相位法自动检焦技术在经纬仪中应用的研究

介绍了一种在经纬仪中应用相位法自动检调焦的技术:通过检测CCD输出信号之间相位差获得像的相对偏移量,从而获得离焦量;存在相位差的两个信号经电路处理后控制执行机构来调节物镜的位置,使目标的像始终位于焦面上,以实现设备的自动调焦.双分离透镜组成的相位法检焦方法可以检测到由环境、目标相对位置变化等各方面引起的离焦量;CCD亚象素定位技术的应用提高了离焦量检测的精度;原理实验表明相位法自动检焦技术,在经纬仪中应用是可行的,只要选取合适的参数就可达到经纬仪的调焦精度要求,该系统具有调整方便以及较好的实时性等优点.     

新型航空相机自动调焦系统的设计

根据航空摄影侦察高机动性的特点和调焦精度要求,提出了数据采集与计算的自动调焦方法.分析了航空摄影时大气压力、温度和摄影斜距的变化对航空相机离焦的影响,给出了计算相机离焦量的简易数学方程,介绍了新型航空相机自动调焦系统的设计原理和基本组成,完成了系统的硬件电路和软件流程设计.光学测试和实际应用证明:这种控制技术不仅实用可...     

基于图像处理的光学无热化设计效果检测系统

无热化设计是红外光学系统设计的一项重要内容,为了检测无热化设计的效果,提出了一种基于图像处理的红外光学系统无热化设计效果检测方法。利用此方法对被测光学系统进行自动调焦,记录其在不同工作温度下的焦点位置并进行分析,得到被测光学系统在不同温度下的相对离焦量。研制了某型无热化设计效果检测系统,介绍了其系统组成、测量离焦量的工作原理、自动调焦算法和调焦区域的选择,给出了实验结果。还提出了一种基于图像灰度梯度的复合聚焦策略并进行验证。实验结果表明,其调焦速度快,重复性好,精度较高,抗噪声干扰能力强。     

单幅图像估计离焦量的航空摄像机自动调焦系统

为了改进航空相机自动调焦的方法,解决传统对焦深度法自身不可避免的多峰值问题和实时性问题。本文提出一种新型自动调焦方法,建立了调焦模型,并通过实验装置验证了该方法,调焦时间相比传统方法短,实现了一次定位的调焦方法。首先,通过采集大量不同离焦程度的自然图像作为分析样本的总体,对总体中分类采样出小块样本进行运算分析,经过迭代运算获得所需模板;然后,在凸轮机构完成粗调焦以后采集当前图像,通过对当前图像采样,把采集的样本小块放入建立好的模板中计算,得到当前镜头的离焦量。最后,根据离焦量的结果,换算为调焦执行机构的位移量,驱动调焦电机移动相应位移完成调焦。实验结果表明:在目前实验条件下离焦量计算时间为0.4 s,较传统方法的4~8 s调焦时间有了大幅度提高。在保证调焦精度的前提下,实现了一种具有实时性的自动调焦方法。     

基于线阵CCD 的高速光刻检焦技术

随着光学投影光刻分辨力的提高,投影物镜的焦深在逐渐缩短。为充分利用物镜有限的焦深,一般采用调焦技术来调整硅片位置。作为调焦的关键,检焦技术的研究尤为热门。现有的检焦方法多采用四象限探测器或者面阵CCD采集携带有硅片离焦量信息的光强信号,并在计算机上进行图像处理完成检焦。该方法处理速度慢,难以满足实时调焦的要求。鉴于此,提出了一种用线阵CCD采集图像,以FPGA为处理器的检焦方法。该方法利用线阵CCD的高速性和FPGA的并行性,结合多项式插值的亚像素边缘检测算法,能够高速实时检测硅片离焦量;同时, FPGA通过驱动电机控制工件台运动对离焦量进行补偿,形成一个实时闭环的调焦系统,减少了原有的计算机环节,具有高速度、高分辨率、低功耗、低成本的特点。     

基于嵌入式机器视觉的激光熔覆成形熔池离焦量在线测控系统

在金属激光熔覆自由三维成形中,不断生长的成形面与成形喷头之间的距离应保持恒定值,以保证生长表面上处于聚焦激光焦点附近熔池的离焦量基本不变。以光学三角法为原理,提出了一种基于嵌入式机器视觉的激光自由成形熔池离焦量在线测控系统,推导出了镜头焦距设计公式,给出了系统硬件方案以及软件方案,同时为高效稳定处理熔池图像,提出了一种基于面积的熔池灰度阈值估计算法。经测试,此测量系统能实时准确地测得熔池离焦量,将该系统运用至实际薄壁圆环成形中,实时调节光头提升速度以保持离焦量恒定,使得薄壁圆环成形精度得到明显提高。     

激光三角测距法自动调焦模型的建立与分析

为了满足工业TFT-LCD检测系统中显微镜对主动自动对焦的要求,提出了一种基于激光三角测距法主动自动调焦的方法,建立了相应的数学模型并进行了实验数据分析。该方法在可见光光路中加入一路808 nm波长的红外光,红外光在被检测物体表面反射后经过一系列光学器件投射在CCD相机上形成一个光斑,以对焦完成时CCD上光斑半径最小为基准,给出了离焦量δ与光斑信息探测量r之间的数学关系,据此实时控制PZT进行自动调焦。初步以50×物镜进行实验,结果显示其在焦平面±30μm范围内的实际测量值与理论值吻合,线性度优越,调焦精度达到0.2μm。与传统的显微镜调焦方法相比具有精度高、线性度好、调焦速度快等优点,满足工业检测自动化的实际需要。     

激光跟踪瞄准系统的扩束系统设计

根据远距离激光跟踪瞄准系统对出射激光束的准直要求,设计了一个倍率18的激光扩束系统,系统地介绍了设计方法.按照高斯光束的透镜变换理论,计算了该扩束系统的正确离焦量,分析了系统的焦点偏移量对出射光束束腰位置和束腰半径的影响,指出扩束效率对焦点偏移量非常敏感,预测了精密调焦机构要注意的问题.     

激光参数对旁轴送粉激光熔覆粉末熔化行为的影响

旁轴送粉激光熔覆时粉末到达熔池的热物状态对熔覆层成形精度和质量有着重要意义，针对光粉作用时粉末的不同熔化行为，搭建了旁轴送粉激光熔覆过程红外热成像采集系统和高速摄像过程采集系统，研究了不同激光功率和离焦量下的光粉热交互作用，建立了粉末熔化时出现的三个典型特征阶段并分析了不同激光功率和离焦量对粉末熔化特征阶段持续时间的影响，最终得出粉末热物状态与特征阶段的关系。结果表明：激光功率增大，光粉作用空间中熔化的粉末数量增多，粉末温度不均匀性减小；离焦量增大，液态粉末颗粒数量增大，粉末温度不均匀性横向减小；激光功率越小或离焦量越大，固态粉末升温和熔化所需的时间增大，粉末以固态进入熔池的几率变大。最后，得到了不同激光参数下粉末到达熔池时的热物状态，为实现粉末熔化行为的解析提供了试验依据。     

经纬仪分离透镜法自动调焦模型建立与分析

为实现经纬仪实时自动调焦,设计了一种用于经纬仪的分离透镜法自动调焦方案,建立了相应的数学模型并作分析。物光经放置在经纬仪第一像面后的两块分离透镜后,在CCD上成像,形成两光斑,以对焦准确时CCD上两光斑间距为基准,给出了离焦量与光斑间距变化之间的关系,据此进行调焦。同时分析了跟踪中心漂移、发散角等对调焦精度的影响。与经纬仪传统调焦方案相比具有精度高、算法简单、受环境温度变化影响小、结构简单等优点。初步实验结果显示其调焦精度优于0.056mm,满足经纬仪工程实际的需要。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.