大面阵碲镉汞芯片的热应力分析与优化

随着红外焦平面探测器面阵规模的不断扩大,大面阵碲镉汞芯片的热应力进一步恶化,受温度冲击后更容易产生损伤,进而直接影响探测器的使用,甚至导致探测器失效。这已成为大面阵探测器生产工艺亟需解决的问题。借助仿真手段研究了大面阵碲镉汞芯片的低温损伤原因,并结合小面阵探测器进行了对比分析。结果表明,铟柱与碲镉汞接触边缘部位因应力集中明显而成为损伤的起源点。不同材料的选择以及结构尺寸的设计有助于降低大面阵碲镉汞芯片的热应力和提高其工作可靠性。     

超大面阵碲镉汞探测器低应力设计及有限元分析

随着碲镉汞材料和器件技术的不断发展,满足大视场、超高分辨率应用需求的超大阵列规模的红外探测器逐步投入工程应用,超大面阵探测器芯片的低温可靠性成为封装技术的重点研究内容。以某超大面阵碲镉汞混成芯片为研究对象,采用有限元仿真分析法研究了冷头材料体系、冷台外径、冷台的结构形式等因素对混成芯片低温应力和芯片光敏面低温变形的影响规律,最终优化设计出一套可满足超大面阵芯片低温可靠性要求的冷头结构和材料体系。仿真结果显示,该冷头体系硅电路低温下最大应力约为70 MPa,碲镉汞光敏区在低温下的变形约为30■m。仿真结果能满足工程应用可靠性要求的经验仿真阈值,有效改进了超大面阵红外探测器的高可靠小型化封装技术。     

红外焦平面探测器热应力的有限元仿真方法分析

以64×64红外焦平面探测器为例,构建了包含探测器芯片、铟柱、填充胶和读出电路的全尺寸有限元仿真模型,与探测器芯片、填充层和读出电路的简化模型进行对比。研究表明,两种模型在芯片热应力的变化趋势上保持一致。由于铟材料与碲镉汞材料之间的热膨胀系数相差较大,随着芯片尺寸的增大,铟柱的影响逐渐增加,填充层简化模型计算得到的芯片热应力与全尺寸模型的热应力的差距会越来越大。     

碲镉汞集成偏振探测器应力分析

红外碲镉汞集成偏振探测器的结构是采用多个芯片叠层的方式,由于各层的材料不同,热膨胀系数不同,在低温下工作时各层界面之间存在应力,应力控制的不好会造成芯片裂片等情况,导致探测器性能劣化或无法使用。本文对长波320×256碲镉汞集成偏振探测器的裂片现象进行了分析,对存在的应力运用软件进行了仿真,得到了碲镉汞芯片上的应力值及减小应力的方向。针对仿真分析的结果进行了相应的铟柱降低、碲锌镉衬底减薄的试验,解决了碲镉汞集成偏振探测器的裂片现象。     

光刻工艺对大面阵长波碲镉汞芯片性能的影响

通过分析器件工艺对大面阵长波碲镉汞芯片性能的影响,发现光刻工艺非均匀性累积进而显著影响碲镉汞芯片性能的现象。应用Matlab仿真计算,定量分析了碲镉汞材料片表面凸点对不同线宽光刻工艺非均匀性的影响,提出了降低光刻工艺非均匀性累积的方法和高质量光刻工艺对碲镉汞材料平坦度的具体要求。     

新型大面阵碲镉汞探测器In柱生长工艺研究

介绍了新一代大面阵碲镉汞器件互连工艺中在碲镉汞器件芯片上的In柱生长技术,分析并试验了各种工艺手段的不同效果,最终选择了较为优化的In柱生长工艺条件.     

HgCdTe红外探测器芯片微管电极的制备与应用

介绍了一种用于超大面阵碲镉汞探测器的新型微管电极。使用常规金属沉积、光刻和刻蚀设备,即可在碲镉汞芯片上制备微管电极。在倒装互连时,碲镉汞芯片通过微管电极插入读出电路上的铟球,实现与读出电路互连。使用微管电极互连,互连所需压力比现有工艺降低了约65 %,并降低了倒装互连工艺对碲镉汞芯片平坦度和互连精度的要求,大幅度提高了互连成功率。     

10 μm间距长波1280×1024碲镉汞探测器研制进展

随着红外技术的进步,红外探测器组件向着更小尺寸、更高分辨率的方向发展.小像元间距、大面阵规格是长波探测器发展的重要方向.通过对10μm像元间距、9μm截止波长、1280×1024阵列规格长波探测器的研究,突破了10μm间距长波像元成结技术、10μm像元间距铟柱制备及互连技术,制备了有效像元率大于等于99.4％、非均匀性小于等于4％的10 μm间距长波1280×1024碲镉汞探测器芯片.     

分子束外延硅基碲镉汞材料技术研究现状

目前,高性能大面阵中波及短波红外探测器已经得到了越来越多的应用。材料参数控制精确、材料质量良好的碲镉汞材料是获得高质量碲镉汞探测器的先决条件。报道了华北光电技术研究所在分子束外延(Molecular Beam Epitaxy, MBE)生长硅基中波及短波碲镉汞材料方面的最新研究进展,并介绍了现阶段MBE生长碲镉汞材料的研究现状。     

基于分子束外延的4in硅基碲镉汞材料工艺研究

现阶段,大面阵碲镉汞红外焦平面探测器的需求持续增加,面向更大尺寸的碲镉汞材料制备技术成为了研究热点。对4 in硅基碲镉汞材料外延技术进行了研究。通过提升设备参数的稳定性、控制外延片的平整度以及优化材料工艺参数等一系列手段,突破了大尺寸硅基碲镉汞材料工艺的关键技术瓶颈,并制备出了高平整度、高均匀性、低缺陷率、高质量的4 in硅基碲镉汞材料。结果表明,该材料的双晶衍射半峰宽小于等于90 arcsec,表面宏观缺陷密度小于等于100 cm^-2,表面平整度小于等于15 μm。     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.     

High-quality single-crystal CdSe nanoribbons and their optical properties

Large-scale synthesis of single-crystal CdSe nanoribbons is achieved by a modified thermal evaporation method, in which two-step-thermal-evaporation is used to control CdSe sources＇ evaporation. The synthesized CdSe nanoribbons are usually several micrometers in width, 50 nm in thickness, and tens to several hundred micrometers in length. Studies have shown that high-quality CdSe nanoribbons with regular shapes can be obtained by this method. Room-temperature photolumines-cence indicates that the lasing emission at 710 nm has been observed under optical pumping （266 nm） at power densities of 25-153 kW/cm^2. The full width half maximum （FWHM） of the lasing mode is 0.67 nm     

Propagation of hermite-cosh-gaussian beams passing through ABCD optical system with an annular aperture

By using the expansion of the aperture function into a finte sum of complex Gaussian functions, the corresponding analytical expressions of Hermite-cosh-Gaussian beams passing through annular apertured paraxially and symmetrically optical systems written in terms of ABCD matrix were derived, and they could reduce to the cases with squared aperture. In a similar way, the corresponding analytical expressions of cosh-Gaussian beams through annular apertured ABCD matrix were also given. The method could save more calculation time than that by using the diffraction integral formula directly.     

Influence of polarization extinction ratio on distributed polarization coupling detection

Distributed polarization coupling in polarization-maintaining fibers can be detected by using a white light Michelson interferometer. This technique usually requires that only one polarization mode is excited. However, in practical measurement, the injection polarization direction could not be exactly aligned to one of the principal axes of the PMF, so the influence of the polarization extinction ratio should be considered. Based on the polarization coupling theory, the influence of the incident polarization extinction on the measurement result is evaluated and analyzed, and a method for distributed polarization coupling detection is developed when both two orthogonal eigenmodes are excited.     

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正Communications—VLSI Researches and industries of telecommunications have been growing rapidly in the last 20 years and will keep their high growing pace in the next decade.The involved researches and developments cover mobile communications,highway and last-mile broadband communication,domain specific communications,and emerging D2D M2M communications.Radio communication steps into its