基于五棱镜的大型平行光管焦面监测技术及误差修正方法

大型平行光管在进行空间环境模拟实验中由于受到温度、气压大幅改变的影响,离焦现象较为严重,为了解决该状态下平行光管离焦量检测难度较大、检测精度不高等问题,提出了一种针对大口径长焦距平行光管焦面位置检测的新方法,可以对平行光管的离焦量进行实时的监测。分析了由五棱镜引入的主要系统误差,并使用更新基准数据的方法将其修正。在口径为700 mm 焦距为18 m 的平行光管上进行了实验,结果表明该系统检焦精度在150 m 以内,满足实验室对大型平行光管焦面位置精度小于200 m 的指标要求。     

倾斜安装的光管焦距标定方法研究

平行光管水平放置和倾斜安装时由于受力状态不同其光学参数会有较大差异,为了精准评价平行光管的焦距,根据平行光管焦面上的点与全站仪角度之间的映射关系,建立了倾斜安装条件下光管焦距与全站仪角度关系的精确数学模型,修正了全站仪垂直轴轴系转动时产生的原理性投影误差。使用全站仪采集了多组数据并进行了实验验证:修正畸变后由焦面目标与竖丝平行时的各测试点解算的焦距值分别为1980.03、1983.45、1982.79 mm,焦距平均值即真值为1982.09 mm。修正畸变但未修正投影误差的情况下由焦面目标与分划板横丝平行时的各测试点解算的焦距值分别为996.42、995.23、995.22 mm,焦距平均值相对误差为50.2%。修正投影误差和畸变后由焦面目标位于不同象限及与分划板横丝平行时的各测试点解算的焦距值极差为4.74 mm,焦距平均值为1982.69 mm,与真值差值为0.6 mm。测量结果的展伸不确定度与焦距真值的最大相对误差为0.36%,该值远小于GB/T 9917.1—2002 照相镜头中实测焦距对名义焦距的相对误差不超过±5%的规定。实验结果表明:该模型具有较高的解算精度,目标狭缝在分划板中的相位可以是随机值,对于倾斜安装条件下平行光管焦距的原位检测具有极大的工程应用价值。     

基于数字干涉仪的平行光管分划板安装方法

为了提高平行光管分划板的安装精度,提出一种基于数字干涉仪的平行光管分划板安装方法,介绍了该安装方法的原理和实施过程。以口径800 mm,焦距20 m的平行光管为例,分析并计算了该安装方法和已有安装方法的安装精度。结果表明,该方法对任意分划板的安装精度优于0.07 mm,远高于已有安装方法的安装精度。     

平视显示器视差自动测量系统的设计与实现

针对平视显示器现场调试过程中视差检测存在主观性大、不易给出定量结果的问题,研制了一套用于平视显示器视差自动检测装置.本装置采用传统光学系统,利用CCD光电耦合器件将大视场平行光管分划像清晰成像,放入被测平显,再次将分划成像,并对此图像进行处理.通过自制计算软件,计算给出视差调节量,从而进行自动检测.利用这一装置与未采用...     

新型高精度空间折转光管的设计方法

星模惯测组合装置在标调过程中,要求测量星模拟器出射光束与惯组棱镜反射光束的方位夹角,两光束不仅方向相反且存在空间平移,为了实现单台经纬仪对该角度的测量,该系统中需要加入特定的折转光管.提出了一种新型的空间转折光管的设计方法,能够实现光路的180折转和垂直于星模拟器光轴的平面内的二维平移,设计中采用了直角屋脊棱镜与斜方棱镜,很好地消除了安装误差;为了消除由于棱镜加工误差带来的折转光管传递偏差,设计中加入双光楔结构.折转光管的光路通过双光楔机构可以发生一定的偏转,该偏转可以抵消折转光管各个部分带来的传递偏差.实验结果表明,该设计方法可以很好的实现光路折转地要求,同时在保证折转光管的传递精度的基础上,降低了整个光管的加工成本.     

利用水下平行光管测量水下相机成像分辨率

水下光学成像是重要的水下探测方式。现有水下相机成像检测方法受到水体本身以及测量方法的影响,难以准确进行成像分辨率检测。提出了基于水下平行光管的水下相机成像分辨率检测技术,通过在水中产生平行光束,直接对水下相机成像分辨率进行检测。通过仿真得出：水下平行光管在水中可见光和空气中单波长的调制传递函数(Modulation Transfer Function, MTF)基本一致。利用这一结论,提出了水下平行光管空气中装调检测的方法。针对实验室所研制的一款水下相机开展实验测试,其在水中可见光与空气中635 m光源照明条件下的分辨率相同。实验结果表明,所提出的基于水下平行光管的水下相机成像分辨率检测方法可有效消除水体对分辨率测量的影响,实现水下相机成像分辨率的准确测量。     

基于频谱傅里叶变换的平行光管液晶显示屏测透镜焦距研究

为了提高平行光管测透镜焦距的质量,采用频谱傅里叶变换和液晶显示屏方法.首先给出系统结构图以及测量方程;接着根据液晶显示屏上光斑位置变化的距离,鉴别出平行光管是否离焦,通过液晶显示屏最小像元尺寸计算最大检焦分辨率;然后基于频谱傅里叶变换对液晶显示屏定焦;最后给出了误差分析.实验测量显示液晶显示屏比目视法有更高的精度,测量重复性好.     

便携式多光轴平行性检校系统的研制

为满足野外检测多波段光电设备光轴平行性的检校需求,研制了一套便携式多光轴平行性检校系统。系统采用反射式卡塞格林光学系统和ZnS晶体靶板,为被校系统提供无穷远的十字分划目标并以此作为瞄准基准,完成对被校系统电视轴和红外轴之间的平行性检校;采用CCD系统完成分划板十字线和靶纸上激光光斑的采集,并利用数据处理系统检测出分划板十字中心与激光光斑中心位置的偏差量,完成对被校系统激光光轴与可见光轴之间的平行性检校。利用高精度光学角规对所研制的检校系统进行了标定,精度可达亚秒级。实验结果表明,该检校系统测量电视轴与红外轴之间平行性标准不确定度为2″,检校激光瞄准轴与发射轴平行性标准不确定度为5″。     

基于双五棱镜组件的大间距光轴平行性检测方法

光轴平行性是多光轴光电设备的重要参数,对其进行检测十分必要。随着光电设备复杂程度的逐步增加,其光轴之间的距离不断增大,传统的小口径检测手段已经不能满足现有光电设备的检测需求。针对大间距光轴之间的平行性的检测,设计了一种基于双五棱镜结构的扩径组件,实现了平行光管的出射光束的平移,并利用双光楔结构对扩径组件进行修正,将平行光管的有效口径由300 mm扩展至1 200 mm。对扩径组件进行数学建模分析和实际装调,并对检测系统进行整体精度测试。实验结果表明:平行光管出射的光束经扩径组件后能够保持良好的平行性,其平行误差在11以内,满足大间距光轴检测的精度要求。     

空间相机系统自准直传函测试方法及应用

调制传递函数（传函）测试是空间相机研制过程的重要环节,常规传函测试需要用到平行光管。自准直传函测试方法是一种不依赖于平行光管的系统传函测试方案。首先介绍了自准直传函测试系统的原理和搭建方案。其次对比了平行光管测试的过焦曲线和自准直传函测试的过焦曲线,发现该系统对焦面离焦敏感程度不亚于平行光管,得到该系统可以用于判定焦面位置正确性的结论。再次分析了自准直靶标条纹经过平面镜反射后偏转的现象,该现象将引入测试误差。给出了偏转角的数值计算公式和条纹偏转对传函值影响的计算公式。针对离轴系统对偏转角敏感的问题,给出自准直靶标的设计方法。利用该方法可以将靶标条纹偏转造成的传函测试误差降至可以忽略的量级。然后讨论了采用自准直传函测试方案时相机探测器与测试靶标的拼接,分析了探测器滤光片对焦面位置的影响,提出了探测器与靶标共焦面的设计及拼接方案。最后总结了该测试方法在某型号相机的实际应用,为自准直传函测试方法在后续系统的应用打下基础。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.