CN1632165一种在硬质合金工具上制备金刚石涂层的方法

本发明提供了一种在硬质合金工具上制备金刚石涂层的方法。采取等离子体CVD技术，由含有氢、碳和硅元素的气体混合物为反应气体，在硬质合金工具上沉积含有金刚石相和硅的金刚石涂层；其中，硅是在金刚石涂层的CVD过程进行的同时，被沉积到金刚石涂层中以及金刚石涂层与硬质合金工具的界面处的；硅元素在金刚石涂层与硬质合金工具界面处的存在与富集使金刚石涂层对硬质合金工具形成高的附着力。所述的CVD技术包括：微波等离子体CVD技术、热丝CVD技术、直流电弧等离子体CVD技术。本发明的优点在于：有效地提高金刚石涂层的附着力并简化了涂层的制备工艺。     

YG6金刚石涂层刀片衬底真空渗硼预处理新技术研究

本文研究了真空渗硼预处理硬质合金基体的表面组织、形貌、粗糙度，并在处理过的YG6刀片基体上，用强电流直流伸展电弧等离子体CVD法沉积金刚石薄膜涂层。结果表明，真空渗硼预处理不仅可以有效的消除或控制钴在金刚石沉积时的不利影响，而且，还显著粗化硬质合金基体表面。因此，提高了金刚石薄膜的质量和涂层的附着力。     

TiC中间过渡层对硬质合金表面沉积（类）金刚石的影响

采用ＣＨ４－Ｈ２－Ｏ２微波等离子体化学相沉积法在硬质合金表面沉积金刚石薄膜，研究了ＴｉＣ中间过渡层对金刚石沉积效果的作用及粘结机理，结果表明在相同沉积条件下ＴｉＣ中间过渡层可以显著提高硬质合金表面沉积金刚石薄膜的生长速率，而且还可提高金刚石薄膜与基体的结合力。     

TiC中间过渡层对硬质合金表面沉积（类）金刚石的影响

采用ＣＨ＿４－Ｈ＿２－Ｏ＿２微波等离子体化学气相沉积法在硬质合金表面沉积金刚石薄膜，研究了ＴｉＣ中间过渡层对金刚石薄膜沉积效果的作用及粘结机理。结果表明在相同沉积条件下ＴｉＣ中间过渡层可以显著提高硬质合金表面沉积金刚石薄膜的生长速率，而且还可提高金刚石薄膜与基体的结合力。     

激光预处理硬质合金衬底沉积金刚石薄膜研究

研究了准分子激光辐照对ＷＣ－６ｗｔ％Ｃｏ（ＹＧ６）硬质合金工具衬底沉积金刚石膜的影响。证实准分子激光辐照可产生钴选择性蒸发和表面粗糙化；从而有效地降低表面钴含量，消除钴对金刚石膜沉积的有害影响。硬质合金ＹＧ６工具衬底沉积金刚石薄膜工艺参数范围较窄，采用阶段沉积法可以得到质量良好，附着力强的金刚石薄膜。     

CVD金刚石硬质合金基体的表面预处理方法

开发硬质合金基体上沉积高结合强度、低粗糙度的金刚石涂层是人们非常关注的问题。制约CVD金刚石涂层工具产业化的主要因素是其与硬质合金基体间的附着力。大量实验显示,通过对硬质合金基体表面的预处理,可以提高金刚石涂层与硬质合金基体之间的附着力。本文从物理预处理法、化学预处理法和中间层法等,对硬质合金基体表面预处理后的效果做了较为系统的阐述。指出,不同的预处理方法对硬质合金基体与金刚石涂层之间的附着力影响是不一样的。     

酸浸＋等离子体刻蚀YC6微米-纳米金刚石复合涂层工具研究

金刚石涂层工具一直是金刚石膜工具应用研究的主流。制约其产业化的主要因素是涂层的附着力低和微晶金刚石涂层工具的加工精度差。通过对衬底的有效预处理和CVD沉积过程控制的研究，开发在硬质合金基体上沉积高结合强度、低粗糙度的金刚石涂层新技术，对于实现CVD金刚石涂层刀具高效、高精度切削加工具有重要意义。对旨在提高金刚石涂层附着力的预处理技术，本文探索了将酸蚀脱钴＋等离子体刻蚀处理衬底法。利用优化的沉积工艺，在酸浸＋等离子刻蚀处理的YG6刀片上沉积的两层金刚石复合膜表面粗糙度为0．13μm，附着力压痕测试临界载荷大于1500N。金刚百涂层工具的切削加工性能明显高予无涂层硬质合金工具。在加工ZAlSi12合金时，单层和两层金刚石涂层车刀片的切削寿命分别是无涂层车刀片切削寿命的21倍和28倍。     

酸浸+等离子体刻蚀YG6微米-纳米金刚石复合涂层工具研究

金刚石涂层工具一直是金刚石膜工具应用研究的主流.制约其产业化的主要因素是涂层的附着力低和微晶金刚石涂层工具的加工精度差.通过对衬底的有效预处理和CVD沉积过程控制的研究,开发在硬质合金基体上沉积高结合强度、低粗糙度的金刚石涂层新技术,对于实现CVD金刚石涂层刀具高效、高精度切削加工具有重要意义.对旨在提高金刚石涂层附着力的预处理技术,本文探索了将酸蚀脱钴+等离子体刻蚀处理衬底法.利用优化的沉积工艺,在酸浸+等离子刻蚀处理的YG6刀片上沉积的两层金刚石复合膜表面粗糙度为0.13μm,附着力压痕测试临界载荷大于1500N.金刚石涂层工具的切削加工性能明显高于无涂层硬质合金工具.在加工ZAlSi12合金时,单层和两层金刚石涂层车刀片的切削寿命分别是无涂层车刀片切削寿命的21倍和28倍.     

硬质合金金刚石涂层工具基体前处理有效方法探讨

利用两种溶液浸蚀硬质合金表面，分别选择性刻蚀WC和Co.这不仅强粗化了硬质合金表面，而且，还能抑制CO在金刚石沉积过程中的负作用，从,而，提高了金刚石薄膜的质量和涂层的附着力。     

化学气相沉积金刚石膜工业应用

成果成熟程度 已经解决在硬质合金衬底上生长均匀致密、附着 良好的金刚石膜的技术 成果的特点 金刚石薄膜涂层硬质合金工具由于性能优异、成 本相对较低(与PCD和金刚石厚膜钎焊工具相比)、可 以适应于复杂形状工具衬底沉积、以及可能大批量沉 积等优点,具有非常好的市场前景. 金刚石薄膜涂层硬质合金工具开发的关键是解决 金刚石薄膜在硬质合金衬底上的生长(沉积)和良好附 着的技术.本项目成果采用独特的衬底预处理和优化 的金刚石膜沉积工艺已经解决了Co对金刚石膜生长 和附着的有害影响问题.在YG类硬质合金工具衬底 所沉积的金刚石膜涂层厚度最大可达20～30μm.用洛 氏硬度压痕法评定的金刚石膜附着力时的无裂纹临界 载荷达1500N以上.在铣削A1-12wt%Si合金时,金 刚石薄膜涂层的YG6铣刀比未涂层硬质合金刀片使 用寿命可提高13倍以上.     

Mechanism and prediction of failure of diamond films deposited on various substrates by HFCVD

Diamond films were deposited on the WC-Co cemented carbide and Si3N4 ceramic cutting tool substrates by hot-filament-assisted chemical vapour deposition. The adherence property of diamond films was estimated using the critical load (Pcr) in the indentation test. The adhesive strength of diamond films is related to the intermediate layer between the film and the substrate. Poor adhesion of diamond films to polished cemented carbide substrate is owing to the formation of graphite phase in the interface. The adhesion of diamond films deposited on acid etched cemented carbide substrate is improved, and the peeling-off of the films often happens in the loosen layer of WC particles where the cobalt element is nearly removed. The diamond films' adhesion to cemented carbide substrate whose surface layer is decarbonizated is strengthened dramatically because WC phase forms by reaction between the deposited carbon and tungsten in the surface layer of substrates during the deposition of diamond, which results in chemical combination in the film-substrate interface. The adhesion of diamond films to silicon nitride substrate is the firmest due to the formation of chemical combination of the SiC intermediate layer in the interfaces. In the piston-turning application, the diamond-coated Si3N4 ceramic and the cemented carbide cutting tools usually fail in the form of collapsing of edge and cracking or flaking respectively. They have no built-up edge(BUE) as long as coating is intact.As it wears through, BUE develops and the cutting force on it increases 1 - 3 times than that prior to failure. This can predict the failure of diamond-coated cutting tools.     

硬质合金CVD金刚石涂层最新进展

金刚石因具有优异的物理化学性能被认为是理想的刀具材料。硬质合金基底上涂覆CVD金刚石薄膜有利于改善刀具的加工性能和寿命,但涂层和基底之间存在热膨胀系数差异以及合金中Co对沉积有不利影响,使得薄膜附着力较差。本文综述了近几年来各种提高CVD金刚石涂层刀具切屑性能的方法,从提高薄膜附着力和改善金刚石膜的质量两个方面进行了讨论。并介绍了国外较先进的CVD金刚石涂层刀具的应用,随着技术的不断成熟,CVD金刚石涂层将会有更为广泛的应用。     

金刚石膜涂层硬质合金工具研究进展及产业化前景

金刚石具有最高的硬度，极低的摩擦因数，最高的热导率和极佳的化学稳定性，因此是最理想的工具涂层材料。由于金刚石膜涂层硬质合金工具可能具有金刚石的硬度和硬质合金的强韧性的结合．因此20余年来一直受到世界各国的普遍关注。本文综述了金刚石膜涂层硬质合金的研发历史与现状，并针对目前的市场状况和未来的发展进行了评述。     

DLC膜涂层硬质合金刀具的研究进展

类金刚石(DLC)膜涂层刀具的硬度高、摩擦系数低、耐摩擦和耐腐蚀性能强、抗粘结性能好,并且可以用来制作复杂、异型刀具,是未来刀具的一个重要发展方向。本文介绍了DLC膜的表面显微结构和Raman光谱并列举了DLC的制备方法 (包括磁控溅射、离子束沉积、脉冲激光沉积、真空阴极电弧沉积、等离子体增强型化学气相沉积)与分类。从酸蚀法、施加过渡层、表面微喷砂处理和掺杂4个方面分析如何提高膜基结合力,探讨了DLC膜的摩擦性能受湿度、温度和加工条件的影响。例举了几个国内外DLC涂层硬质合金刀具的使用范例,指出了目前研究工作的不足之处,提出了下一步研究工作的重点是优化DLC膜的制备工艺、提高膜基结合力和热稳定性以及加强DLC涂层硬质合金刀具的磨损机理研究。     

Preparation of cemented carbide diamond films by gaseous boronizing pretreatment combines with self-assembly seeding process

In order to enhance the adhesion of cemented carbide diamond film and improve the cutting performance of cemented carbide diamond coating tools. This paper was the first to combine gaseous boronizing pretreatment with self-assembly seeding process to prepare diamond films on cemented carbide substrate. It not only eliminated the negative influence of cobalt (Co), but also improved the nucleation density of diamond. The gaseous boronizing pretreatment completed the boronation of the cemented carbide in a short time and obtained the CoWB phase which effectively prevented the diffusion of Co. By application of a self-assembly seeding process with the help of [2-(Methacryloyloxy) ethyl] trimethylammonium chloride (TMAEMC) highly improved the colloidal stability of nanodiamond (ND) particles. When the concentration of TMAEMC was 5 × 10⁻⁶ mol/l, the nucleation density of diamond was the highest. Rockwell indentation shows that the combination of gaseous boronizing pretreatment and TMAEMC self-assembly seeding process significantly improved the film-substrate adhesion. The reciprocating friction test shows that the diamond films prepared by this method had low friction coefficient and excellent wear resistance. Therefore, gaseous boronizing pretreatment combines with self-assembly seeding process is an effective way to achieve strong adhesion and high cutting performance of industrial diamond coating tools.     

碳源浓度对金刚石薄膜涂层刀具性能的影响

用热丝ＣＶＤ法,以丙酮为碳源,在ＷＣ－Ｃｏ硬质合金衬底上沉积金刚石薄膜,研究了碳源浓度对金刚石薄膜涂层刀具性能的影响,结果表明,碳源浓度对金刚石涂层薄膜质量、形貌和粗糙度、薄膜与衬底间的附着力、刀具的耐用度用度发削性能有显著影响,合理控制碳源浓度对获得实用化的在硬质合金刀具基础上沉积高附着强度、低粗糙度金刚石薄膜的新技术具有重要的意义。     

Analysis of the manufacturing chain of CVD diamond coated shaft type cutting tools

Hypereutectic aluminium silicon alloys, e.g. casted AlSi17Cu4Mg, are commonly used in the automotive and aeronautical industries. These alloys consist of hard, abrasive silicon particles in a soft aluminium matrix and thus place high mechanical loads on the tool during machining processes. Polycrystalline Diamond or CVD (chemical vapour deposition) diamond based cutting tools can be used for the high speed machining of these alloys due to their high hardness and wear resistance. Diamond thin film coatings of different film morphologies are commonly applied on cemented carbide tools using Hot Filament CVD. The distinguishing characteristic to other coatings is utmost hardness resulting in high resistance to abrasion, low tendency to adhesion and low friction coefficient. The manufacturing of CVD diamond coated shaft type cutting tools is challenging due to the complex design of the cutting edges and the demanding stress behaviour during tool application. The influencing parameters of substrate type, chemical and mechanical substrate pre-treatment as well as diamond film modification on the tool cutting performance are discussed. The manufacturing route of CVD diamond coated thread milling drills is analysed with the use of material and tribological tests. The complex thread manufacturing tools are then applied in the machining of AlSi17Cu4Mg, whereby the tool performance is characterised with respect to their wear behaviour, the process forces and temperatures as well as the workpiece quality.     

热丝CVD金刚石涂层膜基界面结合强度研究新进展

硬质合金基体金刚石涂层工具产业化应用的主要障碍之一在于涂层的膜基界面结合强度较差,易引发涂层早期脱落。提高膜基界面结合强度、保证刀具正常使用寿命,已成为金刚石涂层工具产业化亟待解决的主要问题。我们介绍了近年来在提高硬质合金基体金刚石涂层膜基界面结合强度方面所取得的一系列研究新进展,并提出了进一步改善其膜基界面结合强度的新思路,以促进热丝CVD金刚石涂层工具的产业化应用。      

化学气相沉积金刚石薄膜刀具膜/基附着性能研究现状

CVD金刚石薄膜涂层刀具被认为是能最早实现CVD金刚石工业化应用的领域之一.目前,限制CVD金刚石薄膜涂层刀具产品大规模产业化应用的主要原因,是金刚石薄膜与硬质合金基底之间粘附性能较差.如何提高膜/基粘附性能,确保CVD金刚石薄膜涂层刀具优异性能的发挥、涂层刀具的使用寿命和加工性能,已成为材料科学工作者迫切需要解决的问题.介绍了影响CVD金刚石薄膜硬质合金刀具膜/基附着性能的主要因素、改善金刚石薄膜与硬质合金基体之间附着力的途径以及表征膜/基附着力的测试方法等方面的研究成果,并对提高低压气相金刚石薄膜硬质合金刀具膜/基附着性能的研究现状进行了分析.     

Diamond-coated cutting tools for biomedical applications

Diamond coatings are attractive for cutting processes due to their high-hardness, low-friction coefficient; excellent wear resistance, and chemical inertness. The application of diamond coatings on cemented, tungsten carbide (WC-Co) burs has been the subject of much attention in recent years as a method to improve cutting performance and tool life. WC-Co burs containing 6% Co and 94% WC substrate, with an average grain size of 1–3 μm, were used in this study. To improve the adhesion between diamond and WC substrates, it is necessary to etch away the surface Co and prepare the surface for subsequent diamond growth. Hot filament chemical vapor deposition (HFCVD), with a modified vertical filament arrangement, has been used for the deposition of diamond films. Diamond film quality and purity has been characterized using scanning electron microscopy (SEM) and micro-Raman spectroscopy. The performance of diamond-coated WC-Co burs, uncoated WC-Co burs, and diamond-embedded (sintered) burs have been compared by drilling a series of holes into various materials such as human teeth, borosilicate glass, and acrylic teeth. Flank wear has been used to assess the wear rates of the burs when machining biomedical materials such as those just described. This paper was presented at the 2nd International Surface Engineering Congress sponsored by ASM International, on September 15–17, 2003, in Indianapolis, Indiana, and appears on pp. 273–82 of the Proceedings.