共查询到18条相似文献,搜索用时 78 毫秒
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微电子技术的快速发展,促使硅基传感器向着集成化、微型化、可批量加工方向发展.对于pH-ISFET集成芯片而言,如何以MEMS工艺制备性能优良的pH功能膜,是其发展的关键.目的:以适合批量加工的MEMS工艺研制pH功能膜;方法:在小尺寸集成芯片的基础上,以MEMS工艺分别制备Ta2O5材料的pH敏感膜,PTFE材料的pH钝化膜;结果:在pH1~12范围内,Ta2O5膜pH-ISFET对H+的灵敏度达56mV/pH,PTFE膜REFET对H+的响应仅为0.13mV/pH;结论:采用MEMS工艺,可对以标准CMOS技术加工的ISFET集成芯片系统,进行后续加工,从而实现传感器芯片系统的全过程批量加工. 相似文献
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生化微传感集成系统是目前的研究焦点,本文以在线性区和饱和区两种模式下工作的pH-ISFET作为研究对象,提出ISFET微传感器与其信号读出电路的单芯片集成,并深入研究传感机理以及与标准CMOS兼容的敏感材料制备技术.整个芯片包含ISFET/REFET微传感差分对、双模式ISFET/REFET放大器、次级差分放大、参比电极Pt、恒流源等,采用新加坡Chartered半导体集成电路公司3.3V标准CMOS工艺流片.同时进行传感器芯片的pH响应实验测试,获得53mV/pH灵敏度. 相似文献
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黄楚舒 《电子工业专用设备》2006,35(5):56-59
分析了在多芯片叠装封装产品中采用晶圆级芯片贴装薄膜对传统芯片制备以及后续封装工艺所产生的巨大影响。阐述了在晶圆级芯片贴装薄膜贴覆工艺,芯片制备以及后序工艺中所遇到的巨大挑战。 相似文献
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基于本实验室的实验条件,采用射频磁控溅射、等离子干法刻蚀等技术成功制备出具有ZnO∶Ga(GZO)透明电极的LED芯片。实验研究了相同工艺条件制备的ITO透明电极LED芯片和GZO透明电极LED芯片,对比实验结果表明GZO薄膜沉积工艺简单,其器件性能与ITO电极LED相当。相同条件下制备的GZO薄膜可见光波段透过率约90%,而ITO仅为75%。实验室制备的LED器件均具有较高的阈值电压,一方面p-GaN与ZnO的禁带宽度相差4.13 eV,接触势垒大,另一方面器件制备过程中的等离子体损伤薄膜表面和器件性能。 相似文献
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铁电存储器中Pb(Zr,Ti)O_3集成铁电电容的制备 总被引:1,自引:0,他引:1
在铁电不挥发存储器 (FERAM)技术中 ,集成铁电电容的制备是关键工艺之一。文中提出一种制备集成铁电电容的改进工艺 :采用 lift-off技术在衬底样品表面淀积铁电电容 Pt/Ti下电极 ,然后用 Sol-Gel方法制备 PZT薄膜。在 PZT薄膜未析晶前 ,先将它加工成电容图形 ,再高温退火成为 PZT铁电薄膜。最后完成铁电电容 Pt上电极。与传统工艺相比 ,改进后的工艺能保持 PZT铁电薄膜与金属上电极之间良好的接触界面。测试结果表明 ,工艺条件的变动不会影响 PZT铁电薄膜的成膜和结构 ,从而可得到性能优良的铁电电容。 相似文献
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采用sol-gel(溶胶-凝胶)技术在SOI 基底上制备了多层组合结构的纳米薄膜(PT/PZT/PT~PT/PZT/PT),采取金属键合技术,将薄膜作为敏感元件翻转与另一高热阻抗基底对接键合,然后腐蚀SOI 上的底层硅和氧化硅,最终SOI 材料上制备出具有锥状森林结构的黑硅作为吸收层得到一种新颖的敏感元件。重点开展高检测性能的薄膜结构和黑硅吸收层的加工工艺及其敏感机理研究,为实现气体传感器微型化、集成化与批量生产奠定技术基础。 相似文献
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为提高现有光纤pH值传感器的检测灵敏度和检测范围,降低弯曲以及温度交叉敏感的影响,提出以pH值敏感型智能水凝胶为敏感膜的细直径极大倾角光纤光栅(Thin Excessively Tilted Fiber Grating,Thin-Ex-TFG) pH值传感器.理论上分析了影响传感器灵敏度的因素,研究了提高传感器灵敏度的方案.然后,制作出不同封装厚度的Thin-Ex-TFG pH值传感器,进行实验研究.实验结果表明:Thin-Ex-TFG pH值传感器相比基于光纤Bragg光栅和长周期光纤光栅的pH值传感器,检测灵敏度(最大可达-0.704 nm/pH)和响应范围(pH值2~7)均有提高;与标准直径极大倾角光纤光栅相比,其检测灵敏度也有所提升.此外,增加水凝胶涂覆厚度或减少光纤光栅包层直径均能有效地提高pH值检测的灵敏度,实验结果与理论分析吻合. 相似文献
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针对新能源电动汽车锂电池电荷状态SOC估算问题,在锂电池二阶RC等效电路模型基础上,引入扩展卡尔曼滤波方法,利用扩展卡尔曼滤波方法处理复杂非线性系统能力,建立了扩展卡尔曼滤波锂电池SOC估算模型,并通过MATLAB/Simulink对新建模型仿真分析。仿真结果显示,建立的扩展卡尔曼滤波锂电池SOC估算模型具有较高估算精度,整体误差小于±0.05%,满足新能源电动汽车对锂电池SOC估算要求。 相似文献
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介绍一种新型聚炔离子导体湿敏材料-聚对二炔苯的Langmuir-Boldgett成膜原理与制备,淀积有10层PDEB LB膜层的声表面波延迟线型湿度传感器的特性。由于LB成膜技术拉制的膜可以在分子水平上进行定量控制,保证了膜的均匀性和一致性。 相似文献
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Jianwei Wan Seung-Ho Park Gilyong Chung Mark Loboda 《Journal of Electronic Materials》2005,34(10):1342-1348
Micropipes are considered to be one of the most serious defects in silicon carbide (SiC) wafers affecting device yield. Developing
a method to count and map micropipes accurately has been a challenging task. In this study, the different etching behavior
of conductive and semi-insulating wafers in molten potassium oxide (KOH) is compared. Micropipes and closed-core screw dislocations
exhibit different morphology after etching and can be easily distinguished with a polishing process. Based on a new sample
preparation procedure and a digital imaging technique, a novel method of efficiently and reliably mapping and counting micropipes
in both conductive and semi-insulating SiC wafers is developed. 相似文献
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SOC芯片设计与测试 总被引:2,自引:0,他引:2
SOC已经成为集成电路设计的主流.SOC测试变得越来越复杂,在设计时必须考虑DFT和DFM.本文以-SOC单芯片系统为例,在其设计、测试和可制造性等方面进行研究,并详细介绍了SOC测试解决方案及设计考虑. 相似文献
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Vikram Iyengar Krishnendu Chakrabarty Erik Jan Marinissen 《Journal of Electronic Testing》2002,18(2):213-230
Test access mechanisms (TAMs) and test wrappers are integral parts of a system-on-chip (SOC) test architecture. Prior research has concentrated on only one aspect of the TAM/wrapper design problem at a time, i.e., either optimizing the TAMs for a set of pre-designed wrappers, or optimizing the wrapper for a given TAM width. In this paper, we address a more general problem, that of carrying out TAM design and wrapper optimization in conjunction. We present an efficient algorithm to construct wrappers that reduce the testing time for cores. Our wrapper design algorithm improves on earlier approaches by also reducing the TAM width required to achieve these lower testing times. We present new mathematical models for TAM optimization that use the core testing time values calculated by our wrapper design algorithm. We further present a new enumerative method for TAM optimization that reduces execution time significantly when the number of TAMs being designed is small. Experimental results are presented for an academic SOC as well as an industrial SOC. 相似文献
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Energy Management for a Residential Microgrid Using Wavelet Transform and Fuzzy Control Including a Vehicle-to-Grid System
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This paper presents the design and implementation of an energy management system (EMS) with wavelet transform and fuzzy control for a residential micro-grid. The hybrid system in this paper consists of a wind turbine generator, photovoltaic (PV) panels, an electric vehicle (EV), and a super capacitor (SC), which is able to connect or disconnect to the main grid. The control strategy is responsible for compensating the difference between the generated power by the wind and solar generators and the demanded power by the loads. Wavelet transform decomposes the power difference into a smoothed component and a fast fluctuated component. The command approach used for fuzzy logic rules considers the state of charging (SOC) of EV, renewable production, and the load demand as parameters. Furthermore, the command rules are developed in order to ensure a reliable grid when taking into account the EV battery protection to decide the output power of the EV. The model of the hybrid system is developed in detail under Matlab/Simulink software environment. 相似文献