A cathode support structure for use in a magnetron oscillator experiment

A low temperature co-fired ceramic (LTCC) material system has been used to develop a protype field emission cathode structure for use in an experimental magnetron oscillator. The structure is designed for used with 30 gated field emission array (GFEA) die electrically connected through silver metal traces and electrical vias. To approximate a cylinder, the cathode structure (48 mm long and 13.7 mm in diameter) is comprised of 10 faceted plates which cover the GFEA dies. Slits in the facet plates allow electron injection. The GFEA die (3 mm × 8 mm) are placed in axial columns of 3 and spaced azimuthally around a cylindrical support structure in a staggered configuration resulting in 10 azimuthal locations. LTCC manufacturing techniques were developed in order to fabricate the newly designed cathode with seven layers wrapped to form the cylinder with electrical traces and vias. Two different cathode wrapping techniques and two different via filling techniques were studied and compared. Two different facet plate manufacturing techniques were studied. Finally, four different support stand configurations for firing the cylindrical structure were also compared with a square post stand having the best circularity and linearity measurements of the fired structure.     

RF磁控溅射制备钛酸锶钡BST纳米薄膜

钛酸锶钡(BST)薄膜作为一种高K介质材料在微电子和微机电系统等领域具有广阔的应用前景,人们已对BST薄膜的制备工艺技术和介电性能进行了大量的研究。BST纳米薄膜的制备工艺直接影响和决定着薄膜的介电性能(介电常数、漏电流密度、介电强度等)。对RF磁控反应溅射制备BST纳米薄膜的工艺技术进行了综述。从溅射靶的制备、溅射工艺参数的优化、热处理、薄膜组分的控制,及制备工艺对介电性能的影响等方面,对现有研究成果进行了较全面的总结。     

源气体流量比对F-DLC薄膜结构的影响

以高纯石墨作靶，CHF3/Ar作源气体采用反应磁控溅射法制备出了氟化类金刚石（F-DLC）薄膜。拉曼光谱表明，CHF3相对流量的增加会引起薄膜的D峰与G峰强度之比I（D）/I（G）减小，晶粒增大，芳香环结构出例下降。红外吸收光谱分析证实了这些推论，指出这是由于薄膜中氟含量上升的结果。     

磁控溅射WO3薄膜特性研究

用磁控溅射法制成WO3薄膜,通过改变成膜的溅射参数来改变WO3薄膜的性能.利用XRD分析了样品的粒径大小,研究了成膜工艺参数对气敏元件性能的影响.结果表明,薄膜中WO3晶粒的平均尺寸为17 nm,该传感器对NOx气体有非常好的灵敏度和选择性,对体积分数为1×10-5的NOx气体灵敏度高于50倍,而对其他干扰气体的灵敏度小于2倍.     

一种奇特型阴极的分析研究与改进

本文主要叙述对Jc-300磁控管奇特型阴极的分析研究、改进过程及其投入生产使用的效果     

热氧化磁控溅射金属锌膜合成一维ZnO纳米棒

利用退火热氧化射频磁控溅射金属锌膜的方法在Si(111)衬底上制备了一维Zn O纳米棒,同时用多种测试手段对样品的晶体结构、表面形貌和光学性能进行了研究.XRD,SEM和TEM的测试结果表明,Zn O纳米棒为单晶相六方纤锌矿结构,呈头簪状向外发散生长,直径在30～60 nm左右,其长度可达几μm.PL 谱测试结果表明:在波长为280 nm光的激发下,在372 nm处有强的近带边紫外光发射和516 nm处的较微弱深能级绿光发射.说明合成的一维Zn O纳米棒的结晶质量和光学性能优良     

Series resonant ZCS‐PFM DC‐DC power converter with high‐frequency high‐voltage transformer link for high‐power magnetron drive

This paper presents a single lossless inductive snubber‐assisted ZCS‐PFM series resonant DC‐DC power converter with a high‐frequency high‐voltage transformer link for industrial‐use high‐power magnetron drive. The current flowing through the active power switches rises gradually at a turned‐on transient state with the aid of a single lossless snubber inductor, and ZCS turn‐on commutation based on overlapping current can be achieved via the wide range pulse frequency modulation control scheme. The high‐frequency high‐voltage transformer primary side resonant current always becomes continuous operation mode, by electromagnetic loose coupling design of the high‐frequency high‐voltage transformer and the magnetizing inductance of the high‐frequency high‐voltage transformer. As a result, this high‐voltage power converter circuit for the magnetron can achieve a complete zero current soft switching under the condition of broad width gate voltage signals. Furthermore, this high‐voltage DC‐DC power converter circuit can regulate the output power from zero to full over audible frequency range via the two resonant frequency circuit design. Its operating performances are evaluated and discussed on the basis of the power loss analysis simulation and the experimental results from a practical point of view. © 2005 Wiley Periodicals, Inc. Electr Eng Jpn, 153(3): 79–87, 2005; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.20126     

双层辉光离子渗镀钽

介绍了一种新型离子渗镀钽的工艺方法。较好解决了渗镀钽时供给活性钽粒子的总是比方法工艺简单，操作方便，效率高。为充分利用和节约使用昂贵的钽探索了一条实用可行的途径。     

1Cr18Ni9Ti不锈钢微晶的耐局部腐蚀性能研究

利用磁控离子溅射技术得到bcc结构的1Cr18Ni9Ti不锈钢微晶溅射层,在不同溅射条件下可以得到(110)和(211)两种择优取向的微晶。用电化学方法研究表明,这两种微晶的耐局部腐蚀性能都较正常晶粒有明显提高,且(110)择优取向微晶的耐局部腐蚀性能较(211)择优取向微晶的耐局部腐蚀性能更好。