nBn InAsSb/AlAsSb中波红外探测器的设计

对nBn势垒型InAsSb/AlAsSb中波红外探测器材料进行了系统深入的理论研究。通过理论计算势垒层的厚度、组分和掺杂等结构参数对器件能带结构、暗电流和光电流的影响,分析了势垒性的温度特性、器件输运特性,揭示了nBn势垒型中波红外探测器高温工作的机制,探索降低器件暗电流的方法。完成nBn势垒型锑化物材料系统的优化设计,为高温工作的锑化物中波红外探测器研制提供理论基础和支持。     

新型Sb基二类超晶格红外探测器

InAs/Ga(In)SbⅡ类超晶格材料由于特殊的二型能带结构,可以通过人造低维结构获得类似于体材料的带间吸收,从而获得较高的量子效率;另外,通过调节材料参数调节能带结构,器件响应波段可调;通过能带结构设计抑制俄歇复合,获得较小的暗电流和较高的器件性能。因为以上特有的材料性能和器件特性,Sb基二类超晶格在国际上被认为是第三代红外焦平面探测器的优选材料。对二类超晶格材料的设计和器件特性进行了研究,设计了峰值波长4μm的nBn结构的中波红外探测器,在没有蒸镀抗反膜的条件下,77 K温度下测试得到的峰值探测率为2.4×1011cm Hz1/2W-1,计算得到的量子效率为47.8%,峰值探测率已经接近目前的碲镉汞中波红外探测器器件性能。研究结果充分显示了二类超晶格优越的材料和器件性能。     

非制冷势垒型InAsSb基高速中波红外探测器

高速响应的中波红外探测器在自由空间光通信和频率梳光谱学等新兴领域的需求逐渐增加。中长波XB_nn势垒型红外光探测器对暗电流等散粒噪声具有显著抑制作用。本文在GaSb衬底上采用分子束外延技术生长了nBn和pBn两种结构的InAsSb/AlAsSb/AlSb中波红外光探测器材料,并通过微纳加工工艺制备了可用于射频响应特性测试的GSG结构探测器。XRD和AFM的测试结果表明,两种结构的外延片都具有较好的晶体质量。器件暗电流测试结果表明,相较于nBn器件,在室温和反向偏压400 mV的工作条件下,直径90 μm的pBn器件表现出更低的暗电流密度0.145 A/cm2,说明该器件在室温非制冷环境下表现出较低的噪声水平。不同台面直径的探测器的暗电流测试表明,pBn器件的表面电阻率低于对照的nBn器件的表面电阻率。另外,根据探测器的电容测试结果,可零偏压工作的pBn探测器具有完全耗尽的势垒层和部分耗尽的吸收区,nBn的吸收区也存在部分耗尽。探测器的射频响应特性表明,直径90 μm的pBn器件的响应速度在室温和3 V反向偏压下可达2.62 GHz,对照的nBn器件的响应速度仅为2.02 GHz,响应速度提升了29.7%,初步实现了在中红外波段下可快速探测的室温非制冷势垒型光电探测器。     

nBn型InAsSb探测器的材料及器件研究

nBn型红外探测器可有效抑制产生-复合电流,进而提高探测器的工作温度。由于制备工艺可移植于III/V族成熟工艺以及存在晶格完全匹配的衬底等优势,InAsSb/AlAsSb材料是nBn型红外探测器的首选。简单介绍了InAsSb/AlAsSb nBn型红外探测器的研究现状、工作原理以及近期的研究成果。通过生长试验实现了良好的材料表面质量、晶体质量和光学性能。相关结果表明,在制备器件时,nBn结构中势垒层的掺杂浓度不应低于8×1016cm-3,否则就不利于减小nBn型器件的暗电流。     

正照射延伸波长In0.8Ga0.2As红外焦平面探测器

为了研究延伸波长In0.8Ga0.2As PIN短波红外探测器的温度响应光电特性,采用闭管扩散的平面型器件工艺,在金属有机化学气相外延（MOCVD）外延生长的NIN型InAs0.6P0.4/In0.8Ga0.2As/InAs0.6P0.4 buf./InP材料上制备了正照射延伸波长2561线列InGaAs红外焦平面探测器,研究了探测器在不同温度下的I-V特性、光谱响应特性和探测率。结果表明,随着温度的降低,在小偏压下,器件的正向暗电流由产生复合电流为主逐渐变为以扩散电流为主。在260~300 K温度范围内,反向电流主要由扩散电流和产生复合电流组成,当温度低于180 K时,器件的反向电流主要为隧穿电流。室温下器件响应截止波长和峰值波长分别为2.57 m和2.09 m,峰值探测率为7.25108 cmHz1/2/W,峰值响应率为0.95 A/W,量子效率为56.9%。焦平面的峰值探测率在153 K达到峰值,约为1.111011 cmHz1/2/W,响应非均匀性为5.28%。     

中波-长波双色量子阱红外探测器

采用n型掺杂的AlGaAs/GaAs和AlGaAs/InGaA多量子阱材料,基于MOCVD外延生长技术,利用成熟的GaAs集成电路加工工艺,设计并制作了不同结构的中波-长波双色量子阱红外探测器(QWIP)器件,器件采用正面入射二维光栅耦合,光栅周期设计为4μm,宽度2μm;对制作的500μm×500μm大面积双色QWIP单元器件暗电流、响应光谱、探测率进行了测试和分析。在-3V偏压、77K温度和300K背景温度下长波(LWIR)和中波(MWIR)QWIP的暗电流密度分别为0.6、0.02mA/cm2;-3V偏压、80K温度下MWIR和LWIR QWIP的响应光谱峰值波长分别为5.2、7.8μm;在2V偏压、65K温度下,LWIR和MWIR QWIP的峰值探测率分别为1.4×1011、6×1010cm.Hz1/2/W。     

平面型铟镓砷红外探测器八元线列的制备与性能分析

由于具有高探测率、高可靠性以及可室温工作等特点,InGaAs红外探测器在航天遥感领域具有重要的应用,而平面型的InGaAs红外探测器是国际主流的结构,但是国内这一方面的研究却刚刚起步,文中通过闭管锌扩散方式制备了平面型In0.53Ga0.47As红外探测器八元线列,测试了器件的伏安特性,得到器件的暗电流在零偏压下平均值为6.5pA,-500mV下为18.2pA,并且通过对器件信号、噪声以及响应光谱的测试得到器件的峰值响应率,其平均值为8.11×1011cm·Hz1/2·W-1,不均匀性为4.69%.通过器件的优值因子R0A计算了器件理论峰值响应率,结果表明:理论峰值响应率平均值高于测试值,且不均匀性较大.通过拟合器件的伏安曲线分析了器件峰值响应率与理论值的差别.     

nBn红外探测器研究进展

nBn红外探测器旨在消除肖特基-里德-霍尔产生复合电流,这将有效降低器件的暗电流并提高工作温度.由于制造工艺的兼容性和晶格匹配的衬底的存在,基于III-V化合物(包括二类超晶格材料)的nBn红外探测器得到了快速发展.通过理论模拟,基于HgCdTe材料的nBn红外探测器也能有效抑制暗电流.然而,去除价带势垒的困难阻碍了H...     

4H-SiC紫外光电探测器光电特性随温度变化的研究

利用光电流谱法研究了300K到60K温度范围内的p-i-n结构4H-SiC紫外光电探测器的暗电流及相对光谱响应特性。研究发现随着温度的降低,探测器的暗电流和相对光谱响应都逐渐减小;而且,反向偏压越高,暗电流减小的速率越大。在零偏压下,随着温度的降低,器件的温度从300K降低到60K时,相对光谱响应的峰值波长先向短波方向移动,后向长波方向移动,在60K时移至从272nm附近移至282nm附近;同时观察到探测器的相对光谱响应范围略有缩小,。此外,我们对器件并讨论了温度变化对器件p、i、n各层产生的光电流随温度变化的机理进行讨论,提出了可以通过减少i层缺陷和适当减小n层的掺杂浓度的方式来提高器件的相对光谱响应。     

p-i-n InP/InGaAs光电探测器电流及电容特性研究

为了实现高灵敏度探测,红外探测器需要得到优化。利用Silvaco器件仿真工具研究了p-i-n型InP/In_0.53Ga_0.47As/In_0.53Ga_0.47As光电探测器结构,模拟了结构中吸收层浓度和台阶宽度对暗电流及结电容的影响。结果表明,随着吸收层掺杂浓度的逐渐增大,器件暗电流逐渐减小,结电容逐渐增大;当台阶宽度变窄时,器件暗电流随之减小,结电容也随之变小。最后研究了光强和频率对器件结电容的影响：在低光强下,器件结电容基本不变;当光强增大到1 W/cm²时,器件结电容迅速增大;器件结电容随频率的升高而减小,其峰值由缺陷能级引起。     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.