基于光纤F-P干涉波长的溶液浓度测量系统研究

为了消除光源强度波动对测量结果的影响，根据溶液浓度与其折射率的关系和光纤法布里珀罗(F—P)干涉仪透射光谱中心波长与干涉仪腔内介质折射率之间的关系，利用其透射光谱的中心波长进行透明溶液浓度的精确测量，开发出测量实验系统。采用可调光学滤波器对传感信号进行采集。对浓度为5％～80％的酒精进行了实际测量实验，浓度最大测量偏差为0．003％。该系统具有如下特点：1)与CCD测量技术相比，采用法布里-珀罗干涉系统透射光谱的波长信号进行溶液浓度测量，可实现连续大范围、高精度测量；2)消除了光源波动对测量结果的影响，可实现连续高精度测量，且测量范围宽；3)直接利用光电探测器PIN进行传感信号的检测，使系统计算简单；4)便于实现分布式遥测系统；5)直接拟合出F—P干涉波长与溶液浓度之间的关系，使其更适合于工程实际的应用。     

基于F-P干涉波长的折射率测量

利用光纤法布里 珀罗 (F P)干涉仪透射光谱的中心波长与其干涉腔内介质折射率之间的线性关系 ,提出一种实现液体 /气体折射率精确测量的方法 ,消除了光源强度波动对测量结果的影响和量化误差。开发出一套实验系统 ,采用可调光滤波器对传感信号进行采集。利用一组不同浓度的酒精溶液对折射率与干涉波长之间的关系进行了拟合 ,拟合误差小于 0 0 0 0 0 5。对蒸馏水和丙酮折射率的实际测量实验误差小于 0 0 0 0 1。     

应用于海水盐度测量的单模异芯结构光纤折射率传感器

提出了一种应用于海水盐度测量的单模异芯结构的光纤折射率传感器。在两段普通单模光纤(SMF28)之间熔接一段细芯单模光纤(TCSMF),构成全光纤Mach-Zehnder干涉仪(MZI)。以0-40‰NaCl溶液作为测试溶液,测量宽带光源经MZI后的透射光谱,应用特征峰波长和光谱差分积分两种方法进行解调,特征峰波长漂移量和光谱差分积分值均与NaCl浓度呈较好的线性关系。采用光谱差分积分法对全波段透射光谱强度进行解调,累积因折射率不同引起的透射谱差异,理论上可获得的盐水浓度分辨率为9.17×10-4‰,较之波长解调法提高了近3个数量级。本文的折射率传感器具有结构简单、机械强度好、测量灵敏度高和对温度不敏感等优点,可应用于海水盐度测量。     

基于单模异芯光纤结构的液位传感器

提出了一种新颖的光纤液位传感器。在普通单模光纤(SMF)中间熔接一段细芯单模光纤(TCSMF),构成共轴光纤马赫曾德尔干涉仪(MZI)。液位的变化引起包层模与芯模的相位差发生改变,从而导致干涉仪的透射光谱发生改变。对传感器的工作原理和测量灵敏度及精度进行了理论分析,实验结果显示透射光谱中特征峰波长漂移量跟液位变化量呈较好的线性关系,且灵敏度随待测液体折射率的增大而增高,与理论分析结果相一致。测量得到纯水和饱和氯化钠溶液的测量灵敏度分别为0.160 nm/mm和0.228 nm/mm。该传感器采用全光纤结构,制备简单、测量精度高,可适用于折射率低于光纤包层折射率液体的高精度液位测量。     

基于双锥形光子晶体光纤的折射率传感器

设计了一种基于光子晶体光纤的双锥形马赫-曾德尔干涉仪,并对其折射率传感特性进行了研究。在FDTD Solutions光学仿真平台中建立了干涉仪结构模型,研究了该结构的透射光谱对环境折射率的响应。仿真结果表明,透射光谱随环境折射率的增加发生红移,灵敏度为95.906nm/RIU。利用熔接与拉锥工艺制备了干涉仪样品,搭建了实验系统,在不同浓度甘油溶液中对其透射谱进行了检测,实验结果表明,折射率在1.3222~1.3538范围内,透射谱偏移灵敏度为121.95nm/RIU。该传感器具有体积小、重量轻、易于制备、灵敏度高等优点,适用于生化和物理传感领域。     

基于单模光纤偏芯结构的光纤折射率传感器研究

基于迈克尔逊(Michelson)干涉仪(MI)原理,结合光纤传感器的特性,设计和实现了一种单模光纤(SMF)偏芯干涉仪结构光纤折射率传感器,并针对蔗糖溶液进行了折射率的测量。实验结果表明:这种传感器的传感范围在1.33～1.39时,特征波长与外界折射率有单调的递减变化关系,蔗糖折射率每变化0.01时,特征波长平均变化约为0.12nm。这种传感器结构简单,灵敏度较高,能够实现液体折射率与浓度变化的在线检测。     

基于M-Z滤波和LPFG的液体折射率传感特性研究

利用飞秒激光逐线刻写方式在HI1060光纤中制作谐振波长为1548.5 nm,谐振强度为7 dB,栅区长度为3.2 mm的长周期光纤光栅。通过纤芯错位熔接方法在HI1060光纤中制作马赫曾德-干涉仪(MZI),对LPFG的透射光谱进行滤波优化。设计使用不同折射率的酒精溶液、氯化钠溶液和蔗糖溶液分别对基于MZI滤波的LPFG的折射率特性进行了测试和研究。实验中随着三种溶液折射率增加,LPFG的谐振波长发生红移,该LPFG在酒精溶液、氯化钠溶液和蔗糖溶液中的折射率灵敏度分别为301.78 nm/RIU、138.80 nm/RIU和132.67 nm/RIU。     

基于紫外拉曼光谱的乙醇水溶液浓度测量

拉曼光谱中每个谱峰对应一种特定的分子键振动，每个拉曼峰记录了相应的拉曼散射光的波长位置和强度，常用于对不同物质的定性、定量分析。利用266 nm紫外拉曼系统测量乙醇和水溶液的拉曼光谱，分析峰值关系与乙醇和水浓度之间的关系，用水与乙醇的混合溶液模拟白酒场景，配取多组不同浓度标准乙醇溶液，测量各组溶液拉曼光谱，对光谱进行平滑去噪、基线校正，分析不同浓度乙醇溶液CH伸缩振动特征峰与OH伸缩振动特征峰的相对强度，并拟合出相对强度与乙醇浓度的曲线，决定系数R²达到0.996,测量数款市面在售白酒浓度验证，证明了拉曼光谱应用于白酒浓度测量的可行性。     

基于倾斜光纤光栅及其表面等离子效应的折射率传感比较研究(英文)

介绍了倾斜光纤光栅作为折射率传感器的测量原理,给出它的倾斜角8°与中心波长1550nm的反射谱与透射谱,分析了具有表面等离子的倾斜光纤光栅传感机理。为验证折射率传感的可能性与优点,进行了蔗糖浓度溶液的裸倾斜光纤光栅与镀金的倾斜光纤光栅的折射率测量分析,证明镀金后的表面等离子效应倾斜光纤光栅折射率传感器其灵敏度大大增加。     

级联FPI-MZI复合干涉光纤传感器双参数特性研究

为了实现工业生产过程中温度和溶液质量分数的同时测量和传感检测, 提出了一种由法布里-珀罗干涉仪(FPI)和马赫-曾德尔干涉仪(MZI)级联干涉结构构成的双参数传感器。该传感器由融合在一起的单模光纤(SMF)和空芯光纤(HCF)组成。采用同时测量FPI反射光谱和MZI透射光谱的特征波长位移的方法, 获得了FPI和MZI对温度和折射率的灵敏度差, 建立了传感器温度-质量分数灵敏度矩阵, 实现了传感器双参数的测量。结果表明, 在40℃~150℃的温度范围内, FPI的温度敏感度为10pm/℃, 而MZI的对温度不敏感; 在质量分数0.05~0.40的范围内, FPI对折射率不敏感, 而MZI质量分数灵敏度是232.3nm/RIU; 该传感器可以实现温度与溶液质量分数的同时测量。该研究为石油、化工、电力、钢铁、机械等加工行业中双参数的动态测量提供了参考。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.