高效170 GHz平衡式肖特基二极管倍频器

太赫兹源的输出功率是限制太赫兹技术远距离应用的重要参数。为了实现高效的太赫兹倍频器,基于高频特性下肖特基二极管的有源区电气模型建模方法,利用指标参数不同的两种肖特基二极管,研制出了两种170 GHz平衡式倍频器。所采用的肖特基二极管有源结区模型完善地考虑了二极管IV特性,载流子饱和速率限制,直流串联电阻以及趋肤效应等特性。通过对两种倍频器仿真结果进行对比,完备地分析了二极管主要指标参数对倍频器性能的影响。最后测试结果显示两种平衡式170 GHz倍频器在155~178 GHz工作带宽内的最高倍频效率分别大于11%和24%,最高输出功率分别大于15 mW和25 mW。从仿真和测试结果表示,采用的肖特基二极管建模方法和平衡式倍频器结构适用于研制高效的太赫兹倍频器。     

基于肖特基势垒二极管三维电磁模型的220GHz三倍频器

采用阻性肖特基势垒二极管UMS DBES105a设计了一个太赫兹三倍频器.为了提高功率容量和倍频效率,该倍频器采用反向并联二极管对结构实现平衡式倍频.根据S参数测试曲线建立了该二极管的等效电路模型并提取了模型参数.由于在太赫兹频段二极管的封装影响到电路的场分布,将传统的二极管SPICE参数直接应用于太赫兹频段的电路设计存在一定缺陷,因此还建立了二极管的三维电磁模型.基于该模型研制出的220 GHz三倍频器最大输出功率为1.7 mW,最小倍频损耗为17.5 dB,在223.5 GHz~237 GHz输出频率范围内,倍频损耗小于22 dB.     

基于平面肖特基二极管的太赫兹频段倍频器的研究

基于研究肖特基变容二极管的半导体层结构分析与建模,通过研究太赫兹平面肖特基势全二极管半导体材料的 物理层结构,分析二极管结构的电磁效应及其频率响应特性。研究D 频段变容二极管高效率倍频器技术,在太赫兹频段 倍频器的性能对整个接收机的性能有着至关重要的影响。要实现高频率,高功率,宽频带,高效率,低噪声太赫兹倍频 技术是太赫兹技术领域的核心研究方向之一。研究基肖特基二极管倍频器的关键技术,分析了国内外现状及发展动态。     

固态太赫兹二倍频器设计

研制了一种平衡结构的太赫兹二倍频器,采用Teratech公司的AS1太赫兹平面肖特基二极管。在对太赫兹肖特基二极管建模和分析的基础上,结合HFSS和ADS软件对太赫兹二倍频器进行仿真。对该倍频器进行加工测试,实测结果表明,在180~192GHz,最大输出功率16.3mW,最大倍频效率为9.1%。     

GaAs/AlN异构集成太赫兹倍频器芯片

针对太赫兹GaAs肖特基二极管倍频器芯片散热能力差导致输出功率低的问题,开展了GaAs/AlN异构集成太赫兹倍频器芯片研究。通过稳态热仿真发现,将肖特基二极管芯片衬底由GaAs替换为热导率更高的AlN可以降低结温。对芯片衬底替换工艺开展了研究,获得了GaAs/AlN异构集成太赫兹二极管。分别对基于GaAs衬底二极管和基于GaAs/AlN异构集成二极管的162 GHz倍频器开展功率性能测试对比。测试结果表明:装配GaAs衬底二极管的倍频器输入功率为200 mW时,输出功率最高为43.6 mW;而装配GaAs/AlN异构集成二极管的倍频器输入功率提高到316 mW,输出功率为72.4 mW。肖特基二极管由GaAs衬底替换为AlN衬底后耐受功率(输入功率)提高了约58%,倍频效率由21.8%提升至22.9%,输出功率也相应提升,验证了相比GaAs衬底肖特基二极管,GaAs/AlN异构集成太赫兹二极管的散热性能及耐受功率具有明显的优越性。     

0.14 THz倍频器的设计与仿真

固态倍频器是毫米波及亚毫米波频段超外差接收机中的关键器件,其研制对太赫兹通信具有重要意义。介绍了一种基于肖特基变容二极管的宽带、高效率0.14 THz二倍频器的拓扑结构和仿真设计。该倍频器基于波导腔体石英基片微带电路形式,通过引线互联分别实现肖特基二极管接地和施加外部直流偏置,倍频器各部分采用了宽带电磁耦合结构设计。在开展了二极管建模及阻抗特性分析的基础上,采用三维有限元与非线性谐波平衡联合仿真方法,实现了倍频器的最优化设计。仿真结果表明,当输入频率为65 GHz~75 GHz,驱动功率为20 dBm时,倍频器的输出功率最高达10.1 dBm,倍频效率达10.8%。     

单片集成430 GHz三倍频器的设计及测试

通过单片集成的方法,将工作于太赫兹频段(430GHz)的三倍频器的各个功能电路集成在厚度为12μm的砷化镓薄膜单片上,设计、制造太赫兹三倍频集成电路单片。单片结构采用一对反向并联连接的肖特基二极管,构成串联平衡式电路,电路不需要外加偏置电压。平衡式电路只产生奇数次谐波,简化了电路分析和优化过程。电路设计采用三维电磁仿真软件与谐波非线性仿真软件联合仿真场路的方法,准确模拟单片电路的射频特性。将单片电路安装在中间剖开的波导腔体内制成三倍频器进行测试,在430GHz处测得输出功率为215.7μW,效率为4.3%。     

太赫兹平面肖特基二极管参数模型

根据太赫兹平面肖特基二极管物理结构,在理想二极管SPICE参数模型的基础上建立了二极管小信号等效电路模型。依据该二极管等效电路模型设计了基于共面波导（CPW）去嵌方法的二极管S参数在片测试结构,并对其在0.1~50 GHz、75~110 GHz频率范围内进行了高频小信号测试,利用测试结果提取了高频下二极管电路模型中各部分电容、电阻以及电感参数。将相应的高频下电容与电阻参数分别与低频经验公式电容值和直流I-V测试提取的电阻值进行了对比,并利用仿真手段对高频参数模型进行了验证。完整的参数模型以及测试手段相较于理想二极管SPICE模型和传统的参数提取方法可以更为准确地表征器件在高频下的工作状态。该建模思路可用于太赫兹频段非线性电路的优化设计。     

高截止频率肖特基二极管仿真模型研究

基于表面沟道型平面肖特基势垒二极管基本结构,采用GaAs 0.15μm伪高电子迁移率晶体管（pseudomorphic high electron mobility transistors, pHEMT）工艺制程,提出了一种垂直沟道长跨度空气桥的肖特基二极管模型.研究了不同阳极直径对肖特基二极管级联电阻的影响,对比分析了不同焊盘间距下肖特基二极管模型的S参数仿真结果,得到最优空气桥长度;仿真了最优焊盘间距下二极管肖特基结的TCAD模型,根据仿真得到的特性曲线提取肖特基二极管的SPICE参数.经实验测试,该二极管具有极低的零偏置结电容,截止频率高达9 THz,仿真结果与实测结果吻合度较高,可用于太赫兹频段上.     

GaAs肖特基二极管中不连续性电路仿真分析

在太赫兹技术应用系统中,太赫兹混频器是太赫兹接收前端的关键部件,而太赫兹肖特基二极管是太赫兹混频器的核心器件。本文采用信号完整性的方法对肖特基二极管在无源区的特性进行建模分析,并对不连续性、寄生电容等参数进行分析。根据肖特基二极管设计的物理参数,如尺寸、材料的介电常数等,在高频结构仿真器(HFSS)中对肖特基二极管进行建模。通过多次建模仿真,最终给出肖特基二极管的等效电路模型。通过对比 HFSS中提取二极管欧姆焊盘的S参数和 Ansoft-designer中对二极管欧姆焊盘的等效电路进行仿真得到的S参数,证明了等效电路的合理性。该模型可以应用在对太赫兹混频器的电路级仿真中。     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.