准分子激光均束器及其研究进展

以准分子激光在半导体微光刻技术、脉冲激光沉积、平板显示器加工制造以及激光钻孔中的应用为例,阐述了准分子激光光束均匀化的重要性;按照折射光学元件、衍射光学元件和混合光学元件分类的方法,分别对这三类准分子激光均束器进行了介绍,并对其特点、应用和进展情况进行了综述。     

基于视觉的环形激光陀螺自动调腔系统

针对激光陀螺调腔,设计了一种基于视觉的自动调腔系统.采用基于统计的图像分析方法,对激光陀螺光学谐振腔中的光阑和光束进行定位.根据几何光学,分析了谐振腔中反射镜位置失调与光束偏移之间的关系,并设计了基于图像的闭环位置控制律,对反射镜的位置进行调整.实验表明,该系统能够完成对光阑和光束的自动识别,能够较好地实现激光陀螺的调腔.     

机动车激光测速仪校准技术的研究

依据移动式(单光束)和固定式(双光束)红外机动车激光测速仪共同的测量原理,提出了一种基于时间延迟的校准方法.采用虚拟仪器技术的机动车激光测速仪校准系统,将激光测速仪发射的905nm测量脉冲激光光束进行特定时间量的延迟,以模拟其在空气中对应的传播距离,实现固定时间间隔激光脉冲串测量的距离变化量的精确模拟,完成机动车激光测速仪在20～250 km/h时速范围内任意速度值的实验室准确校准,其时间延迟分辨率为5 ps,对应位移分辨率为0.75 mm,模拟速度不确定度优于0.5%(k=2).     

用于激光光束随机漂移校正的算法研究

在分析移动平均值(MA)校正机理的基础上,本文分别利用补偿量和补偿量的移动平均值作为校正量对激光光束随机偏差进行校正.以光束传递系统中利用快速反射镜校正脉冲激光器自身漂移的过程为例,介绍了利用移动平均值(MA)进行闭环控制的稳定光束的算法,给出了两种校正量的仿真结果,并对比加载地面抖动前后的校正效果.结果表明,基于此原...     

太阳光下可调谐激光脉冲的波长和入射方向的实时测试和系统研究

提出了在恶劣环境条件下,应用衍射光栅测量宽波长范围可调谐脉冲激光波长和入射方向的实时测试方法,并设计了实验系统,在该实验系统中,光电传感器采用了ATMEL公司的50 MHz线阵探测器,由高速度数字信号处理器TMS320VC5509处理该传感器获得的信号,获得入射激光的波长和入射方向,实验结果表明,该系统能达到10ns的波长分辩率和1(°)的角度分辩率;该测试方法可用在相干探测激光告警接收机中.     

用KrF准分子脉冲激光在低基板温度下制备AlN薄膜的研究

用KrF准分子脉冲激光在 2 0 0℃的Si(111)基板上通过改变制备条件 ,采用沉积后直接保温处理的方式制备出了具有不同择优取向的AlN薄膜 ,并得出了较高的处理温度和过长的时间不利于AlN相的形成的结论。     

用KrF准分子脉冲激光在低基板温度下制备AIN薄膜的研究

用KrF准分子脉冲激光在200℃的Si(111)基板上通过改变制备条件,采用沉积后直接保温处理的方式制备出了具有不同择优取向的AlN薄膜,并得出了较高的处理温度和过长的时间不利于AIN相的形成的结论。     

用光声信号飞越时间法对纯铜脉冲激光烧蚀的研究

利用脉冲激光束轰击金属样品表面时在周围空气中激发的光声信号研究了纯铜的激光烧蚀。实验中,用He-Ne探测光束偏转方法检测光声信号,并根据光声信号飞越时间随激光能量密度的变化测定了纯铜的脉冲激光烧蚀阈值。文中还给出了一种理论估计脉冲激光烧蚀阈值的较为实用的方法。纯铜的脉冲激光烧蚀阈值的实测值约为3.0 J/cm2,理论估计值为3.2 J/cm2。两者符合较好。结果表明,光声信号方法是测定纯铜的脉冲激光烧蚀阈值的一种简单可行的方法。     

激光剥离Al2O3/GaN中GaN材料温度场的模拟

对激光剥离Al2O3/GaN技术,建立了紫外脉冲激光辐照过程中GaN外延层内热传导理论模型。计算分析了不同能量密度脉冲激光辐照时,GaN外延层内的温度场分布,由此得到激光剥离的阈值条件。采用紫外KrF准分子激光器对Al2O3/GaN样品进行激光剥离实验,样品表面显微镜和端面扫描电镜(SEM)测试照片说明,计算结果与实验现象相符。进一步分析表明,脉冲激光的能量密度和频率是实现激光剥离的关键参数,适当选取这些参数能将GaN材料内的高温区控制在100nm以内,实现高效低损伤激光剥离。     

生物微流控PCR荧光芯片微通道动态检测系统研究

研究和建立了生物微流控PCR荧光芯片微流控微通道动态检测系统,对该系统的多光路光纤校准进行了研究,获得了荧光检测的重复性(偏差:2.6%)和稳定性(偏差》2.7%)等.实验结果表明:该系统可用于准分子激光制备高聚物基生物微流控PCR荧光芯片最佳工艺激光制备参数的优化设计;可用于生物微流控PCR荧光芯片生物分析时的实时荧光定量检测;也可用于对激光荧光检测微型化技术与生物芯片光谱检测集成化提供多功能实验基础和性能评估体系.     

Influence of the wavefront mismatch,spatial chirp and multimode pump on the beam quality of OPCPA

The beam quality and wavefront distribution of the optical parametric chirped‐pulse amplification (OPCPA) front‐end system of the petawatt laser has become a focus for research. The influence of wavefront mismatch, spatial chirp and multimode pump on the beam quality of OPCPA is numerically simulated and analyzed. It is shown that the beam quality and wavefront distribution becomes worse as the mismatch angle or the order of the spatial chirp increases. Meanwhile, it is also found that the beam quality and conversion efficiency of the amplified signal becomes worse as the transverse distribution of the pump laser descends.     

Effect of processing conditions on superconductive properties of laser-deposited YBCO thin films

Thin superconductive films of YBa₂Cu₃O_7−x have been deposited on (100) single crystal SrTiO₃ substrates by using technique of ArF pulse excimer laser evaporation of bulk YBCO target in a vacuum, followed by slow cooling in an oxygen atmosphere. Thin-film properties are strongly influenced by the processing conditions. The effect of pulse repetition rate, beam power, beam size on the target surface and oxygen pressure on the surface morphology and superconductive properties of deposited films has been investigated. Film characterization has been performed by using X-ray diffractometry, scanning electron microscopy and four-point probe electrical instruments.     

Krypton fluoride laser pulse shortening by stimulated thermal scattering on a liquid surface

Pulse shortening of the backscatter of a KrF excimer laser beam focused on the surface of n-hexane is reported. Simultaneous measurements of the backscattered beam, a Fresnel reflected beam, incoherent scattered photons from a liquid surface, and a transmitted beam are performed. The results show that the surface reflected beam disappears followed by beam expansion and the transmitted beam is reduced to form a filamentlike structure with the onset of backscatter. The pulse width of the backscattered beam shows a clear dependence on the focal position in the liquid. Incoherent scattering is sharply enhanced when the laser beam is focused at the liquid surface where the backscattered beam is especially short. The observed phenomena indicate that stimulated thermal scattering is the pulse shortening mechanism.     

High-intensity multi-bunch beam generation by a photo-cathode RF gun

A multi-bunch photo-cathode RF gun system has been developed as an electron source for the production of intense quasi-monochromatic X-rays based on inverse Compton scattering. The desired multi-bunch beam is 100 bunches/pulse with a total charge of 500 nC and a bunch spacing of 2.8 ns. We modified the gun cavity of a ‘BNL-type IV’ RF gun to allow a CsTe cathode plug in the end plate. The system uses a four-dipole chicane beam line to allow the injection of laser light normal to the cathode surface. We compensate the gun cavity beam loading caused by the high-intensity multi-bunch electron beam by injecting the laser pulse before RF power has filled the cavity. We have achieved a total intensity of 220 nC in 100 bunches with a bunch-to-bunch energy spread under 1.3% (peak-to-peak). This paper concentrates on experiments to generate the high-intensity multi-bunch beam with compensation of the bunch-to-bunch energy spread due to heavy beam loading.     

Evaluation of laser drilling of holes in thermal barrier coated superalloys

Abstract

Laser drilling of precise holes in thermal barrier coated Ni based superalloys has been studied. The interplay between various hole geometrical features such as hole shape, taper, barrelling, undercut, etc. and laser parameters such as pulse energy, pulse width and pulse repetition rate have been examined. The hole diameters are seen to follow a linear dependence on the incoming laser power densities for pulse width up to 2·0 ms. However, such a linear dependence was not observed for a pulse width of 3·0 ms. It was found that high pulse energy and short pulse width (high power density) gave crack free recast layer, whereas low pulse energy and longer pulse width (low power density) gave microcracks in the heat affected layer of superalloy. The significant barrelling observed in IN718 material at low power density values is due to multiple reflection of the incident beam from the cavity in combination with plasma formation at the evaporation front and trapping of the incident radiation causing excessive heating in that region.     

Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate

In this research the laser beam shaper component has been used to obtain top-hat intensity distribution laser beam to perform line scribing and to perform electrode patterning on Indium thin oxide (ITO) thin films deposited on glass and plastic substrate. ITO films were removed with third harmonic Nd:YAG laser processing system. The pulse duration, laser output power, pulse repetition rate and scanning speed parameters of straight line patterning and electrode patterning on different types of substrates were discussed, respectively. The experimental results are measured by optical microscope and scanning electron microscope to evaluate the processing parameters and surface properties of ITO thin films.     

Diffractive shaping of excimer laser beams

Abstract

We address the problem of shaping the intensity distribution of a highly directional partially coherent field, such as an excimer laser beam, by means of diffractive optics. Our theoretical analysis is based on modelling the multi-transverse-mode laser beam as a Gaussian Schell-model beam. It is shown numerically that a periodic element, which is unsuitable for the shaping of a coherent laser beam, works well with an excimer laser beam because of its partial spatial coherence. The conversion of an approximately Gaussian excimer laser beam into a flat-top beam in the Fourier plane of a lens is demonstrated with a diffractive beam shaper fabricated as a multilevel profile in SiOl by electron-beam lithography and proportional reactive-ion etching.     

Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

A diffractive beam homogenizer, based on an array of square, off-axis, continuous-relief diffractive microlenses, for use with an excimer laser has been studied. We originally fabricated the homogenizer by direct-write electron-beam lithography, from which we made replicas in UV-grade fused silica by hot embossing and reactive ion etching. Atomic force microscopy measurements of original and replicated elements showed the accuracy of the replication fidelity. One of the replicated homogenizers was evaluated together with a KrF excimer laser. The homogenized beam had a flat-top profile with 31% of the beam energy contained within an area where the beam intensity was above a threshold level of 90% of the maximum intensity.     

Laser ablative shaping of plastic optical components for phase control

A new scheme for phase control of optical components with laser ablation has been developed. One can ablate the surface shape of optical plastic material coated on a glass plate by using 193-nm laser light to control the transmission wave front. The surface shape is monitored in situ and corrected to attain the desired aberration level. The irradiation fluence is approximately 40 mJ/cm(2), and the ablation depth/pulse is approximately 0.01 mum/pulse for UV-cured resin. A wave-front aberration of 3.0 lambda is reduced to 0.17 lambda for flat surface shaping. For spherical surface generation, an aberration of 2.5 lambda is reduced to 0.2 lambda. The increase in surface roughness is kept within acceptable levels.     

An analytical modeling of heat transfer for laser-assisted nanoimprinting processes

Laser-assisted direct imprinting (LADI) technique has been proposed to utilize an excimer laser to irradiate and heat up the substrate surface through a highly-transparent quartz mold preloaded on this substrate for micro- to nano-scaled structure fabrications. While the melting depth and molten duration are key issues to achieve a satisfactory imprinting pattern transfer, many material property issues such as crystalline phase alteration, grain size change and induced film stress variation are strongly affected by transient thermal response. With one-dimensional simplification as a model for the LADI technique, the present paper has successfully derived an analytical solution for the arbitrary laser pulse distribution to predict the relevant imprinting parameters during the laser induced melting and solidification processes. The analytical results agree quite well with the experimental data in the literature and hence can be employed to further investigate the effects of LADI technique from laser characteristics (wavelength, fluence and pulse duration) and substrate materials (silicon and copper) on the molten duration, molten depth and temperature distributions. Three kinds of excimer laser sources, ArF (193 nm), KrF (248 nm) and XeCl (308 nm) were investigated in this study. For the silicon substrate, the melting duration and depth were significantly dictated by the wavelength of laser used, indicating that employing the XeCl excimer laser with longer pulse duration (30 ns in the present study) will achieve the longest molten duration and deepest melting depth. As for the copper substrate, the melting duration and depth are mainly affected by the laser pulse duration; however, the wavelength of laser still plays an insignificant role in LADI processing. Meanwhile, the laser fluence should properly be chosen, less than 1.4 J/cm² herein, so as to avoid the substrate temperature exceeding the softening point of the quartz mold (~1950 K) and to make sure that the mold can still maintain the original features.