Polymer-based flexible microlens arrays with hermaphroditic focusing properties

Polymer microlens arrays with hermaphroditic focusing behaviors are demonstrated. Each microlens in an arrays exhibits either converging or diverging focus, depending on the polarization direction of the incident light. A polymer film with patterned microlens arrays is flexible, lightweight, and ultrathin (approximately 50 microm). Details of the lens structure, device fabrication, and lens performance are described.     

Replication of Microlens Arrays by Gas-Assisted Hot Embossing

This article reports an effective method for mass-production of 300 × 300 microlens arrays. A microlens array master is formed by imprint lithography and photo-resist reflow at room temperature. The electroforming is then applied to fabricating the Ni mold from the master, followed by the gas-assisted hot embossing to replicate the microlens arrays. The isotropic gas pressure on the plastic film against the Ni mold produces plastic microlens array of high quality and uniformity. The effects of processing parameters including the processing temperature, pressure, and time on the replication quality of microlens arrays were investigated. The experimental results show that the filling of molded microlens significantly increases as the processing temperature and pressure increase. Under the condition of 180°C, 3.9 MPa for gas pressure, and 90 seconds processing time, the arrays of polycarbonate microlens of diameter 150 µm and pitch 200 µm have been successfully replicated. The deviation of replicated microlens from the mold is less than 0.25%. Compared with the conventional hot embossing process, the new replication method offers more uniform embossing pressure distribution. The great potential for replicating microlens array on large plastic films with high productivity and low cost was demonstrated.     

衍射微透镜列阵掩模制作软件的设计

研究了衍射微透镜列阵的设计方法及ＣＩＦ格式掩模数据的数据结构与生成方法,设计了一套产用软件,采用图形切割、跟踪计算等方法,解决了生成子孔径为矩形、六 方形及圆环扇形的衍射微透镜列阵掩模的问题,满足了实际系统对衍射微透镜列阵子孔径形状的各种需求。     

大数值孔径微透镜阵列激光扫描

提出微透镜阵列与转镜相结合的大口径激光光束扫描方法。采用机械制模法制作微透镜阵列模板 ,然后采用模压法制作光学微透镜阵列 ,其子口径为 2 mm× 2 mm,数值孔径为 0 .2 ,阵列数为 8× 8。并进行了扫描测试实验 ,扫描角达± 6.56°。     

Analysis of a cylindrical microlens array with long focal depth by a rigorous boundary-element method and scalar approximations

We investigated the focal characteristics of open-regional cylindrical microlens arrays with long focal depth by using a rigorous boundary-element method (BEM) and three scalar methods, i.e., a Kirchhoff and two Rayleigh-Sommerfeld diffraction integral forms. Numerical analysis clearly shows that the model cylindrical microlens arrays with different f-numbers can generate focusing beams with both long focal depth and high transverse resolution. The performance of the cylindrical microlens arrays, such as extended focal depth, relative extended focal depth, diffraction efficiency, and focal spot size, is appraised and analyzed. From a comparison of the results obtained by the rigorous BEM and by scalar approximations, we found that the results are quite similar when the f-number equals f/1.6; however, they are quite different for f/0.8. We conclude that the BEM should be adopted to analyze the performance of a microlens array system whose f-number is less than f/1.0.     

Analysis of a micro-optical light modulator

A light modulator with microlens arrays in a confocal arrangement and with various filters in the common focal plane of the arrays, which are translated with the help of piezoelectric actuators, is proposed. The theoretical analysis deals with the influence of the lens arrays on the performance of the modulator. The system is investigated for spatially incoherent beams. It is shown that the configuration is suited for efficient modulation of radiation emitted by multimode fibers. A choice of the proper focal length of the microlens arrays and lens pitch d results in a good transmission efficiency (above 90%) combined with a large number of possible switching states.     

Highly corrected close-packed microlens arrays and moth-eye structuring on curved surfaces

The fabrication of near-micrometer-sized close-packed coherent microlens arrays on spheric or aspheric surfaces has been accomplished by use of a compact holographic projector system that was developed for producing multimicrometer down to submicrometer grid patterning on curved surfaces. The microlens arrays, which can be utilized as moth-eye relief structures, are formed in a photoimageable bisbenzocyclobutene polymeric resin by a photolytic process involving standing-wave interference patterns from the holographic projector system. Because of absorption, each integral microlenslet of the finished arrays possesses a near-paraboloid contour. The trajectories of the meridional rays from each microlenslet can be optimized to intersect at either a single point or a locus of points.     

Microlenses and Microlens Arrays Formed on a Glass Plate by Use of a CO(2) Laser

Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO(2) laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused CO(2) laser beam, it tends to become a hyperboloid owing to surface tension, which results in a microlens. A profile of the microlens was measured with an ultrahigh accurate three-dimensional profilometer (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utilizes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He-Ne laser as a light source. The focused spot FWHM diameter of 1.35 mum was obtained, and the modulation transfer function was derived from the spot profile. Microlens arrays were also fabricated and characterized.     

Index-distributed planar microlenses for three-dimensional micro-optics fabricated by silver-sodium ion exchange in BGG35 substrates

Fabrication of planar microlens arrays by silver-sodium ion exchange is possible by using a new glass type, optimized for this technology. Because of its nonlinear diffusion response it is well suited to the fabrication of microlens arrays. We show that the diffusion coefficient can be described theoretically by an exponential concentration dependence. The parameters of the planar microlenses are measured interferometrically and by imaging experiments. Because of the specific index distribution, new evaluation techniques for the determination of lens parameters from interferometric measurements have been applied. We also present a simple model that relates the achievable lens parameters to the diffusion conditions.     

Conical microlens arrays that flatten optical-irradiance profiles of nonuniform sources

One can create conical microlens arrays on a glass plate by simply spin coating spin-on-glass film on the glass, patterning the photoresist, and then etching the glass in a HF solution. These arrays can be used to obtain more-uniform irradiance profiles from nonuniform incoherent sources.     

微透镜填充因子快速检测方法

本文提出了一种有效的微透镜阵列填充因子快速检测方法.文章从光的标量衍射理论出发,分析了连续浮雕微透镜阵列的衍射光斑分布与透镜子口径、透镜矢高之间的关系,推导出了微透镜阵列远场衍射光斑的理论模型,用该模型对不同填充因子的微透镜阵列为例进行计算机模拟分析,并且搭建了实验装置来获得实际的衍射光斑.结果表明,模拟光强分布与实际衍射光斑相当接近,在此基础上给出了微透镜衍射光斑分布与填充因子之间的半定量关系,为微透镜阵列的快速检测提供了一种有效手段.这种方法可以实现微透镜阵列的准确、简单、低成本的填充因子检测,极大地提高了生产效率,满足了实际测试的要求.     

一种新颖的超大点阵分束实现方法

首次提出了一种实现超大卢、阵光束分束的新方法，它是利用位相迭加原理和ＶＬＳＩ技术将光栅分束器和位相型菲涅耳微透镜列阵集成为一体，构成了一种新型的光束分束列阵器件—一菲涅耳计算机源生全息分来器（ＣＧＦＢＳ），以实现１２８×１２８，甚至更高卢、阵数的光点分束。     

Improved distributed-index planar microlens and its application to 2-D lightwave components

A recent improvement of a 2-D array of distributed-index (DI) planar microlenses is presented to demonstrate a 2-D integrated optical component using a planar microlens array. These components are made by stacking planar microlens arrays and other planar optical devices. The improved planar microlens has f = 2.0 mm, a N.A. = 0.23, and its spherical aberration is very small. A fiber coupler is demonstrated. From a preliminary experiment, it is shown that the coupling loss of each channel is <0.5 dB for coupling 50-micron core DI fibers.     

Implementation of field lens arrays in beam-deflecting microlens array telescopes

Laterally displaceable microlens array telescopes allow for variable and fast beam deflection. The generation of spurious light usually leads to a reduction of transfer efficiency with increasing displacement. We present the introduction of an array of field lenses on the back side of a recollimating microlens array that results in a reduced deflection angle dependency of transfer efficiency. A paraxial matrix formalism is used to prove the theoretical elimination of spurious light by use of a field lens array. The fabrication of well-aligned double-sided lens arrays by UV replication is discussed. Measurements of transfer efficiency with and without the use of field lens arrays are compared with the results of numerical wave-optic simulations.     

Implementation of multilens micro-optical systems with large numerical aperture by stacking of microlenses

In the field of micro-optics there is a demand for objectives with large numerical aperture (NA). One example is optical storage in which a NA greater than 0.5 is required. For planar microlenses the NA is determined by means of the maximal index difference and the degree of exchange and reaches typical values of 0.13-0.2. Thus stacking is needed to build high NA objectives from planar microlenses. An additional benefit of stacking lenses is the possibility to correct for different types of aberrations. We realized two stacked systems: an array of micro-objectives with a NA of 0.45 from three microlens arrays and a confocal sensor head from four microlens arrays and one pinhole array mask.     

微透镜阵列与针孔阵列合成的微光学器件的研制

给出用于并行共焦显微镜中的微光学阵列器件的制作工艺。特别设计了微透镜阵列与针孔阵列对准粘接的机械和观察系统。实验证明系统是简易可行的,并给出了实验结果。     

Compact optical imaging system for arrays of optical thyristors

A compact and modular optical system that employs gradient-refractive-index rod lenses to image arrays of Lambertian sources is characterized both experimentally and by ray-tracing simulations. A hybrid optical system that incorporates additional microlens arrays to reduce transmittance losses and aberrations is also modeled, and the two systems are compared.     

Microlens-array-based exit-pupil expander for full-color displays

Two-dimensional arrays of microlenses can be used in wearable display applications as numerical aperture expanders or exit-pupil expanders (EPEs) to increase the size of the display exit pupil. A novel EPE approach that uses two microlens arrays (MLAs) is presented. The approach is based on cascading two identical microlens arrays spaced precisely at one focal-length distance with submicrometer registration tolerances relative to each other. The ideal MLA for this application requires a 100% fillfactor, sharp seams between microlenses, and a perfect spherical profile. We demonstrate a dual-MLA-based EPE that produces excellent exit-pupil uniformity and better than 90% diffraction efficiency for all three wavelengths in a color-display system. Two-MLA registration is performed with submicrometer precision by use of far-field alignment techniques. Fourier optics theory is used to derive the analytical formulas, and physical optics beam propagation is used for numerical computations. Three MLA fabrication technologies, including gray-scale lithography, photoresist reflow, and isotropic etching, are evaluated and compared for an EPE application.     

Investigation of statistical variations between lenslets of microlens arrays

We investigate the behavior of microlens arrays consisting of lenslets that have statistically distributed parameters (focal length, offset phase, lens center). In theoretical investigations we introduce a lens-array coherence parameter kappa, which describes the statistical variations of the lenslets. In experiments we measured this parameter for concrete lens arrays.     

Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera

In this research, a unique freeform microlens array was designed and fabricated for a compact compound-eye camera to achieve a large field of view. This microlens array has a field of view of 48°×48°, with a thickness of only 1.6 mm. The freeform microlens array resides on a flat substrate, and thus can be directly mounted to a commercial 2D image sensor. Freeform surfaces were used to design the microlens profiles, thus allowing the microlenses to steer and focus incident rays simultaneously. The profiles of the freeform microlenses were represented using extended polynomials, the coefficients of which were optimized using ZEMAX. To reduce crosstalk among neighboring channels, a micro aperture array was machined using high-speed micromilling. The molded microlens array was assembled with the micro aperture array, an adjustable fixture, and a board-level image sensor to form a compact compound-eye camera system. The imaging tests using the compound-eye camera showed that the unique freeform microlens array was capable of forming proper images, as suggested by design. The measured field of view of ±23.5° also matches the initial design and is considerably larger compared with most similar camera designs using conventional microlens arrays. To achieve low manufacturing cost without sacrificing image quality, the freeform microlens array was fabricated using a combination of ultraprecision diamond broaching and a microinjection molding process.