电火花仿铣加工轨迹环切特征单元生成算法研究

基于数控电火花仿铣特征单元和环切特征单元理论,运用平面区域加工方法,给出一种较为简便的数控电火花仿铣加工轨迹的生成方法,从而有效的对电极损耗和放电间隙进行补偿。     

弱电解质溶液EDM/ECM复合加工机理研究

弱电解质溶液中利用电沉积补偿电极损耗的电火花/电化学复合加工技术可以大幅降低电极损耗,对提高微细电火花加工效率具有重要意义。由于该工艺方法是EDM/ECM复合加工领域一个新的研究方向,研究成果很少。为加深对利用电沉积补偿电极损耗的电火花/电化学复合加工技术的认识,基于实验结果,对弱电解质溶液中的电火花/电化学复合加工的材料去除机理、放电通道形成机理及电极损耗机理进行了初步探索,得到了以下结果:电火花放电蚀除和电化学溶解共同将工件材料去除;大量气泡存在于电极间隙使复合加工放电通道的形成异于电火花放电加工;电沉积作用和电火花放电蚀除共同对工具电极损耗产生影响。     

微细电火花加工倒凹坑效应的研究

对微细电火花圆柱电极损耗出现倒凹坑效应的影响因素进行研究。通常微细电火花电极损耗稳定后,加工端面为半球形,然而在特定的加工条件下,电极端面呈倒凹形状,微孔底端为山状突起,这种异常损耗会破坏电极形状精度而影响加工零件的尺寸精度。通过改变放电能量与放电间隙流体状态等微细电火花加工工艺参数,对比不同实验条件下电极端面形状损耗的变化情况,经检测,出现倒凹坑效应的微孔底端突起为电极材料沉积。实验研究结果表明:电极熔融沉积是电极损耗倒凹坑效应出现的主要原因。     

材料晶界和晶粒对电火花微细加工的影响研究

为了在电火花微细加工中确定合理的工具损耗补偿工艺与加工工艺,提高微小零件微细加工的质量,通过在合金材料上选择晶粒和晶界部位大量加工微孔以及其后的统计分析,研究了微细电火花加工过程中工件材料晶粒与晶界对放电间隙、材料去除速度以及电极体积相对损耗等加工特性的影响。研究结果表明,由于工件材料中晶粒和晶界在成分、熔点、热导率以及机械性能等方面的差异,当用微细电火花进行微细加工,特别是当加工尺度小于工件材料的晶粒尺寸时,晶粒和晶界的加工特性具有明显差别,制订工具损耗补偿工艺和加工工艺时应该考虑到材料微观结构对加工过程的影响。     

微细电火花加工系统及其工艺技术

开发了一套微细电火花加工系统,该系统不仅能加工微细轴、微细孔,还能实现微三维结构的微细电火花加工。研究了针对该系统的微细电火花加工工艺技术,研究了放电电压、放电电容等工艺参数,主轴转速,以及工作液介质对微细电火花加工效率、相对电极损耗率的影响规律。采用旋转削边电极技术大大提高了进行大深径比微细孔加工时的加工效率。进行了大量的加工实验,加工出了最小直径为6μm的微细轴以及最小直径为10μm的微细孔;通过对电极损耗的在线补偿策略研究,实现了微三维结构的加工,加工出了外径为4mm、具有24个叶片的微型涡轮盘及具有微三维结构的微细梁,充分证实了该系统的广泛适用性。     

一种三轴联动微细电火花加工装置的研制

1.微细电火花的加工原理及特点 微细电火花加工的原理与普通电火花加工并无本质区别。其加工的表面质量主要取决于电蚀凹坑的大小和深度,即单个放电脉冲的能量;而其加工精度则与放电间隙、工艺系统稳定性、电极损耗等     

微细电火花加工机床关键技术

研制开发两台高精度、高性能,具有自主知识产权的微细电火花加工机床,并对微细电火花加工机床的几个特有关键技术进行了深入研究.基于压电陶瓷的宏微伺服进给系统能实现分辨率为3.42 nm的微进给,并且能实现振动式进给,以改善微细电火花加工的间隙状态,提高微细电火花的加工效率和加工质量.结合块电极反拷与线电极反拷的微细工具电极反拷系统,可高效高精度地现场制作微细电极,电极直径最小可达4 μm.基于多传感器信息融合技术的放电间隙状态监测技术,能很好地解决微细电火花加工间隙状态的监测与识别问题.RC脉冲电源不存在维持电压现象,这一最新发现为降低单脉冲放电能量难题提供一个新的解决途径,使得基于RC方法开发的超微能脉冲电源的单脉冲放电能量最小降至皮焦级,为微细电火花加工奠定了良好的基础.最后的微细电火花加工试验表明,所开发的微细电火花加工机床性能稳定,且加工质量良好,尤其适合加工孔径为50～200 μm的微细孔.     

基于液相电极的微细电火花加工方法研究

提出了一种利用液态金属作为加工电极的新型微细电火花放电加工方法,用于解决传统电火花加工中电极损耗引起的相关问题。该方法将导电的液态金属——镓铟锡合金注入毛细管工具电极中,通过控制管内压力使其悬挂在工具电极末端,脉冲电源施加在液体金属、工件之间,并控制它们之间的间隙来进行火花放电,从而达到蚀除工件的目的。放电过程中,尖端的液态金属会损耗,但在静电力以及虹吸作用下,工具电极中的液态金属会连续供应以补偿损耗。试验结果表明,镓铟锡合金能够作为电极进行电火花放电,任意图案扫描刻蚀结果表明镓铟锡合金电极进行电火花放电加工的方案是切实可行的,并且Parylene C镀层能够有效的保护工具电极。     

压电自适应微细电火花加工系统特性分析

针对微细电火花加工过程中排屑困难,极易产生短路、拉弧等非正常加工现象,进而造成微细电火花加工效率低、电极损耗大等特点,基于压电陶瓷的逆压电效应提出了一种新的加工方法--压电自适应微细电火花加工技术,对其加工原理进行了详细阐述,并结合试验对该加工系统的加工特性进行了详细分析.试验证明该技术在加工过程中能够实现放电间隙与放电状态的自适应调节,促进捧屑,可有效控制短路及拉弧现象的出现,进而提高微细电火花的加工稳定性及加工效率,并能实现超低电压下的微细电火花加工.结合实例说明采用压电自适应微细电火花加工技术进行小孔加工的过程中能实现稳定加工,获得较高的加工效率,并且加工的小孔圆度较好,说明该技术在微小孔加工方面具有广阔的应用前景.     

微细电火花加工及其关键技术

综述了微细电火花加工的基本原理及最新研究进展。比较了LIGA技术与微细电火花加工的特点与应用。简要分析了微细电火花加工的关键技术：微细电极的在线制作、微进给装置、微小能量的脉冲电源、微小电极的运动轨迹规划、电极的损耗及补偿策略。展望了微细电火花加工在微三维结构加工中的应用前景。     

Experimental research on effects of process parameters on servo scanning 3D micro electrical discharge machining

Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials.In 3D SSMEDM process,the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap,instead of the traditional methods that depend on experiential models or intermittent compensation.However,the effects of process parameters on 3D SSMEDM have not been reported up until now.In this study,the emphasis is laid on the effects of pulse duration,peak current,machining polarity,track style,track overlap,and scanning velocity on the 3D SSMEDM performances of machining efficiency,processing status,and surface accuracy.A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon.The experimental results were obtained as follows.Peak current plays a main role in machining efficiency and surface accuracy.Pulse duration affects obviously the stability of discharge state.The material removal rate of cathode processing is about 3/5 of that of anode processing.Compared with direction-parallel path,contour-parallel path is better in counteracting the lateral wear of tool electrode end.Scanning velocity should be selected moderately to avoid electric arc and short.Track overlap should be slightly less than the radius of tool electrode.In addition,a typical 3D micro structure of eye shape was machined based on the optimized process parameters.These results are beneficial to improve machining stability,accuracy,and efficiency in 3D SSMEDM.     

Detection of the eroding surface in the EDM process based on the current signal in the gap

To achieve a high removal rate and low electrode wear in a sinking electrical discharge machining process (EDM), rough machining parameters have to be selected according to the size of the eroding surface. In general, the size of the eroding surface varies according to the depth of the machining. Thus, it has to be determined on-line. This paper shows that the electric current signal in the gap depends on the size of the eroding surface. The significance of the process attributes of the electric current signal is established by inductive machine learning and the general decision rules are derived. The size of the eroding surface can be detected on-line by monitoring and evaluating the electric current signal in the gap.     

Detection of the eroding surface in the EDM process based on the current signal in the gap

To achieve high removal rate and low electrode wear in sinking electrical discharge machining process (EDM), rough machining parameters have to be selected according to the size of the eroding surface. In general, the size of the eroding surface varies according to the depth of the machining. Thus, it has to be determined on-line. This paper shows that the electric current signal in the gap depends on the size of the eroding surface. The significance of the process attributes of the electric current signal is established by inductive machine learning and the general decision rules are derived. The size of the eroding surface can be detected on-line by monitoring and evaluating the electric current signal in the gap.     

Process planning and electrode wear compensation for 3D micro-EDM

This paper presents a novel multi-cut process planning method and a new electrode wear compensation method based on a machine vision system for three-dimensional (3D) micro-electrical discharge machining (micro-EDM). Front wear and corner wear of tool electrode can be measured and compensated in a direct manner by the vision system??s image processing software capabilities. Experiments have shown that corner wear ratio (defined as a ratio between the length of corner wear and electrode diameter) is linearly proportional to machining length under a fixed machining depth condition. Track overlapping between the two adjoining paths is designed appropriately according to the corner wear ratio. Experimental results not only indicate that the proposed multi-cut process planning and electrode wear compensation methods can significantly improve machining accuracy and reduce machining time for the micro-EDM process, they also demonstrate that the X?CY dimensional errors of micro-structures can be controlled within 10???m.     

An investigation of tube and rod electrode wear in micro EDM drilling

This paper studies the influence of various factors contributing to micro electrode wear during electrical discharge machining (EDM) drilling with micro rod and micro tube electrodes. In this paper, a simple method for calculating volumetric wear ratios is proposed based only on geometrical information obtained from the process. The objective of the research is to investigate the wear behaviour of electrodes and the suitability of electrode wear compensation methods. Electrode shape deformation and random variation of the volumetric wear are studied as the main factors affecting the applicability of wear compensation methods and as an indicator of the accuracy achievable with the micro EDM process.     

Prediction of aspect ratio of a micro hole drilled by EDM

Micro electrical discharge machining (EDM) has the ability to drill micro holes with high accuracy in metallic materials. The aspect ratio of a micro hole generated by micro EDM is usually higher than those by other processes such as etching, mechanical drilling, and laser. However, it was found that the drilling speed of micro EDM slows down and even stops when the aspect ratio of a micro hole reaches a certain value. To understand this phenomenon, a theoretical model is proposed based on the fluid mechanics and surface tension. Experiments under different machining conditions are carried out to verify this model. Experimental results agree with the theoretical values, which indicate the validity of the proposed model. The difference between the theoretical values and the real values might be caused by debris, temperature and rotating of electrode in the discharge gap, which are ignored in the model.     

Experimental investigations into electrical discharge machining with a rotating disk electrode

In electrical discharge machining, when the provision of holes in the electrode is impracticable, flushing of the working gap poses a major problem. Use of a rotating disk electrode is proposed as a more productive and accurate technique than use of a conventional electrode. Material removal rate, tool wear rate, relative electrode wear, corner reproduction accuracy, and surface finish aspects of a rotary electrode are compared with those of a stationary one. The effective flushing of the working gap brought about by the rotation of the electrode remarkably improves material removal rate and machines surfaces with a better finish. Despite the prevalent high tool wear rate, the reproduction accuracy is least affected as the wear gets uniformly distributed over the entire circumference of the disk. Machining of a sharp corner is possible even with an aluminum electrode, whose relative electrode wear is greater than unity.     

电火花铣削加工智能化数控系统研究

根据电火花铣削加工的特点，开发了基于Windows2000的电火花铣削加工智能化数控系统。该数控系统由PC机、DMC300运动控制卡、放电状态检测卡、A／D卡、I／O卡和脉冲电源等硬件组成。在软件设计中，采用人工神经网络来预测电极损耗，实现电极的智能预测和补偿。建立两个模糊控制器，分别以放电状态和极间电压作为输入，实现进给系统的变步距、变频双重调节，提高了系统的跟踪能力和稳定性。根据Windows驱动程序模型开发了各种板卡的驱动程序。实际使用表明，该系统具有较强的适用性。     

Micro Electrical Discharge Machining Deposition in Air for Fabrication of Micro Spiral Structures

Micro electrical discharge machining(EDM) deposition process is a new micro machining method for fabrication of metal micro structures. In this process, the high level of tool electrode wear is used to achieve the metal material deposition. Up to now, the studies of micro EDM deposition process focused mainly on the researches of deposition process, namely the effects of discharge parameters in deposition process on the deposition rate or deposition quality. The research of the formation of micro structures with different discharge energy density still lacks. With proper conditions and only by the z-axis feeding in vertical direction, a novel shape of micro spiral structure can be deposited, with 0.11 mm in wire diameter, 0.20 mm in outside diameter, and 3.78 mm in height. Then some new deposition strategies including angular deposition and against the gravity deposition were also successful. In order to find the forming mechanism of the spiral structures, the numerical simulation of the transient temperature distribution on the discharge point was conducted by using the finite-element method(FEM). The results show that there are two major factors lead to the forming of the spiral structures. One is the different material removal form of tool electrode according with the discharge energy density, the other is the influenced degree of the movement of the removed material particles in the discharge gap. The more the energy density in single discharge is, the smaller the mass of the removed material particles is, and the easier the movements of which will be changed to form an order tendency. The fine texture characteristics of the deposited micro spiral structures were analyzed by the energy spectrum analysis and the metaliographic analysis. It shows that the components of the deposited material are almost the same as those of the tool electrode. Moreover the deposited material has the brass metallic luster in the longitudinal profile and has compact bonding with the base material. This research is useful to understand the micro-process of micro EDM deposition better and helpful to increase the controllability of the new EDM method for fabrication of micro structures.