基于旋转磁铁箝位的压电尺蠖驱动器理论与试验分析

为简化压电尺蠖驱动器信号控制系统并降低摩擦磨损，提出了一种基于旋转磁铁箝位的新型压电尺蠖驱动器。该驱动器利用直流电机带动永磁体转动实现交替箝位，通过激光对射传感器感知永磁体位置产生的激励信号来驱动压电叠堆实现精密直线位移输出。优化了驱动器结构的相关参数，制作了压电尺蠖驱动器样机并对其进行试验测试，结果表明：驱动器性能稳定，最小分辨率为0.119 μm，最高速度和最大载荷分别为481.43 μm/s、950 g。     

非共振式压电直线电机精密驱动及定位控制

为实现光机结构、集成电路等领域中大行程及高精度的位移控制,利用较为适用的非共振式尺蠖型压电直线电机,基于高压功率运算放大器,设计了非共振式压电直线电机的精密复合放大驱动电路,通过理论分析及实验得到的伯德图验证了驱动电路的分辨率和幅频特性。以现场可编程门阵列(FPGA)为核心处理器,以光栅尺为反馈元件,通过分析非共振式压电直线电机的多种运行模式,根据直线电机的运行时序,设计完成了开环大范围整步运行模式与闭环小范围单步运行模式相结合的控制策略,在单步运行模式中分别设计完成了PID控制算法及PID与压电陶瓷迟滞逆模型前馈相结合的复合控制算法。实验结果表明,该控制策略能够实现大行程内的精密位移控制,复合控制算法具有比PID更加优越的控制效果,能够在21mm大行程内实现1.5nm的闭环定位控制精度,直线电机的最大驱动力可达300N,满足大行程高精度位移控制的应用需求。     

Adaptive identification of hysteresis and creep in piezoelectric stack actuators

The adaptive identification of the non-linear hysteresis and creep effects in a piezoelectric actuator is proposed in this paper. Model uncertainties related to the hysteresis and creep effects, most prominently in the high frequency zone (to 100 Hz), large operating amplitude and/long operating time, can make a piezoelectric actuator-driven micro-positioning system unstable in the closed loop. Furthermore, these uncertainties may lead to inaccurate open-loop control and frequently cause harmonic distortion when a piezoelectric actuator is driven with a sinusoidal input voltage signal. In order to solve the above issues, it is important to determine an accurate non-linear dynamic model of a piezoelectric actuator. An unscented Kalman filter-based adaptive identification algorithm is presented, which accurately determines the non-linear dynamics of a piezoelectric stack type actuator such that the non-linear hysteresis and creep effects can be accurately predicted. Since hysteresis and creep are dominant in open loop, the actuator is driven in an open-loop mode in this investigation.     

神经网络分数阶PI~μD~λ在压电叠堆控制中的应用

为了克服压电叠堆的迟滞特性,实现压电叠堆的精确控制,建立了压电叠堆控制系统,研究了该系统所用到的神经网络、分数阶微积分等算法。首先,搭建了采集压电叠堆位移数据的硬件系统,并对含有噪声的位移数据进行了滤波处理;利用径向基函数(RBF)神经网络对压电叠堆建模,得到了模型参数。然后,利用RBF神经网络建模得到的Jacobain信息来整定分数阶PI~μD~λ控制器中的参数对压电叠堆进行控制。最后,与RBF整数阶PID对压电叠堆的控制效果进行了对比。结果显示:RBF建模误差仅为位移实测数据的0.22%,RBF神经网络分数阶PIμDλ控制系统输出稳定,很好地跟随了给定。得到的结果表明RBF神经网络分数阶PI~μD~λ控制器控制性能良好,在压电叠堆的控制中比RBF整数阶PID控制器表现得更加稳定、精确。     

Controller design for high-frequency cutting using a piezo-driven microstage

Controller design consists of a feedforward and a feedback controller to support a microstage with flexure hinge structure driven by piezoelectric ceramic actuator for high-frequency nanoscale cutting is developed in this article. The feedforward controller is designed based on a hysteresis dynamic model in order to reduce the nonlinear hysteresis effect of piezoelectric actuator. The position feedback controller is designed based upon an exponentially weighted moving average (EWMA) method embedded in an internal model control (IMC) structure constructing a run-to-run IMC (RtR-IMC) control scheme in order to deal with system bias or modeling inaccuracy. Also, disturbance due to temperature rise will influence actuator's performance, hence an additional compensator is included in the IMC structure. Surfaces dimple micro-machining utilizes piezoelectric-driven microstage for high-speed cutting is selected as an example to investigate system performance. The developed control algorithm is implemented on a DSP-based system to provide 1 kHz operating speed. In experiment, the proposed feedforward and feedback controller is verified to be able to overcome those negative factors efficiently and preserve good positioning accuracy.     

Note: creep character of piezoelectric actuator under switched capacitor charge pump control

A major deficiency in piezoelectric actuator performance is caused by hysteresis and creep effects. Switched capacitor charge pump control was previously proved to be an effective way to reduce hysteresis. In this work, creep character of a piezoelectric stack under charge pump control is investigated and modeled. Experiments show that the creep can be reduced by about 77% compared with the one under voltage control. The creep factor denoting the degree of creep shows hysteresis loops similar to displacement outputs under voltage control.     

箝位体刚度平衡对被动箝位压电驱动器性能的影响

基于前期研制的被动箝位直线压电驱动器,研究了带有三角放大结构的箝位体的刚度平衡对其有效输出位移和驱动器性能的影响。实验和有限元仿真分析显示:刚度不平衡时,箝位体结构产生的偏转位移会导致三角放大结构水平输出位移降低,箝位体对导轨放松程度较小,驱动器性能较低。文中提出用增加刚度平衡板的方法使箝位压电叠堆两侧等效拉伸刚度相等,并利用有限元仿真确定了刚度平衡板尺寸。实施上述方法后的实验结果表明:增加刚度平衡板后,箝位体水平运动位移增加,从而提高了箝位体动态响应频率和箝位体对导轨的释放程度,显著提高了驱动器性能。刚度平衡后,驱动器动态响应频率为450Hz,最大驱动力为7N,最大空载运行速度为1.49mm/s。     

Dynamic modelling of a flexure-based mechanism for ultra-precision grinding operation

This paper presents the dynamic modelling and performance evaluation methodologies of a flexure-base mechanism for ultra-precision grinding operation. The mechanical design of the mechanism is briefly described. A piezoelectric actuator is utilized to drive the moving platform. A flexure-based structure is utilized to guide the moving platform and to provide preload for the piezoelectric actuator. By simplifying the Hertzian contact as a linear spring and damping component, a bilinear dynamic model is developed to investigate the dynamic characteristics of the flexure-based mechanism. Based on the established model, the separation phenomenon between the moving platform and the piezoelectric actuator is analyzed. The influences of the control voltage and the preload stiffness on the maximum overshoot are extensively investigated. The slope and cycloidal command signals are utilized to reduce and/or avoid the overshoot of such flexure-based mechanism for rapid positioning. The effects of the rising time of the command signals on the maximum overshoot and the settling time are also explored. Experiments are performed to verify the established dynamic model and the performance of the developed flexure-based mechanism.     

Modeling of hysteresis in piezoelectric actuators using neural networks

For the application of neural networks to the approximation of hysteresis which is characterized of multi-valued mapping and non-smooth nonlinearities, a novel modeling technique based on a transformation of one-to-one mapping is proposed in this paper. In this method, a special hysteretic operator is introduced to describe the change tendency of the hysteresis with regard to its input. Then an expanded input space is constructed for hysteresis with the introduction of such hysteretic operator, on which the multi-valued hysteresis is decomposed into a one-to-one mapping. Thus, neural networks model for hysteresis is derived, avoiding the calculation of the gradient of hysteresis. Subsequently, for approximation of rate-dependent hysteresis in piezoelectric actuators which is caused by the dynamic voltage excitations, a hybrid model, i.e. the dynamic extension of the proposed neural hysteresis submodel is developed. In the model, a linear dynamic block is introduced in series with the proposed neural model to allow for rate-dependent dynamics of the piezoelectric actuator simultaneously. Also the corresponding optimization algorithm by use of the modified Levenberg–Marquarqt (MLM) method is given. Finally, the experimental validation results of applying both the proposed neural hysteresis model and hybrid model to a piezoelectric actuator are presented.     

压电微位移台的动态迟滞建模及实验验证

为了提高压电微位移平台快速定位的精确度,建立了一种表征压电微位移平台驱动电压与输出位移关系的定位模型。考虑压电工作台在快速、大行程精确定位过程中会受压电陶瓷迟滞特性及本身动态特性的影响,本文采用BoucWen模型描述压电陶瓷迟滞特性,并结合压电工作台的动态特性进行共同建模,使模型同时体现压电工作台的动态特性与迟滞特性。为了验证模型的正确性,搭建了基于压电微位移平台和相关驱动器的实验设备对模型进行了实验验证,并进行了测控程序的二次开发。研究结果表明,与单纯的Bouc-Wen模型相比,提出模型在最大位移输出为40μm,输入电压频率为40Hz时的最大误差由3.04μm下降到了0.67μm,此时最大相对误差为1.68%。得到的结果验证了提出的模型可较好地模拟压电工作台的迟滞特性与动态特性,大大提高压电微位移平台在快速、大行程定位中的精确度。     

压电陶瓷驱动微位移机构迟滞非线性改善方法研究

压电陶瓷驱动器在精密微位移系统中有着广泛的应用,但其固有的迟滞非线性严重影响系统的运动精度,使控制困难.通过数学建模方法建立压电陶瓷的迟滞曲线逆模型,并用此模型对压电陶瓷进行位移补偿,可以有效减小压电陶瓷迟滞非线性对系统精确控制的影响.提出一种用两个压电陶瓷协同驱动微动平台运动的微位移机构,通过基于迟滞逆模型的开环控制方法,对压电陶瓷位移进行误差补偿,可以实现微动平台运动与控制信号较好的线性对应关系.     

A flexure-based mechanism and control methodology for ultra-precision turning operation

This paper presents the methodology for modeling and control of a high precision flexure-based mechanism for ultra-precision turning operation. A high performance piezoelectric actuator is used to driven the flexure-based mechanism. A parallel flexure hinge mechanism is utilized to guide the moving platform and to preload the piezoelectric actuator. A high resolution capacitive sensor is used to measure the displacement of the flexure-based mechanism for closed-loop control. With consideration of the driving circuit, the dynamic model of the flexure-based mechanism has been established. The effect of the driving circuit on the dynamic response of the precision mechanism is investigated. Experimental tests have been carried out to verify the established model and the performance of the flexure-based mechanism.     

磁流变测量系统的控制滞后与动态响应

磁流变系统的控制效果依赖于系统建模,因此对滞后与动态响应特性的建模尤为重要。通过分析磁流变系统受控制信号激励时各部分的滞后,得到了系统研究各部分动态行为的方法;通过施加直流加交流的激励,测试与研究了磁流变测量系统的动态响应特性。结果表明,无偏置简谐电流激励下电流-剪切应力关系为蝶形曲线,经分析可知其由响应滞后所致,而曲线光滑的上下沿分别由滞后和系统的非线性导致。最后,通过引入滞后时间较好地描述了各种情况下电流与剪切应力间的动态响应关系,其值为23.1 ms。     

压电陶瓷微位移器件控制模型的研究

从不同角度介绍了压电陶瓷微位移器件的两种控制模型.首先,借助于统计物理学分析,结合数学建模方法,建立了一个简单实用的压电陶瓷的迟滞数学模型.其次,借助于弹性体变形理论,介绍了压电/电致伸缩陶瓷的归一化控制模型,从理论上说明了采用电极化强度的方法可以有效减小迟滞的观点.并设计了两种实验系统,对两种控制模型进行了实验验证,实验结果表明,所建立的两种模型可有效减小压电陶瓷的迟滞非线性误差,提高压电陶瓷微位移的控制精度,有助于实现压电陶瓷驱动器的高精度开环微位移控制.     

压电微定位台的率相关动态迟滞建模及参数辨识

针对压电微定位台固有的率相关迟滞非线性严重限制其微定位精度的问题,研究了基于Backlash-Like的Hammerstein率相关迟滞非线性模型及其建模方法。以改进的Backlash-Like分段辨识模型描述压电微定位台的静态非线性特性,结合ARX(Auto Regressive eXogenous)模型,建立描述压电微定位台的率相关动态迟滞模型。同时,针对传统的粒子群算法(Particle Swarm Optimization,PSO)进行模型参数辨识时易陷入局部最优的问题,提出一种具有交叉变异策略的改进型粒子群算法进行模型的参数辨识。实验结果表明:与传统的Backlash-Like模型相比,改进的Backlash-Like分段辨识模型在输入电压为60V,频率为2Hz的信号时,模型辨识的最大误差由0.68μm下降到了0.104μm,最大相对误差由2.69%下降为0.35%。当压电微定位台输入电压为60V,频率分别为30Hz,60Hz和90Hz的单频信号时,Hammerstein率相关迟滞模型较Backlash-Like分段辨识模型,均方根误差由0.393 1～0.700 6μm下降至0.054 1～0.190 4μm,相对误差由1.721%～3.087%下降至0.236%～0.831%。验证了基于改进Backlash-Like的Hammerstein率相关迟滞模型较传统的Backlash-Like静态迟滞模型能精确地描述压电微定位台的率相关动态迟滞特性,具有较好的频率泛化能力,提高了压电微定位平台的定位精度。     

用于微隔振平台的压电致动器设计与研究

为实现微隔振平台的自适应控制,选择具有驱动和传感功能的压电陶瓷设计了一种驱动器.从其本构关系出发,对单片压电陶瓷进行了分析,在此基础上建立了压电堆动态模型.设计出的压电致动器,不仅具有驱动与传感功能,而且具有简单、易加工等特点,然后通过试验研究,对压电致动器的预压进行了标定,并选择了合适的预压弹簧,完成了对致动器的成品化.最后对压电致动器的迟滞、线性、重复性进行了初步研究,为微隔振平台的控制打下了基础.     

压电陶瓷微动台的复合控制

压电陶瓷微动台的迟滞非线性严重影响其动态定位精度,为了解决这一问题,采用一种改进的PI模型对微动台的迟滞非线性进行了建模.为了提高传统PID算法对压电陶瓷微动台的动态定位性能,将改进的PI模型与传统PID算法组合构成前馈复合控制算法,并进行了微动台的慢速与快速动态定位实验.结果表明,对同频曲线定位时,前馈PID复合算法的最大误差为传统PID算法的40％左右,平均误差为传统算法的20％～30％左右;对多频曲线定位时,前馈PID复合算法的最大误差和平均误差为传统PID算法的33％左右.数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法.     

压电陶瓷驱动微小型步行机的设计与仿真研究

为适应微细操作的需要，研制了一种压电陶瓷驱动的微小型步行机样机。该样机利用仿生蠕动原理，能方便地实现平面上三自由度运动。分析了步行机的移动机理及结构组成。基于ADAMS的动力学仿真结果分析了各种因素(包括步行机与运动平面的摩擦状况、激励电压的幅值和频率等)对步行机运动的影响。仿真结果表明了运动的可行性。     

压电执行器动态迟滞建模与LQG最优控制器设计

为提高空间天文望远镜稳像系统中压电快摆镜(Fast Steering Mirror,FSM)的动态性能,对压电执行器(Piezoelectric Actuator,PZT)动态迟滞补偿和控制进行研究。鉴于基于广义Play算子Prandtl-Ishlinskii(PI)模型的求逆复杂性和迟滞曲线的非对称性,构造一种基于广义Stop算子PI逆模型来补偿压电执行器迟滞非线性。采用Hammerstein模型对压电执行器动态迟滞特性进行建模,以广义PI模型和自回归遍历模型(Auto-regressive Exogenous Model,ARX)分别表征Hammerstein迟滞模型中的静态非线性和率相关性,并针对迟滞率相关模型不确定性问题,提出一种前馈补偿和线性二次型Gauss最优控制算法(Linear Quadratic Gaussian,LQG)相结合的复合控制策略。利用自适应差分进化算法(Adaptive Differential Evolution algorithm,ADE)辨识和整定模型及控制器参数。实验结果表明:该动态迟滞模型能够有效描述1～100Hz频率范围内压电执行器迟滞曲线,拟合均方根误差为0.077 1μm(@1 Hz)～0.512 3μm(@100Hz),相对误差为0.31%(@1Hz)～2.09%(@100Hz);实时跟踪幅值为24.5μm的变频目标位移,LQG控制算法的跟踪精度相比于直接前馈控制和PID控制分别提高48.6%和27.02%。     

快速伺服刀架迟滞特性的Preisach建模

使用压电陶瓷作驱动元部件的快速伺服刀架是一种新的加工手段。本文介绍了基于Preisach模型的快速伺服刀架迟滞特性建模方法。作为快速伺服刀架的驱动元部件,压电陶瓷微位移器自身的迟滞、蠕变等非线性特性严重影响了快速伺服刀架的动态性能。为了精确建立快速伺服刀架的迟滞模型,给出了Preisach模型的数字表达方式,通过一系列实验测得的数据证明快速伺服刀架系统具有一致特性与擦除特性,满足Preisach模型的两个必要条件,最后在实验数据的基础上建立了基于Preisach模型的迟滞特性模型。实验表明,该迟滞模型可以很好地预测快速伺服刀架的迟滞位移曲线,其预测误差不超过0.65 μm。