GaAs MMIC用无源元件的模型

制作了不同结构参数的GaAs MMIC无源元件,包括矩形螺旋电感、MIM电容和薄膜电阻,建立了无源元件的等效电路模型库,采用多项式公式表征无源元件的模型参数和性能参数,便于电路设计的应用.并提取得到MIM电容的单位面积电容值,约为195pF/mm2,NiCr薄膜电阻的方块电阻约为16.1Ω/□.分析结构参数对螺旋电感性能的影响可知,减小线圈面积相关的寄生损耗有助于获得高品质的电感.     

集成薄膜电容一体化工艺研究

将薄膜电容、电阻、电感等无源等无源元件同微带电路导体集成一体化是微波电路向毫米波频段发展的重要工艺手段。实验应用薄膜制造设备、选择适当的材料,把握关键工艺参数可以实现薄膜电容的集成。文章分析了薄膜电容针孔短路和膜层附着力等问题,并提出了相应的解决办法。     

有机基板中埋入无源元件概述

介绍了埋入无源元件在减小基板面积和提高基板高频特性的优点,总结了目前正在应用和研究的埋入电阻和埋入电容技术的实现方法.并提出基于埋入平面薄膜电阻和埋入薄芯介质材料形成平面电容技术的混合埋入技术将成为未来埋入无源元件PCB的主流技术.最后阐述了埋入无源元件技术在产业化过程中遇到的困难.     

一种高频无源元件的EM建模分析技术

采用电磁场(EM)建模的分析方法,提取了砷化镓衬底上MIM电容、方形螺旋电感和微带传输线的等效电路模型,并应用于一种π形匹配网络的设计,该模型充分考虑了衬底损耗、趋肤效应、接近效应等因素,对无源元件电特性的影响,基于GaAs半导体工艺进行了流片.测试结果表明,在0.1～40 GHz频率范围内,采用EM技术提取的元件参数...     

无源元件市场近况分析

无源元件市场概况 无源元件包括电阻、电容及电感,是电子信息产品必不可少的基本元件。2000年全球无源元件的销售额约为350亿美元。目前日本为全球最大的无源元件供应国,约占总产值的三分之一,其次为西欧和美国。无源元件市场可划分为计算机、通信、汽车电子与消费性电子产品等(如图1)。以往全球无源元     

溶胶凝胶法制备TiO_2薄膜忆阻器

忆阻器被认为是除电阻、电容、电感元件之外的第四个基本的无源元件,由于它具有非易失记忆在众多领域里有广泛的应用前景。采用溶胶凝胶法在玻璃衬底上制备出TiO2薄膜,用探针法和半导体参数分析仪表征它的I-V特性,用原子力显微镜表征它的表面形貌,用台阶仪测量它的厚度。结果表明在两个电极之间的TiO2薄膜具有忆阻器特性,阈值电压约为0.8V,两态电阻分别是53?和5?。     

在RF电路中嵌入无源元件

嵌入式无源元件技术的开发源于OEM制造商对减少元件数量、压缩电路板尺寸、增加电路板功能、降低产品总体成本的需求。在电子设备中,无源元件在元件总量中占了相当的比例,其中又以电阻和电容为主。过去,一部典型的GSM手机中含有500多个无源元件,占了电路板面积的一半,并有25％的焊点与此有关。本文描述的EP技术其着重点在于对非关键电阻、电容器和电感进行识别并尽可能多地将它们嵌入HDI—PCB中。     

3D MIM电容器原子层沉积可控生长及电学性能

为提高电容器的比电容,设计了基于三维(3D)结构的金属-绝缘体-金属(MIM)电容器.采用原子层沉积(ALD)技术制备电容器功能薄膜层,通过建立3D结构原子层沉积理论模型,拟舍得到了原子层沉积过程中薄膜覆盖率与3D结构之间的依赖关系.基于该模型优化了工艺参数,制备了不同介质层厚度的电容器,并对器件进行了C-V和I-V特性测试,得到电容器击穿场强和介电常数均值分别为6.68 MV/cm和7.95.同时,制备的3D MIM电容器的比电容达到212.5 fF/μm2,相比常规平面电容器,其电容密度提高了一个数量级.且该电容器击穿场强和介电常数与薄膜厚度之间具有良好的线性关系,表明理论模型合理,实现了基于3D结构的原子层沉积薄膜可控生长.     

基于柔性衬底的平面螺旋电感的计算与仿真

提出了一种基于柔性衬底的平面螺旋电感,介绍了柔性衬底的优点,对比了平面电感的结构类型,给出了平面螺旋电感的自感、电容、串联电阻及互感的计算方法,并对方形平面电感进行了仿真。     

微波、毫米波GaN HEMT与MMIC的新进展(续)

3 MMIC技术 在芯片上由GaN HEMT有源器件和无源元件(如MIM电容、薄膜电阻和衬底上的通孔等)所组成的微波单片集成电路(MMIC)和GaN HEMT分立晶体管几乎同步发展,MMIC技术的发展使GaNHEMT器件的电路应用能减少体积和质量,适应高频率的需求和批量生产.目前4英寸(1英寸=2.54 cm)圆片级GaN MMIC加工线已经成熟,GaN MMIC的工作频率已覆盖微波到3 mm波段,GaN MMIC的性能向高效率、高功率、宽频带和多功能集成的方向发展.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.     

High-quality single-crystal CdSe nanoribbons and their optical properties

Large-scale synthesis of single-crystal CdSe nanoribbons is achieved by a modified thermal evaporation method, in which two-step-thermal-evaporation is used to control CdSe sources＇ evaporation. The synthesized CdSe nanoribbons are usually several micrometers in width, 50 nm in thickness, and tens to several hundred micrometers in length. Studies have shown that high-quality CdSe nanoribbons with regular shapes can be obtained by this method. Room-temperature photolumines-cence indicates that the lasing emission at 710 nm has been observed under optical pumping （266 nm） at power densities of 25-153 kW/cm^2. The full width half maximum （FWHM） of the lasing mode is 0.67 nm     

Propagation of hermite-cosh-gaussian beams passing through ABCD optical system with an annular aperture

By using the expansion of the aperture function into a finte sum of complex Gaussian functions, the corresponding analytical expressions of Hermite-cosh-Gaussian beams passing through annular apertured paraxially and symmetrically optical systems written in terms of ABCD matrix were derived, and they could reduce to the cases with squared aperture. In a similar way, the corresponding analytical expressions of cosh-Gaussian beams through annular apertured ABCD matrix were also given. The method could save more calculation time than that by using the diffraction integral formula directly.     

Influence of polarization extinction ratio on distributed polarization coupling detection

Distributed polarization coupling in polarization-maintaining fibers can be detected by using a white light Michelson interferometer. This technique usually requires that only one polarization mode is excited. However, in practical measurement, the injection polarization direction could not be exactly aligned to one of the principal axes of the PMF, so the influence of the polarization extinction ratio should be considered. Based on the polarization coupling theory, the influence of the incident polarization extinction on the measurement result is evaluated and analyzed, and a method for distributed polarization coupling detection is developed when both two orthogonal eigenmodes are excited.     

Call for Papers

正Communications—VLSI Researches and industries of telecommunications have been growing rapidly in the last 20 years and will keep their high growing pace in the next decade.The involved researches and developments cover mobile communications,highway and last-mile broadband communication,domain specific communications,and emerging D2D M2M communications.Radio communication steps into its