厚钢板激光焊接装置的研究

为满足激光厚板焊接对激光光束质量的要求,研制了多折非虚共焦非稳腔横流CO_2激光器以及厚钢板激光焊接装置。采用了外光桥、内光腔形式一级振荡,两级放大的非稳腔的光腔结构。多折非稳激光谐振腔结构可充分利用辉光放电区及其下游介质增益,获得足够大的高质量的激光功率输出。用有限元法,对该类型的激光谱振腔的特性进行了理论分析。分析结果表明,该多折非稳腔输出激光远场能量分布与多模激光能量分布相似,但非稳腔输出激光远场相位分布不存在180°跳变,因而能够将光束聚焦到厚板深透焊所需功率密度。焊接4mm的钢板,焊速超过了3.2m/min,深宽比大于2:1,焊接6mm钢板,焊速达2.1M/min以上,深宽比大于3:1,并可焊接8mm厚的钢板,通过试轧到0.3mm厚不断带,拉伸试验表明焊缝强度大于母材,说明焊缝具有良好的延展性和机械强度。     

双端抽运双Nd∶YVO4连续绿光激光器

为了提高半导体激光器抽运的全固态激光器的输出功率与光-光转换效率,设计并使用了双端抽运双Nd∶YVO4绿光激光器.通过激光晶体温度场特性的研究以及依据光束的传输矩阵,分析了双激光晶体热透镜效应对于谐振腔稳定性的影响,设计了双端抽运双激光晶体折叠腔.在双端抽运双Nd∶YVO4绿光激光器系统中,LBO晶体采用了Ⅰ类非临界相位匹配腔内倍频方式,当抽运光功率为26.56 W时,获得了5.5 W的稳定连续绿光输出,其光-光转换效率为20.7%.结果同时表明,在谐振腔内插入双激光增益介质,不仅可以提高激光器的光-光转换效率,而且两个激光晶体热透镜效应相互作用的结果可以增强谐振腔的稳定性.     

高功率横流CO_2激光器的多折腔的研究

改善大功率CO_2激光器输出的光束质量,提高输出光束的远场聚焦性能是扩大高功率横流CO_2激光器应用范围的一个迫切需要解决的问题。本文作者在原输出2kW的多模针板式放电横流CO_2激光器内,采用多折腔结构。加长了谐振腔长度,增加了高阶模的衍射损耗,抑制了高阶模振荡,     

热退偏损耗完全补偿的千赫兹电光调Q Nd:YAG激光器

为了同时补偿固体增益介质的热致双折射及热透镜效应,进一步提高重复频率1 kHz激光二极管(LD)侧向抽运高平均功率电光调QNd∶YAG激光器的输出功率,设计了一种完全消除热退偏损耗的双调Q开关谐振腔结构,此结构在传统调Q谐振腔的基础上沿着偏振片的退偏方向增加了一个调Q谐振支路,并使得激光从增益介质方向输出.实验结果表明,此激光器的单脉冲能量比单Q开关结构的非补偿腔输出能量高出74.7%.当侧面抽运的激光二极管输出脉冲能量达到307 mJ时,激光输出能量达到26.2 mJ,光-光转换效率为8.5%,光束发散角为1 mrad.     

用于机载激光测距／指示的激光器原理实验研究

本文介绍了激光器原理实验情况，着重介绍了波罗棱镜谐振腔电光调Q激光器重频实验及平凸非稳腔激光器实验结果及分析，文中对激光输出性能，输入能量及谐振腔腔长等几个相关又互相制约的参数进行分析，以便根据要求合理选择其参数，提高激光器质量，并通过对平凸非稳腔的理论分析及实验测试，设计出了较小发散角，较高效率的平凸非稳腔激光器。     

非链式DF激光器非稳腔数值仿真与实验

基于描述光束传播的菲涅耳-基尔霍夫衍射积分理论,运用快速傅里叶变换算法仿真了非稳腔DF激光的三维近场、远场光强分布。仿真结果显示:非稳腔的近场输出光斑形状为中心对称的空心圆环,远场输出光斑为具有中心亮斑的多级衍射环;大M数将导致近场光斑能量集中,大的Neq值将引起远场发散角变大。运用该算法研究了腔镜倾斜对近场光强分布的影响:腔镜倾斜使光束近场分布变差,倾斜角越大,光强的非对称分布越明显。开展了非链式DF激光器非稳腔实验研究,实验得到的近场、远场光强分布及腔镜失调下的近场光斑变化情况与数值模拟结果一致,实验测量的远场发散角为1.2 mrad。文中的仿真结果可为DF激光器腔镜失调诊断及调节提供依据。     

双热焦距激光热近非稳腔系统

多热焦距激光谐振腔与单热焦距谐振腔相比,具有结构灵活、热管理简便等优点,然而其热稳定性受到激光头分布等因素影响,需要优化设计以实现多热焦距激光谐振腔高功率稳定输出.理论分析了激光头分布对多热焦距激光谐振腔热稳定性的影响,对比了单热焦距双棒谐振腔、双热焦距3棒对称谐振腔和双热焦距3棒非对称谐振腔的热稳定性.根据理论分析,采用不同热焦距的激光头构成双热焦距3棒串接对称热近非稳腔,通过优化设计,当抽运功率为3480 W时,该连续波1064 nm Nd∶YAG激光系统获得稳定输出,最高输出功率达1125 W,光-光转换效率达32%,光束质量约15 mm·mrad.     

环形介质高能激光器谐振腔

本文对用于环形介质高能激光器的会聚波谐振腔、腔间有扩束耦合器的谐振腔、腔内有旋转三棱镜(axicon)的半对称非稳定谐振腔及注频锁相振荡器的结构特点、运行特性、近远场分布和有关光学元件等方面作了介绍.     

电激励重频HF激光器非稳腔设计及实验研究

为实现电激励重频HF激光远距离传输,在较短的谐振腔内产生大模体积的高质量激光束,开展了激光器正支虚共焦非稳腔的结构设计、仿真计算和实验研究。仿真结果表明,随着放大率M的增大,远场光斑中心亮斑包含的能量逐渐增大,能量向中心转移,远场光斑尺寸和远场发散角也随放大率M增大而减小。实验结果表明:随着放大率M的增大,远场光强分布、光斑尺寸和发散角变化规律与仿真结果一致,但输出激光能量以先增大后降低的规律变化。综合考虑高光束质量和高能量的指标要求,在流场正常工作情况下,当放大率M为3.0时,获得了远场发散角为2.37倍衍射极限和激光能量稍低于稳定腔（约为稳定腔激光能量的94.6%）的重频激光输出,满足激光远距离传输需求。     

大功率CO2激光器光腔及控制系统设计

分析了HGL-20型横流CO2激光器的腔式结构,论述了外桥内腔式结构、光腔精密调节系统对改善激光谐振腔稳定性的作用.分析了电源测控系统、光腔及功率测控系统、真空测控、自动充排气系统、温度测控系统、安全报警系统等设计特点以及这些因素对输出激光的稳定性和光束质量的影响.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.