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1.
高介电常数的栅极电介质LaAlO3薄膜的性能研究   总被引:2,自引:0,他引:2  
在室温下,采用射频磁控溅射法在Si衬底上制备了具有高介电常数的LaAlO3薄膜,这是一种新的栅极电介质材料.在高纯O2中经过15min 650℃的高温退火后LaAlO3薄膜仍然不晶化,这种热稳定性有利于减小薄膜的漏电流.本工作研究了LaAlO3薄膜的介电性能,其电容等效氧化物厚度为2.33nm,在外加偏压士1V处的漏电流很低,分别为3.73mA/cm2(+1V处)和5.32×10-4mA/cm2(-1V处),两者相差四个数量级.此结果表明,Pt/LaAlO3/Si结构具有良好的单向导电性能.C-V曲线的滞后电压VH=0.09V,界面态密度的值约为8.35×1011cm-2.研究结果表明,在今后的半导体器件的甚大规模集成(ULSI)中,具有高介电常数的LaAlO3薄膜将会是一种极有希望的栅极电介质材料.  相似文献   

2.
在Pt/Ti/SiO2/Si基片上采用Sol-Gel法制备了五组分成分梯度分布的KTa1-xNbxO3(x=0.55,0.525,0.50,0.425,040)热释电薄膜。测试结果表明,复合KTN薄膜具有钙钛矿型结构,0.5μmKTN薄膜在15℃至51℃温度范围内,频率1.0kHz时,平均相对介电常数εr=1075,平均介电损耗tanδ=0.011。在室温及120kV/cm下极化30m in后,0.5μm复合薄膜在15-51℃温度范围内热释电系数出现峰值,平均热释电系数为3.54×10-6C/(cm2.K),电压响应优值Fv=1.205×10-9C.cm/J,探测度优值Fd=3.768×1-7C.cm/J。该薄膜工作温度范围较宽,作为热释电材料开发应用前景十分广阔。  相似文献   

3.
采用溶胶 -凝胶 (Sol -Gel)工艺在普通Na -Ca -Si玻璃基体上成功地制备出高c轴择优取向性、高可见光透光率以及高电导率的Al3 + 离子掺杂型ZnO薄膜。利用SEM、XRD以及UVS光谱仪等分析方法对不同工艺下制备的薄膜进行了研究 ,结果显示 ,所制备的薄膜为纤锌矿型结构 ,表面均匀、致密 ,薄膜材料晶粒尺寸大约为 5 0~ 2 0 0nm左右 ,薄膜可见光透光率最大可达 99% ;对薄膜的厚度以及电学性能进行了测定后发现 :单次镀膜厚度约为 3 0~ 5 0nm ,Al3 + 离子掺杂型氧化锌薄膜的电阻率在 2 .5 2× 10 -3 ~ 2 .94× 10 -3 Ω·cm范围内 ,其霍尔系数在 6.2 5× 10 -7~ 2 .3 6× 10 -7cm3 /C范围内 ,载流子浓度在 1×10 2 5~ 2 .64× 10 2 5cm-3 范围内 ,霍尔迁移率在 2 .48× 10 -4 ~ 8.0 3× 10 -5cm2 /V·s范围内 ,在太阳能电池透明光电极领域中极具潜在的应用价值。  相似文献   

4.
二氧化锆栅介质薄膜光学及电学特性研究   总被引:3,自引:0,他引:3  
马春雨  李智  张庆瑜 《功能材料》2004,35(4):491-494
采用反应RF磁控溅射法在氧气和氩气的混合气氛中制备了具有较高介电常数、较宽光学禁带间隙的ZrO2薄膜。利用变角度光谱椭圆偏振仪研究了不同O2/Ar流量比下制备所得薄膜的厚度、复折射率、复介电常数和吸收系数,估算了薄膜的光学禁带间隙,并测试分析了在不同O2/Ar流量比下溅射沉积的Al/ZrO2/SiO2/n型Si叠层结构的C V、I V特性曲线。通过对O2/Ar流量比分别为1/9、1/4、4/1、1/0工艺条件下溅射沉积ZrO2薄膜的α2与光子能量关系图的拟合,确定了其光学禁带间隙Eg分别为6.27、5.84、6.03、5.92eV,在O2/Ar流量比为1/9、1/4、1/0工艺条件下溅射沉积ZrO2薄膜,其ZrO2/SiO2叠层的有效介电常数keff计算结果分别为14.6、19.6和9.3,漏电流较低(<5.0×10-5A/cm2),其击穿电场强度分别为5.6、6.3、9MV/cm。  相似文献   

5.
掺Nb的SrTiO_3内边界层高介电常数材料   总被引:5,自引:1,他引:4  
掺 Nb 的 SrTiO_3内边界层高介电常数材料,其相对介电常数(?)值高达7.2×10~4,介电耗损角正切 tgδ<2.5×10~(-2),介电常数的温度系数α_r<2.0×10~(-3)K~(-1),电压系数α_v<5.0×10~(-3)V~(-1)。它不仅是制作电容器的极好材料,而且是压敏电阻材料,其微分电导 dI/dV 在小于击穿电压范围为:(1.15/V~(1/2))×10~(a+bV~(1/2))。材料的特性跟烧结后的晶粒尺寸、过量的 TiO_2和扩散杂质的选择有极其密切的关系。  相似文献   

6.
采用脉冲激光沉积技术,在(100)LaAlO3单晶基片上生长SrTiO3/Y1Ba2Cu3O7-x(STO/YBCO)多层薄膜。XRD分析表明:YBCO薄膜和STO薄膜均为C轴取向,STO(002)/YBCO(006)衍射峰摇摆曲线半高宽为0.73°。AFM分析表明,STO/YBCO多层薄膜表面平整、均匀,在77K,100kHz的测试条件下,STO薄膜介电损耗tgδ<10-2,在53.6kV/cm电场作用下,介电常数的相对变化为38%。  相似文献   

7.
利用传统陶瓷工艺制备出BST(65/35)倒筒靶,采用射频溅射法沉积薄膜.开展了对Pt/Ti/SiO2/Si基底热处理工艺与BST同质缓冲层研究,总结出了可以确保基底界面性能良好、BST薄膜结构致密的工艺方法.介电性能测试表明BST薄膜的介电常数约为60~70,介电损耗为1.5%~2.5%,居里温度为284K,介电温度系数(TCD)为0.5%.漏电流测试表明在1MV/cm电场下,漏电流密度为1.9×10-6A/cm2.  相似文献   

8.
本文采用电子回旋共振(ECR)等离子体技术和十甲基环五硅氧烷(DMCPS)源开展了SiCOH薄膜的研究工作,获得了介电常数为2.88的SiCOH低介电常数薄膜.薄膜经400℃热处理后,膜厚减小,最大相对变化率小于15%,呈现较好的热稳定性.薄膜在1MV/cm场强下的漏电流为8.9×10-6A/cm2,且场强达到2.5 MV/cm时,未发生击穿现象,具有较优越的绝缘性能.因此,采用ECR-CVD技术和DMCPS源可以制备热稳定性优良的、绝缘性能优越的低介电常数SiCOH薄膜.  相似文献   

9.
为使KTN热释电薄膜能够在较宽的温度范围内有较高的热释电系数,本文在Pt/Ti/SiO2/Si基片上采用Sol-Gel法制备了两种多组分成分非梯度分布的KTN热释电薄膜.用XRD分析了薄膜的晶相结构,并研究了其铁电、介电和热释电性能.结果表明,两种薄膜均具有钙钛矿型结构,且均可观察到典型的电滞回线.在100kHz频率下,Ⅰ型薄膜在16~43℃,εr=332,tg δ=0.21,14~46℃平均热释电系数为3.246×10-4C/(cm2·K),计算所得Fv=3.58×10-7C·cm/J,Fd=1.42×10-5C·cm/J,Ⅱ型薄膜在17~46℃,εr=987,tgδ=0.18,14~44℃平均热释电系数为2.797×10-4C/(cm2·K),电压响应优值为1.04×10-7C·cm/J,探测度优值为7.69×10-6C·cm/J.  相似文献   

10.
薄膜电容器是现代电力装置与电子设备的核心电子元件,受限于薄膜介质材料的介电常数偏低,当前薄膜电容器难以获得高储能密度(指有效储能密度,即可释放电能密度),从而导致薄膜电容器体积偏大,应用成本过高。将具有高击穿场强的聚合物与高介电常数的纳米陶瓷颗粒复合,制备聚合物/陶瓷复合电介质,是实现薄膜电容器高储能密度的有效策略。对于单层结构的0-3型聚合物/陶瓷复合电介质,其介电常数与击穿场强难以同时获得有效提升,限制了储能密度的进一步提高。为了解决此矛盾,研究者们叠加组合高介电常数的复合膜与高击穿场强的复合膜,制备了2-2型多层复合电介质,能够协同调控极化强度与击穿场强来获取高储能密度。研究表明,调控多层复合电介质的介观结构与微观结构,可以实现优化电场分布、协同调控介电常数与击穿场强等目标。本文综述了近年来包括陶瓷/聚合物和全有机聚合物在内的多层聚合物基复合电介质的研究进展,重点阐述了多层结构调控策略对储能性能的提升作用,总结了聚合物基多层复合电介质的储能性能增强机制,并讨论了当前多层复合电介质面临的挑战和发展方向。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
A four-ball tester was used to evaluate the anti-wear performance of three kinds of organomolybdemun compounds in the engine oils, i. e., molybdenum dialkyldithiophosphate (MoDDP), molybdenum dialkyldithiocarbamate ( MoDTC), and sulphur and phosphorus freeorganomolybdeum (Molybdate). The results indicate that a low concentration of MoDDP doesn' t improve the anti-wear properties of the commercial engine oils, but a high concentration of MoDDP can obviously improve the anti-wear properties and the load-carrying capacity of the engine oils. MoDTC doesn' t improve the antiwear properties of the engine oils, but worsens the anti-wear properties of the oils. Signifi can timprove ment of frictional and wear characteristics is obtained with Molybdate added in the commercial engine oils and the formulated oils.  相似文献   

13.
14.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

15.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

16.
The end of 2007, over 200 unit products of more than 80 Chinese firms have passed the quality grade certification for liquor products. These products involve distilled spirits, beer, wine, yellow wine, fruit syrup wine and others, and cover over 80% of the national top-branded liquor products.……  相似文献   

17.
Surface characterization and microstructure studies are performed on chemical vapor deposited (CVD) tungsten coating. There is about 2 μm thickness diffusion layer of tungsten in the molybdenum substrate. The thermal shock test shows tungsten coating has good adhesion with molybdenum substrate, but the elements of oxygen and carbon in the tungsten coating have the bad affection to the adhesion. The result of high-temperature diffusion experiment is the diffusion rate from molybdenum substrate to tungsten coating is faster.  相似文献   

18.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

19.
We studied a combined effect of the cryoprotectants both of lipid and carbohydrate origin at the presence of DMSO or without it on cell viability and the RNA synthesis in the embryonic mollusc and echinoderm cell cultures obtained at different developmental stages. Cryoprotective properties of exogenous lipids correlated with their thermotropic behavior. Lipid extracts from marine hydrobiontes, which thermal transitions are characterized by relatively small part of calorimetric thermogram area lying at temperatures above 0 °C (6–18%), were found to possess a considerable cryoprotective activity. The results are discussed in relation to the prediction of the cryoprotective activity of lipid extracts for marine animal cells. In addition, it was found that marine invertebrate cells can be cryopreserved without DMSO at the presence of trehalose and lipid extracts of some marine hydrobiontes.  相似文献   

20.
Pure silver is used extensively in the preparation of high-temperature superconductor wires, tapes, films, and other configurations in which the silver not only shields the superconducting material from the surrounding materials, but also provides a degree of flexibility and strain relief, as well as stabilization and low-resistance electrical contact. Silver is relatively expensive, but at this stage of superconductor development, its unique combination of properties seems to offer the only reasonable means of achieving usable lengths of conductor. In this role, the low-temperature physical (electrical, thermal, magnetic, optical) and mechanical properties of the silver all become important. Here we present a collection of properties data extracted from the cryogenic literature and, to the extent possible, selected for reliability.  相似文献   

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