Ti－N扩散障碍膜的组织结构及高温热稳定性

研究了多弧离子镀Ｔｉ－Ｎ扩散障碍膜的表面形貌、组织结构及高温热稳定性．发现Ｔｉ－Ｎ膜表面存在大量颗粒物；颗粒物对Ｔｉ－Ｎ膜外磁控溅射涂覆的ＭＣｒＡＩＸ包覆型涂层的组织形态及性能有较大影响．Ｘ射线分析表明：Ｔｉ－Ｎ镀膜由δ－ＴｉＮ、ε－ＴｉＤＮ、α－Ｔｉ等多相组成；δ－ＴｉＮ呈明显｛１１１｝择优取向，但经扩散退火处理后，择优取向消失．１０００℃热时效试验结果表明Ｔｉ－Ｎ膜的高温热稳定性良好，与基体及相邻ＭＣｒＡＩＸ镀层间不发生显著互扩散，因而可作为扩散障碍层用于抑止或减缓合金元素在ＧＨ２２０基体及ＭＣｒＡｌＸ涂层间的互扩散．     

极间距对PEMSIP法高速钢基体TiN涂层的影响

应用χ射线衍射分析研究了极间距对ＰＥＭＳＩＰ法ＴｉＮ涂层相互组成的影响，结果表明，随着极间距增加，涂层相组成朝着富氮相及其含量增加的方向发展，变化趋势为：（αＴｉ＋Ｔｉ２Ｎ＋ＴｉＮ）→（Ｔｉ２Ｎ＋ＴｉＮ）→ＴｉＮ。极间距对ＴｉＮ涂层硬度的影响是由其影响涂层相组成而引起的，其中，由Ｔｉ２Ｎ和ＴｉＮ两相组成的涂层硬度最高。     

氮分压对PEMSIP法高速钢基体TiN涂层的影响

用Ｘ射线衍射分析研究了氮分压对ＰＥＭＳＩＰ法ＴｉＮ涂层相组成的影响，结果表明，随着氮分压增加，涂层相组成朝着富氮相及其含量加的方向发展，变化趋势为：ａＴｉ－（ａＴｉ＋Ｔｉ＋Ｔｉ２Ｎ）－ＴｉＮ。氮分压对涂层硬度影响主要是由氮分压影响涂层相组成而引起的，其中，由Ｔｉ２Ｎ和ＴｉＮ两相组成的膜硬度最高。     

多弧离子沉积（TiFeCr）N多元膜

研究了多弧离子沉积（ＴｉＦｅＣｒ）Ｎ多元膜的性能,并与同一设备下沉积ＴｉＮ膜的性能进行比较。结果表明,（ＴｉＦｅＣｒ）Ｎ多元膜的力学性能和耐蚀性能均优于ＴｉＮ膜。定量金相分析结果表明,（ＴｉＦｅＣｒ）Ｎ多元膜的孔隙度比ＴｉＮ膜低得多。文中对多元膜的强化机理进行了讨论,认为孔隙度降低是使多元膜性能大幅度提高的主要原因。     

直流磁控溅射沉积（Ti,Al）N膜的研究

研究了用直流磁控反应性溅射法在Ａｒ＋Ｎ２气氛中沉积（Ｔｉ，Ａｌ）Ｎ膜的工艺。（Ｔｉ，Ａｌ）Ｎ膜具有比ＴｉＮ膜高的耐磨性，硬度和高温抗氧化性，ＡＥＳ深度分析表明，由Ａｌ的选择性氧化形成的Ａｌ２Ｏ３保护层，是（Ｔｉ，Ａｌ）Ｎ膜具有优良高温抗氧化性能的原因。     

直流磁控溅射沉积（Ti，Al）N膜的研究

研究了用直流磁控反应性溅射法在Ａｒ＋Ｎ２气氛中沉积（Ｔｉ，Ａｌ）Ｎ膜的工艺。（Ｔｉ，Ａｌ）Ｎ膜具有比ＴｉＮ膜高的耐磨性、硬度和高温抗氧化性。ＡＥＳ深度分析表明，由Ａｌ的选择性氧化形成的Ａｌ２Ｏ３保护层，是（Ｔｉ，Ａｌ）Ｎ膜具有优良高温抗氧化性能的原因．     

对向靶溅射TiN薄膜的结构和物性

利用对向靶溅射（ＦＴＳ）沉积出（１１１）择优取向的单相ＴｉＮ膜，膜硬度（ＨＶ）最高可达３８００，择优取向随基板偏压增高，可由（１１１）转向（２００），晶格常数随氮气分压增高而增大，这是氮原子进入四面体间隙引起的。     

对向靶溅射TiN薄膜的结构和物性

利用对向靶溅射（ＦＴＳ）沉积出（１１１）择优取向的单相ＴｉＮ膜，膜硬度（ＨＶ）最高可达３８００，择优取向随基板偏压增高，可由（１１１）转向（２００），晶格常数随氮气分压增高而增大，这是氮原子进入四面体间隙引起的。     

铁基体等离子体增强磁控溅射离子镀Ti－TiN涂层的组织结构

利用等离子体增强磁控溅射离子镀（ＰＥＭＳＩＰ），先在铁基体上镀一层很薄的钛中间层，继之沉积ＴｉＮ。对膜层进行俄歇电子能谱（ＡＥＳ）分析和透射电镜（ＴＥＭ）分析。结果表明，膜与基体之间有厚约５０ｎｍ的过渡层；膜基界面处有ＦｅＴｉ相；中间层与后继膜交接处Ｔｉ２Ｎ与α－Ｔｉ有取向关系。     

离子镀Ti（Al）N涂层的结构与耐蚀性

用空心阴极离子镀制备了Ｔｉ（Ａｌ）Ｎ和ＴｉＮ涂层,０．５ｍｏｌ／Ｌ的Ｈ２ＳＯ４ 溶液中极化曲线结果表明,Ｔｉ（Ａｌ）Ｎ涂层的耐蚀性优于ＴｉＮ涂层。电子探针（ＥＰＭＡ）、Ｘ射 线衍射和扫描电镜等分析了Ｔｉ（Ａｌ）Ｎ涂层的元素分布特征及组织结构。     

Characteristics and machining applications of Ti(Y)N coatings

The Ti(Y)N coatings were successfully deposited onto 18-8 stainless steel substrates by the hollow cathode discharge ion-plating method. The influence of the rare-earth element yttrium on the TiN coating properties was studied. The results show that the adhesion of the coating to the substrate were evidently enhanced by adding a small amount (0.2 wt.%) of the rare-earth element yttrium, showing a critical load of about 390 g which is much higher than that (230 g) of the TiN coating/substrate. Investigation on the corrosion resistance of the Ti(Y)N coating and the TiN coating was performed in 0.5 N Na₂SO₄ + 0.1 N H₂SO₄ + 0.1 N NaCl corrosion media by means of an electrochemical potentiodynamic polarization. The Ti(Y)N coating exhibited much better corrosion resistance than the TiN coating, whose passivity maintaining current is about one order in magnitude smaller than that of the TiN coating.The Ti(Y)N coatings deposited on some HSS-based tools were presented and compared with the TiN coating. The service lifetime of Ti(Y)N coated tools is approximately 36% higher (on the pinion shape cutters) and about 50% higher (on punch side pin) compared to that of TiN coated. The Ti(Y)N coatings showed such excellent performance. It is attributed to that the transition area of Ti(Y)N/substrate consisted of three sublayers which revealed a gradual change of phase structure and composition, so that the adhesion of the coating/substrate was evidently enhanced. Moreover, Ti(Y)N coating showed a preferred orientation with (111) plane which is favorable to improve wear resistance and corrosion resistance of the coating.     

过渡层TiAlN的力学性能与微观结构对AlCrSiN涂层宏观力学性能的影响

AlCrSiN多元硬质涂层具有优异的力学性能,在刀具领域有广泛应用前景。然而,如何在基底上制备出力学性能优异的AlCrSiN涂层有待进一步研究。基于电弧离子镀技术,在硬质合金基底上沉积了不同Ti/Al原子比的TiAlN过渡层,并在其上沉积了AlCrSiN涂层,研究了过渡层TiAlN的微观结构(晶面取向、晶粒尺寸、致密度等)对功能层AlCrSiN力学性能的影响。Ti-Al-N固溶相的择优取向为(200)。随着Ti含量的增加,(200)衍射峰宽化,晶粒细化,致密程度提高,硬度增加。Ti/Al原子比为2.75时,TiAlN晶粒尺寸为9.549nm,其上制备的AlCrSiN硬度值达到3139.6HV,并且涂层与基底间的结合力高达92N。细化(200)取向的TiAlN过渡层晶粒可以有效提高其上AlCrSiN涂层的硬度以及涂层与硬质合金基底的结合力。研究成果对提高功能层AlCrSiN的力学性能及涂层刀具的寿命有一定的指导意义。     

稀土钇改性离子镀Ti(Y)N膜与A3钢基材界面的结构特性SCIEI

采用透射电子显微镜及微衍射技术,研究了稀土钇改性的离子镀Ti(Y)N膜与A3钢基材之间的界面精细结构。结果表明:Ti(Y)N/A3系统界面是由三个亚层构成,由于Y的添加导致了界面三个亚层中形成了Y_6Fe_(23),Y和YN相,其中Y_6Fe_(23)和Y与α-Fe,FeTi及Ti_2N相之间存在一定的位向关系。本文还讨论了该界面形成机理。     

SiC颗粒增强铝基复合材料基材上制备(Ti,Al)N涂层的研究

利用电弧离子镀技术在SiCp／2024Al基体上制备(Ti，Al)N涂层．研究了偏压对涂层的相组成、晶格常数和成分的影响及不同过渡层对涂层与基体结合性能的影响．结果表明，在较小偏压下，(Ti，Al)N涂层呈(111)择优取向；偏压在-150V时，涂层无择优取向；但随偏压继续升高，出现(200)和(220)择优取向．在添加Ti过渡层时，涂层与基体形成致密均匀的良好结合．同时通过设计梯度涂层，获得了厚度达105um的无裂纹(Ti，Al)N涂层．     

MICROSTRUCTURE OF INTERFACE BETWEEN Y-MODIFIED REACTIVE ION PLATED Ti(Y)N COATING AND SUBSTRATE STEEL A3

The fine rnicrostrueture of the Y-modified ion plated Ti(Y)N coating/substrate steel A3system has been examined by means of TEM and microdiffraction technique.It was revealedthat the interface consists of 3 sublayers,i.e.α-Fe+Y_6Fe_(23),Ti+Y+FeTi and Ti_2N+YN+Ti_xN_y.The thicknesses of them are about 200,50 and 120 nm respectively.The phases inthe transition area seem to have certain orientation relations.The mechanism of interfaceformation has also been discussed.     

Microstructure and properties of CVD coated Ti(C,N)-based cermets with varying WC additions

In this paper, multilayer coatings of TiN/TiCN/Al₂O₃/TiN are deposited on the Ti(C, N)-based cermets containing WC, and the effect of WC on the growth and adhesion strength as well as the mechanical properties of the coating are investigated. The multilayer coatings deposited by chemical vapor deposition (CVD) are uniform and dense. TiN coating exhibits a dense fine-grained structures and the Ti (C,N) on TiN coating shows dense columnar structure. The α-Al₂O₃ layer deposited on transition coating presents coarse grains with limited voids. The grain size of the columnar crystals deposited on the substrates gradually decreases with WC addition. The Al₂O₃ layer shows a preferred growth orientation of (104) plane. For TiN/TiCN phase, a change in orientation from (111) to (200) is observed. Generally, the (200) preferred orientation enhances and (111) preferred orientation diminishes with increasing WC addition. Strong adhesion of the CVD coating is obtained due to a sufficient amount of chemical elements, especially tungsten, diffusing from the substrate to the interfacial layer. Scratch tests show that the adhesion strength of TiN/TiCN/Al₂O₃/TiN films gradually increases firstly, and then decreases. With the addition of WC, the hardness, elastic modulus and plasticity index increase at the beginning, and then decrease. The change in nanohardness and elastic modulus is related to the grain size, elemental diffusion, and preferred orientation of the coating.     

磁控溅射法制备ZrAlYN涂层的结构和性能

采用磁控溅射技术在YG8硬质合金基体上分别沉积了ZrAlYN涂层和ZrAlN涂层,利用X射线衍射仪、扫描电子显微镜以及原子力显微镜研究了Y元素的添加对ZrAlN涂层微观结构、断口和表面形貌的影响,同时对ZrAlYN和ZrAlN涂层的热稳定性和抗高温氧化性能进行了研究;采用纳米压痕技术对ZrAlYN和ZrAlN涂层的力学性能进行了比较。结果表明:Y元素的添加使ZrAlN涂层的微观结构发生了明显变化,从原来的(111)和(200)共同择优取向转变为(200)占主导;ZrAlYN和ZrAlN涂层的断口都呈非柱状结构,且ZrAlYN涂层的表面粗糙度小于ZrAlN涂层的;相比ZrAlN涂层,Y元素的加入使ZrAlYN涂层的热稳定性和抗高温氧化性有显著提高;硬度略有提高,而弹性模量降低,因此硬模比高于ZrAlN涂层,这表明ZrAlYN涂层具有更好的抵抗塑性变形的能力。     

用稀土钇提高离子镀TiN膜层与基体结合力的研究

研究了不同含量稀土钇对离子镀ＴｉＮ膜与基体结合力的影响，结果表明，加入稀土钇后，大大提高ＴｉＮ膜与基体的结合力，并使膜层内ＴｉＮ相增加，此外，稀土钇能明显提高镀膜过程中钛料蒸发率，在相同镀膜内，能使ＴｉＮ膜层加厚。     

Structure and mechanical properties of TiAlCrSiN coatings deposited on Ti(C,N)-NbC-Ni cermets with varied Mo2C contents

TiAlCrSiN coatings were deposited on Ti(C,N)-NbC-Ni cermets with varied Mo₂C contents by medium frequency reactive magnetron sputtering, and their structure, phases, mechanical and frictional properties were investigated in the present work. The results indicated that both the Mo diffusion to the coating and the Al diffusion to the substrate resulted in the decreased lattice parameter of TiAlCrSiN phase in the coating. When increasing Mo₂C contents in the substrate, the columnar crystal grains in the coating were refined, whereas the adhesion of the coating to the substrate was degraded as a result of the coating thickening and the inner stress in the coating. Apart from being influenced by grain size, the coating's hardness was also linked to the crystal plane orientation, and it declined with a decrease of relative intensity ratio of I₍₁₁₁₎/I₍₂₀₀₎ in the TiAlCrSiN coating. The elasticity modulus of the coating decreased slightly due to the grain refinement in the coating. The average friction coefficient of TiAlCrSiN coating was reduced by oxidation of the Mo diffused from the substrate, while the friction coefficient was not the predominant indicator influencing wear rate of the coated Ti(C,N)-NbC-Ni cermet.     

Al含量对Ti1-xAlxN涂层组织结构、力学性能和铣削性能的影响

目的研究不同Al含量对Ti_(1-x)Al_xN涂层的影响,以获得铣削铸铁材料性能最佳的Ti AlN涂层。方法采用阴极电弧蒸发沉积法在WC-Co硬质合金表面制备两种不同Al含量的Ti_(0.5)Al_(0.5)N和Ti_(0.33)Al_(0.67)N涂层,通过X射线衍射仪(XRD)、扫描电子显微镜(SEM)和电子探针微区分析仪(EPMA)分析合金的微观组织和成分组成,通过CSM纳米硬度计和纳米划痕仪测定涂层的纳米硬度、弹性模量、抗塑性变形因子、显微硬度耗散系数MDP和划痕裂纹扩展阻力CPRs等性能指标,同时比较不同Al含量涂层刀片在铣削灰口铸铁HT250和球墨铸铁QT450时的性能和磨损机理。结果 Ti_(0.5)Al_(0.5)N和Ti_(0.33)Al_(0.67)N涂层主要物相均呈NaCl型面心立方结构,以(200)方向为择优取向,且高铝涂层的XRD衍射峰向高角度偏移量大于中铝涂层,说明高铝涂层具有更高的铝固溶量。与Ti_(0.5)Al_(0.5)N涂层相比,Ti_(0.33)Al_(0.67)N涂层的抗塑性变形因子较小,MDP和CPRs较大,表现出更优的塑性、韧性和膜基结合力。在铣削HT250和QT450时,Ti_(0.33)Al_(0.67)N涂层刀片的平均寿命分别为30、60 min,相比Ti_(0.5)Al_(0.5)N涂层,切削性能更好。结论对于Ti AlN涂层来说,提高Al的质量分数至67%可以获得更优的塑性、韧性和膜基结合力,在铣削HT250和QT450时,Ti_(0.33)Al_(0.67)N涂层刀片的切削性能较优。