A 45-channel 100 GHz AWG based on Si nanowire waveguides

A 45-channel 100 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the spectrum simulation. The simulated results show that the central wavelength and channel spacing are 1 562.1 nm and 0.8 nm, respectively, which are in accord with the designed values, and the crosstalk is about ?23 dB. The device is fabricated on silicon-on-insulator (SOI) substrate by deep ultraviolet lithography (DUV) and inductively coupled plasma (ICP) etching technologies. The 45-channel 100 GHz AWG exhibits insertion loss of 6.5 dB and crosstalk of ?8 dB. This work has been supported by the National High Technology Research and Development Program of China (No.2015AA016902), and the National Natural Science Foundation of China (Nos.61435013 and 61405188). E-mail:zhangjiashun@semi.ac.cn      

光敏性杂化SiO2波导薄膜的制备、表征及应用

利用有机/无机杂化方法制备了光敏性溶胶-凝胶（sol-gel）SiO2材料，在预生长了18μm厚的SiO2上包层的硅基片上旋涂成膜。经前烘、紫外曝光、后烘的薄膜在5μm×5μm的扫描范围内的表面粗糙度只有0．266nm，表面起伏度只有0．336nm。利用紫外光直写技术，制作出条形波导器件。SEM照片表明波导端面形状较好，侧壁陡直。对1×4多模干涉型分束器进行初步的通光测试，观察到分光效果较好的近场输出图像。     

紫外光直写杂化溶胶-凝胶SiO2光波导器件

利用有机/无机杂化方法制备了光敏性溶胶-凝胶(sol-gel)SiO2材料,在硅基片上旋涂成膜.研究了薄膜折射率和厚度随紫外曝光时间、后烘温度及时间等外界工艺条件的变化关系.利用紫外光直写技术,制作出1×2,1×4多模干涉(MMI)型分束器,并且观测到了分光效果较好的近场输出图像.     

Tunable filters based on an SOI nano-wire waveguide micro ring resonator

Micro ring resonator(MRR) filters based on a silicon on insulator(SOI) nanowire waveguide are fabricated by electron beam photolithography(EBL) and inductive coupled plasma(ICP) etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring is around 5μm.The test results from the tunable filter based on a single ring show that the free spectral range(FSR) is 16.8 nm and the extinction ratio(ER) around the wavelength 1550 nm is 18.1 dB.After thermal tuning,the filter’s tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/℃Meanwhile,we fabricated and studied multi-channel filters based on a single ring and a double ring.After measurement,we drew the following conclusions: during the signal transmission of multi-channel filters,crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports.     

紫外光直写杂化溶胶-凝胶SiO2光波导器件

利用有机/无机杂化方法制备了光敏性溶胶-凝胶(sol-gel)SiO2材料,在硅基片上旋涂成膜.研究了薄膜折射率和厚度随紫外曝光时间、后烘温度及时间等外界工艺条件的变化关系.利用紫外光直写技术,制作出1×2,1×4多模干涉(MMI)型分束器,并且观测到了分光效果较好的近场输出图像.     

二氧化硅平面光波导器件的研究进展

二氧化硅平面光波导(PLC)器件以其低损耗、高工艺容差,以及与CMOS工艺兼容和与单模光纤模场匹配良好等优点,在光通信、光互连和集成光学中得到了广泛的应用.文章综述了二氧化硅平面光波导器件及其应用的进展,重点针对分束器、阵列波导光栅、可调光衰减器及其集成器件的最新研究进行了介绍,对未来发展趋势进行了展望.     

一种用于复合轴系统的机动目标跟踪算法

为了实现复合轴捕获、跟踪与瞄准(acquisition,tracking and pointing,ATP)系统对高机动目标的跟踪,文中提出了一种目标跟踪算法思路:利用子系统精度远高于主系统精度的特点,在主系统观测数据基础上再构建了一组精度更高的观测数据。采用不同的交互式多模型集对两组观测数据进行独立滤波,并对得到的两组估计量做自适应调节数据融合处理。通过MATLAB仿真验证了算法的有效性。此算法实现了以相对少的模型种类覆盖更复杂的运动模式,且运算量适中。     

陀螺稳定平台伺服回路的变结构控制

针对陀螺稳定平台伺服回路模型, 设计了基于角加速度信号反馈的变结构控制器.理论及仿真研究结果表明, 变结构控制系统对平台受到的扰动力矩及参数变化具有完全的自适应性, 并可有效地克服变结构控制器的抖动性对系统的不利影响.由于系统设计从实际对象模型出发, 且控制算法简单、易实现, 可望获得工程应用.     

Design and fabrication of 25-channel 200 GHz AWG based on Si nanowire waveguides

A 25-channel 200 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the simulation and error analysis of AWG with width fluctuations. The 25-channel 200 GHz AWG exhibits central channel insertion loss of 6.7 dB, crosstalk of ?13 dB, and central wavelength of 1 560.55 nm. The error analysis can explain the experimental results of 25-channel 200 GHz AWG well. By using deep ultraviolet lithography (DUV) and inductively coupled plasma etching (ICP) technologies, the devices are fabricated on silicon-on-insulator (SOI) substrate. This work has been supported by the National Key Research and Development Program of China (No.2016YFB0402504), and the National Natural Science Foundation of China (Nos.61435013 and 61405188). E-mail:zhangjiashun@semi.ac.cn      

片上网络中服务质量的研究

随着半导体技术的发展,芯片设计者已经能够采用网络互连的方式将不同的IP核连接起来--片上网络(Network on Chip).随着更多的实时性业务在片上网络中的出现,服务质量就成为片上网络设计中必须考虑的一个因素.用于提高片上网络服务质量的模型主要有面向连接、非连接及混合交换的网络模型.本文从资源、网络性能提高等方面对它们进行对比分析,并给出具体的片上网络的应用实例,为以后片上网络的设计提供参考.