红外线聚光非球面透镜的单点金刚石镜面切削方法

根据硬脆性材料的延性域加工机理和面形误差补偿加工方法,研究了圆弧形和平头形刀具的单点金刚石延性域切削方法,在加工中直接获得了镜面切除面;并利用数控技术进行误差补偿,克服了因加工试验、刀具磨损、机械振动、热变形等造成的加工误差导致的非球面的面形精度降低和表面粗糙度恶化.并将该方法用于采用圆弧形刀具对红外线聚光的φ70mm非球面锗透镜进行单点金刚石切削实验中.试验结果表明面形误差补偿加工方法可以进一步消除加工误差,将非球面的面形精度PV值从微米级(1.23μm)提高到亚微米级(0.36μm)的程度,表面粗糙度R_a从亚微米级(0.27μm)改善到超亚微米级(0.04μm)的范围.     

小口径非球面斜轴磨削及磁流变抛光组合加工工艺及装备技术研究

为提高小口径非球面模具加工效率和加工精度,提出一种结合斜轴超精密磨削和斜轴磁流变抛光的组合加工方法,将两种超精密加工方法集成在一台机床上,以缩短装夹时间以及降低装夹误差。研制新型的小口径非球面超精密复合加工机床,对直径Ф6.6 mm的非球面碳化钨模具进行了加工试验。斜轴磨削后加工表面粗糙度达到R_a 6.8 nm,斜轴磁流变抛光后表面粗糙度达到R_a 0.7 nm,面型精度可以达到PV 221 nm。结果表明,所开发的小口径非球面超精密复合加工装备能达到加工要求,可有效提高加工精度和加工效率。     

Fabrication of small aspheric moulds using single point inclined axis grinding

Single point inclined axis grinding techniques, including the wheel setting, wheel–workpiece interference, error source determination and compensation approaches, were studied to fabricate small aspheric moulds of high profile accuracy. The interference of a cylindrical grinding wheel with the workpiece was analysed and the criteria for selection of wheel geometry for avoiding the interference was proposed. The grinding process was performed with compensation focused on two major error sources, wheel setting error and wheel wear. The grinding results showed that the compensation approach was efficient and the developed grinding process was capable to generate small aspheric concave surfaces on tungsten carbide material with a profile error of smaller than 200 nm in PV value after two to three compensation cycles.     

Research on the error analysis and compensation for the precision grinding of large aspheric mirror surface

The purpose of this paper is to propose a compensation grinding method for large aspheric mirror surface. Because the tradition grinding is not suitable for large aspheric mirror surface, in this paper, a grate parallel grinding in 3-axis and an on-machine measurement system are applied. Based on that, it presents the errors that mainly affect the form accuracy and technology of compensation grinding. An experiment of compensation grinding was carried out for large aspheric mirror surface. With the separation of decentering, wheel arc, and residual grinding system error, the PV value further decreased comparing to tradition compensation. These results indicated that this compensation can improve the form accuracy significantly in large aspheric mirror surface grinding.     

Precision grinding of binderless ultrafine tungsten carbide (WC) microstructured surfaces

The primary objective of this study was to produce binderless ultrafine tungsten carbide (WC) microstructured surfaces in the ductile grinding regime and to optimize machining parameters to generate microstructural features and sharp edges without chipping. The micro-deformation, fracture properties, and grinding mechanisms were characterized using micro/nano-indentation and single-grit grinding experiments. The effects of grinding conditions (such as grinding mode, feed rate, and spindle speed) on ground surface quality and the radius and chipping of edges were investigated using microstructural grinding experiments. It was found that in nano-indentation, the binderless WC indentation was accommodated by plastic deformation. An average critical depth of cut of 146 nm could be achieved on single-grit scratching tests using atomic force microscopic procedures. In grinding of microstructured surfaces, the surface roughness of side surfaces was always smaller than that of the bottom surface of the machined feature. The better surface quality and sharper edges were obtained by using the upcut grinding mode. Reducing the tool feed rate did necessarily help to improve the surface roughness and edges of structures. The best ground surface could be obtained at the grinding speed of 2,500 rpm. According to the grinding experimental results, an echelle grating was manufactured using the optimized parameters. The average surface roughness SRa of the bottom surface was 78 nm and that of the side surface was 60 nm. The radius of the edge was less than 1 μm, and the radius of corner was about 3 μm. No visible evidence of grinding-induced cracks and chipping on the ground surfaces was found.     

F-Theta自由曲面透镜的精密与镜面磨削

针对光学玻璃的F-Theta自由曲面透镜加工困难等问题,提出将金刚石砂轮的椭圆环面代替圆环面,进行F-Theta自由曲面磨削加工,研究形状误差的补偿磨削方法和光学玻璃的镜面磨削工艺。根据F-Theta透镜的自由曲面建立砂轮与工件相切的刀具轨迹法向算法。采用#46粗金刚石砂轮修整成椭圆环面,提出自由曲面磨削的法向误差补偿加工模式。最后,采用#3000超细金刚石砂轮的椭圆环面进行轴向磨削试验。试验结果表明:传统的垂直误差补偿磨削可减小面形误差45.9%及其PV值11.6%;而新提出的法向误差补偿磨削可减小面形误差47.9%及其PV值41.5%。此外,超细砂轮磨削可使得自由曲面的粗糙度达到28 nm,其镜面磨削工艺有别于较粗砂轮磨削工艺。因此,椭圆环面砂轮的法向补偿磨削是提高自由曲面加工精度的有效方法,而且,无需研磨抛光就可以实现光学玻璃的自由曲面镜面磨削。     

小口径玻璃透镜热压成形模具的超精密微细磨削加工

对小口径玻璃透镜热压成形模具的超精密平行磨削进行了试验研究,并对加工过程中的形状误差补偿技术进行了探讨。结合超精密平行磨削技术和形状误差补偿技术,选用经精密整形和修锐的微小砂轮,对直径和曲率半径均为10mm的小口径透镜模具样品进行了加工试验。试验获得的加工表面的表面粗糙度Ra=5.98nm、Rz=34.95nm,形状精度峰谷值为113nm、均方根值为23nm,其形状精度峰谷值及均方根值均较误差补偿之前有明显减小,加工过程中的残余形状误差得到了有效的修正和补偿,加工精度得到提高。     

A model for wafer rotational nanogrinding of soft-brittle CdZnTe wafers

Nanogrinding was conducted on soft-brittle cadmium zinc telluride (CdZnTe or CZT) wafers using a ceramic bond ultrafine diamond wheel. Surface roughness R _a and PV achieved by nanogrinding are 1.5 and 12.2 nm, respectively. The highest feed rate was 83.3 nm/r, which is lower than 89 nm that is the critical value of brittle-ductile transition for CZT. As a result, ductile grinding was obtained. A novel model for wafer rotational grinding of undeformed chip thickness was proposed, based on the kinematics and geometric characteristics between wheel and workpiece. The undeformed chip thickness simulated was used to elucidate the fundamental mechanism for nanogrinding conditions, and it is in good agreement with the results found experimentally.     

On-machine precision preparation and dressing of ball-headed diamond wheel for the grinding of fused silica

In the grinding of high quality fused silica parts with complex surface or structure using ball-headed metal bonded diamond wheel with small diameter,the existing dressing methods are not suitable to dress the ball-headed diamond wheel precisely due to that they are either on-line in process dressing which may causes collision problem or without consideration for the effects of the tool setting error and electrode wear.An on-machine precision preparation and dressing method is proposed for ball-headed diamond wheel based on electrical discharge machining.By using this method the cylindrical diamond wheel with small diameter is manufactured to hemispherical-headed form.The obtained ball-headed diamond wheel is dressed after several grinding passes to recover geometrical accuracy and sharpness which is lost due to the wheel wear.A tool setting method based on high precision optical system is presented to reduce the wheel center setting error and dimension error.The effect of electrode tool wear is investigated by electrical dressing experiments,and the electrode tool wear compensation model is established based on the experimental results which show that the value of wear ratio coefficient K’ tends to be constant with the increasing of the feed length of electrode and the mean value of K’ is 0.156.Grinding experiments of fused silica are carried out on a test bench to evaluate the performance of the preparation and dressing method.The experimental results show that the surface roughness of the finished workpiece is 0.03 μm.The effect of the grinding parameter and dressing frequency on the surface roughness is investigated based on the measurement results of the surface roughness.This research provides an on-machine preparation and dressing method for ball-headed metal bonded diamond wheel used in the grinding of fused silica,which provides a solution to the tool setting method and the effect of electrode tool wear.     

非轴对称非球面平行磨削误差补偿技术研究

针对非轴对称非球面的成形加工法柔性不足及球形砂轮加工法对工具和机械的要求太高的缺点,提出采用普通圆弧金刚石砂轮加工的平行磨削法。对于新方法加工中存在的加工误差问题,提出在非轴对称非球面加工中使用带倾角圆弧修整器及对主轴半径和副轴半径误差采用离线补偿的加工技术。通过理论分析和试验表明此方法可达到提高非轴对称非球面的加工精度的效果。     

ALON高陡度薄壁保形非球面的超精密磨削工艺

为了实现新型红外陶瓷ALON高陡度薄壁保形非球面的超精密磨削加工,首先根据ALON的材料属性和高陡度薄壁保形非球面的结构特性,进行了其超精密磨削加工工艺性分析,并基于有限元计算方法,完成了面向ALON高陡度薄壁保形非球面的精密夹具的设计以及关键参数的优化。然后完成了ALON的超精密磨削工艺实验,工艺实验结果表明减小工件转速和砂轮粒度都会降低ALON的平均表面粗糙度Ra值,但砂轮粒度对磨削后ALON的表面粗糙度影响更显著。最后实现了ALON高陡度薄壁保形非球面的超精密磨削加工,磨削后的ALON高陡度薄壁保形非球面的面形精度PV值为2μm,表面粗糙度Ra值可达8.6nm。     

Nanogrinding of soft–brittle monocrystalline mercury cadmium telluride using a ceramic bond ultrafine diamond grinding wheel

Nanogrinding experiments on soft–brittle monocrystalline mercury cadmium telluride (HgCdTe, MCT) were conducted using a novel developed ceramic bond ultrafine diamond grinding wheel. The experimental results showed that the ultrafine grinding wheel exhibited excellent grinding performance on HgCdTe wafers. Surface roughness Ra 1.4?nm, rms 1.7?nm, and PV 10.9?nm were respectively achieved under nanogrinding using this diamond grinding wheel. All the ground surfaces of MCT wafers exhibited ductile mode character, free of cracking and burn damage. The nanogrinding results were discussed in terms of the ceramic bond, as well as maximum undeformed chip thickness.     

Ultraprecision grinding of TiC-based cermet hemisphere couples

In aerospace industry, TiC-based cermet hemisphere couples are widely used as dry sliding bearing and gyro due to its high resistance to wear and heat. To enhance the grinding precision, this paper presents an ultraprecision grinding technique for machining TiC-based cermet hemisphere couples. The factors affecting the form and dimension accuracy of the hemisphere couples in ultraprecision grinding were analyzed theoretically. The optimization of grinding conditions and ground surface morphology of TiC-based cermets were investigated. In addition, the subsurface damage of ground TiC-based cermet hemisphere couples was observed by focused ion beam FIB. The research results show that position errors have more significant impact on concave in grinding of hemisphere couples. The TiC-based cermet ground surface revealed a smooth surface covered by micropits, traces, and reliefs because of the special material properties, and the surface roughness could be improved by the decrease of feed rate, while the different feed rates did not influence form accuracy. Finally, TiC-based cermet hemisphere couples with 16 nm surface roughness, 0.3 μm PV form accuracy, radius deviation of less than 3 μm, and subsurface damage depth of less than 2.5 μm were obtained.     

Characterization of Nanoscale Chips and a Novel Model for Face Nanogrinding on Soft-Brittle HgCdTe Films

A novel ceramic bond ultrafine diamond wheel was developed to acquire nanoscale chips for face nanogrinding. The ceramic bond consists of silicon carbide, alumina, silica, sodium chloride, and sodium bicarbonate. Damage-free subsurfaces of soft-brittle mercury cadmium telluride films were obtained directly by face nanogrinding using the developed ultrafine diamond wheel. Twins and nanocrystals with random orientations were observed. The thickness of the nanoscale chips varied from 21 to 30.2 nm, and their cross-section was triangular. A novel model for maximum undeformed chip thickness for face nanogrinding was constructed. The calculated results obtained from the model are in good agreement with those found experimentally. The surface roughness and peak-to-valley ratio induced by face nanogrinding were approximately stable at around 1.9 and 16 nm, respectively.     

Effect analysis of the residual error evaluation method used in bonnet polishing process for aspheric lens

The purpose of this paper is to investigate the effect of the residual error evaluation method used in bonnet polishing (BP) process to the axisymmetric aspheric surface accuracy. In the past, few attentions have been paid to the normal direction error (NE) of the aspheric surface, not to mention its application in BP. In this paper, a new approach is proposed to calculate NE on the basis of the axis direction error (AE) of the aspheric surface. The comparison of them is presented through a group of experiments on four asxisymmetric aspheric lenses. The effect of using AE as the residual error in BP process to the final surface accuracy is tested. It is confirmed that it would result in the difference between the practical final surface form and the theoretical final surface form, and NE should be used as the residual error in BP process.     

Precise bi-arc curve fitting algorithm for machining an aspheric surface

With the rapid development of the information/image system and aero-space industries, high quality optic aspheric surface lenses play an increasingly important role for completion of the functionalities. Aspheric lenses are non-spherical surfaces having rotation symmetry about the lens axis. The aspheric lens has various shapes according to its application and often requires tens nanometer order form accuracy since surface roughness and form accuracy play essential roles in the functional performance of the optical products. Interpolation of the aspherical surface path must precisely meet the allowable tolerance. Linear interpolation of the aspheric surface path for CNC machining generates an enormous amount of NC code to satisfy the extremely small tolerance, and produces scallops on the machined surface due to the acceleration and deceleration of the tool during every linear motion. Alternatively, interpolations with bi-arcs are used. In this paper, in order to minimize the error induced by the cutting tool path and to shorten the calculation time of interpolation, a precise -arc interpolation method is proposed. The developed algorithm of bi-arc interpolation meets the given tolerance precisely. This is guaranteed by an analytical proof and error maps. Another advantage is its ability to calculate about five times faster than the existing arc interpolation, since iterative calculations for the maximum error can be omitted. The developed algorithm has been used for the precise aspheric machining.     

核主泵用流体静压密封环圆锥面超精密磨削

提出采用工件旋转杯形砂轮切入磨削原理来加工核主泵用流体静压密封环圆锥面新方法,对密封环圆锥面的径向轮廓误差随砂轮半径、回转台与砂轮中心距,砂轮俯仰角、砂轮侧偏角的变化规律进行深入分析,发现选择适当的机床结构参数,采用工件旋转杯形砂轮切入磨削原理加工核主泵用流体静压密封环圆锥面时,由磨削原理引入的径向轮廓误差极小,为纳米量级。根据最小径向轮廓误差和最小磨削接触弧长原则确定了核主泵用流体静压密封环圆锥面的超精密磨削实现策略。在工件旋转杯形砂轮切入磨削机床上实现了核主泵用碳化硅密封环圆锥面的高精度、低表面粗糙度磨削,测得周向跳动、径向轮廓误差和表面粗糙度Ra分别为0.16 m、0.15 m和3 nm。     

可转位刀片周边刃磨的新数学模型和轨迹补偿方法

基于空间曲面成型理论建立可转位刀片周边刃磨削刀轨计算的统一数学模型,给出以斜圆柱或斜圆锥面为过渡面的刀片后角推导方法;结合周边刃磨床中常有的夹具误差,给出了利用运动轨迹补偿的计算公式;以图形文件为接口,研发了一种适用可转位刀片的周边刃磨削数控指令自动生成方法。通过磨削仿真加工和现场磨制验证了试验方法的正确性,可保证刀片的几何精度在±2μm以内。     

应用环形磁场控制的微粉砂轮制备及其磨削性能

在超精密磨削中,金刚石微粉砂轮的磨粒分布均匀性对提高磨削表面质量至关重要,为了使微粉磨粒规则排布,提出了一种采用环形磁场控制磨粒规则排布的砂轮制备方法,制备了多种金刚石微粉砂轮,使用磁场控制制备的微粉砂轮对硬质合金YG8进行了平面及非球面磨削试验。结果表明:应用环形磁场控制可使金刚石微粉砂轮的磨粒实现规则排布,极大改善砂轮加工性能,利用环形磁控方法制备的砂轮可获得最佳表面粗糙度Ra3 nm、最佳面形精度PV318 nm的光滑镜面。     

Analysis of residual stress and work-hardened profiles on Inconel 718 when face turning with large-nose radius tools

Surface integrity (SI) and, particularly, the residual stress profile, has a great influence on the fatigue life of machined aeronautical critical parts. Among the different cutting parameters that affect the final SI, tool geometry is one of the most important factors. In particular, tool nose radius determines the surface roughness, as well as the thermoplastic deformation of the workpiece. Indeed, the use of large tool nose radius in the industry enables (1) increasing the feed rate while keeping the roughness values below specifications and (2) reducing the influence of the tool wear in the surface roughness. Therefore, in this study, the influence of tool nose radius in the induced residual stress profile and work-hardened layer when face turning Inconel 718 is analysed for a cutting speed range between (30–70 m/min) and a feed rate range of (0.15–0.25 mm/rev). For this purpose, residual stress profiles and work-hardened layer were measured by x-ray diffraction method after machining with a 4 mm nose radius. Then, results have been compared against different tool nose radius studies carried out by other authors for the specified working conditions. Results revealed that residual stress profiles varied when machining with different nose radius for the studied range. In particular, the increase of the nose radius brought to a higher difference between surface tensile stress and subsurface compressive peak stress, which is attributed to an increase of the thermal effect. Moreover, thicker work-hardened layer (around 100 μm) was observed when machining with large-nose radius for the studied working conditions.