TDI CCD宽波段光谱响应度的高精度检测

为了解决TDI CCD光谱响应度检测精度较低、检测方法不够准确等问题,提出了一套更为科学而准确的高精度TDI CCD光谱响应度检测方法。首先,改进了TDI CCD视频信号处理方法;其次,选用不同窄带波长的LED阵列作为光源,建立一种方便而准确的宽波段光谱响应度检测系统;然后,改变TDI CCD接收的辐射照度并检测TDI CCD输出信号,提出一种高精度TDI CCD光谱响应度检测方法;最后,计算所有窄带波长的LED对应的TDI CCD光谱响应度,绘制TDI CCD在400～900nm波长范围内的光谱响应度曲线。实验结果表明:此方法覆盖了400～900nm的宽波长范围,检测方便准确,同时,光谱响应度检测误差达0.025。     

基于低温辐射计的陷阱探测器红外绝对光功率响应度的定标

采用低温辐射计在1064nm波长对两个硅陷阱探测器（trap 0#和trap B）进行绝对光功率响应度定标。描述了定标方法、实验装置和数据的分析方法,提出了低温辐射计窗口的精确复位和窗口透过率的测量方案,测量得到的透过率达到0.999以上。结果表明,两个探测器绝对响应度定标的合成不确定度分别为1.457×10-4和1.458×10-4,定标结果的重复性分别达到了0.014％和0.008％。分析了测量时各项不确定度来源,对光功率响应度定标不确定度进行了评估。最后对0＃硅陷阱探测器在1064nm波长处光功率响应度的温度稳定性进行了测试研究。     

新型面阵式CCD探测器型多光栅单色仪

研制了一种采用面阵式高精度CCD探测器和多光栅结构的新型单色仪,该单色仪采用了多块平面光栅结构的光谱分析系统,无需任何机械转动和位移器件,并采用面阵式高精度CCD光谱探测器,对光谱进行快速准确的数字成像,在很宽的光子能量范围内(200～1100nm)实现对光谱的快速测量和分析,适用于各种光电子实验对象的光谱学分析,光谱分辨精度优于1.0nm.解决了二维光谱探测区的数字化光谱定标,建立了探测象素随波长和能量非线性分布的数学模型.     

CCD相对光谱响应同步采样方法研究

连续可调谐均匀单色照明光源系统作为CCD辐射参量定量化专用测试系统,可用于CCD相对光谱响应度的测量。它与传统的测试装置相比,能够实现光谱分辨率1 nm的光谱响应度定标。但是其采用的大功率氙灯超高压供电引入了测试光源不稳定的问题,导致传统分时测量方法引起的测量不确定度较差,不能满足高精度遥感仪器的定标需求,因此提出了同步采样的方法。从理论和器件噪声模型出发,分别对两种方法的测量不确定度进行分析,得出同步采样的方法测得的定标不确定度优于1.03%,与传统分时测量方法相比不确定度提高了43%。分别采用两种方法对目标探测器进行了CCD相对光谱响应对比测试,结果显示,同步采样的方法获得的CCD相对光谱曲线更平坦,与出厂数据相比离散程度更低,进而验证了分析结论的正确性。     

多角度偏振成像仪相对光谱响应定标方法

相对光谱响应是检测和评估多角度偏振成像仪性能的基本参数之一。采用基于激光泵浦氙灯光源的单色仪、消偏器、参考探测器和45°分束镜, 搭建了一套多角度偏振成像仪相对光谱响应测量装置。采用分束镜同步测量的方法,降低光源的非稳定性影响;针对测试过程繁琐和测试时间长的问题, 在基于现有不同开发平台开发的单色仪和数据采集系统的基础上,采用ActiveX控件与动态链接库技术,研制了一套相对光谱响应自动测试系统,降低时间 非稳定性影响,提高测量精度和效率。采用多角度偏振成像仪490 nm和865 nm偏振通道作为应用案例,开展了相对光谱响应的整机测试实验。实验结果 表明多角度偏振成像仪中心波长测量极差值与带宽均值的比值精度在0.11%以内,满足响应非一致性优于0.6%的定标要求。     

用于宽视场空间相机的CCD光谱特性筛选装置

结合CCD辐射响应函数,提出了基于相对光谱响应和光谱参量的CCD筛选方法,研制了CCD光谱特性筛选装置。装置集成化程度高,可以快速便捷的测试CCD的相对光谱响应、峰值波长、中心波长和半峰值带宽(FWHM)等光谱参量,并依据测试数据建立数据库进行最优筛选。对某批次10只时间延迟积分(TDI,time delay integration)(TDICCD)CCD进行筛选试验,对实验数据分析得到了一组4只最优的TDICCD组合。整个系统的测量不确定度优于3.5%。     

紫外-真空紫外光谱辐照度校准系统

为了适应紫外探测技术的迅速发展,满足对紫外光源和紫外探测器校准的需求,建立了紫外-真空紫外光谱辐照度校准装置。装置由标准光源（氘灯）、标准探测器（增强型硅光二极管探测器）、紫外单色仪、真空仓等组成。装置采用双标准比对的方式对被测仪器和器件进行校准。即用标准光源和标准探测器分别对被检紫外光源和被检探测器进行量值传递。校准的光谱范围为110~400 nm。对探测器校准的不确定度最大为12%（k=2）,对光源的校准不确定度最大为20%（k=2）。     

溯源于低温辐射计的1064nm波段探测器绝对光谱响应度定标

标准传递探测器在红外波段的绝对光谱响应度定标不确定度较大且难以降低,其主要影响因子是窗口透过率的测量不确定度,该项因子是由布儒斯特窗口的状态复现引入。给出了陷阱型标准传递探测器在1 064 nm波段溯源于低温绝对辐射计的定标实验过程和结果。介绍了低温辐射计新型Y型定标光路,该光路消除了低温辐射计窗口反射损耗引入的不确定性。实验测试了探测器在1 064 nm波段的线性、空间响应均匀性、稳定性和空间偏振非敏感性。结果表明:传递探测器绝对光谱响应度定标的不确定度优于0.023%,响应度重复性的实验结果表明了Y型低温辐射计定标光路改造的可行性。     

基于面阵CCD的MAX-DOAS系统性能研究

介绍了自制的地基多轴差分吸收光谱系统,该系统采用二维面阵CCD探测器,将不同水平仰角所接收的光信息分布在面阵CCD的不同区域,实现了对不同水平仰角痕量气体的同时测量,并对系统中面阵CCD探测器的偏置、暗电流、噪声、响应线性以及成像光谱仪的分辨率、光谱范围等性能进行了测试.给出了该系统对不同观测水平仰角下大气O3的监测结果,结果表明此多轴差分吸收光谱系统能够满足大气监测的要求.     

512×2元InGaAs光谱传感物联网节点研制

基于512×2元InGaAs光谱组件研制一款新型光谱传感物联网节点。针对中心距为25μm的双列小像元探测器结构,在信号处理电路中对双通道数据进行均值处理,减小了单个光敏元响应异常对系统测试结果带来的影响。实验结果表明,此节点的测试波长范围为976～1700 nm,光谱分辨率达到13.5 nm,波长准确性优于3.2 nm,波长重复性优于0.3 nm,动态范围达到2300:1,吸光度重复性0.0011 AU,光源基线稳定性优于0.0001 A/h。采用多种标称酒精浓度的酒类样本对此光谱传感节点进行测试,验证其功能。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.