大功率低阈值半导体激光器研究

针对大光腔结构往往导致阈值电流密度增大的矛盾,设计了一种具有较高势垒高度的三量子阱有源区。采用非对称宽波导结构的半导体激光器,该激光器在实现大光腔结构的同时保持阈值电流密度不增加。通过金属有机物化学气相沉积(MOCVD)生长InGaAs/AlGaAs三量子阱有源区以及3.6μm超大光腔半导体激光器的外延结构。结合后期工艺,制备了980nm脊形边发射半导体激光器。在未镀膜情况下,4mm腔长半导体激光器阈值电流为1105.5mA,垂直发散角为15.6°,注入电流为25A时的最大输出功率可达到15.9 W。测试结果表明:所设计的半导体激光器在有效地拓展光场,实现大光腔结构的同时,保证了激光器具有较低的阈值电流。     

半导体环形腔激光器输出特性理论与实验

首先导出了光纤环形腔半导体激光器中光子数密度的解析表达式后,分别从理论和实验上研究了阈值电流、输出功率和光纤耦合比之间的依赖关系。结果表明,阈值电流与光纤耦合比的对数满足线性关系;同时,在特定的偏置电流下,存在一个最佳的光纤耦合比使输出功率为最大。这将对于环形腔半导体激光器的理论研究和优化器件结构有所裨益。     

横向微堆积大功率半导体激光器线阵的制备

提出了一种横向微堆积大功率半导体激光器线阵的新结构,在相同的注入电流下提高了器件的输出光功率,有效缓解了大电流下的器件热烧毁和光学灾变性毁坏(COD)。制备了横向微堆积三有源区半导体激光器线阵列,在50A的工作电流下,其输出光功率可达到79.3W,斜率效率可达1.81W/A,是传统单有源区bar条的两倍多。     

隧道级联半导体激光器的光束质量因子

运用波导模式理论和光束传输的非傍轴矢量矩理论,对隧道级联InGaAs/GaAs/AlGaAs半导体激光器的光束质量进行了理论研究.分析了隧道级联半导体激光器内限制层厚度和垂直方向光束质量因子的关系.结果表明,在隧道结耦合距离内,隧道结不仅起到了再生载流子的作用,也作为无源波导拓展了光场,减小了垂直发散角,降低了光束质量因子.根据模拟结果设计并制备了高光束质量,小垂直发散角的隧道级联耦合大光腔半导体激光器,其阈值电流密度为271A/cm2,斜率效率为1.49W/A,垂直发散角为17.4°,光束质量因子为1.11的半导体激光器.     

隧道级联半导体激光器的光束质量因子

运用波导模式理论和光束传输的非傍轴矢量矩理论,对隧道级联InGaAs/GaAs/AlGaAs半导体激光器的光束质量进行了理论研究.分析了隧道级联半导体激光器内限制层厚度和垂直方向光束质量因子的关系.结果表明,在隧道结耦合距离内,隧道结不仅起到了再生载流子的作用,也作为无源波导拓展了光场,减小了垂直发散角,降低了光束质量因子.根据模拟结果设计并制备了高光束质量,小垂直发散角的隧道级联耦合大光腔半导体激光器,其阈值电流密度为271A/cm2,斜率效率为1.49W/A,垂直发散角为17.4°,光束质量因子为1.11的半导体激光器     

电泵浦垂直外腔面发射激光器振荡特性的理论分析及实验研究

对具有InGaAs/GaAsP量子阱周期增益结构有源区的980 nm电泵浦垂直外腔面发射激光器(EP-VECSEL)的振荡特性进行了理论分析及实验研究.模拟并分析了耦合腔条件下EP-VECSEL的振荡特性与其分布布拉格反射镜(DBR)及外腔镜反射率之间的关系,并根据理论分析结果对器件结构进行了优化设计.在实验上制备出具有不同外腔镜反射率的EP-VECSEL器件,并对其连续波(CW)振荡特性进行了研究.实验结果表明,有源区直径为300 μm的EP-VECSEL器件在外腔镜反射率为90 %时阈值电流为1.2 A,注入电流为4 A时连续激光输出功率为270 mW; 在外腔镜反射率为95%时阈值电流为0.9 A,4 A下输出激光功率为150 mW.实验结果与理论分析结论符合较好,说明本文采用的理论分析方法能有效模拟及优化EP-VECSEL器件的振荡特性.     

降低VCSELs激射阈值途径的理论研究

针对量子阱有源层的结构特点，考虑增益和载流子浓度呈对数关系，建立量子陆垂直腔面发射半导体激光器（VCSEL）的速率方程，导出了阈值电流密度的解析表达式，运用MATLAB软件中Simulink可视化仿真系统对理论计算进行模拟仿真，研究了降低VCSEL激射阈值的3个基本途径；有源层选用量子阱实现微腔结构，腔面采取多层介质反射膜提高光腔反射率R：改进外延生长技术在降低各种损耗。     

一种可降低Littman-Metcalf光栅外腔半导体激光器衍射损耗的结构设计

基于原有Littman-Metcalf型光栅外腔半导体激光器的工作原理,设计了一种可以降低衍射损耗的外腔结构。在Littman-Metcalf结构的基础上增加一个反射镜,将闪耀光栅二次衍射产生的零级衍射光反馈回半导体激光器本征腔。推导了新结构模型外腔损耗的表达式,通过等效腔的概念对两种结构激光器的外腔损耗、阈值电流、输出线宽以及输出功率进行了仿真分析。结果表明：将二次衍射产生的零级光反馈回有源区可有效降低Littman-Metcalf结构激光器的外腔损耗,提高了系统的耦合效率,从而降低阈值电流,提高了激光器的输出功率。同时,由于提高了外腔反射效率,该外腔结构进一步压窄激光器的输出线宽。对影响低损耗Littman-Metcalf外腔激光器输出线宽以及输出功率的因素(端面反射率、内外腔长、闪耀光栅衍射效率以及反射镜反射率等)也进行了仿真分析,为后期激光器制作提高了理论指导。     

半导体激光泵浦Nd:YAG激光器技术研究

本文研究了半导体激光端面泵浦固体激光器中的主要技术,指出泵浦功率较低时,为了降低激光器的阈值应选用近半共心腔或大R腔;泵浦功率较高时,为了提高激光器的输出功率和转换效率应选用半共焦腔。泵浦光耦合系统的设计应满足与激光腔模的最佳模式匹配。当泵浦功率为86mW时,Nd;YAG激光器基模输出8.3mW;激光器阈值为12mW。     

大功率宽面808nm GaAsP/AlGaAs量子阱激光器分别限制结构设计

本文对有源区条宽100μm的GaAsP/AlGaAs 808nm量子阱激光器分别限制结构进行了理论分析和设计.选取了三种情况的波导层和限制层的铝组分,分别计算和分析了波导层厚度与激光器光限制因子、最大出光功率、垂直发散角和阈值电流密度的函数关系.根据计算结果可知:当波导层和限制层铝组分为0.4和0.5时,采用窄波导结构可以获得器件的最大输出功率为11.2W,发散角为19°,阈值电流密度为266A/cm2;采用宽波导结构可以得到器件的最大输出功率为9.4W,发散角为32°,阈值电流密度为239A/cm2.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.