化学机械抛光制程中铜抛光液平坦化能力的评估

The evaluation methods of planarization capability of copper slurry are investigated.Planarization capability and material removal rate are the most essential properties of slurry.The goal of chemical mechanical polishing(CMP) is to achieve a flat and smooth surface.Planarization capability is the elimination capability of the step height on the copper pattern wafer surface,and reflects the passivation capability of the slurry to a certain extent.Through analyzing the planarization mechanism of the CMP process and experimental results,the planarization capability of the slurry can be evaluated by the following five aspects:pressure sensitivity,temperature sensitivity,static etch rate,planarization efficiency and saturation properties.     

基于化学机械动力学的碱性铜抛光液平坦化机理研究

The planarization mechanism of alkaline copper slurry is studied in the chemical mechanical polishing (CMP) process from the perspective of chemical mechanical kinetics.Different from the international dominant acidic copper slurry,the copper slurry used in this research adopted the way of alkaline technology based on complexation. According to the passivation property of copper in alkaline conditions,the protection of copper film at the concave position on a copper pattern wafer surface can be achieved without the corrosion inhibitors such as benzotriazole(BTA),by which the problems caused by BTA can be avoided.Through the experiments and theories research,the chemical mechanical kinetics theory of copper removal in alkaline CMP conditions was proposed. Based on the chemical mechanical kinetics theory,the planarization mechanism of alkaline copper slurry was established. In alkaline CMP conditions,the complexation reaction between chelating agent and copper ions needs to break through the reaction barrier.The kinetic energy at the concave position should be lower than the complexation reaction barrier,which is the key to achieve planarization.     

电子束辐照对小麦营养品质和面团流变学特性的影响

采用0、0.83、1.56、2.30、4.93kGy不同剂量的电子束辐照小麦麦仁,研究其对小麦营养品质、面筋质量和面团流变学特性影响。结果表明:不同剂量的电子束辐照对小麦的粗蛋白含量、氨基酸组成与平衡性影响不显著(P>0.05),对湿面筋含量、出粉率无显著影响(P>0.05),但沉淀值、降落数值均随着辐照剂量的增加而下降(P<0.05)。电子束辐照对面团的吸水量、拉伸度影响不显著(P>0.05),但面团弱化度随着辐照剂量的增加而增加(P<0.05)。与未辐照组相比,2.30、4.93kGy剂量辐照时面团形成时间、稳定时间明显下降(P<0.05),0.83、1.56kGy剂量辐照时面团的最大拉伸阻力、50mm处最大拉伸阻力显著增强(P<0.05),0.83kGy剂量辐照时面团的拉伸能量明显提高(P<0.05)。0.83、1.56kGy的辐照剂量可使小麦粉面团筋力增强。     

芒果采后防腐保鲜研究概况

本文介绍芒果后生理特性和主要病害,并综述其防腐保鲜研究概况。     

Fenton试剂氧化降解含甲醛废水的研究

探讨不同pH值、H2O2和Fe2 浓度下Fenton试剂氧化降解甲醛的规律,比较均相催化过程和非均相过程Fenton试剂氧化降解甲醛的效果。发现在其它条件相同的情况下,pH值在3.2时,Fenton试剂的氧化性能最强,适当的H2O2和Fe2 浓度有利于甲醛的降解,以活性炭为载体吸附Fe2 制成的非均相催化剂具有更强的催化性能。     

中央厨房肉制菜品的滋味变化研究进展

中央厨房的发展势头猛进,同时也面临着消费者更多元的消费需求和更高的品质要求。本文综述中央厨房肉制品在热加工、储藏运输等环节中滋味物质的变化,旨在对中央厨房肉制菜品滋味的良好保存提供理论依据,保证其滋味特性的良好呈现,从而实现产品品质和经济效益的最大化,推动中央厨房产业规模化、规范化发展。     

竹炭的改性及对PP废塑料性能影响的研究

首先用硅烷偶联剂γ-氨丙基三乙氧基硅烷(KH550)处理竹炭(BC)得到K-BC,再通过熔融共混制备了一系列的K-BC/聚丙烯废洗衣机料(X-PP)复合材料,通过扫描电子显微镜(SEM)表征了BC的形貌,分析了K-BC含量对复合材料物理性能、尺寸稳定性、热变形温度(HDT)及维卡软化温度(VST)的影响.结果发现,BC...     

系统化市话网规划方法体系的研究

文章对市话网规划的全过程,特别是需要进行优化计算的主要环节,如:业务预测、局所规划、中继网优化以及规划方案的技术经济分析与评价等,进行了系统的论述。全文力求从内容和方法上阐明市话网规划的目的和主要任务,以及各环节之间的相互关系,以便使市话网规划工作更加系统化和科学化。     

基于ANSYS的复合材料旋翼桨叶动力分析

首次应用APDL语言建立复合材料旋翼桨叶三维有限元模型。计入空气动力和离心力,应用ANSYS软件对旋翼桨叶的动力特性和静强度进行分析,给出桨叶共振图。依据本文动力分析后设计的复合材料旋翼桨叶已成功应用于某型号的无人直升机。