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PECVD制备氮化硅薄膜的研究 总被引:2,自引:0,他引:2
采用PECVD法制备了氮化硅薄膜,探讨了沉积参数对氮化硅薄膜折射率的影响和衬底温度对氮化硅薄膜形貌和成分的影响规律。结果表明,不同的NH3流量可改变反应腔体内的氮硅比,对氮化硅的折射率,即减反射性能影响较大;衬底温度是影响氮化硅薄膜形貌和成分的主要因素;在衬底温度达到400℃时,形成了白色团状或岛状的氮化硅膜。 相似文献
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采用低压化学气相沉积方法,通过改变工艺气体配比,在硅衬底上生长低应力氮化硅薄膜。用应力仪、椭偏仪对生成的氮化硅薄膜的应力、生长速率、均匀性、折射率及腐蚀速率等进行实验。实验结果表明:低应力氮化硅薄膜制备的关键是增大DCS和NH3的配比,配比越大,生成的氮化硅薄膜应力越小,折射率越大,耐酸腐蚀能力越强,致密性越好;但随着配比增大,生成的氮化硅薄膜均匀性变差。选择合适的工艺气体配比可在硅衬底上制备出高质量的低应力氮化硅薄膜。 相似文献
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以SiH4为先驱气体,采用低频等离子体增强化学气相沉积(LF-PECVD)方法在Si衬底上制备了氢化非晶硅(a-Si∶H)薄膜。在薄膜沉积过程中,工艺参数将会影响非晶硅薄膜的沉积速率和光学性能。通过反射式椭圆偏振光谱仪(SE)研究了SiH4气体流量、工作压强和衬底温度等条件对氢化非晶硅沉积速率和光学性质的影响。实验结果表明,氢化非晶硅沉积速率随着SiH4流量、工作压强和衬底温度的改变而规律地变化。相比于SiH4流量和工作压强,衬底温度对折射率、吸收系数和折射率的影响更大。各工艺条件下所制备的非晶硅薄膜光学禁带宽度在1.61~1.77eV。 相似文献
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采用等离子体增强化学气相沉积法(PECVD),在单晶硅衬底(100)上成功制备了不同生长工艺条件下的氮化硅薄膜。分别采用XP-2台阶仪、椭圆偏振仪等手段测试了薄膜的厚度、折射率、生长速率等参数。并采用原子力显微镜(AFM)研究了薄膜的表面形貌。结果表明,温度和射频功率是影响薄膜生长速率的主要因素,生长速率变化幅度可以达到230nm/min甚至更高。对于薄膜折射率和成分影响最大的是NH3流量,折射率变化范围可以达到2.7~1.86。分析得出受工艺参数调控的薄膜生长速率对薄膜的性质有重要影响。 相似文献
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为了获得应用于AlGaAs激光器上的优异的氮化硅薄膜,采用等离子增强化学气相沉积(PECVD)低温条件下在GaAs衬底上制备了不同参数的氮化硅薄膜,利用光学膜厚仪、原子力显微镜(AFM)、傅里叶变换红外光谱(FTIR)等技术对薄膜残余应力、表面形貌、折射率等进行了分析。结果表明,薄膜的残余应力随沉积功率的增加而变大;随气压先降低后变大,在200 Pa时仅为6 MPa。薄膜的表面粗糙度随功率的提高而变大;随气压的提高而减小。功率和气压对薄膜的折射率影响不大,均在2.0~2.2之间。薄膜中氢的存在形式为N-H键。选择合适的功率和气压,可以在低温下获得极低应力和优异表面形貌的氮化硅薄膜。 相似文献
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p-Si TFT栅绝缘层用SiNx薄膜界面特性的研究 总被引:1,自引:1,他引:0
以NH3和SiH4为反应源气体,在低温下采用射频等离子体增强化学气相沉积(RF-PECVD)法在多晶硅(p-Si)衬底上沉积了SiNx薄膜.系统地分析讨论了沉积温度、射频功率、反应源气体流量比对SiNx薄膜界面特性的影响.分析表明,沉积温度和射频功率主要是通过影响SiNx薄膜中的si/N比和H含量影响薄膜的界面特性,而NH3/SiH4流量比则主要通过影响薄膜中的H含量影响薄膜界面特性.实验制备的SiNx薄膜层中的固定电荷密度、可动离子密度、SiNx与p-si之间的界面态密度分别达到了1.7×1012/cm2、1.4×1012/cm2、3.5×1012/(eV·cm2),其界面特性达到了制备高质量p-si TFT栅绝缘层的性能要求. 相似文献
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By means of exact conformal mapping method we have defined character of dependence of squares amounts of angular part of film
element on angled part dimension. We propose relations, approximating obtained dependence. Calculation results and experimental
researches of large-scale models are represented. 相似文献
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Moshrefzadeh R.S. Radcliffe M.D. Lee T.C. Mohapatra S.K. 《Lightwave Technology, Journal of》1992,10(4):420-425
The temperature dependence of refractive index of polymer films was determined for a number of slab waveguides by a grating coupling method. This dependence was examined as a function of parameters such as molecular weight and glass transition temperature of the polymer. Temperature-induced changes in N TE-N TM , N being the effective index, were studied systematically for different slab waveguide compositions. It is shown that with proper device design and choice of polymeric materials, thermal effects can be reduced 相似文献
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The approaches to prepare a uniform and unified scientific terminology of chemical carcinogenesis are presented. The main definitions proposed (carcinogen, initiation, promotion, mutagen, multistage carcinogenesis, anti-carcinogen, cocarcinogen, carcinogenic risk, etc.) are based on the current state of comprehending mechanisms of the action of chemical carcinogens. 相似文献
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The article describes a model representation of radar probing data in form of a mixture of background and target samples, which is the sum of two random variables with very different parameters. For model development we research the behavior of the central moments of the distribution mix without assuming the distribution law form. An example it is described the detection of the signal at the output of compression system of chirp ionosonde. 相似文献
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解决IP网QoS问题是目前通信领域的研究热点之一.虽然研究已经取得了一定的进展,但人们对于IP 网QoS本身的含义及相关的问题还有着不同的理解.本文将从IP网QoS的定义入手讨论相关的一些问题以及解决IP网QoS问题所做的各种努力. 相似文献
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《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》1968,56(6):1024-1032
Assuming that visual responses are due to the action of particles on the membrane of the visual cells, the stochastic variability of the response should be a function of the number of particles producing it. Quantitative predictions can be made with the aid of a model proposed in previous articles. It is found that responses produced in visual cells of Limulus by absorption of a single photon have the stochastic properties which would be expected if the response to one photon were brought about by 25 particles. It is concluded from this that the processes leading to visual responses produce multiplication of particles. The effects of temperature and of metabolic poisons suggest that these processes are of chemical nature. 相似文献
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《半导体学报》2008,29(12):2470-2470