿真结果表明,设计的扑翼运动效果良好。     

基于电磁驱动的微扑翼飞行器驱动器振动特性

电磁驱动的微扑翼飞行器翼端拍打振幅受到驱动电压、磁感应强度、电流角频率等因素的影响。为了探究上述三个因素对微扑翼飞行器翼端拍打振幅的影响规律,提出一种新型电磁驱动器方案,并建立电磁场中微梁振动模型,为验证电磁驱动器方案的可行性及进一步探究相关因素对微梁振动的影响规律,设计开展电磁驱动的微梁振动试验。结合理论振动模型与试验结果,得到驱动电压、磁感应强度、电流角频率对于梁端拍打振幅的影响规律,研究结果对于后续微扑翼飞行器电磁驱动器的研究发展具有一定的指导意义。     

仿鸟扑翼飞行器姿态镇定研究

针对仿鸟扑翼飞行器的欠驱动特性,提出了一种简化其飞行控制问题并实现其局部渐近稳定的控制方法．建立并分析了仿鸟扑翼飞行器的动力学和运动学模型,证明其控制问题等价于升力、推力独立可控情况下的姿态控制问题．进一步分析的结果表明,仿鸟扑翼飞行器的升力、推力都是独立可控的,其姿态控制为耦合输入下刚体的姿态控制问题．通过设计光滑时变反馈控制律实现姿态控制的局部渐近稳定,从而解决扑翼飞行器的飞行控制问题．     

SolidWorks在扑翼微型飞行器设计制造中的应用

扑翼微型飞行器是一种模仿鸟类或昆虫飞行的新概念飞行器。介绍SolidWorks设计软件在驱动机构运动仿真、翅翼频率分析和参数化设计中的应用。结果表明,SolidWorks应用于扑翼微型飞行器设计制造可以简化设计流程,提高设计效率。     

电磁振动式微扑翼飞行器动态特性研究

电磁驱动具有驱动电压低、作用力大等优点, 是微机械领域一种重要驱动方式。本文设计了一种电磁振动式微扑翼飞行器，在此基础上，建立了电磁振动式微扑翼飞行器非线性动力学模型，研究了不同电磁力激励下系统动态特性，获得了系统固有频率，并得出方波和正弦半波电磁力驱动能够产生较大扑动幅度的结论。最后，研究了电磁振动式微扑翼飞行器机-磁耦合非线性系统动态特性，研究结果表明电磁振动式微扑翼飞行器适合采用正弦半波电压激励，而且通过结构改进措施，提高了扑动的对称性和稳定性。     

The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle

An electromagnetic MEMS flapping-wing micro air vehicle at insect scale is presented. The detailed scheme, design, micro fabrication and experiment are given in this paper. Firstly, by commercial software ANSYS and MATLAB, electromagnetic analysis, modal analysis and kinetics analysis are proposed. Moreover, based on the result of theoretical analysis, appropriate structure, material and inherent frequency are selected. Then, a new LIGA-like process based on SU-8 photoresist technology is adopted to fabricate thorax, tergum and vein. Finally, a 3.5 cm wingspan, 144 mg weight prototype is integrated, and then we finish the flapping test for this prototype, which has a flapping resonance frequency range of 120–150 Hz. The test result demonstrates the feasibility solution in the development of FMAV based on MEMS, this work is a stepping-stone on the path toward flying robotic insects.     

An Improved Evolvable Oscillator and Basis Function Set for Control of an Insect-Scale Flapping-Wing Micro Air Vehicle

This paper introduces an improved evolvable and adaptive hardware oscillator design capable of supporting adaptation intended to restore control precision in damaged or imperfectly manufactured insect-scale flapping-wing micro air vehicles. It will also present preliminary experimental results demonstrating that previously used basis function sets may have been too large and that significantly improved learning times may be achieved by judiciously culling the oscillator search space. The paper will conclude with a discussion of the application of this adaptive, evolvable oscillator to full vehicle control as well as the consideration of longer term goals and requirements.     

基于MEMS和CORTEX-M3的微惯性测量单元研制

从工程实际出发,给出了一种基于新型Cortex-M3内核ARM和MEMS惯性传感器的低成本、高性能微型惯性测量单元的结构框架。详细介绍了采用三轴MEMS陀螺、三轴MEMS加速度计和三轴磁阻传感器研制的微惯性测量单元硬件设计方案,分析了陀螺和加速度计的信号噪声,利用均值滤波法对信号进行预处理,对预处理后的信号采用FIR滤波器进行滤波,对陀螺和加速度计进行了标定。该测量单元已应用于某小型无人机的姿态测量,达到预期效果。     

分立活塞式MEMS微变形镜的系统级设计

利用实验室自主研发的集成设计平台,搭建了分立活塞式MEMS微变形镜的系统级行为模型,并对其有效性和准确性进行了验证;在此基础上完成了微变形镜的结构设计,并由仿真得到了结构的性能参数.研究结果表明,采用系统级方法进行MEMS器件的设计能够在确保求解精度的前提下,显著提高设计效率,缩短设计周期,减小设计成本;所设计的MEMS微变形镜的各项性能指标完全能满足一般自适应光学系统的应用要求.     

Design of wide range MEMS tunable capacitor for RF applications

The RF applications like voltage controlled oscillators, tunable filters, resonators etc., requires tunable capacitors in their designs. This paper presents the design of wide range MEMS tunable capacitors for RF applications. This design consists of an air suspended bottom plate and a fixed top plate. The top fixed plate and the suspended bottom plate form the tunable capacitor. The capacitance range of this tunable capacitor is from 69.172 to 138.344?nF. This range is wider compared with the conventional MEMS tunable capacitors of tuning ranges in pico Farads. The fabrication process is similar to that of the existing standard integrated circuit fabrication processes, which makes this design suitable for integrated RF applications.     

MEMS based humidity sensor using Si cantilever beam for harsh environmental conditions

The RF applications like voltage controlled oscillators, tunable filters, resonators etc., requires tunable capacitors in their designs. This paper presents the design of wide range MEMS tunable capacitors for RF applications. This design consists of an air suspended bottom plate and a fixed top plate. The top fixed plate and the suspended bottom plate form the tunable capacitor. The capacitance range of this tunable capacitor is from 69.172 to 138.344 nF. This range is wider compared with the conventional MEMS tunable capacitors of tuning ranges in pico Farads. The fabrication process is similar to that of the existing standard integrated circuit fabrication processes, which makes this design suitable for integrated RF applications.     

基于MEMS和GPS的驾驶行为和车辆状态监测系统设计

为了适应智能车辆辅助驾驶系统对驾驶和车辆状态监测的要求,利用MEMS惯性传感器自主设计了微惯性测量单元,并结合GPS设计了一种驾驶行为和车辆状态监测系统,实现对驾驶员操纵动作的感知、汽车6自由度运动状态参数和汽车运行车速的实时监测。介绍了MEMS传感器的选型,设计,安装和布置。实车道路实验结果表明:系统对驾驶员踩踏刹车踏板、离合器踏板和变换档位的操纵动作的感知效果较好,侧向加速度和方向盘转角的理论识别曲线与实车实验曲线在趋势上比较吻合。该系统为开发驾驶人员操纵动作自动识别系统提供理论基础和技术支持,也可为提高汽车行驶性和安全性提供重要的理论依据和工程应用指导。     

Active gap reduction in comb drive of three axes capacitive micro accelerometer for enhancing sense capacitance and sensitivity

The performance of micro-machined sensors is primarily determined via the sensitivity of sensing electrode to displacement. This paper presents the design, modelling, optimization and fabrication of an active gap reduction mechanism used on a conventional comb drive to enhance the capacitance in a three axes capacitive micro accelerometer. The design parameters of the active gap reduced comb drive (AGRCD) are optimized for best performance. The finite element analysis of the AGRCD is performed for design verification. The modeling and simulation results demonstrated a 534 % increase in sensitivity of the three axes capacitive micro accelerometer. The three axes capacitive micro accelerometer with AGRCD is fabricated using a commercially available standard metal-multi user MEMS processes.